9/29/2011	9:14:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	9:14:26 AM	Recipe started at 9:14 AM
9/29/2011	9:14:26 AM	Helium valve closed
9/29/2011	9:14:26 AM	H2 valve closed
9/29/2011	9:14:26 AM	BCl3 valve closed
9/29/2011	9:14:26 AM	PH3 valve closed
9/29/2011	9:14:26 AM	SiCl4 pre valve closed
9/29/2011	9:14:26 AM	SiCl4 post valve closed
9/29/2011	9:14:26 AM	Main Vac valve closed
9/29/2011	9:14:26 AM	Bypass valve closed
9/29/2011	9:14:26 AM	Bubbler valve closed
9/29/2011	9:14:26 AM	Helium MFC set to  0.000000
9/29/2011	9:14:26 AM	H2 MFC set to  0.000000
9/29/2011	9:14:26 AM	BCl3 MFC set to  0.000000
9/29/2011	9:14:26 AM	PHl3 MFC set to  0.000000
9/29/2011	9:14:26 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:14:26 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:14:26 AM	Tube furnace set to 0
9/29/2011	9:14:29 AM	H2 valve closed
9/29/2011	9:14:29 AM	BCl3 valve closed
9/29/2011	9:14:29 AM	PH3 valve closed
9/29/2011	9:14:29 AM	SiCl4 pre valve closed
9/29/2011	9:14:29 AM	SiCl4 post valve closed
9/29/2011	9:14:29 AM	Main Vac valve closed
9/29/2011	9:14:29 AM	Bypass valve closed
9/29/2011	9:14:29 AM	Bubbler valve closed
9/29/2011	9:14:29 AM	Helium valve opened
9/29/2011	9:14:29 AM	Helium MFC set to  500.000000
9/29/2011	9:14:29 AM	H2 MFC set to  0.000000
9/29/2011	9:14:29 AM	BCl3 MFC set to  0.000000
9/29/2011	9:14:29 AM	PHl3 MFC set to  0.000000
9/29/2011	9:14:29 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:14:29 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:14:29 AM	Tube furnace set to 0
9/29/2011	9:15:35 AM	Helium valve closed
9/29/2011	9:15:35 AM	H2 valve closed
9/29/2011	9:15:35 AM	BCl3 valve closed
9/29/2011	9:15:35 AM	PH3 valve closed
9/29/2011	9:15:35 AM	SiCl4 pre valve closed
9/29/2011	9:15:35 AM	SiCl4 post valve closed
9/29/2011	9:15:35 AM	Main Vac valve closed
9/29/2011	9:15:35 AM	Bypass valve closed
9/29/2011	9:15:35 AM	Bubbler valve closed
9/29/2011	9:15:35 AM	Helium MFC set to  0.000000
9/29/2011	9:15:35 AM	H2 MFC set to  0.000000
9/29/2011	9:15:35 AM	BCl3 MFC set to  0.000000
9/29/2011	9:15:35 AM	PHl3 MFC set to  0.000000
9/29/2011	9:15:35 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:15:35 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:15:36 AM	Tube furnace set to 0
9/29/2011	9:15:37 AM	Run finished at 9:15 AM
9/29/2011	9:15:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	9:30:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	9:30:01 AM	Recipe started at 9:30 AM
9/29/2011	9:30:01 AM	Helium valve closed
9/29/2011	9:30:01 AM	H2 valve closed
9/29/2011	9:30:01 AM	BCl3 valve closed
9/29/2011	9:30:01 AM	PH3 valve closed
9/29/2011	9:30:01 AM	SiCl4 pre valve closed
9/29/2011	9:30:01 AM	SiCl4 post valve closed
9/29/2011	9:30:01 AM	Main Vac valve closed
9/29/2011	9:30:01 AM	Bubbler valve closed
9/29/2011	9:30:01 AM	Bypass valve opened
9/29/2011	9:30:01 AM	Helium MFC set to  0.000000
9/29/2011	9:30:01 AM	H2 MFC set to  0.000000
9/29/2011	9:30:01 AM	BCl3 MFC set to  0.000000
9/29/2011	9:30:01 AM	PHl3 MFC set to  0.000000
9/29/2011	9:30:01 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:30:01 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:30:01 AM	Tube furnace set to 0
9/29/2011	9:31:26 AM	Helium valve closed
9/29/2011	9:31:26 AM	H2 valve closed
9/29/2011	9:31:26 AM	BCl3 valve closed
9/29/2011	9:31:26 AM	PH3 valve closed
9/29/2011	9:31:26 AM	SiCl4 pre valve closed
9/29/2011	9:31:26 AM	SiCl4 post valve closed
9/29/2011	9:31:26 AM	Main Vac valve closed
9/29/2011	9:31:26 AM	Bubbler valve closed
9/29/2011	9:31:26 AM	Bypass valve opened
9/29/2011	9:31:26 AM	Helium MFC set to  0.000000
9/29/2011	9:31:26 AM	H2 MFC set to  0.000000
9/29/2011	9:31:26 AM	BCl3 MFC set to  0.000000
9/29/2011	9:31:26 AM	PHl3 MFC set to  0.000000
9/29/2011	9:31:26 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:31:26 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:31:26 AM	Tube furnace set to 0
9/29/2011	9:32:26 AM	Helium valve closed
9/29/2011	9:32:26 AM	H2 valve closed
9/29/2011	9:32:26 AM	BCl3 valve closed
9/29/2011	9:32:26 AM	PH3 valve closed
9/29/2011	9:32:26 AM	SiCl4 pre valve closed
9/29/2011	9:32:26 AM	SiCl4 post valve closed
9/29/2011	9:32:26 AM	Bypass valve closed
9/29/2011	9:32:26 AM	Bubbler valve closed
9/29/2011	9:32:26 AM	Main Vac valve opened
9/29/2011	9:32:26 AM	Helium MFC set to  0.000000
9/29/2011	9:32:26 AM	H2 MFC set to  0.000000
9/29/2011	9:32:26 AM	BCl3 MFC set to  0.000000
9/29/2011	9:32:26 AM	PHl3 MFC set to  0.000000
9/29/2011	9:32:26 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:32:26 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:32:26 AM	Tube furnace set to 0
9/29/2011	9:32:27 AM	Run finished at 9:32 AM
9/29/2011	9:32:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	9:33:56 AM	Recipe started at 9:33 AM
9/29/2011	9:33:56 AM	Helium valve closed
9/29/2011	9:33:56 AM	H2 valve closed
9/29/2011	9:33:56 AM	BCl3 valve closed
9/29/2011	9:33:56 AM	PH3 valve closed
9/29/2011	9:33:56 AM	SiCl4 pre valve closed
9/29/2011	9:33:56 AM	SiCl4 post valve closed
9/29/2011	9:33:56 AM	Bypass valve closed
9/29/2011	9:33:56 AM	Bubbler valve closed
9/29/2011	9:33:56 AM	Main Vac valve opened
9/29/2011	9:33:56 AM	Helium MFC set to  0.000000
9/29/2011	9:33:56 AM	H2 MFC set to  0.000000
9/29/2011	9:33:56 AM	BCl3 MFC set to  0.000000
9/29/2011	9:33:56 AM	PHl3 MFC set to  0.000000
9/29/2011	9:33:56 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:33:56 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:33:56 AM	Tube furnace set to 100
9/29/2011	9:34:26 AM	H2 valve closed
9/29/2011	9:34:26 AM	BCl3 valve closed
9/29/2011	9:34:26 AM	PH3 valve closed
9/29/2011	9:34:26 AM	SiCl4 pre valve closed
9/29/2011	9:34:26 AM	SiCl4 post valve closed
9/29/2011	9:34:26 AM	Bypass valve closed
9/29/2011	9:34:26 AM	Bubbler valve closed
9/29/2011	9:34:26 AM	Helium valve opened
9/29/2011	9:34:26 AM	Main Vac valve opened
9/29/2011	9:34:26 AM	Helium MFC set to  20.000000
9/29/2011	9:34:26 AM	H2 MFC set to  0.000000
9/29/2011	9:34:26 AM	BCl3 MFC set to  0.000000
9/29/2011	9:34:26 AM	PHl3 MFC set to  0.000000
9/29/2011	9:34:26 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:34:26 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:34:26 AM	Tube furnace set to 100
9/29/2011	9:34:56 AM	Helium valve closed
9/29/2011	9:34:56 AM	H2 valve closed
9/29/2011	9:34:56 AM	BCl3 valve closed
9/29/2011	9:34:56 AM	PH3 valve closed
9/29/2011	9:34:56 AM	SiCl4 pre valve closed
9/29/2011	9:34:56 AM	SiCl4 post valve closed
9/29/2011	9:34:56 AM	Bypass valve closed
9/29/2011	9:34:56 AM	Bubbler valve closed
9/29/2011	9:34:56 AM	Main Vac valve opened
9/29/2011	9:34:56 AM	Helium MFC set to  0.000000
9/29/2011	9:34:56 AM	H2 MFC set to  0.000000
9/29/2011	9:34:56 AM	BCl3 MFC set to  0.000000
9/29/2011	9:34:56 AM	PHl3 MFC set to  0.000000
9/29/2011	9:34:56 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:34:56 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:34:56 AM	Tube furnace set to 100
9/29/2011	9:35:26 AM	H2 valve closed
9/29/2011	9:35:26 AM	BCl3 valve closed
9/29/2011	9:35:26 AM	PH3 valve closed
9/29/2011	9:35:26 AM	SiCl4 pre valve closed
9/29/2011	9:35:26 AM	SiCl4 post valve closed
9/29/2011	9:35:26 AM	Bypass valve closed
9/29/2011	9:35:26 AM	Bubbler valve closed
9/29/2011	9:35:26 AM	Helium valve opened
9/29/2011	9:35:26 AM	Main Vac valve opened
9/29/2011	9:35:26 AM	Helium MFC set to  20.000000
9/29/2011	9:35:26 AM	H2 MFC set to  0.000000
9/29/2011	9:35:26 AM	BCl3 MFC set to  0.000000
9/29/2011	9:35:26 AM	PHl3 MFC set to  0.000000
9/29/2011	9:35:26 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:35:26 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:35:26 AM	Tube furnace set to 100
9/29/2011	9:35:56 AM	Helium valve closed
9/29/2011	9:35:56 AM	H2 valve closed
9/29/2011	9:35:56 AM	BCl3 valve closed
9/29/2011	9:35:56 AM	PH3 valve closed
9/29/2011	9:35:56 AM	SiCl4 pre valve closed
9/29/2011	9:35:56 AM	SiCl4 post valve closed
9/29/2011	9:35:56 AM	Bypass valve closed
9/29/2011	9:35:56 AM	Bubbler valve closed
9/29/2011	9:35:56 AM	Main Vac valve opened
9/29/2011	9:35:56 AM	Helium MFC set to  0.000000
9/29/2011	9:35:56 AM	H2 MFC set to  0.000000
9/29/2011	9:35:56 AM	BCl3 MFC set to  0.000000
9/29/2011	9:35:56 AM	PHl3 MFC set to  0.000000
9/29/2011	9:35:56 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:35:56 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:35:57 AM	Tube furnace set to 100
9/29/2011	9:36:27 AM	H2 valve closed
9/29/2011	9:36:27 AM	BCl3 valve closed
9/29/2011	9:36:27 AM	PH3 valve closed
9/29/2011	9:36:27 AM	SiCl4 pre valve closed
9/29/2011	9:36:27 AM	SiCl4 post valve closed
9/29/2011	9:36:27 AM	Bypass valve closed
9/29/2011	9:36:27 AM	Bubbler valve closed
9/29/2011	9:36:27 AM	Helium valve opened
9/29/2011	9:36:27 AM	Main Vac valve opened
9/29/2011	9:36:27 AM	Helium MFC set to  20.000000
9/29/2011	9:36:27 AM	H2 MFC set to  0.000000
9/29/2011	9:36:27 AM	BCl3 MFC set to  0.000000
9/29/2011	9:36:27 AM	PHl3 MFC set to  0.000000
9/29/2011	9:36:27 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:36:27 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:36:27 AM	Tube furnace set to 100
9/29/2011	9:36:57 AM	Helium valve closed
9/29/2011	9:36:57 AM	H2 valve closed
9/29/2011	9:36:57 AM	BCl3 valve closed
9/29/2011	9:36:57 AM	PH3 valve closed
9/29/2011	9:36:57 AM	SiCl4 pre valve closed
9/29/2011	9:36:57 AM	SiCl4 post valve closed
9/29/2011	9:36:57 AM	Bypass valve closed
9/29/2011	9:36:57 AM	Bubbler valve closed
9/29/2011	9:36:57 AM	Main Vac valve opened
9/29/2011	9:36:57 AM	Helium MFC set to  0.000000
9/29/2011	9:36:57 AM	H2 MFC set to  0.000000
9/29/2011	9:36:57 AM	BCl3 MFC set to  0.000000
9/29/2011	9:36:57 AM	PHl3 MFC set to  0.000000
9/29/2011	9:36:57 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:36:57 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:36:57 AM	Tube furnace set to 100
9/29/2011	9:37:27 AM	H2 valve closed
9/29/2011	9:37:27 AM	BCl3 valve closed
9/29/2011	9:37:27 AM	PH3 valve closed
9/29/2011	9:37:27 AM	SiCl4 pre valve closed
9/29/2011	9:37:27 AM	SiCl4 post valve closed
9/29/2011	9:37:27 AM	Bypass valve closed
9/29/2011	9:37:27 AM	Bubbler valve closed
9/29/2011	9:37:27 AM	Helium valve opened
9/29/2011	9:37:27 AM	Main Vac valve opened
9/29/2011	9:37:27 AM	Helium MFC set to  20.000000
9/29/2011	9:37:27 AM	H2 MFC set to  0.000000
9/29/2011	9:37:27 AM	BCl3 MFC set to  0.000000
9/29/2011	9:37:27 AM	PHl3 MFC set to  0.000000
9/29/2011	9:37:27 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:37:27 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:37:27 AM	Tube furnace set to 100
9/29/2011	9:37:57 AM	Helium valve closed
9/29/2011	9:37:57 AM	H2 valve closed
9/29/2011	9:37:57 AM	BCl3 valve closed
9/29/2011	9:37:57 AM	PH3 valve closed
9/29/2011	9:37:57 AM	SiCl4 pre valve closed
9/29/2011	9:37:57 AM	SiCl4 post valve closed
9/29/2011	9:37:57 AM	Bypass valve closed
9/29/2011	9:37:57 AM	Bubbler valve closed
9/29/2011	9:37:57 AM	Main Vac valve opened
9/29/2011	9:37:57 AM	Helium MFC set to  0.000000
9/29/2011	9:37:57 AM	H2 MFC set to  0.000000
9/29/2011	9:37:57 AM	BCl3 MFC set to  0.000000
9/29/2011	9:37:57 AM	PHl3 MFC set to  0.000000
9/29/2011	9:37:57 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:37:57 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:37:57 AM	Tube furnace set to 100
9/29/2011	9:38:27 AM	H2 valve closed
9/29/2011	9:38:27 AM	BCl3 valve closed
9/29/2011	9:38:27 AM	PH3 valve closed
9/29/2011	9:38:27 AM	SiCl4 pre valve closed
9/29/2011	9:38:27 AM	SiCl4 post valve closed
9/29/2011	9:38:27 AM	Bypass valve closed
9/29/2011	9:38:27 AM	Bubbler valve closed
9/29/2011	9:38:27 AM	Helium valve opened
9/29/2011	9:38:27 AM	Main Vac valve opened
9/29/2011	9:38:27 AM	Helium MFC set to  20.000000
9/29/2011	9:38:27 AM	H2 MFC set to  0.000000
9/29/2011	9:38:27 AM	BCl3 MFC set to  0.000000
9/29/2011	9:38:27 AM	PHl3 MFC set to  0.000000
9/29/2011	9:38:27 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:38:27 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:38:28 AM	Tube furnace set to 100
9/29/2011	9:38:58 AM	Helium valve closed
9/29/2011	9:38:58 AM	H2 valve closed
9/29/2011	9:38:58 AM	BCl3 valve closed
9/29/2011	9:38:58 AM	PH3 valve closed
9/29/2011	9:38:58 AM	SiCl4 pre valve closed
9/29/2011	9:38:58 AM	SiCl4 post valve closed
9/29/2011	9:38:58 AM	Bypass valve closed
9/29/2011	9:38:58 AM	Bubbler valve closed
9/29/2011	9:38:58 AM	Main Vac valve opened
9/29/2011	9:38:58 AM	Helium MFC set to  0.000000
9/29/2011	9:38:58 AM	H2 MFC set to  0.000000
9/29/2011	9:38:58 AM	BCl3 MFC set to  0.000000
9/29/2011	9:38:58 AM	PHl3 MFC set to  0.000000
9/29/2011	9:38:58 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:38:58 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:38:58 AM	Tube furnace set to 100
9/29/2011	9:39:28 AM	H2 valve closed
9/29/2011	9:39:28 AM	BCl3 valve closed
9/29/2011	9:39:28 AM	PH3 valve closed
9/29/2011	9:39:28 AM	SiCl4 pre valve closed
9/29/2011	9:39:28 AM	SiCl4 post valve closed
9/29/2011	9:39:28 AM	Bypass valve closed
9/29/2011	9:39:28 AM	Bubbler valve closed
9/29/2011	9:39:28 AM	Helium valve opened
9/29/2011	9:39:28 AM	Main Vac valve opened
9/29/2011	9:39:28 AM	Helium MFC set to  20.000000
9/29/2011	9:39:28 AM	H2 MFC set to  0.000000
9/29/2011	9:39:28 AM	BCl3 MFC set to  0.000000
9/29/2011	9:39:28 AM	PHl3 MFC set to  0.000000
9/29/2011	9:39:28 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:39:28 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:39:28 AM	Tube furnace set to 100
9/29/2011	9:39:58 AM	Helium valve closed
9/29/2011	9:39:58 AM	H2 valve closed
9/29/2011	9:39:58 AM	BCl3 valve closed
9/29/2011	9:39:58 AM	PH3 valve closed
9/29/2011	9:39:58 AM	SiCl4 pre valve closed
9/29/2011	9:39:58 AM	SiCl4 post valve closed
9/29/2011	9:39:58 AM	Bypass valve closed
9/29/2011	9:39:58 AM	Bubbler valve closed
9/29/2011	9:39:58 AM	Main Vac valve opened
9/29/2011	9:39:58 AM	Helium MFC set to  0.000000
9/29/2011	9:39:58 AM	H2 MFC set to  0.000000
9/29/2011	9:39:58 AM	BCl3 MFC set to  0.000000
9/29/2011	9:39:58 AM	PHl3 MFC set to  0.000000
9/29/2011	9:39:58 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:39:58 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:39:58 AM	Tube furnace set to 100
9/29/2011	9:40:28 AM	H2 valve closed
9/29/2011	9:40:28 AM	BCl3 valve closed
9/29/2011	9:40:28 AM	PH3 valve closed
9/29/2011	9:40:28 AM	SiCl4 pre valve closed
9/29/2011	9:40:28 AM	SiCl4 post valve closed
9/29/2011	9:40:28 AM	Bypass valve closed
9/29/2011	9:40:28 AM	Bubbler valve closed
9/29/2011	9:40:28 AM	Helium valve opened
9/29/2011	9:40:28 AM	Main Vac valve opened
9/29/2011	9:40:28 AM	Helium MFC set to  20.000000
9/29/2011	9:40:28 AM	H2 MFC set to  0.000000
9/29/2011	9:40:28 AM	BCl3 MFC set to  0.000000
9/29/2011	9:40:28 AM	PHl3 MFC set to  0.000000
9/29/2011	9:40:28 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:40:28 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:40:28 AM	Tube furnace set to 100
9/29/2011	9:40:58 AM	Helium valve closed
9/29/2011	9:40:58 AM	H2 valve closed
9/29/2011	9:40:58 AM	BCl3 valve closed
9/29/2011	9:40:58 AM	PH3 valve closed
9/29/2011	9:40:58 AM	SiCl4 pre valve closed
9/29/2011	9:40:58 AM	SiCl4 post valve closed
9/29/2011	9:40:58 AM	Bypass valve closed
9/29/2011	9:40:58 AM	Bubbler valve closed
9/29/2011	9:40:58 AM	Main Vac valve opened
9/29/2011	9:40:58 AM	Helium MFC set to  0.000000
9/29/2011	9:40:58 AM	H2 MFC set to  0.000000
9/29/2011	9:40:59 AM	BCl3 MFC set to  0.000000
9/29/2011	9:40:59 AM	PHl3 MFC set to  0.000000
9/29/2011	9:40:59 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:40:59 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:40:59 AM	Tube furnace set to 100
9/29/2011	9:41:29 AM	H2 valve closed
9/29/2011	9:41:29 AM	BCl3 valve closed
9/29/2011	9:41:29 AM	PH3 valve closed
9/29/2011	9:41:29 AM	SiCl4 pre valve closed
9/29/2011	9:41:29 AM	SiCl4 post valve closed
9/29/2011	9:41:29 AM	Bypass valve closed
9/29/2011	9:41:29 AM	Bubbler valve closed
9/29/2011	9:41:29 AM	Helium valve opened
9/29/2011	9:41:29 AM	Main Vac valve opened
9/29/2011	9:41:29 AM	Helium MFC set to  20.000000
9/29/2011	9:41:29 AM	H2 MFC set to  0.000000
9/29/2011	9:41:29 AM	BCl3 MFC set to  0.000000
9/29/2011	9:41:29 AM	PHl3 MFC set to  0.000000
9/29/2011	9:41:29 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:41:29 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:41:29 AM	Tube furnace set to 100
9/29/2011	9:41:59 AM	Helium valve closed
9/29/2011	9:41:59 AM	H2 valve closed
9/29/2011	9:41:59 AM	BCl3 valve closed
9/29/2011	9:41:59 AM	PH3 valve closed
9/29/2011	9:41:59 AM	SiCl4 pre valve closed
9/29/2011	9:41:59 AM	SiCl4 post valve closed
9/29/2011	9:41:59 AM	Bypass valve closed
9/29/2011	9:41:59 AM	Bubbler valve closed
9/29/2011	9:41:59 AM	Main Vac valve opened
9/29/2011	9:41:59 AM	Helium MFC set to  0.000000
9/29/2011	9:41:59 AM	H2 MFC set to  0.000000
9/29/2011	9:41:59 AM	BCl3 MFC set to  0.000000
9/29/2011	9:41:59 AM	PHl3 MFC set to  0.000000
9/29/2011	9:41:59 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:41:59 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:41:59 AM	Tube furnace set to 100
9/29/2011	9:42:29 AM	H2 valve closed
9/29/2011	9:42:29 AM	BCl3 valve closed
9/29/2011	9:42:29 AM	PH3 valve closed
9/29/2011	9:42:29 AM	SiCl4 pre valve closed
9/29/2011	9:42:29 AM	SiCl4 post valve closed
9/29/2011	9:42:29 AM	Bypass valve closed
9/29/2011	9:42:29 AM	Bubbler valve closed
9/29/2011	9:42:29 AM	Helium valve opened
9/29/2011	9:42:29 AM	Main Vac valve opened
9/29/2011	9:42:29 AM	Helium MFC set to  20.000000
9/29/2011	9:42:29 AM	H2 MFC set to  0.000000
9/29/2011	9:42:29 AM	BCl3 MFC set to  0.000000
9/29/2011	9:42:29 AM	PHl3 MFC set to  0.000000
9/29/2011	9:42:29 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:42:29 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:42:29 AM	Tube furnace set to 100
9/29/2011	9:42:59 AM	Helium valve closed
9/29/2011	9:42:59 AM	H2 valve closed
9/29/2011	9:42:59 AM	BCl3 valve closed
9/29/2011	9:42:59 AM	PH3 valve closed
9/29/2011	9:42:59 AM	SiCl4 pre valve closed
9/29/2011	9:42:59 AM	SiCl4 post valve closed
9/29/2011	9:42:59 AM	Bypass valve closed
9/29/2011	9:42:59 AM	Bubbler valve closed
9/29/2011	9:42:59 AM	Main Vac valve opened
9/29/2011	9:42:59 AM	Helium MFC set to  0.000000
9/29/2011	9:42:59 AM	H2 MFC set to  0.000000
9/29/2011	9:42:59 AM	BCl3 MFC set to  0.000000
9/29/2011	9:42:59 AM	PHl3 MFC set to  0.000000
9/29/2011	9:42:59 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:42:59 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:42:59 AM	Tube furnace set to 100
9/29/2011	9:43:30 AM	H2 valve closed
9/29/2011	9:43:30 AM	BCl3 valve closed
9/29/2011	9:43:30 AM	PH3 valve closed
9/29/2011	9:43:30 AM	SiCl4 pre valve closed
9/29/2011	9:43:30 AM	SiCl4 post valve closed
9/29/2011	9:43:30 AM	Bypass valve closed
9/29/2011	9:43:30 AM	Bubbler valve closed
9/29/2011	9:43:30 AM	Helium valve opened
9/29/2011	9:43:30 AM	Main Vac valve opened
9/29/2011	9:43:30 AM	Helium MFC set to  20.000000
9/29/2011	9:43:30 AM	H2 MFC set to  0.000000
9/29/2011	9:43:30 AM	BCl3 MFC set to  0.000000
9/29/2011	9:43:30 AM	PHl3 MFC set to  0.000000
9/29/2011	9:43:30 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:43:30 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:43:30 AM	Tube furnace set to 100
9/29/2011	9:44:00 AM	Helium valve closed
9/29/2011	9:44:00 AM	H2 valve closed
9/29/2011	9:44:00 AM	BCl3 valve closed
9/29/2011	9:44:00 AM	PH3 valve closed
9/29/2011	9:44:00 AM	SiCl4 pre valve closed
9/29/2011	9:44:00 AM	SiCl4 post valve closed
9/29/2011	9:44:00 AM	Bypass valve closed
9/29/2011	9:44:00 AM	Bubbler valve closed
9/29/2011	9:44:00 AM	Main Vac valve opened
9/29/2011	9:44:00 AM	Helium MFC set to  0.000000
9/29/2011	9:44:00 AM	H2 MFC set to  0.000000
9/29/2011	9:44:00 AM	BCl3 MFC set to  0.000000
9/29/2011	9:44:00 AM	PHl3 MFC set to  0.000000
9/29/2011	9:44:00 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:44:00 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:44:00 AM	Tube furnace set to 100
9/29/2011	9:44:01 AM	Run finished at 9:44 AM
9/29/2011	9:45:54 AM	Recipe started at 9:45 AM
9/29/2011	9:45:54 AM	Helium valve closed
9/29/2011	9:45:54 AM	H2 valve closed
9/29/2011	9:45:54 AM	BCl3 valve closed
9/29/2011	9:45:54 AM	PH3 valve closed
9/29/2011	9:45:54 AM	SiCl4 pre valve closed
9/29/2011	9:45:54 AM	SiCl4 post valve closed
9/29/2011	9:45:54 AM	Bypass valve closed
9/29/2011	9:45:54 AM	Bubbler valve closed
9/29/2011	9:45:54 AM	Main Vac valve opened
9/29/2011	9:45:54 AM	Helium MFC set to  0.000000
9/29/2011	9:45:54 AM	H2 MFC set to  0.000000
9/29/2011	9:45:54 AM	BCl3 MFC set to  0.000000
9/29/2011	9:45:54 AM	PHl3 MFC set to  0.000000
9/29/2011	9:45:54 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:45:54 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:45:55 AM	Tube furnace set to 100
9/29/2011	9:46:25 AM	H2 valve closed
9/29/2011	9:46:25 AM	BCl3 valve closed
9/29/2011	9:46:25 AM	PH3 valve closed
9/29/2011	9:46:25 AM	SiCl4 pre valve closed
9/29/2011	9:46:25 AM	SiCl4 post valve closed
9/29/2011	9:46:25 AM	Bypass valve closed
9/29/2011	9:46:25 AM	Bubbler valve closed
9/29/2011	9:46:25 AM	Helium valve opened
9/29/2011	9:46:25 AM	Main Vac valve opened
9/29/2011	9:46:25 AM	Helium MFC set to  20.000000
9/29/2011	9:46:25 AM	H2 MFC set to  0.000000
9/29/2011	9:46:25 AM	BCl3 MFC set to  0.000000
9/29/2011	9:46:25 AM	PHl3 MFC set to  0.000000
9/29/2011	9:46:25 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:46:25 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:46:25 AM	Tube furnace set to 100
9/29/2011	9:46:25 AM	Run aborted at 9:46 AM
9/29/2011	9:46:25 AM	Helium valve closed
9/29/2011	9:46:25 AM	H2 valve closed
9/29/2011	9:46:25 AM	BCl3 valve closed
9/29/2011	9:46:25 AM	PH3 valve closed
9/29/2011	9:46:25 AM	SiCl4 pre valve closed
9/29/2011	9:46:25 AM	SiCl4 post valve closed
9/29/2011	9:46:25 AM	Bypass valve closed
9/29/2011	9:46:25 AM	Main Vac valve closed
9/29/2011	9:46:25 AM	Bubbler valve closed
9/29/2011	9:46:25 AM	Helium MFC set to  0.000000
9/29/2011	9:46:25 AM	H2 MFC set to  0.000000
9/29/2011	9:46:25 AM	BCl3 MFC set to  0.000000
9/29/2011	9:46:25 AM	PHl3 MFC set to  0.000000
9/29/2011	9:46:25 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:46:25 AM	Tube furnace set to 0
9/29/2011	9:47:41 AM	Recipe started at 9:47 AM
9/29/2011	9:47:41 AM	Helium valve closed
9/29/2011	9:47:41 AM	H2 valve closed
9/29/2011	9:47:41 AM	BCl3 valve closed
9/29/2011	9:47:41 AM	PH3 valve closed
9/29/2011	9:47:41 AM	SiCl4 pre valve closed
9/29/2011	9:47:41 AM	SiCl4 post valve closed
9/29/2011	9:47:41 AM	Bypass valve closed
9/29/2011	9:47:41 AM	Bubbler valve closed
9/29/2011	9:47:41 AM	Main Vac valve opened
9/29/2011	9:47:41 AM	Helium MFC set to  0.000000
9/29/2011	9:47:41 AM	H2 MFC set to  0.000000
9/29/2011	9:47:41 AM	BCl3 MFC set to  0.000000
9/29/2011	9:47:41 AM	PHl3 MFC set to  0.000000
9/29/2011	9:47:41 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:47:41 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:47:41 AM	Tube furnace set to 200
9/29/2011	9:48:11 AM	H2 valve closed
9/29/2011	9:48:11 AM	BCl3 valve closed
9/29/2011	9:48:11 AM	PH3 valve closed
9/29/2011	9:48:11 AM	SiCl4 pre valve closed
9/29/2011	9:48:11 AM	SiCl4 post valve closed
9/29/2011	9:48:11 AM	Bypass valve closed
9/29/2011	9:48:11 AM	Bubbler valve closed
9/29/2011	9:48:11 AM	Helium valve opened
9/29/2011	9:48:11 AM	Main Vac valve opened
9/29/2011	9:48:11 AM	Helium MFC set to  20.000000
9/29/2011	9:48:11 AM	H2 MFC set to  0.000000
9/29/2011	9:48:11 AM	BCl3 MFC set to  0.000000
9/29/2011	9:48:11 AM	PHl3 MFC set to  0.000000
9/29/2011	9:48:11 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:48:11 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:48:12 AM	Tube furnace set to 100
9/29/2011	9:48:42 AM	Helium valve closed
9/29/2011	9:48:42 AM	H2 valve closed
9/29/2011	9:48:42 AM	BCl3 valve closed
9/29/2011	9:48:42 AM	PH3 valve closed
9/29/2011	9:48:42 AM	SiCl4 pre valve closed
9/29/2011	9:48:42 AM	SiCl4 post valve closed
9/29/2011	9:48:42 AM	Bypass valve closed
9/29/2011	9:48:42 AM	Bubbler valve closed
9/29/2011	9:48:42 AM	Main Vac valve opened
9/29/2011	9:48:42 AM	Helium MFC set to  0.000000
9/29/2011	9:48:42 AM	H2 MFC set to  0.000000
9/29/2011	9:48:42 AM	BCl3 MFC set to  0.000000
9/29/2011	9:48:42 AM	PHl3 MFC set to  0.000000
9/29/2011	9:48:42 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:48:42 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:48:42 AM	Tube furnace set to 100
9/29/2011	9:49:08 AM	Run aborted at 9:49 AM
9/29/2011	9:49:08 AM	Helium valve closed
9/29/2011	9:49:08 AM	H2 valve closed
9/29/2011	9:49:08 AM	BCl3 valve closed
9/29/2011	9:49:08 AM	PH3 valve closed
9/29/2011	9:49:08 AM	SiCl4 pre valve closed
9/29/2011	9:49:08 AM	SiCl4 post valve closed
9/29/2011	9:49:08 AM	Bypass valve closed
9/29/2011	9:49:08 AM	Main Vac valve closed
9/29/2011	9:49:08 AM	Bubbler valve closed
9/29/2011	9:49:08 AM	Helium MFC set to  0.000000
9/29/2011	9:49:08 AM	H2 MFC set to  0.000000
9/29/2011	9:49:08 AM	BCl3 MFC set to  0.000000
9/29/2011	9:49:08 AM	PHl3 MFC set to  0.000000
9/29/2011	9:49:08 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:49:08 AM	Tube furnace set to 0
9/29/2011	9:51:13 AM	Recipe started at 9:51 AM
9/29/2011	9:51:13 AM	Helium valve closed
9/29/2011	9:51:13 AM	H2 valve closed
9/29/2011	9:51:13 AM	BCl3 valve closed
9/29/2011	9:51:13 AM	PH3 valve closed
9/29/2011	9:51:13 AM	SiCl4 pre valve closed
9/29/2011	9:51:13 AM	SiCl4 post valve closed
9/29/2011	9:51:13 AM	Bypass valve closed
9/29/2011	9:51:13 AM	Bubbler valve closed
9/29/2011	9:51:13 AM	Main Vac valve opened
9/29/2011	9:51:13 AM	Helium MFC set to  0.000000
9/29/2011	9:51:13 AM	H2 MFC set to  0.000000
9/29/2011	9:51:13 AM	BCl3 MFC set to  0.000000
9/29/2011	9:51:13 AM	PHl3 MFC set to  0.000000
9/29/2011	9:51:13 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:51:13 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:51:13 AM	Tube furnace set to 200
9/29/2011	9:51:43 AM	H2 valve closed
9/29/2011	9:51:43 AM	BCl3 valve closed
9/29/2011	9:51:43 AM	PH3 valve closed
9/29/2011	9:51:43 AM	SiCl4 pre valve closed
9/29/2011	9:51:43 AM	SiCl4 post valve closed
9/29/2011	9:51:43 AM	Bypass valve closed
9/29/2011	9:51:43 AM	Bubbler valve closed
9/29/2011	9:51:43 AM	Helium valve opened
9/29/2011	9:51:43 AM	Main Vac valve opened
9/29/2011	9:51:43 AM	Helium MFC set to  20.000000
9/29/2011	9:51:43 AM	H2 MFC set to  0.000000
9/29/2011	9:51:43 AM	BCl3 MFC set to  0.000000
9/29/2011	9:51:43 AM	PHl3 MFC set to  0.000000
9/29/2011	9:51:43 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:51:43 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:51:43 AM	Tube furnace set to 200
9/29/2011	9:52:13 AM	Helium valve closed
9/29/2011	9:52:13 AM	H2 valve closed
9/29/2011	9:52:13 AM	BCl3 valve closed
9/29/2011	9:52:13 AM	PH3 valve closed
9/29/2011	9:52:13 AM	SiCl4 pre valve closed
9/29/2011	9:52:13 AM	SiCl4 post valve closed
9/29/2011	9:52:13 AM	Bypass valve closed
9/29/2011	9:52:13 AM	Bubbler valve closed
9/29/2011	9:52:13 AM	Main Vac valve opened
9/29/2011	9:52:13 AM	Helium MFC set to  0.000000
9/29/2011	9:52:13 AM	H2 MFC set to  0.000000
9/29/2011	9:52:13 AM	BCl3 MFC set to  0.000000
9/29/2011	9:52:13 AM	PHl3 MFC set to  0.000000
9/29/2011	9:52:13 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:52:13 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:52:13 AM	Tube furnace set to 200
9/29/2011	9:52:43 AM	H2 valve closed
9/29/2011	9:52:43 AM	BCl3 valve closed
9/29/2011	9:52:43 AM	PH3 valve closed
9/29/2011	9:52:43 AM	SiCl4 pre valve closed
9/29/2011	9:52:43 AM	SiCl4 post valve closed
9/29/2011	9:52:43 AM	Bypass valve closed
9/29/2011	9:52:43 AM	Bubbler valve closed
9/29/2011	9:52:43 AM	Helium valve opened
9/29/2011	9:52:43 AM	Main Vac valve opened
9/29/2011	9:52:43 AM	Helium MFC set to  20.000000
9/29/2011	9:52:43 AM	H2 MFC set to  0.000000
9/29/2011	9:52:43 AM	BCl3 MFC set to  0.000000
9/29/2011	9:52:43 AM	PHl3 MFC set to  0.000000
9/29/2011	9:52:43 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:52:43 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:52:44 AM	Tube furnace set to 200
9/29/2011	9:53:14 AM	Helium valve closed
9/29/2011	9:53:14 AM	H2 valve closed
9/29/2011	9:53:14 AM	BCl3 valve closed
9/29/2011	9:53:14 AM	PH3 valve closed
9/29/2011	9:53:14 AM	SiCl4 pre valve closed
9/29/2011	9:53:14 AM	SiCl4 post valve closed
9/29/2011	9:53:14 AM	Bypass valve closed
9/29/2011	9:53:14 AM	Bubbler valve closed
9/29/2011	9:53:14 AM	Main Vac valve opened
9/29/2011	9:53:14 AM	Helium MFC set to  0.000000
9/29/2011	9:53:14 AM	H2 MFC set to  0.000000
9/29/2011	9:53:14 AM	BCl3 MFC set to  0.000000
9/29/2011	9:53:14 AM	PHl3 MFC set to  0.000000
9/29/2011	9:53:14 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:53:14 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:53:14 AM	Tube furnace set to 200
9/29/2011	9:53:44 AM	H2 valve closed
9/29/2011	9:53:44 AM	BCl3 valve closed
9/29/2011	9:53:44 AM	PH3 valve closed
9/29/2011	9:53:44 AM	SiCl4 pre valve closed
9/29/2011	9:53:44 AM	SiCl4 post valve closed
9/29/2011	9:53:44 AM	Bypass valve closed
9/29/2011	9:53:44 AM	Bubbler valve closed
9/29/2011	9:53:44 AM	Helium valve opened
9/29/2011	9:53:44 AM	Main Vac valve opened
9/29/2011	9:53:44 AM	Helium MFC set to  20.000000
9/29/2011	9:53:44 AM	H2 MFC set to  0.000000
9/29/2011	9:53:44 AM	BCl3 MFC set to  0.000000
9/29/2011	9:53:44 AM	PHl3 MFC set to  0.000000
9/29/2011	9:53:44 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:53:44 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:53:44 AM	Tube furnace set to 200
9/29/2011	9:54:14 AM	Helium valve closed
9/29/2011	9:54:14 AM	H2 valve closed
9/29/2011	9:54:14 AM	BCl3 valve closed
9/29/2011	9:54:14 AM	PH3 valve closed
9/29/2011	9:54:14 AM	SiCl4 pre valve closed
9/29/2011	9:54:14 AM	SiCl4 post valve closed
9/29/2011	9:54:14 AM	Bypass valve closed
9/29/2011	9:54:14 AM	Bubbler valve closed
9/29/2011	9:54:14 AM	Main Vac valve opened
9/29/2011	9:54:14 AM	Helium MFC set to  0.000000
9/29/2011	9:54:14 AM	H2 MFC set to  0.000000
9/29/2011	9:54:14 AM	BCl3 MFC set to  0.000000
9/29/2011	9:54:14 AM	PHl3 MFC set to  0.000000
9/29/2011	9:54:14 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:54:14 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:54:14 AM	Tube furnace set to 200
9/29/2011	9:54:44 AM	H2 valve closed
9/29/2011	9:54:44 AM	BCl3 valve closed
9/29/2011	9:54:44 AM	PH3 valve closed
9/29/2011	9:54:44 AM	SiCl4 pre valve closed
9/29/2011	9:54:44 AM	SiCl4 post valve closed
9/29/2011	9:54:44 AM	Bypass valve closed
9/29/2011	9:54:44 AM	Bubbler valve closed
9/29/2011	9:54:44 AM	Helium valve opened
9/29/2011	9:54:44 AM	Main Vac valve opened
9/29/2011	9:54:44 AM	Helium MFC set to  20.000000
9/29/2011	9:54:44 AM	H2 MFC set to  0.000000
9/29/2011	9:54:44 AM	BCl3 MFC set to  0.000000
9/29/2011	9:54:44 AM	PHl3 MFC set to  0.000000
9/29/2011	9:54:44 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:54:44 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:54:44 AM	Tube furnace set to 200
9/29/2011	9:55:14 AM	Helium valve closed
9/29/2011	9:55:14 AM	H2 valve closed
9/29/2011	9:55:14 AM	BCl3 valve closed
9/29/2011	9:55:14 AM	PH3 valve closed
9/29/2011	9:55:14 AM	SiCl4 pre valve closed
9/29/2011	9:55:14 AM	SiCl4 post valve closed
9/29/2011	9:55:14 AM	Bypass valve closed
9/29/2011	9:55:14 AM	Bubbler valve closed
9/29/2011	9:55:14 AM	Main Vac valve opened
9/29/2011	9:55:14 AM	Helium MFC set to  0.000000
9/29/2011	9:55:14 AM	H2 MFC set to  0.000000
9/29/2011	9:55:14 AM	BCl3 MFC set to  0.000000
9/29/2011	9:55:14 AM	PHl3 MFC set to  0.000000
9/29/2011	9:55:14 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:55:14 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:55:15 AM	Tube furnace set to 200
9/29/2011	9:55:45 AM	H2 valve closed
9/29/2011	9:55:45 AM	BCl3 valve closed
9/29/2011	9:55:45 AM	PH3 valve closed
9/29/2011	9:55:45 AM	SiCl4 pre valve closed
9/29/2011	9:55:45 AM	SiCl4 post valve closed
9/29/2011	9:55:45 AM	Bypass valve closed
9/29/2011	9:55:45 AM	Bubbler valve closed
9/29/2011	9:55:45 AM	Helium valve opened
9/29/2011	9:55:45 AM	Main Vac valve opened
9/29/2011	9:55:45 AM	Helium MFC set to  20.000000
9/29/2011	9:55:45 AM	H2 MFC set to  0.000000
9/29/2011	9:55:45 AM	BCl3 MFC set to  0.000000
9/29/2011	9:55:45 AM	PHl3 MFC set to  0.000000
9/29/2011	9:55:45 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:55:45 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:55:45 AM	Tube furnace set to 200
9/29/2011	9:56:15 AM	Helium valve closed
9/29/2011	9:56:15 AM	H2 valve closed
9/29/2011	9:56:15 AM	BCl3 valve closed
9/29/2011	9:56:15 AM	PH3 valve closed
9/29/2011	9:56:15 AM	SiCl4 pre valve closed
9/29/2011	9:56:15 AM	SiCl4 post valve closed
9/29/2011	9:56:15 AM	Bypass valve closed
9/29/2011	9:56:15 AM	Bubbler valve closed
9/29/2011	9:56:15 AM	Main Vac valve opened
9/29/2011	9:56:15 AM	Helium MFC set to  0.000000
9/29/2011	9:56:15 AM	H2 MFC set to  0.000000
9/29/2011	9:56:15 AM	BCl3 MFC set to  0.000000
9/29/2011	9:56:15 AM	PHl3 MFC set to  0.000000
9/29/2011	9:56:15 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:56:15 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:56:15 AM	Tube furnace set to 200
9/29/2011	9:56:45 AM	H2 valve closed
9/29/2011	9:56:45 AM	BCl3 valve closed
9/29/2011	9:56:45 AM	PH3 valve closed
9/29/2011	9:56:45 AM	SiCl4 pre valve closed
9/29/2011	9:56:45 AM	SiCl4 post valve closed
9/29/2011	9:56:45 AM	Bypass valve closed
9/29/2011	9:56:45 AM	Bubbler valve closed
9/29/2011	9:56:45 AM	Helium valve opened
9/29/2011	9:56:45 AM	Main Vac valve opened
9/29/2011	9:56:45 AM	Helium MFC set to  20.000000
9/29/2011	9:56:45 AM	H2 MFC set to  0.000000
9/29/2011	9:56:45 AM	BCl3 MFC set to  0.000000
9/29/2011	9:56:45 AM	PHl3 MFC set to  0.000000
9/29/2011	9:56:45 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:56:45 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:56:45 AM	Tube furnace set to 200
9/29/2011	9:57:15 AM	Helium valve closed
9/29/2011	9:57:15 AM	H2 valve closed
9/29/2011	9:57:15 AM	BCl3 valve closed
9/29/2011	9:57:15 AM	PH3 valve closed
9/29/2011	9:57:15 AM	SiCl4 pre valve closed
9/29/2011	9:57:15 AM	SiCl4 post valve closed
9/29/2011	9:57:15 AM	Bypass valve closed
9/29/2011	9:57:15 AM	Bubbler valve closed
9/29/2011	9:57:15 AM	Main Vac valve opened
9/29/2011	9:57:15 AM	Helium MFC set to  0.000000
9/29/2011	9:57:15 AM	H2 MFC set to  0.000000
9/29/2011	9:57:15 AM	BCl3 MFC set to  0.000000
9/29/2011	9:57:15 AM	PHl3 MFC set to  0.000000
9/29/2011	9:57:15 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:57:15 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:57:15 AM	Tube furnace set to 200
9/29/2011	9:57:45 AM	H2 valve closed
9/29/2011	9:57:45 AM	BCl3 valve closed
9/29/2011	9:57:45 AM	PH3 valve closed
9/29/2011	9:57:45 AM	SiCl4 pre valve closed
9/29/2011	9:57:45 AM	SiCl4 post valve closed
9/29/2011	9:57:45 AM	Bypass valve closed
9/29/2011	9:57:45 AM	Bubbler valve closed
9/29/2011	9:57:45 AM	Helium valve opened
9/29/2011	9:57:45 AM	Main Vac valve opened
9/29/2011	9:57:45 AM	Helium MFC set to  20.000000
9/29/2011	9:57:45 AM	H2 MFC set to  0.000000
9/29/2011	9:57:45 AM	BCl3 MFC set to  0.000000
9/29/2011	9:57:45 AM	PHl3 MFC set to  0.000000
9/29/2011	9:57:45 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:57:45 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:57:46 AM	Tube furnace set to 200
9/29/2011	9:58:16 AM	Helium valve closed
9/29/2011	9:58:16 AM	H2 valve closed
9/29/2011	9:58:16 AM	BCl3 valve closed
9/29/2011	9:58:16 AM	PH3 valve closed
9/29/2011	9:58:16 AM	SiCl4 pre valve closed
9/29/2011	9:58:16 AM	SiCl4 post valve closed
9/29/2011	9:58:16 AM	Bypass valve closed
9/29/2011	9:58:16 AM	Bubbler valve closed
9/29/2011	9:58:16 AM	Main Vac valve opened
9/29/2011	9:58:16 AM	Helium MFC set to  0.000000
9/29/2011	9:58:16 AM	H2 MFC set to  0.000000
9/29/2011	9:58:16 AM	BCl3 MFC set to  0.000000
9/29/2011	9:58:16 AM	PHl3 MFC set to  0.000000
9/29/2011	9:58:16 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:58:16 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:58:16 AM	Tube furnace set to 200
9/29/2011	9:58:46 AM	H2 valve closed
9/29/2011	9:58:46 AM	BCl3 valve closed
9/29/2011	9:58:46 AM	PH3 valve closed
9/29/2011	9:58:46 AM	SiCl4 pre valve closed
9/29/2011	9:58:46 AM	SiCl4 post valve closed
9/29/2011	9:58:46 AM	Bypass valve closed
9/29/2011	9:58:46 AM	Bubbler valve closed
9/29/2011	9:58:46 AM	Helium valve opened
9/29/2011	9:58:46 AM	Main Vac valve opened
9/29/2011	9:58:46 AM	Helium MFC set to  20.000000
9/29/2011	9:58:46 AM	H2 MFC set to  0.000000
9/29/2011	9:58:46 AM	BCl3 MFC set to  0.000000
9/29/2011	9:58:46 AM	PHl3 MFC set to  0.000000
9/29/2011	9:58:46 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:58:46 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:58:46 AM	Tube furnace set to 200
9/29/2011	9:59:16 AM	Helium valve closed
9/29/2011	9:59:16 AM	H2 valve closed
9/29/2011	9:59:16 AM	BCl3 valve closed
9/29/2011	9:59:16 AM	PH3 valve closed
9/29/2011	9:59:16 AM	SiCl4 pre valve closed
9/29/2011	9:59:16 AM	SiCl4 post valve closed
9/29/2011	9:59:16 AM	Bypass valve closed
9/29/2011	9:59:16 AM	Bubbler valve closed
9/29/2011	9:59:16 AM	Main Vac valve opened
9/29/2011	9:59:16 AM	Helium MFC set to  0.000000
9/29/2011	9:59:16 AM	H2 MFC set to  0.000000
9/29/2011	9:59:16 AM	BCl3 MFC set to  0.000000
9/29/2011	9:59:16 AM	PHl3 MFC set to  0.000000
9/29/2011	9:59:16 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:59:16 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:59:16 AM	Tube furnace set to 200
9/29/2011	9:59:46 AM	H2 valve closed
9/29/2011	9:59:46 AM	BCl3 valve closed
9/29/2011	9:59:46 AM	PH3 valve closed
9/29/2011	9:59:46 AM	SiCl4 pre valve closed
9/29/2011	9:59:46 AM	SiCl4 post valve closed
9/29/2011	9:59:46 AM	Bypass valve closed
9/29/2011	9:59:46 AM	Bubbler valve closed
9/29/2011	9:59:46 AM	Helium valve opened
9/29/2011	9:59:46 AM	Main Vac valve opened
9/29/2011	9:59:46 AM	Helium MFC set to  20.000000
9/29/2011	9:59:46 AM	H2 MFC set to  0.000000
9/29/2011	9:59:46 AM	BCl3 MFC set to  0.000000
9/29/2011	9:59:46 AM	PHl3 MFC set to  0.000000
9/29/2011	9:59:46 AM	SiCl4 MFC set to  0.000000
9/29/2011	9:59:46 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:59:46 AM	Tube furnace set to 200
9/29/2011	10:00:16 AM	Helium valve closed
9/29/2011	10:00:16 AM	H2 valve closed
9/29/2011	10:00:16 AM	BCl3 valve closed
9/29/2011	10:00:16 AM	PH3 valve closed
9/29/2011	10:00:16 AM	SiCl4 pre valve closed
9/29/2011	10:00:16 AM	SiCl4 post valve closed
9/29/2011	10:00:16 AM	Bypass valve closed
9/29/2011	10:00:16 AM	Bubbler valve closed
9/29/2011	10:00:16 AM	Main Vac valve opened
9/29/2011	10:00:16 AM	Helium MFC set to  0.000000
9/29/2011	10:00:16 AM	H2 MFC set to  0.000000
9/29/2011	10:00:16 AM	BCl3 MFC set to  0.000000
9/29/2011	10:00:16 AM	PHl3 MFC set to  0.000000
9/29/2011	10:00:16 AM	SiCl4 MFC set to  0.000000
9/29/2011	10:00:16 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:00:17 AM	Tube furnace set to 200
9/29/2011	10:00:47 AM	H2 valve closed
9/29/2011	10:00:47 AM	BCl3 valve closed
9/29/2011	10:00:47 AM	PH3 valve closed
9/29/2011	10:00:47 AM	SiCl4 pre valve closed
9/29/2011	10:00:47 AM	SiCl4 post valve closed
9/29/2011	10:00:47 AM	Bypass valve closed
9/29/2011	10:00:47 AM	Bubbler valve closed
9/29/2011	10:00:47 AM	Helium valve opened
9/29/2011	10:00:47 AM	Main Vac valve opened
9/29/2011	10:00:47 AM	Helium MFC set to  20.000000
9/29/2011	10:00:47 AM	H2 MFC set to  0.000000
9/29/2011	10:00:47 AM	BCl3 MFC set to  0.000000
9/29/2011	10:00:47 AM	PHl3 MFC set to  0.000000
9/29/2011	10:00:47 AM	SiCl4 MFC set to  0.000000
9/29/2011	10:00:47 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:00:47 AM	Tube furnace set to 200
9/29/2011	10:01:17 AM	Helium valve closed
9/29/2011	10:01:17 AM	H2 valve closed
9/29/2011	10:01:17 AM	BCl3 valve closed
9/29/2011	10:01:17 AM	PH3 valve closed
9/29/2011	10:01:17 AM	SiCl4 pre valve closed
9/29/2011	10:01:17 AM	SiCl4 post valve closed
9/29/2011	10:01:17 AM	Bypass valve closed
9/29/2011	10:01:17 AM	Bubbler valve closed
9/29/2011	10:01:17 AM	Main Vac valve opened
9/29/2011	10:01:17 AM	Helium MFC set to  0.000000
9/29/2011	10:01:17 AM	H2 MFC set to  0.000000
9/29/2011	10:01:17 AM	BCl3 MFC set to  0.000000
9/29/2011	10:01:17 AM	PHl3 MFC set to  0.000000
9/29/2011	10:01:17 AM	SiCl4 MFC set to  0.000000
9/29/2011	10:01:17 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:01:17 AM	Tube furnace set to 200
9/29/2011	10:01:18 AM	Run finished at 10:01 AM
9/29/2011	10:04:19 AM	Recipe started at 10:04 AM
9/29/2011	10:04:19 AM	Helium valve closed
9/29/2011	10:04:19 AM	H2 valve closed
9/29/2011	10:04:19 AM	BCl3 valve closed
9/29/2011	10:04:19 AM	PH3 valve closed
9/29/2011	10:04:19 AM	SiCl4 pre valve closed
9/29/2011	10:04:19 AM	SiCl4 post valve closed
9/29/2011	10:04:19 AM	Main Vac valve closed
9/29/2011	10:04:19 AM	Bypass valve closed
9/29/2011	10:04:19 AM	Bubbler valve closed
9/29/2011	10:04:19 AM	Helium MFC set to  0.000000
9/29/2011	10:04:19 AM	H2 MFC set to  0.000000
9/29/2011	10:04:19 AM	BCl3 MFC set to  0.000000
9/29/2011	10:04:19 AM	PHl3 MFC set to  0.000000
9/29/2011	10:04:19 AM	SiCl4 MFC set to  0.000000
9/29/2011	10:04:19 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:04:19 AM	Tube furnace set to 0
9/29/2011	10:04:22 AM	Helium valve closed
9/29/2011	10:04:22 AM	BCl3 valve closed
9/29/2011	10:04:22 AM	PH3 valve closed
9/29/2011	10:04:22 AM	SiCl4 pre valve closed
9/29/2011	10:04:22 AM	SiCl4 post valve closed
9/29/2011	10:04:22 AM	Main Vac valve closed
9/29/2011	10:04:22 AM	Bypass valve closed
9/29/2011	10:04:22 AM	Bubbler valve closed
9/29/2011	10:04:22 AM	H2 valve opened
9/29/2011	10:04:22 AM	Helium MFC set to  0.000000
9/29/2011	10:04:22 AM	H2 MFC set to  500.000000
9/29/2011	10:04:22 AM	BCl3 MFC set to  0.000000
9/29/2011	10:04:22 AM	PHl3 MFC set to  0.000000
9/29/2011	10:04:22 AM	SiCl4 MFC set to  0.000000
9/29/2011	10:04:22 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:04:22 AM	Tube furnace set to 0
9/29/2011	10:05:25 AM	Helium valve closed
9/29/2011	10:05:25 AM	BCl3 valve closed
9/29/2011	10:05:25 AM	PH3 valve closed
9/29/2011	10:05:25 AM	SiCl4 pre valve closed
9/29/2011	10:05:25 AM	SiCl4 post valve closed
9/29/2011	10:05:25 AM	Main Vac valve closed
9/29/2011	10:05:25 AM	Bypass valve closed
9/29/2011	10:05:25 AM	H2 valve opened
9/29/2011	10:05:25 AM	Bubbler valve opened
9/29/2011	10:05:25 AM	Helium MFC set to  0.000000
9/29/2011	10:05:25 AM	H2 MFC set to  500.000000
9/29/2011	10:05:25 AM	BCl3 MFC set to  0.000000
9/29/2011	10:05:25 AM	PHl3 MFC set to  0.000000
9/29/2011	10:05:25 AM	SiCl4 MFC set to  0.000000
9/29/2011	10:05:25 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:05:25 AM	Tube furnace set to 0
9/29/2011	10:05:26 AM	Helium valve closed
9/29/2011	10:05:26 AM	BCl3 valve closed
9/29/2011	10:05:26 AM	PH3 valve closed
9/29/2011	10:05:26 AM	SiCl4 pre valve closed
9/29/2011	10:05:26 AM	SiCl4 post valve closed
9/29/2011	10:05:26 AM	Main Vac valve closed
9/29/2011	10:05:26 AM	Bypass valve closed
9/29/2011	10:05:26 AM	H2 valve opened
9/29/2011	10:05:26 AM	Bubbler valve opened
9/29/2011	10:05:26 AM	Helium MFC set to  0.000000
9/29/2011	10:05:26 AM	H2 MFC set to  500.000000
9/29/2011	10:05:26 AM	BCl3 MFC set to  0.000000
9/29/2011	10:05:26 AM	PHl3 MFC set to  0.000000
9/29/2011	10:05:26 AM	SiCl4 MFC set to  0.000000
9/29/2011	10:05:26 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:05:26 AM	Tube furnace set to 1000
9/29/2011	10:25:26 AM	Helium valve closed
9/29/2011	10:25:26 AM	PH3 valve closed
9/29/2011	10:25:26 AM	Main Vac valve closed
9/29/2011	10:25:26 AM	Bypass valve closed
9/29/2011	10:25:26 AM	H2 valve opened
9/29/2011	10:25:26 AM	BCl3 valve opened
9/29/2011	10:25:26 AM	SiCl4 pre valve opened
9/29/2011	10:25:26 AM	SiCl4 post valve opened
9/29/2011	10:25:26 AM	Bubbler valve opened
9/29/2011	10:25:26 AM	Helium MFC set to  0.000000
9/29/2011	10:25:26 AM	H2 MFC set to  500.000000
9/29/2011	10:25:26 AM	BCl3 MFC set to  2.300000
9/29/2011	10:25:26 AM	PHl3 MFC set to  0.000000
9/29/2011	10:25:26 AM	SiCl4 MFC set to  50.000000
9/29/2011	10:25:26 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:25:26 AM	Tube furnace set to 1000
9/29/2011	10:41:26 AM	Helium valve closed
9/29/2011	10:41:26 AM	BCl3 valve closed
9/29/2011	10:41:26 AM	PH3 valve closed
9/29/2011	10:41:26 AM	SiCl4 pre valve closed
9/29/2011	10:41:26 AM	SiCl4 post valve closed
9/29/2011	10:41:26 AM	Main Vac valve closed
9/29/2011	10:41:26 AM	Bypass valve closed
9/29/2011	10:41:26 AM	H2 valve opened
9/29/2011	10:41:26 AM	Bubbler valve opened
9/29/2011	10:41:26 AM	Helium MFC set to  0.000000
9/29/2011	10:41:26 AM	H2 MFC set to  500.000000
9/29/2011	10:41:26 AM	BCl3 MFC set to  0.000000
9/29/2011	10:41:26 AM	PHl3 MFC set to  0.000000
9/29/2011	10:41:26 AM	SiCl4 MFC set to  0.000000
9/29/2011	10:41:26 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:41:26 AM	Tube furnace set to 750
9/29/2011	10:46:26 AM	H2 valve closed
9/29/2011	10:46:26 AM	BCl3 valve closed
9/29/2011	10:46:26 AM	PH3 valve closed
9/29/2011	10:46:26 AM	SiCl4 pre valve closed
9/29/2011	10:46:26 AM	SiCl4 post valve closed
9/29/2011	10:46:26 AM	Main Vac valve closed
9/29/2011	10:46:26 AM	Bypass valve closed
9/29/2011	10:46:26 AM	Helium valve opened
9/29/2011	10:46:26 AM	Bubbler valve opened
9/29/2011	10:46:26 AM	Helium MFC set to  500.000000
9/29/2011	10:46:26 AM	H2 MFC set to  0.000000
9/29/2011	10:46:26 AM	BCl3 MFC set to  0.000000
9/29/2011	10:46:26 AM	PHl3 MFC set to  0.000000
9/29/2011	10:46:26 AM	SiCl4 MFC set to  0.000000
9/29/2011	10:46:26 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:46:27 AM	Tube furnace set to 0
9/29/2011	11:06:27 AM	Helium valve closed
9/29/2011	11:06:27 AM	H2 valve closed
9/29/2011	11:06:27 AM	BCl3 valve closed
9/29/2011	11:06:27 AM	PH3 valve closed
9/29/2011	11:06:27 AM	SiCl4 pre valve closed
9/29/2011	11:06:27 AM	SiCl4 post valve closed
9/29/2011	11:06:27 AM	Main Vac valve closed
9/29/2011	11:06:27 AM	Bypass valve closed
9/29/2011	11:06:27 AM	Bubbler valve closed
9/29/2011	11:06:27 AM	Helium MFC set to  0.000000
9/29/2011	11:06:27 AM	H2 MFC set to  0.000000
9/29/2011	11:06:27 AM	BCl3 MFC set to  0.000000
9/29/2011	11:06:27 AM	PHl3 MFC set to  0.000000
9/29/2011	11:06:27 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:06:27 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:06:27 AM	Tube furnace set to 0
9/29/2011	11:06:28 AM	Run finished at 11:06 AM
9/29/2011	11:07:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	11:07:49 AM	Recipe started at 11:07 AM
9/29/2011	11:07:49 AM	Helium valve closed
9/29/2011	11:07:49 AM	H2 valve closed
9/29/2011	11:07:49 AM	BCl3 valve closed
9/29/2011	11:07:49 AM	PH3 valve closed
9/29/2011	11:07:49 AM	SiCl4 pre valve closed
9/29/2011	11:07:49 AM	SiCl4 post valve closed
9/29/2011	11:07:49 AM	Main Vac valve closed
9/29/2011	11:07:49 AM	Bypass valve closed
9/29/2011	11:07:49 AM	Bubbler valve closed
9/29/2011	11:07:49 AM	Helium MFC set to  0.000000
9/29/2011	11:07:49 AM	H2 MFC set to  0.000000
9/29/2011	11:07:49 AM	BCl3 MFC set to  0.000000
9/29/2011	11:07:49 AM	PHl3 MFC set to  0.000000
9/29/2011	11:07:49 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:07:49 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:07:49 AM	Tube furnace set to 0
9/29/2011	11:07:52 AM	H2 valve closed
9/29/2011	11:07:52 AM	BCl3 valve closed
9/29/2011	11:07:52 AM	PH3 valve closed
9/29/2011	11:07:52 AM	SiCl4 pre valve closed
9/29/2011	11:07:52 AM	SiCl4 post valve closed
9/29/2011	11:07:52 AM	Main Vac valve closed
9/29/2011	11:07:52 AM	Bypass valve closed
9/29/2011	11:07:52 AM	Bubbler valve closed
9/29/2011	11:07:52 AM	Helium valve opened
9/29/2011	11:07:52 AM	Helium MFC set to  500.000000
9/29/2011	11:07:52 AM	H2 MFC set to  0.000000
9/29/2011	11:07:52 AM	BCl3 MFC set to  0.000000
9/29/2011	11:07:52 AM	PHl3 MFC set to  0.000000
9/29/2011	11:07:52 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:07:52 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:07:52 AM	Tube furnace set to 0
9/29/2011	11:07:52 AM	Helium valve closed
9/29/2011	11:07:52 AM	H2 valve closed
9/29/2011	11:07:52 AM	BCl3 valve closed
9/29/2011	11:07:52 AM	PH3 valve closed
9/29/2011	11:07:52 AM	SiCl4 pre valve closed
9/29/2011	11:07:52 AM	SiCl4 post valve closed
9/29/2011	11:07:52 AM	Main Vac valve closed
9/29/2011	11:07:52 AM	Bypass valve closed
9/29/2011	11:07:52 AM	Bubbler valve closed
9/29/2011	11:07:52 AM	Helium MFC set to  0.000000
9/29/2011	11:07:52 AM	H2 MFC set to  0.000000
9/29/2011	11:07:52 AM	BCl3 MFC set to  0.000000
9/29/2011	11:07:52 AM	PHl3 MFC set to  0.000000
9/29/2011	11:07:52 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:07:52 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:07:53 AM	Tube furnace set to 0
9/29/2011	11:07:54 AM	Run finished at 11:07 AM
9/29/2011	11:07:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	11:30:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	11:31:00 AM	Recipe started at 11:30 AM
9/29/2011	11:31:00 AM	Helium valve closed
9/29/2011	11:31:00 AM	H2 valve closed
9/29/2011	11:31:00 AM	BCl3 valve closed
9/29/2011	11:31:00 AM	PH3 valve closed
9/29/2011	11:31:00 AM	SiCl4 pre valve closed
9/29/2011	11:31:00 AM	SiCl4 post valve closed
9/29/2011	11:31:00 AM	Main Vac valve closed
9/29/2011	11:31:00 AM	Bubbler valve closed
9/29/2011	11:31:00 AM	Bypass valve opened
9/29/2011	11:31:00 AM	Helium MFC set to  0.000000
9/29/2011	11:31:00 AM	H2 MFC set to  0.000000
9/29/2011	11:31:00 AM	BCl3 MFC set to  0.000000
9/29/2011	11:31:00 AM	PHl3 MFC set to  0.000000
9/29/2011	11:31:00 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:31:00 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:31:00 AM	Tube furnace set to 0
9/29/2011	11:32:28 AM	Helium valve closed
9/29/2011	11:32:28 AM	H2 valve closed
9/29/2011	11:32:28 AM	BCl3 valve closed
9/29/2011	11:32:28 AM	PH3 valve closed
9/29/2011	11:32:28 AM	SiCl4 pre valve closed
9/29/2011	11:32:28 AM	SiCl4 post valve closed
9/29/2011	11:32:28 AM	Main Vac valve closed
9/29/2011	11:32:28 AM	Bubbler valve closed
9/29/2011	11:32:28 AM	Bypass valve opened
9/29/2011	11:32:28 AM	Helium MFC set to  0.000000
9/29/2011	11:32:28 AM	H2 MFC set to  0.000000
9/29/2011	11:32:28 AM	BCl3 MFC set to  0.000000
9/29/2011	11:32:28 AM	PHl3 MFC set to  0.000000
9/29/2011	11:32:28 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:32:28 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:32:28 AM	Tube furnace set to 0
9/29/2011	11:33:28 AM	Helium valve closed
9/29/2011	11:33:28 AM	H2 valve closed
9/29/2011	11:33:28 AM	BCl3 valve closed
9/29/2011	11:33:28 AM	PH3 valve closed
9/29/2011	11:33:28 AM	SiCl4 pre valve closed
9/29/2011	11:33:28 AM	SiCl4 post valve closed
9/29/2011	11:33:28 AM	Bypass valve closed
9/29/2011	11:33:28 AM	Bubbler valve closed
9/29/2011	11:33:28 AM	Main Vac valve opened
9/29/2011	11:33:28 AM	Helium MFC set to  0.000000
9/29/2011	11:33:28 AM	H2 MFC set to  0.000000
9/29/2011	11:33:28 AM	BCl3 MFC set to  0.000000
9/29/2011	11:33:28 AM	PHl3 MFC set to  0.000000
9/29/2011	11:33:28 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:33:28 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:33:29 AM	Tube furnace set to 0
9/29/2011	11:33:30 AM	Run finished at 11:33 AM
9/29/2011	11:33:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	11:33:44 AM	Recipe started at 11:33 AM
9/29/2011	11:33:44 AM	Helium valve closed
9/29/2011	11:33:44 AM	H2 valve closed
9/29/2011	11:33:44 AM	BCl3 valve closed
9/29/2011	11:33:44 AM	PH3 valve closed
9/29/2011	11:33:44 AM	SiCl4 pre valve closed
9/29/2011	11:33:44 AM	SiCl4 post valve closed
9/29/2011	11:33:44 AM	Bypass valve closed
9/29/2011	11:33:44 AM	Bubbler valve closed
9/29/2011	11:33:44 AM	Main Vac valve opened
9/29/2011	11:33:44 AM	Helium MFC set to  0.000000
9/29/2011	11:33:44 AM	H2 MFC set to  0.000000
9/29/2011	11:33:44 AM	BCl3 MFC set to  0.000000
9/29/2011	11:33:44 AM	PHl3 MFC set to  0.000000
9/29/2011	11:33:44 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:33:44 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:33:44 AM	Tube furnace set to 200
9/29/2011	11:34:14 AM	H2 valve closed
9/29/2011	11:34:14 AM	BCl3 valve closed
9/29/2011	11:34:14 AM	PH3 valve closed
9/29/2011	11:34:14 AM	SiCl4 pre valve closed
9/29/2011	11:34:14 AM	SiCl4 post valve closed
9/29/2011	11:34:14 AM	Bypass valve closed
9/29/2011	11:34:14 AM	Bubbler valve closed
9/29/2011	11:34:14 AM	Helium valve opened
9/29/2011	11:34:14 AM	Main Vac valve opened
9/29/2011	11:34:14 AM	Helium MFC set to  20.000000
9/29/2011	11:34:14 AM	H2 MFC set to  0.000000
9/29/2011	11:34:14 AM	BCl3 MFC set to  0.000000
9/29/2011	11:34:14 AM	PHl3 MFC set to  0.000000
9/29/2011	11:34:14 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:34:14 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:34:14 AM	Tube furnace set to 200
9/29/2011	11:34:44 AM	Helium valve closed
9/29/2011	11:34:44 AM	H2 valve closed
9/29/2011	11:34:44 AM	BCl3 valve closed
9/29/2011	11:34:44 AM	PH3 valve closed
9/29/2011	11:34:44 AM	SiCl4 pre valve closed
9/29/2011	11:34:44 AM	SiCl4 post valve closed
9/29/2011	11:34:44 AM	Bypass valve closed
9/29/2011	11:34:44 AM	Bubbler valve closed
9/29/2011	11:34:44 AM	Main Vac valve opened
9/29/2011	11:34:44 AM	Helium MFC set to  0.000000
9/29/2011	11:34:44 AM	H2 MFC set to  0.000000
9/29/2011	11:34:44 AM	BCl3 MFC set to  0.000000
9/29/2011	11:34:44 AM	PHl3 MFC set to  0.000000
9/29/2011	11:34:44 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:34:44 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:34:44 AM	Tube furnace set to 200
9/29/2011	11:35:14 AM	H2 valve closed
9/29/2011	11:35:14 AM	BCl3 valve closed
9/29/2011	11:35:14 AM	PH3 valve closed
9/29/2011	11:35:14 AM	SiCl4 pre valve closed
9/29/2011	11:35:14 AM	SiCl4 post valve closed
9/29/2011	11:35:14 AM	Bypass valve closed
9/29/2011	11:35:14 AM	Bubbler valve closed
9/29/2011	11:35:14 AM	Helium valve opened
9/29/2011	11:35:14 AM	Main Vac valve opened
9/29/2011	11:35:14 AM	Helium MFC set to  20.000000
9/29/2011	11:35:14 AM	H2 MFC set to  0.000000
9/29/2011	11:35:14 AM	BCl3 MFC set to  0.000000
9/29/2011	11:35:14 AM	PHl3 MFC set to  0.000000
9/29/2011	11:35:14 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:35:14 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:35:15 AM	Tube furnace set to 200
9/29/2011	11:35:45 AM	Helium valve closed
9/29/2011	11:35:45 AM	H2 valve closed
9/29/2011	11:35:45 AM	BCl3 valve closed
9/29/2011	11:35:45 AM	PH3 valve closed
9/29/2011	11:35:45 AM	SiCl4 pre valve closed
9/29/2011	11:35:45 AM	SiCl4 post valve closed
9/29/2011	11:35:45 AM	Bypass valve closed
9/29/2011	11:35:45 AM	Bubbler valve closed
9/29/2011	11:35:45 AM	Main Vac valve opened
9/29/2011	11:35:45 AM	Helium MFC set to  0.000000
9/29/2011	11:35:45 AM	H2 MFC set to  0.000000
9/29/2011	11:35:45 AM	BCl3 MFC set to  0.000000
9/29/2011	11:35:45 AM	PHl3 MFC set to  0.000000
9/29/2011	11:35:45 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:35:45 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:35:45 AM	Tube furnace set to 200
9/29/2011	11:36:15 AM	H2 valve closed
9/29/2011	11:36:15 AM	BCl3 valve closed
9/29/2011	11:36:15 AM	PH3 valve closed
9/29/2011	11:36:15 AM	SiCl4 pre valve closed
9/29/2011	11:36:15 AM	SiCl4 post valve closed
9/29/2011	11:36:15 AM	Bypass valve closed
9/29/2011	11:36:15 AM	Bubbler valve closed
9/29/2011	11:36:15 AM	Helium valve opened
9/29/2011	11:36:15 AM	Main Vac valve opened
9/29/2011	11:36:15 AM	Helium MFC set to  20.000000
9/29/2011	11:36:15 AM	H2 MFC set to  0.000000
9/29/2011	11:36:15 AM	BCl3 MFC set to  0.000000
9/29/2011	11:36:15 AM	PHl3 MFC set to  0.000000
9/29/2011	11:36:15 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:36:15 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:36:15 AM	Tube furnace set to 200
9/29/2011	11:36:45 AM	Helium valve closed
9/29/2011	11:36:45 AM	H2 valve closed
9/29/2011	11:36:45 AM	BCl3 valve closed
9/29/2011	11:36:45 AM	PH3 valve closed
9/29/2011	11:36:45 AM	SiCl4 pre valve closed
9/29/2011	11:36:45 AM	SiCl4 post valve closed
9/29/2011	11:36:45 AM	Bypass valve closed
9/29/2011	11:36:45 AM	Bubbler valve closed
9/29/2011	11:36:45 AM	Main Vac valve opened
9/29/2011	11:36:45 AM	Helium MFC set to  0.000000
9/29/2011	11:36:45 AM	H2 MFC set to  0.000000
9/29/2011	11:36:45 AM	BCl3 MFC set to  0.000000
9/29/2011	11:36:45 AM	PHl3 MFC set to  0.000000
9/29/2011	11:36:45 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:36:45 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:36:45 AM	Tube furnace set to 200
9/29/2011	11:37:15 AM	H2 valve closed
9/29/2011	11:37:15 AM	BCl3 valve closed
9/29/2011	11:37:15 AM	PH3 valve closed
9/29/2011	11:37:15 AM	SiCl4 pre valve closed
9/29/2011	11:37:15 AM	SiCl4 post valve closed
9/29/2011	11:37:15 AM	Bypass valve closed
9/29/2011	11:37:15 AM	Bubbler valve closed
9/29/2011	11:37:15 AM	Helium valve opened
9/29/2011	11:37:15 AM	Main Vac valve opened
9/29/2011	11:37:15 AM	Helium MFC set to  20.000000
9/29/2011	11:37:15 AM	H2 MFC set to  0.000000
9/29/2011	11:37:15 AM	BCl3 MFC set to  0.000000
9/29/2011	11:37:15 AM	PHl3 MFC set to  0.000000
9/29/2011	11:37:15 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:37:15 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:37:15 AM	Tube furnace set to 200
9/29/2011	11:37:45 AM	Helium valve closed
9/29/2011	11:37:45 AM	H2 valve closed
9/29/2011	11:37:46 AM	BCl3 valve closed
9/29/2011	11:37:46 AM	PH3 valve closed
9/29/2011	11:37:46 AM	SiCl4 pre valve closed
9/29/2011	11:37:46 AM	SiCl4 post valve closed
9/29/2011	11:37:46 AM	Bypass valve closed
9/29/2011	11:37:46 AM	Bubbler valve closed
9/29/2011	11:37:46 AM	Main Vac valve opened
9/29/2011	11:37:46 AM	Helium MFC set to  0.000000
9/29/2011	11:37:46 AM	H2 MFC set to  0.000000
9/29/2011	11:37:46 AM	BCl3 MFC set to  0.000000
9/29/2011	11:37:46 AM	PHl3 MFC set to  0.000000
9/29/2011	11:37:46 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:37:46 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:37:46 AM	Tube furnace set to 200
9/29/2011	11:38:16 AM	H2 valve closed
9/29/2011	11:38:16 AM	BCl3 valve closed
9/29/2011	11:38:16 AM	PH3 valve closed
9/29/2011	11:38:16 AM	SiCl4 pre valve closed
9/29/2011	11:38:16 AM	SiCl4 post valve closed
9/29/2011	11:38:16 AM	Bypass valve closed
9/29/2011	11:38:16 AM	Bubbler valve closed
9/29/2011	11:38:16 AM	Helium valve opened
9/29/2011	11:38:16 AM	Main Vac valve opened
9/29/2011	11:38:16 AM	Helium MFC set to  20.000000
9/29/2011	11:38:16 AM	H2 MFC set to  0.000000
9/29/2011	11:38:16 AM	BCl3 MFC set to  0.000000
9/29/2011	11:38:16 AM	PHl3 MFC set to  0.000000
9/29/2011	11:38:16 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:38:16 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:38:16 AM	Tube furnace set to 200
9/29/2011	11:38:46 AM	Helium valve closed
9/29/2011	11:38:46 AM	H2 valve closed
9/29/2011	11:38:46 AM	BCl3 valve closed
9/29/2011	11:38:46 AM	PH3 valve closed
9/29/2011	11:38:46 AM	SiCl4 pre valve closed
9/29/2011	11:38:46 AM	SiCl4 post valve closed
9/29/2011	11:38:46 AM	Bypass valve closed
9/29/2011	11:38:46 AM	Bubbler valve closed
9/29/2011	11:38:46 AM	Main Vac valve opened
9/29/2011	11:38:46 AM	Helium MFC set to  0.000000
9/29/2011	11:38:46 AM	H2 MFC set to  0.000000
9/29/2011	11:38:46 AM	BCl3 MFC set to  0.000000
9/29/2011	11:38:46 AM	PHl3 MFC set to  0.000000
9/29/2011	11:38:46 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:38:46 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:38:46 AM	Tube furnace set to 200
9/29/2011	11:39:16 AM	H2 valve closed
9/29/2011	11:39:16 AM	BCl3 valve closed
9/29/2011	11:39:16 AM	PH3 valve closed
9/29/2011	11:39:16 AM	SiCl4 pre valve closed
9/29/2011	11:39:16 AM	SiCl4 post valve closed
9/29/2011	11:39:16 AM	Bypass valve closed
9/29/2011	11:39:16 AM	Bubbler valve closed
9/29/2011	11:39:16 AM	Helium valve opened
9/29/2011	11:39:16 AM	Main Vac valve opened
9/29/2011	11:39:16 AM	Helium MFC set to  20.000000
9/29/2011	11:39:16 AM	H2 MFC set to  0.000000
9/29/2011	11:39:16 AM	BCl3 MFC set to  0.000000
9/29/2011	11:39:16 AM	PHl3 MFC set to  0.000000
9/29/2011	11:39:16 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:39:16 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:39:16 AM	Tube furnace set to 200
9/29/2011	11:39:46 AM	Helium valve closed
9/29/2011	11:39:46 AM	H2 valve closed
9/29/2011	11:39:46 AM	BCl3 valve closed
9/29/2011	11:39:46 AM	PH3 valve closed
9/29/2011	11:39:46 AM	SiCl4 pre valve closed
9/29/2011	11:39:46 AM	SiCl4 post valve closed
9/29/2011	11:39:46 AM	Bypass valve closed
9/29/2011	11:39:46 AM	Bubbler valve closed
9/29/2011	11:39:46 AM	Main Vac valve opened
9/29/2011	11:39:46 AM	Helium MFC set to  0.000000
9/29/2011	11:39:46 AM	H2 MFC set to  0.000000
9/29/2011	11:39:46 AM	BCl3 MFC set to  0.000000
9/29/2011	11:39:46 AM	PHl3 MFC set to  0.000000
9/29/2011	11:39:46 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:39:46 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:39:47 AM	Tube furnace set to 200
9/29/2011	11:40:17 AM	H2 valve closed
9/29/2011	11:40:17 AM	BCl3 valve closed
9/29/2011	11:40:17 AM	PH3 valve closed
9/29/2011	11:40:17 AM	SiCl4 pre valve closed
9/29/2011	11:40:17 AM	SiCl4 post valve closed
9/29/2011	11:40:17 AM	Bypass valve closed
9/29/2011	11:40:17 AM	Bubbler valve closed
9/29/2011	11:40:17 AM	Helium valve opened
9/29/2011	11:40:17 AM	Main Vac valve opened
9/29/2011	11:40:17 AM	Helium MFC set to  20.000000
9/29/2011	11:40:17 AM	H2 MFC set to  0.000000
9/29/2011	11:40:17 AM	BCl3 MFC set to  0.000000
9/29/2011	11:40:17 AM	PHl3 MFC set to  0.000000
9/29/2011	11:40:17 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:40:17 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:40:17 AM	Tube furnace set to 200
9/29/2011	11:40:47 AM	Helium valve closed
9/29/2011	11:40:47 AM	H2 valve closed
9/29/2011	11:40:47 AM	BCl3 valve closed
9/29/2011	11:40:47 AM	PH3 valve closed
9/29/2011	11:40:47 AM	SiCl4 pre valve closed
9/29/2011	11:40:47 AM	SiCl4 post valve closed
9/29/2011	11:40:47 AM	Bypass valve closed
9/29/2011	11:40:47 AM	Bubbler valve closed
9/29/2011	11:40:47 AM	Main Vac valve opened
9/29/2011	11:40:47 AM	Helium MFC set to  0.000000
9/29/2011	11:40:47 AM	H2 MFC set to  0.000000
9/29/2011	11:40:47 AM	BCl3 MFC set to  0.000000
9/29/2011	11:40:47 AM	PHl3 MFC set to  0.000000
9/29/2011	11:40:47 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:40:47 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:40:47 AM	Tube furnace set to 200
9/29/2011	11:41:17 AM	H2 valve closed
9/29/2011	11:41:17 AM	BCl3 valve closed
9/29/2011	11:41:17 AM	PH3 valve closed
9/29/2011	11:41:17 AM	SiCl4 pre valve closed
9/29/2011	11:41:17 AM	SiCl4 post valve closed
9/29/2011	11:41:17 AM	Bypass valve closed
9/29/2011	11:41:17 AM	Bubbler valve closed
9/29/2011	11:41:17 AM	Helium valve opened
9/29/2011	11:41:17 AM	Main Vac valve opened
9/29/2011	11:41:17 AM	Helium MFC set to  20.000000
9/29/2011	11:41:17 AM	H2 MFC set to  0.000000
9/29/2011	11:41:17 AM	BCl3 MFC set to  0.000000
9/29/2011	11:41:17 AM	PHl3 MFC set to  0.000000
9/29/2011	11:41:17 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:41:17 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:41:17 AM	Tube furnace set to 200
9/29/2011	11:41:47 AM	Helium valve closed
9/29/2011	11:41:47 AM	H2 valve closed
9/29/2011	11:41:47 AM	BCl3 valve closed
9/29/2011	11:41:47 AM	PH3 valve closed
9/29/2011	11:41:47 AM	SiCl4 pre valve closed
9/29/2011	11:41:47 AM	SiCl4 post valve closed
9/29/2011	11:41:47 AM	Bypass valve closed
9/29/2011	11:41:47 AM	Bubbler valve closed
9/29/2011	11:41:47 AM	Main Vac valve opened
9/29/2011	11:41:47 AM	Helium MFC set to  0.000000
9/29/2011	11:41:47 AM	H2 MFC set to  0.000000
9/29/2011	11:41:47 AM	BCl3 MFC set to  0.000000
9/29/2011	11:41:47 AM	PHl3 MFC set to  0.000000
9/29/2011	11:41:47 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:41:47 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:41:47 AM	Tube furnace set to 200
9/29/2011	11:42:17 AM	H2 valve closed
9/29/2011	11:42:17 AM	BCl3 valve closed
9/29/2011	11:42:17 AM	PH3 valve closed
9/29/2011	11:42:17 AM	SiCl4 pre valve closed
9/29/2011	11:42:17 AM	SiCl4 post valve closed
9/29/2011	11:42:17 AM	Bypass valve closed
9/29/2011	11:42:17 AM	Bubbler valve closed
9/29/2011	11:42:17 AM	Helium valve opened
9/29/2011	11:42:17 AM	Main Vac valve opened
9/29/2011	11:42:17 AM	Helium MFC set to  20.000000
9/29/2011	11:42:17 AM	H2 MFC set to  0.000000
9/29/2011	11:42:17 AM	BCl3 MFC set to  0.000000
9/29/2011	11:42:17 AM	PHl3 MFC set to  0.000000
9/29/2011	11:42:17 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:42:17 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:42:18 AM	Tube furnace set to 200
9/29/2011	11:42:48 AM	Helium valve closed
9/29/2011	11:42:48 AM	H2 valve closed
9/29/2011	11:42:48 AM	BCl3 valve closed
9/29/2011	11:42:48 AM	PH3 valve closed
9/29/2011	11:42:48 AM	SiCl4 pre valve closed
9/29/2011	11:42:48 AM	SiCl4 post valve closed
9/29/2011	11:42:48 AM	Bypass valve closed
9/29/2011	11:42:48 AM	Bubbler valve closed
9/29/2011	11:42:48 AM	Main Vac valve opened
9/29/2011	11:42:48 AM	Helium MFC set to  0.000000
9/29/2011	11:42:48 AM	H2 MFC set to  0.000000
9/29/2011	11:42:48 AM	BCl3 MFC set to  0.000000
9/29/2011	11:42:48 AM	PHl3 MFC set to  0.000000
9/29/2011	11:42:48 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:42:48 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:42:48 AM	Tube furnace set to 200
9/29/2011	11:43:18 AM	H2 valve closed
9/29/2011	11:43:18 AM	BCl3 valve closed
9/29/2011	11:43:18 AM	PH3 valve closed
9/29/2011	11:43:18 AM	SiCl4 pre valve closed
9/29/2011	11:43:18 AM	SiCl4 post valve closed
9/29/2011	11:43:18 AM	Bypass valve closed
9/29/2011	11:43:18 AM	Bubbler valve closed
9/29/2011	11:43:18 AM	Helium valve opened
9/29/2011	11:43:18 AM	Main Vac valve opened
9/29/2011	11:43:18 AM	Helium MFC set to  20.000000
9/29/2011	11:43:18 AM	H2 MFC set to  0.000000
9/29/2011	11:43:18 AM	BCl3 MFC set to  0.000000
9/29/2011	11:43:18 AM	PHl3 MFC set to  0.000000
9/29/2011	11:43:18 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:43:18 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:43:18 AM	Tube furnace set to 200
9/29/2011	11:43:48 AM	Helium valve closed
9/29/2011	11:43:48 AM	H2 valve closed
9/29/2011	11:43:48 AM	BCl3 valve closed
9/29/2011	11:43:48 AM	PH3 valve closed
9/29/2011	11:43:48 AM	SiCl4 pre valve closed
9/29/2011	11:43:48 AM	SiCl4 post valve closed
9/29/2011	11:43:48 AM	Bypass valve closed
9/29/2011	11:43:48 AM	Bubbler valve closed
9/29/2011	11:43:48 AM	Main Vac valve opened
9/29/2011	11:43:48 AM	Helium MFC set to  0.000000
9/29/2011	11:43:48 AM	H2 MFC set to  0.000000
9/29/2011	11:43:48 AM	BCl3 MFC set to  0.000000
9/29/2011	11:43:48 AM	PHl3 MFC set to  0.000000
9/29/2011	11:43:48 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:43:48 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:43:48 AM	Tube furnace set to 200
9/29/2011	11:43:49 AM	Run finished at 11:43 AM
9/29/2011	11:44:00 AM	Recipe started at 11:43 AM
9/29/2011	11:44:00 AM	Helium valve closed
9/29/2011	11:44:00 AM	H2 valve closed
9/29/2011	11:44:00 AM	BCl3 valve closed
9/29/2011	11:44:00 AM	PH3 valve closed
9/29/2011	11:44:00 AM	SiCl4 pre valve closed
9/29/2011	11:44:00 AM	SiCl4 post valve closed
9/29/2011	11:44:00 AM	Bypass valve closed
9/29/2011	11:44:00 AM	Bubbler valve closed
9/29/2011	11:44:00 AM	Main Vac valve opened
9/29/2011	11:44:00 AM	Helium MFC set to  0.000000
9/29/2011	11:44:00 AM	H2 MFC set to  0.000000
9/29/2011	11:44:00 AM	BCl3 MFC set to  0.000000
9/29/2011	11:44:00 AM	PHl3 MFC set to  0.000000
9/29/2011	11:44:00 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:44:00 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:44:00 AM	Tube furnace set to 200
9/29/2011	11:44:30 AM	H2 valve closed
9/29/2011	11:44:30 AM	BCl3 valve closed
9/29/2011	11:44:30 AM	PH3 valve closed
9/29/2011	11:44:30 AM	SiCl4 pre valve closed
9/29/2011	11:44:30 AM	SiCl4 post valve closed
9/29/2011	11:44:30 AM	Bypass valve closed
9/29/2011	11:44:30 AM	Bubbler valve closed
9/29/2011	11:44:30 AM	Helium valve opened
9/29/2011	11:44:30 AM	Main Vac valve opened
9/29/2011	11:44:30 AM	Helium MFC set to  20.000000
9/29/2011	11:44:30 AM	H2 MFC set to  0.000000
9/29/2011	11:44:30 AM	BCl3 MFC set to  0.000000
9/29/2011	11:44:30 AM	PHl3 MFC set to  0.000000
9/29/2011	11:44:30 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:44:30 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:44:31 AM	Tube furnace set to 200
9/29/2011	11:45:01 AM	Helium valve closed
9/29/2011	11:45:01 AM	H2 valve closed
9/29/2011	11:45:01 AM	BCl3 valve closed
9/29/2011	11:45:01 AM	PH3 valve closed
9/29/2011	11:45:01 AM	SiCl4 pre valve closed
9/29/2011	11:45:01 AM	SiCl4 post valve closed
9/29/2011	11:45:01 AM	Bypass valve closed
9/29/2011	11:45:01 AM	Bubbler valve closed
9/29/2011	11:45:01 AM	Main Vac valve opened
9/29/2011	11:45:01 AM	Helium MFC set to  0.000000
9/29/2011	11:45:01 AM	H2 MFC set to  0.000000
9/29/2011	11:45:01 AM	BCl3 MFC set to  0.000000
9/29/2011	11:45:01 AM	PHl3 MFC set to  0.000000
9/29/2011	11:45:01 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:45:01 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:45:01 AM	Tube furnace set to 200
9/29/2011	11:45:31 AM	H2 valve closed
9/29/2011	11:45:31 AM	BCl3 valve closed
9/29/2011	11:45:31 AM	PH3 valve closed
9/29/2011	11:45:31 AM	SiCl4 pre valve closed
9/29/2011	11:45:31 AM	SiCl4 post valve closed
9/29/2011	11:45:31 AM	Bypass valve closed
9/29/2011	11:45:31 AM	Bubbler valve closed
9/29/2011	11:45:31 AM	Helium valve opened
9/29/2011	11:45:31 AM	Main Vac valve opened
9/29/2011	11:45:31 AM	Helium MFC set to  20.000000
9/29/2011	11:45:31 AM	H2 MFC set to  0.000000
9/29/2011	11:45:31 AM	BCl3 MFC set to  0.000000
9/29/2011	11:45:31 AM	PHl3 MFC set to  0.000000
9/29/2011	11:45:31 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:45:31 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:45:31 AM	Tube furnace set to 200
9/29/2011	11:46:01 AM	Helium valve closed
9/29/2011	11:46:01 AM	H2 valve closed
9/29/2011	11:46:01 AM	BCl3 valve closed
9/29/2011	11:46:01 AM	PH3 valve closed
9/29/2011	11:46:01 AM	SiCl4 pre valve closed
9/29/2011	11:46:01 AM	SiCl4 post valve closed
9/29/2011	11:46:01 AM	Bypass valve closed
9/29/2011	11:46:01 AM	Bubbler valve closed
9/29/2011	11:46:01 AM	Main Vac valve opened
9/29/2011	11:46:01 AM	Helium MFC set to  0.000000
9/29/2011	11:46:01 AM	H2 MFC set to  0.000000
9/29/2011	11:46:01 AM	BCl3 MFC set to  0.000000
9/29/2011	11:46:01 AM	PHl3 MFC set to  0.000000
9/29/2011	11:46:01 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:46:01 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:46:01 AM	Tube furnace set to 200
9/29/2011	11:46:31 AM	H2 valve closed
9/29/2011	11:46:31 AM	BCl3 valve closed
9/29/2011	11:46:31 AM	PH3 valve closed
9/29/2011	11:46:31 AM	SiCl4 pre valve closed
9/29/2011	11:46:31 AM	SiCl4 post valve closed
9/29/2011	11:46:31 AM	Bypass valve closed
9/29/2011	11:46:31 AM	Bubbler valve closed
9/29/2011	11:46:31 AM	Helium valve opened
9/29/2011	11:46:31 AM	Main Vac valve opened
9/29/2011	11:46:31 AM	Helium MFC set to  20.000000
9/29/2011	11:46:31 AM	H2 MFC set to  0.000000
9/29/2011	11:46:31 AM	BCl3 MFC set to  0.000000
9/29/2011	11:46:31 AM	PHl3 MFC set to  0.000000
9/29/2011	11:46:31 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:46:31 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:46:31 AM	Tube furnace set to 200
9/29/2011	11:47:01 AM	Helium valve closed
9/29/2011	11:47:01 AM	H2 valve closed
9/29/2011	11:47:01 AM	BCl3 valve closed
9/29/2011	11:47:01 AM	PH3 valve closed
9/29/2011	11:47:01 AM	SiCl4 pre valve closed
9/29/2011	11:47:01 AM	SiCl4 post valve closed
9/29/2011	11:47:01 AM	Bypass valve closed
9/29/2011	11:47:01 AM	Bubbler valve closed
9/29/2011	11:47:01 AM	Main Vac valve opened
9/29/2011	11:47:01 AM	Helium MFC set to  0.000000
9/29/2011	11:47:01 AM	H2 MFC set to  0.000000
9/29/2011	11:47:01 AM	BCl3 MFC set to  0.000000
9/29/2011	11:47:01 AM	PHl3 MFC set to  0.000000
9/29/2011	11:47:01 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:47:01 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:47:02 AM	Tube furnace set to 200
9/29/2011	11:47:32 AM	H2 valve closed
9/29/2011	11:47:32 AM	BCl3 valve closed
9/29/2011	11:47:32 AM	PH3 valve closed
9/29/2011	11:47:32 AM	SiCl4 pre valve closed
9/29/2011	11:47:32 AM	SiCl4 post valve closed
9/29/2011	11:47:32 AM	Bypass valve closed
9/29/2011	11:47:32 AM	Bubbler valve closed
9/29/2011	11:47:32 AM	Helium valve opened
9/29/2011	11:47:32 AM	Main Vac valve opened
9/29/2011	11:47:32 AM	Helium MFC set to  20.000000
9/29/2011	11:47:32 AM	H2 MFC set to  0.000000
9/29/2011	11:47:32 AM	BCl3 MFC set to  0.000000
9/29/2011	11:47:32 AM	PHl3 MFC set to  0.000000
9/29/2011	11:47:32 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:47:32 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:47:32 AM	Tube furnace set to 200
9/29/2011	11:48:02 AM	Helium valve closed
9/29/2011	11:48:02 AM	H2 valve closed
9/29/2011	11:48:02 AM	BCl3 valve closed
9/29/2011	11:48:02 AM	PH3 valve closed
9/29/2011	11:48:02 AM	SiCl4 pre valve closed
9/29/2011	11:48:02 AM	SiCl4 post valve closed
9/29/2011	11:48:02 AM	Bypass valve closed
9/29/2011	11:48:02 AM	Bubbler valve closed
9/29/2011	11:48:02 AM	Main Vac valve opened
9/29/2011	11:48:02 AM	Helium MFC set to  0.000000
9/29/2011	11:48:02 AM	H2 MFC set to  0.000000
9/29/2011	11:48:02 AM	BCl3 MFC set to  0.000000
9/29/2011	11:48:02 AM	PHl3 MFC set to  0.000000
9/29/2011	11:48:02 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:48:02 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:48:02 AM	Tube furnace set to 200
9/29/2011	11:48:32 AM	H2 valve closed
9/29/2011	11:48:32 AM	BCl3 valve closed
9/29/2011	11:48:32 AM	PH3 valve closed
9/29/2011	11:48:32 AM	SiCl4 pre valve closed
9/29/2011	11:48:32 AM	SiCl4 post valve closed
9/29/2011	11:48:32 AM	Bypass valve closed
9/29/2011	11:48:32 AM	Bubbler valve closed
9/29/2011	11:48:32 AM	Helium valve opened
9/29/2011	11:48:32 AM	Main Vac valve opened
9/29/2011	11:48:32 AM	Helium MFC set to  20.000000
9/29/2011	11:48:32 AM	H2 MFC set to  0.000000
9/29/2011	11:48:32 AM	BCl3 MFC set to  0.000000
9/29/2011	11:48:32 AM	PHl3 MFC set to  0.000000
9/29/2011	11:48:32 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:48:32 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:48:32 AM	Tube furnace set to 200
9/29/2011	11:49:02 AM	Helium valve closed
9/29/2011	11:49:02 AM	H2 valve closed
9/29/2011	11:49:02 AM	BCl3 valve closed
9/29/2011	11:49:02 AM	PH3 valve closed
9/29/2011	11:49:02 AM	SiCl4 pre valve closed
9/29/2011	11:49:02 AM	SiCl4 post valve closed
9/29/2011	11:49:02 AM	Bypass valve closed
9/29/2011	11:49:02 AM	Bubbler valve closed
9/29/2011	11:49:02 AM	Main Vac valve opened
9/29/2011	11:49:02 AM	Helium MFC set to  0.000000
9/29/2011	11:49:02 AM	H2 MFC set to  0.000000
9/29/2011	11:49:02 AM	BCl3 MFC set to  0.000000
9/29/2011	11:49:02 AM	PHl3 MFC set to  0.000000
9/29/2011	11:49:02 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:49:02 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:49:02 AM	Tube furnace set to 200
9/29/2011	11:49:32 AM	H2 valve closed
9/29/2011	11:49:32 AM	BCl3 valve closed
9/29/2011	11:49:32 AM	PH3 valve closed
9/29/2011	11:49:32 AM	SiCl4 pre valve closed
9/29/2011	11:49:32 AM	SiCl4 post valve closed
9/29/2011	11:49:32 AM	Bypass valve closed
9/29/2011	11:49:32 AM	Bubbler valve closed
9/29/2011	11:49:32 AM	Helium valve opened
9/29/2011	11:49:32 AM	Main Vac valve opened
9/29/2011	11:49:32 AM	Helium MFC set to  20.000000
9/29/2011	11:49:32 AM	H2 MFC set to  0.000000
9/29/2011	11:49:32 AM	BCl3 MFC set to  0.000000
9/29/2011	11:49:32 AM	PHl3 MFC set to  0.000000
9/29/2011	11:49:32 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:49:32 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:49:33 AM	Tube furnace set to 200
9/29/2011	11:50:03 AM	Helium valve closed
9/29/2011	11:50:03 AM	H2 valve closed
9/29/2011	11:50:03 AM	BCl3 valve closed
9/29/2011	11:50:03 AM	PH3 valve closed
9/29/2011	11:50:03 AM	SiCl4 pre valve closed
9/29/2011	11:50:03 AM	SiCl4 post valve closed
9/29/2011	11:50:03 AM	Bypass valve closed
9/29/2011	11:50:03 AM	Bubbler valve closed
9/29/2011	11:50:03 AM	Main Vac valve opened
9/29/2011	11:50:03 AM	Helium MFC set to  0.000000
9/29/2011	11:50:03 AM	H2 MFC set to  0.000000
9/29/2011	11:50:03 AM	BCl3 MFC set to  0.000000
9/29/2011	11:50:03 AM	PHl3 MFC set to  0.000000
9/29/2011	11:50:03 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:50:03 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:50:03 AM	Tube furnace set to 200
9/29/2011	11:50:33 AM	H2 valve closed
9/29/2011	11:50:33 AM	BCl3 valve closed
9/29/2011	11:50:33 AM	PH3 valve closed
9/29/2011	11:50:33 AM	SiCl4 pre valve closed
9/29/2011	11:50:33 AM	SiCl4 post valve closed
9/29/2011	11:50:33 AM	Bypass valve closed
9/29/2011	11:50:33 AM	Bubbler valve closed
9/29/2011	11:50:33 AM	Helium valve opened
9/29/2011	11:50:33 AM	Main Vac valve opened
9/29/2011	11:50:33 AM	Helium MFC set to  20.000000
9/29/2011	11:50:33 AM	H2 MFC set to  0.000000
9/29/2011	11:50:33 AM	BCl3 MFC set to  0.000000
9/29/2011	11:50:33 AM	PHl3 MFC set to  0.000000
9/29/2011	11:50:33 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:50:33 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:50:33 AM	Tube furnace set to 200
9/29/2011	11:51:03 AM	Helium valve closed
9/29/2011	11:51:03 AM	H2 valve closed
9/29/2011	11:51:03 AM	BCl3 valve closed
9/29/2011	11:51:03 AM	PH3 valve closed
9/29/2011	11:51:03 AM	SiCl4 pre valve closed
9/29/2011	11:51:03 AM	SiCl4 post valve closed
9/29/2011	11:51:03 AM	Bypass valve closed
9/29/2011	11:51:03 AM	Bubbler valve closed
9/29/2011	11:51:03 AM	Main Vac valve opened
9/29/2011	11:51:03 AM	Helium MFC set to  0.000000
9/29/2011	11:51:03 AM	H2 MFC set to  0.000000
9/29/2011	11:51:03 AM	BCl3 MFC set to  0.000000
9/29/2011	11:51:03 AM	PHl3 MFC set to  0.000000
9/29/2011	11:51:03 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:51:03 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:51:03 AM	Tube furnace set to 200
9/29/2011	11:51:33 AM	H2 valve closed
9/29/2011	11:51:33 AM	BCl3 valve closed
9/29/2011	11:51:33 AM	PH3 valve closed
9/29/2011	11:51:33 AM	SiCl4 pre valve closed
9/29/2011	11:51:33 AM	SiCl4 post valve closed
9/29/2011	11:51:33 AM	Bypass valve closed
9/29/2011	11:51:33 AM	Bubbler valve closed
9/29/2011	11:51:33 AM	Helium valve opened
9/29/2011	11:51:33 AM	Main Vac valve opened
9/29/2011	11:51:33 AM	Helium MFC set to  20.000000
9/29/2011	11:51:33 AM	H2 MFC set to  0.000000
9/29/2011	11:51:33 AM	BCl3 MFC set to  0.000000
9/29/2011	11:51:33 AM	PHl3 MFC set to  0.000000
9/29/2011	11:51:33 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:51:33 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:51:33 AM	Tube furnace set to 200
9/29/2011	11:52:04 AM	Helium valve closed
9/29/2011	11:52:04 AM	H2 valve closed
9/29/2011	11:52:04 AM	BCl3 valve closed
9/29/2011	11:52:04 AM	PH3 valve closed
9/29/2011	11:52:04 AM	SiCl4 pre valve closed
9/29/2011	11:52:04 AM	SiCl4 post valve closed
9/29/2011	11:52:04 AM	Bypass valve closed
9/29/2011	11:52:04 AM	Bubbler valve closed
9/29/2011	11:52:04 AM	Main Vac valve opened
9/29/2011	11:52:04 AM	Helium MFC set to  0.000000
9/29/2011	11:52:04 AM	H2 MFC set to  0.000000
9/29/2011	11:52:04 AM	BCl3 MFC set to  0.000000
9/29/2011	11:52:04 AM	PHl3 MFC set to  0.000000
9/29/2011	11:52:04 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:52:04 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:52:04 AM	Tube furnace set to 200
9/29/2011	11:52:34 AM	H2 valve closed
9/29/2011	11:52:34 AM	BCl3 valve closed
9/29/2011	11:52:34 AM	PH3 valve closed
9/29/2011	11:52:34 AM	SiCl4 pre valve closed
9/29/2011	11:52:34 AM	SiCl4 post valve closed
9/29/2011	11:52:34 AM	Bypass valve closed
9/29/2011	11:52:34 AM	Bubbler valve closed
9/29/2011	11:52:34 AM	Helium valve opened
9/29/2011	11:52:34 AM	Main Vac valve opened
9/29/2011	11:52:34 AM	Helium MFC set to  20.000000
9/29/2011	11:52:34 AM	H2 MFC set to  0.000000
9/29/2011	11:52:34 AM	BCl3 MFC set to  0.000000
9/29/2011	11:52:34 AM	PHl3 MFC set to  0.000000
9/29/2011	11:52:34 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:52:34 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:52:34 AM	Tube furnace set to 200
9/29/2011	11:53:04 AM	Helium valve closed
9/29/2011	11:53:04 AM	H2 valve closed
9/29/2011	11:53:04 AM	BCl3 valve closed
9/29/2011	11:53:04 AM	PH3 valve closed
9/29/2011	11:53:04 AM	SiCl4 pre valve closed
9/29/2011	11:53:04 AM	SiCl4 post valve closed
9/29/2011	11:53:04 AM	Bypass valve closed
9/29/2011	11:53:04 AM	Bubbler valve closed
9/29/2011	11:53:04 AM	Main Vac valve opened
9/29/2011	11:53:04 AM	Helium MFC set to  0.000000
9/29/2011	11:53:04 AM	H2 MFC set to  0.000000
9/29/2011	11:53:04 AM	BCl3 MFC set to  0.000000
9/29/2011	11:53:04 AM	PHl3 MFC set to  0.000000
9/29/2011	11:53:04 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:53:04 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:53:04 AM	Tube furnace set to 200
9/29/2011	11:53:34 AM	H2 valve closed
9/29/2011	11:53:34 AM	BCl3 valve closed
9/29/2011	11:53:34 AM	PH3 valve closed
9/29/2011	11:53:34 AM	SiCl4 pre valve closed
9/29/2011	11:53:34 AM	SiCl4 post valve closed
9/29/2011	11:53:34 AM	Bypass valve closed
9/29/2011	11:53:34 AM	Bubbler valve closed
9/29/2011	11:53:34 AM	Helium valve opened
9/29/2011	11:53:34 AM	Main Vac valve opened
9/29/2011	11:53:34 AM	Helium MFC set to  20.000000
9/29/2011	11:53:34 AM	H2 MFC set to  0.000000
9/29/2011	11:53:34 AM	BCl3 MFC set to  0.000000
9/29/2011	11:53:34 AM	PHl3 MFC set to  0.000000
9/29/2011	11:53:34 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:53:34 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:53:34 AM	Tube furnace set to 200
9/29/2011	11:54:04 AM	Helium valve closed
9/29/2011	11:54:04 AM	H2 valve closed
9/29/2011	11:54:04 AM	BCl3 valve closed
9/29/2011	11:54:04 AM	PH3 valve closed
9/29/2011	11:54:04 AM	SiCl4 pre valve closed
9/29/2011	11:54:04 AM	SiCl4 post valve closed
9/29/2011	11:54:04 AM	Bypass valve closed
9/29/2011	11:54:04 AM	Bubbler valve closed
9/29/2011	11:54:04 AM	Main Vac valve opened
9/29/2011	11:54:04 AM	Helium MFC set to  0.000000
9/29/2011	11:54:04 AM	H2 MFC set to  0.000000
9/29/2011	11:54:04 AM	BCl3 MFC set to  0.000000
9/29/2011	11:54:04 AM	PHl3 MFC set to  0.000000
9/29/2011	11:54:04 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:54:04 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:54:05 AM	Tube furnace set to 200
9/29/2011	11:54:06 AM	Run finished at 11:54 AM
9/29/2011	11:54:48 AM	Recipe started at 11:54 AM
9/29/2011	11:54:48 AM	Helium valve closed
9/29/2011	11:54:48 AM	H2 valve closed
9/29/2011	11:54:48 AM	BCl3 valve closed
9/29/2011	11:54:48 AM	PH3 valve closed
9/29/2011	11:54:48 AM	SiCl4 pre valve closed
9/29/2011	11:54:48 AM	SiCl4 post valve closed
9/29/2011	11:54:48 AM	Main Vac valve closed
9/29/2011	11:54:48 AM	Bypass valve closed
9/29/2011	11:54:48 AM	Bubbler valve closed
9/29/2011	11:54:48 AM	Helium MFC set to  0.000000
9/29/2011	11:54:48 AM	H2 MFC set to  0.000000
9/29/2011	11:54:48 AM	BCl3 MFC set to  0.000000
9/29/2011	11:54:48 AM	PHl3 MFC set to  0.000000
9/29/2011	11:54:48 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:54:48 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:54:48 AM	Tube furnace set to 0
9/29/2011	11:54:51 AM	Helium valve closed
9/29/2011	11:54:51 AM	BCl3 valve closed
9/29/2011	11:54:51 AM	PH3 valve closed
9/29/2011	11:54:51 AM	SiCl4 pre valve closed
9/29/2011	11:54:51 AM	SiCl4 post valve closed
9/29/2011	11:54:51 AM	Main Vac valve closed
9/29/2011	11:54:51 AM	Bypass valve closed
9/29/2011	11:54:51 AM	Bubbler valve closed
9/29/2011	11:54:51 AM	H2 valve opened
9/29/2011	11:54:51 AM	Helium MFC set to  0.000000
9/29/2011	11:54:51 AM	H2 MFC set to  500.000000
9/29/2011	11:54:51 AM	BCl3 MFC set to  0.000000
9/29/2011	11:54:51 AM	PHl3 MFC set to  0.000000
9/29/2011	11:54:51 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:54:51 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:54:52 AM	Tube furnace set to 0
9/29/2011	11:55:50 AM	Helium valve closed
9/29/2011	11:55:50 AM	BCl3 valve closed
9/29/2011	11:55:50 AM	PH3 valve closed
9/29/2011	11:55:50 AM	SiCl4 pre valve closed
9/29/2011	11:55:50 AM	SiCl4 post valve closed
9/29/2011	11:55:50 AM	Main Vac valve closed
9/29/2011	11:55:50 AM	Bypass valve closed
9/29/2011	11:55:50 AM	H2 valve opened
9/29/2011	11:55:50 AM	Bubbler valve opened
9/29/2011	11:55:50 AM	Helium MFC set to  0.000000
9/29/2011	11:55:50 AM	H2 MFC set to  500.000000
9/29/2011	11:55:50 AM	BCl3 MFC set to  0.000000
9/29/2011	11:55:50 AM	PHl3 MFC set to  0.000000
9/29/2011	11:55:50 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:55:50 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:55:51 AM	Tube furnace set to 0
9/29/2011	11:55:52 AM	Helium valve closed
9/29/2011	11:55:52 AM	BCl3 valve closed
9/29/2011	11:55:52 AM	PH3 valve closed
9/29/2011	11:55:52 AM	SiCl4 pre valve closed
9/29/2011	11:55:52 AM	SiCl4 post valve closed
9/29/2011	11:55:52 AM	Main Vac valve closed
9/29/2011	11:55:52 AM	Bypass valve closed
9/29/2011	11:55:52 AM	H2 valve opened
9/29/2011	11:55:52 AM	Bubbler valve opened
9/29/2011	11:55:52 AM	Helium MFC set to  0.000000
9/29/2011	11:55:52 AM	H2 MFC set to  500.000000
9/29/2011	11:55:52 AM	BCl3 MFC set to  0.000000
9/29/2011	11:55:52 AM	PHl3 MFC set to  0.000000
9/29/2011	11:55:52 AM	SiCl4 MFC set to  0.000000
9/29/2011	11:55:52 AM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:55:52 AM	Tube furnace set to 1000
9/29/2011	12:15:52 PM	Helium valve closed
9/29/2011	12:15:52 PM	PH3 valve closed
9/29/2011	12:15:52 PM	Main Vac valve closed
9/29/2011	12:15:52 PM	Bypass valve closed
9/29/2011	12:15:52 PM	H2 valve opened
9/29/2011	12:15:52 PM	BCl3 valve opened
9/29/2011	12:15:52 PM	SiCl4 pre valve opened
9/29/2011	12:15:52 PM	SiCl4 post valve opened
9/29/2011	12:15:52 PM	Bubbler valve opened
9/29/2011	12:15:52 PM	Helium MFC set to  0.000000
9/29/2011	12:15:52 PM	H2 MFC set to  500.000000
9/29/2011	12:15:52 PM	BCl3 MFC set to  2.300000
9/29/2011	12:15:52 PM	PHl3 MFC set to  0.000000
9/29/2011	12:15:52 PM	SiCl4 MFC set to  50.000000
9/29/2011	12:15:52 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	12:15:52 PM	Tube furnace set to 1000
9/29/2011	12:31:52 PM	Helium valve closed
9/29/2011	12:31:52 PM	BCl3 valve closed
9/29/2011	12:31:52 PM	PH3 valve closed
9/29/2011	12:31:52 PM	SiCl4 pre valve closed
9/29/2011	12:31:52 PM	SiCl4 post valve closed
9/29/2011	12:31:52 PM	Main Vac valve closed
9/29/2011	12:31:52 PM	Bypass valve closed
9/29/2011	12:31:52 PM	H2 valve opened
9/29/2011	12:31:52 PM	Bubbler valve opened
9/29/2011	12:31:52 PM	Helium MFC set to  0.000000
9/29/2011	12:31:52 PM	H2 MFC set to  500.000000
9/29/2011	12:31:52 PM	BCl3 MFC set to  0.000000
9/29/2011	12:31:52 PM	PHl3 MFC set to  0.000000
9/29/2011	12:31:52 PM	SiCl4 MFC set to  0.000000
9/29/2011	12:31:52 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	12:31:52 PM	Tube furnace set to 750
9/29/2011	12:36:52 PM	H2 valve closed
9/29/2011	12:36:52 PM	BCl3 valve closed
9/29/2011	12:36:52 PM	PH3 valve closed
9/29/2011	12:36:52 PM	SiCl4 pre valve closed
9/29/2011	12:36:52 PM	SiCl4 post valve closed
9/29/2011	12:36:52 PM	Main Vac valve closed
9/29/2011	12:36:52 PM	Bypass valve closed
9/29/2011	12:36:52 PM	Helium valve opened
9/29/2011	12:36:52 PM	Bubbler valve opened
9/29/2011	12:36:52 PM	Helium MFC set to  500.000000
9/29/2011	12:36:52 PM	H2 MFC set to  0.000000
9/29/2011	12:36:52 PM	BCl3 MFC set to  0.000000
9/29/2011	12:36:52 PM	PHl3 MFC set to  0.000000
9/29/2011	12:36:52 PM	SiCl4 MFC set to  0.000000
9/29/2011	12:36:52 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	12:36:52 PM	Tube furnace set to 0
9/29/2011	12:56:52 PM	Helium valve closed
9/29/2011	12:56:52 PM	H2 valve closed
9/29/2011	12:56:52 PM	BCl3 valve closed
9/29/2011	12:56:52 PM	PH3 valve closed
9/29/2011	12:56:52 PM	SiCl4 pre valve closed
9/29/2011	12:56:52 PM	SiCl4 post valve closed
9/29/2011	12:56:52 PM	Main Vac valve closed
9/29/2011	12:56:52 PM	Bypass valve closed
9/29/2011	12:56:52 PM	Bubbler valve closed
9/29/2011	12:56:52 PM	Helium MFC set to  0.000000
9/29/2011	12:56:52 PM	H2 MFC set to  0.000000
9/29/2011	12:56:52 PM	BCl3 MFC set to  0.000000
9/29/2011	12:56:52 PM	PHl3 MFC set to  0.000000
9/29/2011	12:56:52 PM	SiCl4 MFC set to  0.000000
9/29/2011	12:56:52 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	12:56:52 PM	Tube furnace set to 0
9/29/2011	12:56:53 PM	Run finished at 12:56 PM
9/29/2011	12:57:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	12:57:41 PM	Recipe started at 12:57 PM
9/29/2011	12:57:41 PM	Helium valve closed
9/29/2011	12:57:41 PM	H2 valve closed
9/29/2011	12:57:41 PM	BCl3 valve closed
9/29/2011	12:57:41 PM	PH3 valve closed
9/29/2011	12:57:41 PM	SiCl4 pre valve closed
9/29/2011	12:57:41 PM	SiCl4 post valve closed
9/29/2011	12:57:41 PM	Main Vac valve closed
9/29/2011	12:57:41 PM	Bypass valve closed
9/29/2011	12:57:41 PM	Bubbler valve closed
9/29/2011	12:57:41 PM	Helium MFC set to  0.000000
9/29/2011	12:57:41 PM	H2 MFC set to  0.000000
9/29/2011	12:57:41 PM	BCl3 MFC set to  0.000000
9/29/2011	12:57:41 PM	PHl3 MFC set to  0.000000
9/29/2011	12:57:41 PM	SiCl4 MFC set to  0.000000
9/29/2011	12:57:41 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	12:57:41 PM	Tube furnace set to 0
9/29/2011	12:57:44 PM	H2 valve closed
9/29/2011	12:57:44 PM	BCl3 valve closed
9/29/2011	12:57:44 PM	PH3 valve closed
9/29/2011	12:57:44 PM	SiCl4 pre valve closed
9/29/2011	12:57:44 PM	SiCl4 post valve closed
9/29/2011	12:57:44 PM	Main Vac valve closed
9/29/2011	12:57:44 PM	Bypass valve closed
9/29/2011	12:57:44 PM	Bubbler valve closed
9/29/2011	12:57:44 PM	Helium valve opened
9/29/2011	12:57:44 PM	Helium MFC set to  500.000000
9/29/2011	12:57:44 PM	H2 MFC set to  0.000000
9/29/2011	12:57:44 PM	BCl3 MFC set to  0.000000
9/29/2011	12:57:44 PM	PHl3 MFC set to  0.000000
9/29/2011	12:57:44 PM	SiCl4 MFC set to  0.000000
9/29/2011	12:57:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	12:57:44 PM	Tube furnace set to 0
9/29/2011	12:57:44 PM	Helium valve closed
9/29/2011	12:57:44 PM	H2 valve closed
9/29/2011	12:57:44 PM	BCl3 valve closed
9/29/2011	12:57:44 PM	PH3 valve closed
9/29/2011	12:57:44 PM	SiCl4 pre valve closed
9/29/2011	12:57:44 PM	SiCl4 post valve closed
9/29/2011	12:57:44 PM	Main Vac valve closed
9/29/2011	12:57:44 PM	Bypass valve closed
9/29/2011	12:57:44 PM	Bubbler valve closed
9/29/2011	12:57:44 PM	Helium MFC set to  0.000000
9/29/2011	12:57:44 PM	H2 MFC set to  0.000000
9/29/2011	12:57:44 PM	BCl3 MFC set to  0.000000
9/29/2011	12:57:44 PM	PHl3 MFC set to  0.000000
9/29/2011	12:57:44 PM	SiCl4 MFC set to  0.000000
9/29/2011	12:57:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	12:57:44 PM	Tube furnace set to 0
9/29/2011	12:57:45 PM	Run finished at 12:57 PM
9/29/2011	12:57:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	1:08:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	1:08:13 PM	Recipe started at 1:08 PM
9/29/2011	1:08:13 PM	Helium valve closed
9/29/2011	1:08:13 PM	H2 valve closed
9/29/2011	1:08:13 PM	BCl3 valve closed
9/29/2011	1:08:13 PM	PH3 valve closed
9/29/2011	1:08:13 PM	SiCl4 pre valve closed
9/29/2011	1:08:13 PM	SiCl4 post valve closed
9/29/2011	1:08:13 PM	Main Vac valve closed
9/29/2011	1:08:13 PM	Bubbler valve closed
9/29/2011	1:08:13 PM	Bypass valve opened
9/29/2011	1:08:13 PM	Helium MFC set to  0.000000
9/29/2011	1:08:13 PM	H2 MFC set to  0.000000
9/29/2011	1:08:13 PM	BCl3 MFC set to  0.000000
9/29/2011	1:08:13 PM	PHl3 MFC set to  0.000000
9/29/2011	1:08:13 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:08:13 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:08:13 PM	Tube furnace set to 0
9/29/2011	1:09:29 PM	Helium valve closed
9/29/2011	1:09:29 PM	H2 valve closed
9/29/2011	1:09:29 PM	BCl3 valve closed
9/29/2011	1:09:29 PM	PH3 valve closed
9/29/2011	1:09:29 PM	SiCl4 pre valve closed
9/29/2011	1:09:29 PM	SiCl4 post valve closed
9/29/2011	1:09:29 PM	Main Vac valve closed
9/29/2011	1:09:29 PM	Bubbler valve closed
9/29/2011	1:09:29 PM	Bypass valve opened
9/29/2011	1:09:29 PM	Helium MFC set to  0.000000
9/29/2011	1:09:29 PM	H2 MFC set to  0.000000
9/29/2011	1:09:29 PM	BCl3 MFC set to  0.000000
9/29/2011	1:09:29 PM	PHl3 MFC set to  0.000000
9/29/2011	1:09:29 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:09:29 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:09:29 PM	Tube furnace set to 0
9/29/2011	1:10:29 PM	Helium valve closed
9/29/2011	1:10:29 PM	H2 valve closed
9/29/2011	1:10:29 PM	BCl3 valve closed
9/29/2011	1:10:29 PM	PH3 valve closed
9/29/2011	1:10:29 PM	SiCl4 pre valve closed
9/29/2011	1:10:29 PM	SiCl4 post valve closed
9/29/2011	1:10:29 PM	Bypass valve closed
9/29/2011	1:10:29 PM	Bubbler valve closed
9/29/2011	1:10:29 PM	Main Vac valve opened
9/29/2011	1:10:29 PM	Helium MFC set to  0.000000
9/29/2011	1:10:29 PM	H2 MFC set to  0.000000
9/29/2011	1:10:29 PM	BCl3 MFC set to  0.000000
9/29/2011	1:10:29 PM	PHl3 MFC set to  0.000000
9/29/2011	1:10:29 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:10:29 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:10:29 PM	Tube furnace set to 0
9/29/2011	1:10:30 PM	Run finished at 1:10 PM
9/29/2011	1:10:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	1:11:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/29/2011	1:11:57 PM	Recipe started at 1:11 PM
9/29/2011	1:11:57 PM	Helium valve closed
9/29/2011	1:11:57 PM	H2 valve closed
9/29/2011	1:11:57 PM	BCl3 valve closed
9/29/2011	1:11:57 PM	PH3 valve closed
9/29/2011	1:11:57 PM	SiCl4 pre valve closed
9/29/2011	1:11:57 PM	SiCl4 post valve closed
9/29/2011	1:11:57 PM	Main Vac valve closed
9/29/2011	1:11:57 PM	Bypass valve closed
9/29/2011	1:11:57 PM	Bubbler valve closed
9/29/2011	1:11:57 PM	Helium MFC set to  0.000000
9/29/2011	1:11:57 PM	H2 MFC set to  0.000000
9/29/2011	1:11:57 PM	BCl3 MFC set to  0.000000
9/29/2011	1:11:57 PM	PHl3 MFC set to  0.000000
9/29/2011	1:11:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:11:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:11:57 PM	Tube furnace set to 0
9/29/2011	1:11:57 PM	Run finished at 1:11 PM
9/29/2011	1:11:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/29/2011	1:12:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	1:12:06 PM	Recipe started at 1:12 PM
9/29/2011	1:12:06 PM	Helium valve closed
9/29/2011	1:12:06 PM	H2 valve closed
9/29/2011	1:12:06 PM	BCl3 valve closed
9/29/2011	1:12:06 PM	PH3 valve closed
9/29/2011	1:12:06 PM	SiCl4 pre valve closed
9/29/2011	1:12:06 PM	SiCl4 post valve closed
9/29/2011	1:12:06 PM	Main Vac valve closed
9/29/2011	1:12:06 PM	Bubbler valve closed
9/29/2011	1:12:06 PM	Bypass valve opened
9/29/2011	1:12:06 PM	Helium MFC set to  0.000000
9/29/2011	1:12:06 PM	H2 MFC set to  0.000000
9/29/2011	1:12:06 PM	BCl3 MFC set to  0.000000
9/29/2011	1:12:06 PM	PHl3 MFC set to  0.000000
9/29/2011	1:12:06 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:12:06 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:12:06 PM	Tube furnace set to 0
9/29/2011	1:12:06 PM	Helium valve closed
9/29/2011	1:12:06 PM	H2 valve closed
9/29/2011	1:12:06 PM	BCl3 valve closed
9/29/2011	1:12:06 PM	PH3 valve closed
9/29/2011	1:12:06 PM	SiCl4 pre valve closed
9/29/2011	1:12:06 PM	SiCl4 post valve closed
9/29/2011	1:12:06 PM	Main Vac valve closed
9/29/2011	1:12:06 PM	Bubbler valve closed
9/29/2011	1:12:06 PM	Bypass valve opened
9/29/2011	1:12:06 PM	Helium MFC set to  0.000000
9/29/2011	1:12:06 PM	H2 MFC set to  0.000000
9/29/2011	1:12:06 PM	BCl3 MFC set to  0.000000
9/29/2011	1:12:06 PM	PHl3 MFC set to  0.000000
9/29/2011	1:12:06 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:12:06 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:12:07 PM	Tube furnace set to 0
9/29/2011	1:13:07 PM	Helium valve closed
9/29/2011	1:13:07 PM	H2 valve closed
9/29/2011	1:13:07 PM	BCl3 valve closed
9/29/2011	1:13:07 PM	PH3 valve closed
9/29/2011	1:13:07 PM	SiCl4 pre valve closed
9/29/2011	1:13:07 PM	SiCl4 post valve closed
9/29/2011	1:13:07 PM	Bypass valve closed
9/29/2011	1:13:07 PM	Bubbler valve closed
9/29/2011	1:13:07 PM	Main Vac valve opened
9/29/2011	1:13:07 PM	Helium MFC set to  0.000000
9/29/2011	1:13:07 PM	H2 MFC set to  0.000000
9/29/2011	1:13:07 PM	BCl3 MFC set to  0.000000
9/29/2011	1:13:07 PM	PHl3 MFC set to  0.000000
9/29/2011	1:13:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:13:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:13:07 PM	Tube furnace set to 0
9/29/2011	1:13:08 PM	Run finished at 1:13 PM
9/29/2011	1:13:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	1:13:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	1:13:39 PM	Recipe started at 1:13 PM
9/29/2011	1:13:39 PM	Helium valve closed
9/29/2011	1:13:39 PM	H2 valve closed
9/29/2011	1:13:39 PM	BCl3 valve closed
9/29/2011	1:13:39 PM	PH3 valve closed
9/29/2011	1:13:39 PM	SiCl4 pre valve closed
9/29/2011	1:13:39 PM	SiCl4 post valve closed
9/29/2011	1:13:39 PM	Main Vac valve closed
9/29/2011	1:13:39 PM	Bypass valve closed
9/29/2011	1:13:39 PM	Bubbler valve closed
9/29/2011	1:13:39 PM	Helium MFC set to  0.000000
9/29/2011	1:13:39 PM	H2 MFC set to  0.000000
9/29/2011	1:13:39 PM	BCl3 MFC set to  0.000000
9/29/2011	1:13:39 PM	PHl3 MFC set to  0.000000
9/29/2011	1:13:39 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:13:39 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:13:39 PM	Tube furnace set to 0
9/29/2011	1:13:42 PM	H2 valve closed
9/29/2011	1:13:42 PM	BCl3 valve closed
9/29/2011	1:13:42 PM	PH3 valve closed
9/29/2011	1:13:42 PM	SiCl4 pre valve closed
9/29/2011	1:13:42 PM	SiCl4 post valve closed
9/29/2011	1:13:42 PM	Main Vac valve closed
9/29/2011	1:13:43 PM	Bypass valve closed
9/29/2011	1:13:43 PM	Bubbler valve closed
9/29/2011	1:13:43 PM	Helium valve opened
9/29/2011	1:13:43 PM	Helium MFC set to  500.000000
9/29/2011	1:13:43 PM	H2 MFC set to  0.000000
9/29/2011	1:13:43 PM	BCl3 MFC set to  0.000000
9/29/2011	1:13:43 PM	PHl3 MFC set to  0.000000
9/29/2011	1:13:43 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:13:43 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:13:43 PM	Tube furnace set to 0
9/29/2011	1:14:31 PM	Helium valve closed
9/29/2011	1:14:31 PM	H2 valve closed
9/29/2011	1:14:31 PM	BCl3 valve closed
9/29/2011	1:14:31 PM	PH3 valve closed
9/29/2011	1:14:31 PM	SiCl4 pre valve closed
9/29/2011	1:14:31 PM	SiCl4 post valve closed
9/29/2011	1:14:31 PM	Main Vac valve closed
9/29/2011	1:14:31 PM	Bypass valve closed
9/29/2011	1:14:31 PM	Bubbler valve closed
9/29/2011	1:14:31 PM	Helium MFC set to  0.000000
9/29/2011	1:14:31 PM	H2 MFC set to  0.000000
9/29/2011	1:14:31 PM	BCl3 MFC set to  0.000000
9/29/2011	1:14:31 PM	PHl3 MFC set to  0.000000
9/29/2011	1:14:31 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:14:31 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:14:32 PM	Tube furnace set to 0
9/29/2011	1:14:33 PM	Run finished at 1:14 PM
9/29/2011	1:14:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	1:17:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	1:17:36 PM	Recipe started at 1:17 PM
9/29/2011	1:17:36 PM	Helium valve closed
9/29/2011	1:17:36 PM	H2 valve closed
9/29/2011	1:17:36 PM	BCl3 valve closed
9/29/2011	1:17:36 PM	PH3 valve closed
9/29/2011	1:17:36 PM	SiCl4 pre valve closed
9/29/2011	1:17:36 PM	SiCl4 post valve closed
9/29/2011	1:17:36 PM	Main Vac valve closed
9/29/2011	1:17:36 PM	Bubbler valve closed
9/29/2011	1:17:36 PM	Bypass valve opened
9/29/2011	1:17:36 PM	Helium MFC set to  0.000000
9/29/2011	1:17:36 PM	H2 MFC set to  0.000000
9/29/2011	1:17:36 PM	BCl3 MFC set to  0.000000
9/29/2011	1:17:36 PM	PHl3 MFC set to  0.000000
9/29/2011	1:17:36 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:17:36 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:17:37 PM	Tube furnace set to 0
9/29/2011	1:18:41 PM	Helium valve closed
9/29/2011	1:18:41 PM	H2 valve closed
9/29/2011	1:18:41 PM	BCl3 valve closed
9/29/2011	1:18:41 PM	PH3 valve closed
9/29/2011	1:18:41 PM	SiCl4 pre valve closed
9/29/2011	1:18:41 PM	SiCl4 post valve closed
9/29/2011	1:18:41 PM	Main Vac valve closed
9/29/2011	1:18:41 PM	Bubbler valve closed
9/29/2011	1:18:41 PM	Bypass valve opened
9/29/2011	1:18:41 PM	Helium MFC set to  0.000000
9/29/2011	1:18:41 PM	H2 MFC set to  0.000000
9/29/2011	1:18:41 PM	BCl3 MFC set to  0.000000
9/29/2011	1:18:41 PM	PHl3 MFC set to  0.000000
9/29/2011	1:18:41 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:18:41 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:18:42 PM	Tube furnace set to 0
9/29/2011	1:19:42 PM	Helium valve closed
9/29/2011	1:19:42 PM	H2 valve closed
9/29/2011	1:19:42 PM	BCl3 valve closed
9/29/2011	1:19:42 PM	PH3 valve closed
9/29/2011	1:19:42 PM	SiCl4 pre valve closed
9/29/2011	1:19:42 PM	SiCl4 post valve closed
9/29/2011	1:19:42 PM	Bypass valve closed
9/29/2011	1:19:42 PM	Bubbler valve closed
9/29/2011	1:19:42 PM	Main Vac valve opened
9/29/2011	1:19:42 PM	Helium MFC set to  0.000000
9/29/2011	1:19:42 PM	H2 MFC set to  0.000000
9/29/2011	1:19:42 PM	BCl3 MFC set to  0.000000
9/29/2011	1:19:42 PM	PHl3 MFC set to  0.000000
9/29/2011	1:19:42 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:19:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:19:42 PM	Tube furnace set to 0
9/29/2011	1:19:43 PM	Run finished at 1:19 PM
9/29/2011	1:19:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	1:21:33 PM	Recipe started at 1:21 PM
9/29/2011	1:21:33 PM	Helium valve closed
9/29/2011	1:21:33 PM	H2 valve closed
9/29/2011	1:21:33 PM	BCl3 valve closed
9/29/2011	1:21:33 PM	PH3 valve closed
9/29/2011	1:21:33 PM	SiCl4 pre valve closed
9/29/2011	1:21:33 PM	SiCl4 post valve closed
9/29/2011	1:21:33 PM	Bypass valve closed
9/29/2011	1:21:33 PM	Bubbler valve closed
9/29/2011	1:21:33 PM	Main Vac valve opened
9/29/2011	1:21:33 PM	Helium MFC set to  0.000000
9/29/2011	1:21:33 PM	H2 MFC set to  0.000000
9/29/2011	1:21:33 PM	BCl3 MFC set to  0.000000
9/29/2011	1:21:33 PM	PHl3 MFC set to  0.000000
9/29/2011	1:21:33 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:21:33 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:21:33 PM	Tube furnace set to 200
9/29/2011	1:21:50 PM	Run aborted at 1:21 PM
9/29/2011	1:21:50 PM	Helium valve closed
9/29/2011	1:21:50 PM	H2 valve closed
9/29/2011	1:21:50 PM	BCl3 valve closed
9/29/2011	1:21:50 PM	PH3 valve closed
9/29/2011	1:21:50 PM	SiCl4 pre valve closed
9/29/2011	1:21:50 PM	SiCl4 post valve closed
9/29/2011	1:21:50 PM	Bypass valve closed
9/29/2011	1:21:50 PM	Main Vac valve closed
9/29/2011	1:21:50 PM	Bubbler valve closed
9/29/2011	1:21:50 PM	Helium MFC set to  0.000000
9/29/2011	1:21:50 PM	H2 MFC set to  0.000000
9/29/2011	1:21:50 PM	BCl3 MFC set to  0.000000
9/29/2011	1:21:50 PM	PHl3 MFC set to  0.000000
9/29/2011	1:21:50 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:21:50 PM	Tube furnace set to 0
9/29/2011	1:22:50 PM	Main Vac valve opened
9/29/2011	1:23:33 PM	Main Vac valve closed
9/29/2011	1:23:44 PM	Main Vac valve opened
9/29/2011	1:24:07 PM	Helium MFC set to  20.000000
9/29/2011	1:24:09 PM	Helium valve opened
9/29/2011	1:24:44 PM	Helium valve closed
9/29/2011	1:25:17 PM	Main Vac valve closed
9/29/2011	1:25:23 PM	Main Vac valve opened
9/29/2011	1:25:44 PM	Recipe started at 1:25 PM
9/29/2011	1:25:44 PM	Helium valve closed
9/29/2011	1:25:44 PM	H2 valve closed
9/29/2011	1:25:44 PM	BCl3 valve closed
9/29/2011	1:25:44 PM	PH3 valve closed
9/29/2011	1:25:44 PM	SiCl4 pre valve closed
9/29/2011	1:25:44 PM	SiCl4 post valve closed
9/29/2011	1:25:44 PM	Bypass valve closed
9/29/2011	1:25:44 PM	Bubbler valve closed
9/29/2011	1:25:44 PM	Main Vac valve opened
9/29/2011	1:25:44 PM	Helium MFC set to  0.000000
9/29/2011	1:25:44 PM	H2 MFC set to  0.000000
9/29/2011	1:25:44 PM	BCl3 MFC set to  0.000000
9/29/2011	1:25:44 PM	PHl3 MFC set to  0.000000
9/29/2011	1:25:44 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:25:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:25:44 PM	Tube furnace set to 200
9/29/2011	1:25:59 PM	H2 valve closed
9/29/2011	1:25:59 PM	BCl3 valve closed
9/29/2011	1:25:59 PM	PH3 valve closed
9/29/2011	1:25:59 PM	SiCl4 pre valve closed
9/29/2011	1:25:59 PM	SiCl4 post valve closed
9/29/2011	1:25:59 PM	Bypass valve closed
9/29/2011	1:25:59 PM	Bubbler valve closed
9/29/2011	1:25:59 PM	Helium valve opened
9/29/2011	1:25:59 PM	Main Vac valve opened
9/29/2011	1:25:59 PM	Helium MFC set to  20.000000
9/29/2011	1:25:59 PM	H2 MFC set to  0.000000
9/29/2011	1:25:59 PM	BCl3 MFC set to  0.000000
9/29/2011	1:25:59 PM	PHl3 MFC set to  0.000000
9/29/2011	1:25:59 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:25:59 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:25:59 PM	Tube furnace set to 200
9/29/2011	1:26:30 PM	Helium valve closed
9/29/2011	1:26:30 PM	H2 valve closed
9/29/2011	1:26:30 PM	BCl3 valve closed
9/29/2011	1:26:30 PM	PH3 valve closed
9/29/2011	1:26:30 PM	SiCl4 pre valve closed
9/29/2011	1:26:30 PM	SiCl4 post valve closed
9/29/2011	1:26:30 PM	Bypass valve closed
9/29/2011	1:26:30 PM	Bubbler valve closed
9/29/2011	1:26:30 PM	Main Vac valve opened
9/29/2011	1:26:30 PM	Helium MFC set to  0.000000
9/29/2011	1:26:30 PM	H2 MFC set to  0.000000
9/29/2011	1:26:30 PM	BCl3 MFC set to  0.000000
9/29/2011	1:26:30 PM	PHl3 MFC set to  0.000000
9/29/2011	1:26:30 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:26:30 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:26:30 PM	Tube furnace set to 200
9/29/2011	1:27:00 PM	H2 valve closed
9/29/2011	1:27:00 PM	BCl3 valve closed
9/29/2011	1:27:00 PM	PH3 valve closed
9/29/2011	1:27:00 PM	SiCl4 pre valve closed
9/29/2011	1:27:00 PM	SiCl4 post valve closed
9/29/2011	1:27:00 PM	Bypass valve closed
9/29/2011	1:27:00 PM	Bubbler valve closed
9/29/2011	1:27:00 PM	Helium valve opened
9/29/2011	1:27:00 PM	Main Vac valve opened
9/29/2011	1:27:00 PM	Helium MFC set to  20.000000
9/29/2011	1:27:00 PM	H2 MFC set to  0.000000
9/29/2011	1:27:00 PM	BCl3 MFC set to  0.000000
9/29/2011	1:27:00 PM	PHl3 MFC set to  0.000000
9/29/2011	1:27:00 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:27:00 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:27:00 PM	Tube furnace set to 200
9/29/2011	1:27:30 PM	Helium valve closed
9/29/2011	1:27:30 PM	H2 valve closed
9/29/2011	1:27:30 PM	BCl3 valve closed
9/29/2011	1:27:30 PM	PH3 valve closed
9/29/2011	1:27:30 PM	SiCl4 pre valve closed
9/29/2011	1:27:30 PM	SiCl4 post valve closed
9/29/2011	1:27:30 PM	Bypass valve closed
9/29/2011	1:27:30 PM	Bubbler valve closed
9/29/2011	1:27:30 PM	Main Vac valve opened
9/29/2011	1:27:30 PM	Helium MFC set to  0.000000
9/29/2011	1:27:30 PM	H2 MFC set to  0.000000
9/29/2011	1:27:30 PM	BCl3 MFC set to  0.000000
9/29/2011	1:27:30 PM	PHl3 MFC set to  0.000000
9/29/2011	1:27:30 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:27:30 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:27:30 PM	Tube furnace set to 200
9/29/2011	1:28:00 PM	H2 valve closed
9/29/2011	1:28:00 PM	BCl3 valve closed
9/29/2011	1:28:00 PM	PH3 valve closed
9/29/2011	1:28:00 PM	SiCl4 pre valve closed
9/29/2011	1:28:00 PM	SiCl4 post valve closed
9/29/2011	1:28:00 PM	Bypass valve closed
9/29/2011	1:28:00 PM	Bubbler valve closed
9/29/2011	1:28:00 PM	Helium valve opened
9/29/2011	1:28:00 PM	Main Vac valve opened
9/29/2011	1:28:00 PM	Helium MFC set to  20.000000
9/29/2011	1:28:00 PM	H2 MFC set to  0.000000
9/29/2011	1:28:00 PM	BCl3 MFC set to  0.000000
9/29/2011	1:28:00 PM	PHl3 MFC set to  0.000000
9/29/2011	1:28:00 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:28:00 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:28:00 PM	Tube furnace set to 200
9/29/2011	1:28:30 PM	Helium valve closed
9/29/2011	1:28:30 PM	H2 valve closed
9/29/2011	1:28:30 PM	BCl3 valve closed
9/29/2011	1:28:30 PM	PH3 valve closed
9/29/2011	1:28:30 PM	SiCl4 pre valve closed
9/29/2011	1:28:30 PM	SiCl4 post valve closed
9/29/2011	1:28:30 PM	Bypass valve closed
9/29/2011	1:28:30 PM	Bubbler valve closed
9/29/2011	1:28:30 PM	Main Vac valve opened
9/29/2011	1:28:30 PM	Helium MFC set to  0.000000
9/29/2011	1:28:30 PM	H2 MFC set to  0.000000
9/29/2011	1:28:30 PM	BCl3 MFC set to  0.000000
9/29/2011	1:28:30 PM	PHl3 MFC set to  0.000000
9/29/2011	1:28:30 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:28:30 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:28:31 PM	Tube furnace set to 200
9/29/2011	1:29:01 PM	H2 valve closed
9/29/2011	1:29:01 PM	BCl3 valve closed
9/29/2011	1:29:01 PM	PH3 valve closed
9/29/2011	1:29:01 PM	SiCl4 pre valve closed
9/29/2011	1:29:01 PM	SiCl4 post valve closed
9/29/2011	1:29:01 PM	Bypass valve closed
9/29/2011	1:29:01 PM	Bubbler valve closed
9/29/2011	1:29:01 PM	Helium valve opened
9/29/2011	1:29:01 PM	Main Vac valve opened
9/29/2011	1:29:01 PM	Helium MFC set to  20.000000
9/29/2011	1:29:01 PM	H2 MFC set to  0.000000
9/29/2011	1:29:01 PM	BCl3 MFC set to  0.000000
9/29/2011	1:29:01 PM	PHl3 MFC set to  0.000000
9/29/2011	1:29:01 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:29:01 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:29:01 PM	Tube furnace set to 200
9/29/2011	1:29:31 PM	Helium valve closed
9/29/2011	1:29:31 PM	H2 valve closed
9/29/2011	1:29:31 PM	BCl3 valve closed
9/29/2011	1:29:31 PM	PH3 valve closed
9/29/2011	1:29:31 PM	SiCl4 pre valve closed
9/29/2011	1:29:31 PM	SiCl4 post valve closed
9/29/2011	1:29:31 PM	Bypass valve closed
9/29/2011	1:29:31 PM	Bubbler valve closed
9/29/2011	1:29:31 PM	Main Vac valve opened
9/29/2011	1:29:31 PM	Helium MFC set to  0.000000
9/29/2011	1:29:31 PM	H2 MFC set to  0.000000
9/29/2011	1:29:31 PM	BCl3 MFC set to  0.000000
9/29/2011	1:29:31 PM	PHl3 MFC set to  0.000000
9/29/2011	1:29:31 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:29:31 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:29:31 PM	Tube furnace set to 200
9/29/2011	1:30:01 PM	H2 valve closed
9/29/2011	1:30:01 PM	BCl3 valve closed
9/29/2011	1:30:01 PM	PH3 valve closed
9/29/2011	1:30:01 PM	SiCl4 pre valve closed
9/29/2011	1:30:01 PM	SiCl4 post valve closed
9/29/2011	1:30:01 PM	Bypass valve closed
9/29/2011	1:30:01 PM	Bubbler valve closed
9/29/2011	1:30:01 PM	Helium valve opened
9/29/2011	1:30:01 PM	Main Vac valve opened
9/29/2011	1:30:01 PM	Helium MFC set to  20.000000
9/29/2011	1:30:01 PM	H2 MFC set to  0.000000
9/29/2011	1:30:01 PM	BCl3 MFC set to  0.000000
9/29/2011	1:30:01 PM	PHl3 MFC set to  0.000000
9/29/2011	1:30:01 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:30:01 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:30:01 PM	Tube furnace set to 200
9/29/2011	1:30:31 PM	Helium valve closed
9/29/2011	1:30:31 PM	H2 valve closed
9/29/2011	1:30:31 PM	BCl3 valve closed
9/29/2011	1:30:31 PM	PH3 valve closed
9/29/2011	1:30:31 PM	SiCl4 pre valve closed
9/29/2011	1:30:31 PM	SiCl4 post valve closed
9/29/2011	1:30:31 PM	Bypass valve closed
9/29/2011	1:30:31 PM	Bubbler valve closed
9/29/2011	1:30:31 PM	Main Vac valve opened
9/29/2011	1:30:31 PM	Helium MFC set to  0.000000
9/29/2011	1:30:31 PM	H2 MFC set to  0.000000
9/29/2011	1:30:31 PM	BCl3 MFC set to  0.000000
9/29/2011	1:30:31 PM	PHl3 MFC set to  0.000000
9/29/2011	1:30:31 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:30:31 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:30:31 PM	Tube furnace set to 200
9/29/2011	1:31:01 PM	H2 valve closed
9/29/2011	1:31:01 PM	BCl3 valve closed
9/29/2011	1:31:01 PM	PH3 valve closed
9/29/2011	1:31:01 PM	SiCl4 pre valve closed
9/29/2011	1:31:01 PM	SiCl4 post valve closed
9/29/2011	1:31:01 PM	Bypass valve closed
9/29/2011	1:31:01 PM	Bubbler valve closed
9/29/2011	1:31:01 PM	Helium valve opened
9/29/2011	1:31:01 PM	Main Vac valve opened
9/29/2011	1:31:01 PM	Helium MFC set to  20.000000
9/29/2011	1:31:01 PM	H2 MFC set to  0.000000
9/29/2011	1:31:01 PM	BCl3 MFC set to  0.000000
9/29/2011	1:31:01 PM	PHl3 MFC set to  0.000000
9/29/2011	1:31:01 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:31:01 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:31:02 PM	Tube furnace set to 200
9/29/2011	1:31:32 PM	Helium valve closed
9/29/2011	1:31:32 PM	H2 valve closed
9/29/2011	1:31:32 PM	BCl3 valve closed
9/29/2011	1:31:32 PM	PH3 valve closed
9/29/2011	1:31:32 PM	SiCl4 pre valve closed
9/29/2011	1:31:32 PM	SiCl4 post valve closed
9/29/2011	1:31:32 PM	Bypass valve closed
9/29/2011	1:31:32 PM	Bubbler valve closed
9/29/2011	1:31:32 PM	Main Vac valve opened
9/29/2011	1:31:32 PM	Helium MFC set to  0.000000
9/29/2011	1:31:32 PM	H2 MFC set to  0.000000
9/29/2011	1:31:32 PM	BCl3 MFC set to  0.000000
9/29/2011	1:31:32 PM	PHl3 MFC set to  0.000000
9/29/2011	1:31:32 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:31:32 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:31:32 PM	Tube furnace set to 200
9/29/2011	1:32:02 PM	H2 valve closed
9/29/2011	1:32:02 PM	BCl3 valve closed
9/29/2011	1:32:02 PM	PH3 valve closed
9/29/2011	1:32:02 PM	SiCl4 pre valve closed
9/29/2011	1:32:02 PM	SiCl4 post valve closed
9/29/2011	1:32:02 PM	Bypass valve closed
9/29/2011	1:32:02 PM	Bubbler valve closed
9/29/2011	1:32:02 PM	Helium valve opened
9/29/2011	1:32:02 PM	Main Vac valve opened
9/29/2011	1:32:02 PM	Helium MFC set to  20.000000
9/29/2011	1:32:02 PM	H2 MFC set to  0.000000
9/29/2011	1:32:02 PM	BCl3 MFC set to  0.000000
9/29/2011	1:32:02 PM	PHl3 MFC set to  0.000000
9/29/2011	1:32:02 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:32:02 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:32:02 PM	Tube furnace set to 200
9/29/2011	1:32:32 PM	Helium valve closed
9/29/2011	1:32:32 PM	H2 valve closed
9/29/2011	1:32:32 PM	BCl3 valve closed
9/29/2011	1:32:32 PM	PH3 valve closed
9/29/2011	1:32:32 PM	SiCl4 pre valve closed
9/29/2011	1:32:32 PM	SiCl4 post valve closed
9/29/2011	1:32:32 PM	Bypass valve closed
9/29/2011	1:32:32 PM	Bubbler valve closed
9/29/2011	1:32:32 PM	Main Vac valve opened
9/29/2011	1:32:32 PM	Helium MFC set to  0.000000
9/29/2011	1:32:32 PM	H2 MFC set to  0.000000
9/29/2011	1:32:32 PM	BCl3 MFC set to  0.000000
9/29/2011	1:32:32 PM	PHl3 MFC set to  0.000000
9/29/2011	1:32:32 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:32:32 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:32:32 PM	Tube furnace set to 200
9/29/2011	1:33:02 PM	H2 valve closed
9/29/2011	1:33:02 PM	BCl3 valve closed
9/29/2011	1:33:02 PM	PH3 valve closed
9/29/2011	1:33:02 PM	SiCl4 pre valve closed
9/29/2011	1:33:02 PM	SiCl4 post valve closed
9/29/2011	1:33:02 PM	Bypass valve closed
9/29/2011	1:33:02 PM	Bubbler valve closed
9/29/2011	1:33:02 PM	Helium valve opened
9/29/2011	1:33:02 PM	Main Vac valve opened
9/29/2011	1:33:02 PM	Helium MFC set to  20.000000
9/29/2011	1:33:02 PM	H2 MFC set to  0.000000
9/29/2011	1:33:02 PM	BCl3 MFC set to  0.000000
9/29/2011	1:33:02 PM	PHl3 MFC set to  0.000000
9/29/2011	1:33:02 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:33:02 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:33:02 PM	Tube furnace set to 200
9/29/2011	1:33:32 PM	Helium valve closed
9/29/2011	1:33:32 PM	H2 valve closed
9/29/2011	1:33:32 PM	BCl3 valve closed
9/29/2011	1:33:32 PM	PH3 valve closed
9/29/2011	1:33:32 PM	SiCl4 pre valve closed
9/29/2011	1:33:32 PM	SiCl4 post valve closed
9/29/2011	1:33:32 PM	Bypass valve closed
9/29/2011	1:33:32 PM	Bubbler valve closed
9/29/2011	1:33:32 PM	Main Vac valve opened
9/29/2011	1:33:32 PM	Helium MFC set to  0.000000
9/29/2011	1:33:32 PM	H2 MFC set to  0.000000
9/29/2011	1:33:32 PM	BCl3 MFC set to  0.000000
9/29/2011	1:33:32 PM	PHl3 MFC set to  0.000000
9/29/2011	1:33:32 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:33:32 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:33:33 PM	Tube furnace set to 200
9/29/2011	1:34:03 PM	H2 valve closed
9/29/2011	1:34:03 PM	BCl3 valve closed
9/29/2011	1:34:03 PM	PH3 valve closed
9/29/2011	1:34:03 PM	SiCl4 pre valve closed
9/29/2011	1:34:03 PM	SiCl4 post valve closed
9/29/2011	1:34:03 PM	Bypass valve closed
9/29/2011	1:34:03 PM	Bubbler valve closed
9/29/2011	1:34:03 PM	Helium valve opened
9/29/2011	1:34:03 PM	Main Vac valve opened
9/29/2011	1:34:03 PM	Helium MFC set to  20.000000
9/29/2011	1:34:03 PM	H2 MFC set to  0.000000
9/29/2011	1:34:03 PM	BCl3 MFC set to  0.000000
9/29/2011	1:34:03 PM	PHl3 MFC set to  0.000000
9/29/2011	1:34:03 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:34:03 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:34:03 PM	Tube furnace set to 200
9/29/2011	1:34:33 PM	Helium valve closed
9/29/2011	1:34:33 PM	H2 valve closed
9/29/2011	1:34:33 PM	BCl3 valve closed
9/29/2011	1:34:33 PM	PH3 valve closed
9/29/2011	1:34:33 PM	SiCl4 pre valve closed
9/29/2011	1:34:33 PM	SiCl4 post valve closed
9/29/2011	1:34:33 PM	Bypass valve closed
9/29/2011	1:34:33 PM	Bubbler valve closed
9/29/2011	1:34:33 PM	Main Vac valve opened
9/29/2011	1:34:33 PM	Helium MFC set to  0.000000
9/29/2011	1:34:33 PM	H2 MFC set to  0.000000
9/29/2011	1:34:33 PM	BCl3 MFC set to  0.000000
9/29/2011	1:34:33 PM	PHl3 MFC set to  0.000000
9/29/2011	1:34:33 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:34:33 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:34:33 PM	Tube furnace set to 200
9/29/2011	1:35:03 PM	H2 valve closed
9/29/2011	1:35:03 PM	BCl3 valve closed
9/29/2011	1:35:03 PM	PH3 valve closed
9/29/2011	1:35:03 PM	SiCl4 pre valve closed
9/29/2011	1:35:03 PM	SiCl4 post valve closed
9/29/2011	1:35:03 PM	Bypass valve closed
9/29/2011	1:35:03 PM	Bubbler valve closed
9/29/2011	1:35:03 PM	Helium valve opened
9/29/2011	1:35:03 PM	Main Vac valve opened
9/29/2011	1:35:03 PM	Helium MFC set to  20.000000
9/29/2011	1:35:03 PM	H2 MFC set to  0.000000
9/29/2011	1:35:03 PM	BCl3 MFC set to  0.000000
9/29/2011	1:35:03 PM	PHl3 MFC set to  0.000000
9/29/2011	1:35:03 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:35:03 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:35:03 PM	Tube furnace set to 200
9/29/2011	1:35:33 PM	Helium valve closed
9/29/2011	1:35:33 PM	H2 valve closed
9/29/2011	1:35:33 PM	BCl3 valve closed
9/29/2011	1:35:33 PM	PH3 valve closed
9/29/2011	1:35:33 PM	SiCl4 pre valve closed
9/29/2011	1:35:33 PM	SiCl4 post valve closed
9/29/2011	1:35:33 PM	Bypass valve closed
9/29/2011	1:35:33 PM	Bubbler valve closed
9/29/2011	1:35:33 PM	Main Vac valve opened
9/29/2011	1:35:33 PM	Helium MFC set to  0.000000
9/29/2011	1:35:33 PM	H2 MFC set to  0.000000
9/29/2011	1:35:33 PM	BCl3 MFC set to  0.000000
9/29/2011	1:35:33 PM	PHl3 MFC set to  0.000000
9/29/2011	1:35:33 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:35:33 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:35:33 PM	Tube furnace set to 200
9/29/2011	1:35:34 PM	Run finished at 1:35 PM
9/29/2011	1:36:29 PM	Helium MFC set to  20.000000
9/29/2011	1:36:31 PM	Helium valve opened
9/29/2011	1:38:23 PM	Helium valve closed
9/29/2011	1:38:27 PM	Helium MFC set to  0.000000
9/29/2011	1:39:09 PM	Recipe started at 1:39 PM
9/29/2011	1:39:09 PM	Helium valve closed
9/29/2011	1:39:09 PM	H2 valve closed
9/29/2011	1:39:09 PM	BCl3 valve closed
9/29/2011	1:39:09 PM	PH3 valve closed
9/29/2011	1:39:09 PM	SiCl4 pre valve closed
9/29/2011	1:39:09 PM	SiCl4 post valve closed
9/29/2011	1:39:09 PM	Bypass valve closed
9/29/2011	1:39:09 PM	Bubbler valve closed
9/29/2011	1:39:09 PM	Main Vac valve opened
9/29/2011	1:39:09 PM	Helium MFC set to  0.000000
9/29/2011	1:39:09 PM	H2 MFC set to  0.000000
9/29/2011	1:39:09 PM	BCl3 MFC set to  0.000000
9/29/2011	1:39:09 PM	PHl3 MFC set to  0.000000
9/29/2011	1:39:09 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:39:09 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:39:09 PM	Tube furnace set to 200
9/29/2011	1:39:11 PM	H2 valve closed
9/29/2011	1:39:11 PM	BCl3 valve closed
9/29/2011	1:39:11 PM	PH3 valve closed
9/29/2011	1:39:11 PM	SiCl4 pre valve closed
9/29/2011	1:39:11 PM	SiCl4 post valve closed
9/29/2011	1:39:11 PM	Bypass valve closed
9/29/2011	1:39:11 PM	Bubbler valve closed
9/29/2011	1:39:11 PM	Helium valve opened
9/29/2011	1:39:11 PM	Main Vac valve opened
9/29/2011	1:39:11 PM	Helium MFC set to  20.000000
9/29/2011	1:39:11 PM	H2 MFC set to  0.000000
9/29/2011	1:39:11 PM	BCl3 MFC set to  0.000000
9/29/2011	1:39:11 PM	PHl3 MFC set to  0.000000
9/29/2011	1:39:11 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:39:11 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:39:11 PM	Tube furnace set to 200
9/29/2011	1:39:41 PM	Helium valve closed
9/29/2011	1:39:41 PM	H2 valve closed
9/29/2011	1:39:41 PM	BCl3 valve closed
9/29/2011	1:39:41 PM	PH3 valve closed
9/29/2011	1:39:41 PM	SiCl4 pre valve closed
9/29/2011	1:39:41 PM	SiCl4 post valve closed
9/29/2011	1:39:41 PM	Bypass valve closed
9/29/2011	1:39:41 PM	Bubbler valve closed
9/29/2011	1:39:41 PM	Main Vac valve opened
9/29/2011	1:39:41 PM	Helium MFC set to  0.000000
9/29/2011	1:39:41 PM	H2 MFC set to  0.000000
9/29/2011	1:39:41 PM	BCl3 MFC set to  0.000000
9/29/2011	1:39:41 PM	PHl3 MFC set to  0.000000
9/29/2011	1:39:41 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:39:41 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:39:41 PM	Tube furnace set to 200
9/29/2011	1:40:11 PM	H2 valve closed
9/29/2011	1:40:11 PM	BCl3 valve closed
9/29/2011	1:40:11 PM	PH3 valve closed
9/29/2011	1:40:11 PM	SiCl4 pre valve closed
9/29/2011	1:40:11 PM	SiCl4 post valve closed
9/29/2011	1:40:11 PM	Bypass valve closed
9/29/2011	1:40:11 PM	Bubbler valve closed
9/29/2011	1:40:11 PM	Helium valve opened
9/29/2011	1:40:11 PM	Main Vac valve opened
9/29/2011	1:40:11 PM	Helium MFC set to  20.000000
9/29/2011	1:40:11 PM	H2 MFC set to  0.000000
9/29/2011	1:40:11 PM	BCl3 MFC set to  0.000000
9/29/2011	1:40:11 PM	PHl3 MFC set to  0.000000
9/29/2011	1:40:11 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:40:11 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:40:11 PM	Tube furnace set to 200
9/29/2011	1:40:41 PM	Helium valve closed
9/29/2011	1:40:41 PM	H2 valve closed
9/29/2011	1:40:41 PM	BCl3 valve closed
9/29/2011	1:40:41 PM	PH3 valve closed
9/29/2011	1:40:41 PM	SiCl4 pre valve closed
9/29/2011	1:40:41 PM	SiCl4 post valve closed
9/29/2011	1:40:41 PM	Bypass valve closed
9/29/2011	1:40:41 PM	Bubbler valve closed
9/29/2011	1:40:41 PM	Main Vac valve opened
9/29/2011	1:40:41 PM	Helium MFC set to  0.000000
9/29/2011	1:40:41 PM	H2 MFC set to  0.000000
9/29/2011	1:40:41 PM	BCl3 MFC set to  0.000000
9/29/2011	1:40:41 PM	PHl3 MFC set to  0.000000
9/29/2011	1:40:41 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:40:41 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:40:42 PM	Tube furnace set to 200
9/29/2011	1:41:12 PM	H2 valve closed
9/29/2011	1:41:12 PM	BCl3 valve closed
9/29/2011	1:41:12 PM	PH3 valve closed
9/29/2011	1:41:12 PM	SiCl4 pre valve closed
9/29/2011	1:41:12 PM	SiCl4 post valve closed
9/29/2011	1:41:12 PM	Bypass valve closed
9/29/2011	1:41:12 PM	Bubbler valve closed
9/29/2011	1:41:12 PM	Helium valve opened
9/29/2011	1:41:12 PM	Main Vac valve opened
9/29/2011	1:41:12 PM	Helium MFC set to  20.000000
9/29/2011	1:41:12 PM	H2 MFC set to  0.000000
9/29/2011	1:41:12 PM	BCl3 MFC set to  0.000000
9/29/2011	1:41:12 PM	PHl3 MFC set to  0.000000
9/29/2011	1:41:12 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:41:12 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:41:12 PM	Tube furnace set to 200
9/29/2011	1:41:42 PM	Helium valve closed
9/29/2011	1:41:42 PM	H2 valve closed
9/29/2011	1:41:42 PM	BCl3 valve closed
9/29/2011	1:41:42 PM	PH3 valve closed
9/29/2011	1:41:42 PM	SiCl4 pre valve closed
9/29/2011	1:41:42 PM	SiCl4 post valve closed
9/29/2011	1:41:42 PM	Bypass valve closed
9/29/2011	1:41:42 PM	Bubbler valve closed
9/29/2011	1:41:42 PM	Main Vac valve opened
9/29/2011	1:41:42 PM	Helium MFC set to  0.000000
9/29/2011	1:41:42 PM	H2 MFC set to  0.000000
9/29/2011	1:41:42 PM	BCl3 MFC set to  0.000000
9/29/2011	1:41:42 PM	PHl3 MFC set to  0.000000
9/29/2011	1:41:42 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:41:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:41:42 PM	Tube furnace set to 200
9/29/2011	1:42:12 PM	H2 valve closed
9/29/2011	1:42:12 PM	BCl3 valve closed
9/29/2011	1:42:12 PM	PH3 valve closed
9/29/2011	1:42:12 PM	SiCl4 pre valve closed
9/29/2011	1:42:12 PM	SiCl4 post valve closed
9/29/2011	1:42:12 PM	Bypass valve closed
9/29/2011	1:42:12 PM	Bubbler valve closed
9/29/2011	1:42:12 PM	Helium valve opened
9/29/2011	1:42:12 PM	Main Vac valve opened
9/29/2011	1:42:12 PM	Helium MFC set to  20.000000
9/29/2011	1:42:12 PM	H2 MFC set to  0.000000
9/29/2011	1:42:12 PM	BCl3 MFC set to  0.000000
9/29/2011	1:42:12 PM	PHl3 MFC set to  0.000000
9/29/2011	1:42:12 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:42:12 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:42:12 PM	Tube furnace set to 200
9/29/2011	1:42:42 PM	Helium valve closed
9/29/2011	1:42:42 PM	H2 valve closed
9/29/2011	1:42:42 PM	BCl3 valve closed
9/29/2011	1:42:42 PM	PH3 valve closed
9/29/2011	1:42:42 PM	SiCl4 pre valve closed
9/29/2011	1:42:42 PM	SiCl4 post valve closed
9/29/2011	1:42:42 PM	Bypass valve closed
9/29/2011	1:42:42 PM	Bubbler valve closed
9/29/2011	1:42:42 PM	Main Vac valve opened
9/29/2011	1:42:42 PM	Helium MFC set to  0.000000
9/29/2011	1:42:42 PM	H2 MFC set to  0.000000
9/29/2011	1:42:42 PM	BCl3 MFC set to  0.000000
9/29/2011	1:42:42 PM	PHl3 MFC set to  0.000000
9/29/2011	1:42:42 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:42:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:42:42 PM	Tube furnace set to 200
9/29/2011	1:43:12 PM	H2 valve closed
9/29/2011	1:43:12 PM	BCl3 valve closed
9/29/2011	1:43:12 PM	PH3 valve closed
9/29/2011	1:43:12 PM	SiCl4 pre valve closed
9/29/2011	1:43:12 PM	SiCl4 post valve closed
9/29/2011	1:43:12 PM	Bypass valve closed
9/29/2011	1:43:12 PM	Bubbler valve closed
9/29/2011	1:43:12 PM	Helium valve opened
9/29/2011	1:43:12 PM	Main Vac valve opened
9/29/2011	1:43:12 PM	Helium MFC set to  20.000000
9/29/2011	1:43:12 PM	H2 MFC set to  0.000000
9/29/2011	1:43:12 PM	BCl3 MFC set to  0.000000
9/29/2011	1:43:12 PM	PHl3 MFC set to  0.000000
9/29/2011	1:43:12 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:43:12 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:43:13 PM	Tube furnace set to 200
9/29/2011	1:43:43 PM	Helium valve closed
9/29/2011	1:43:43 PM	H2 valve closed
9/29/2011	1:43:43 PM	BCl3 valve closed
9/29/2011	1:43:43 PM	PH3 valve closed
9/29/2011	1:43:43 PM	SiCl4 pre valve closed
9/29/2011	1:43:43 PM	SiCl4 post valve closed
9/29/2011	1:43:43 PM	Bypass valve closed
9/29/2011	1:43:43 PM	Bubbler valve closed
9/29/2011	1:43:43 PM	Main Vac valve opened
9/29/2011	1:43:43 PM	Helium MFC set to  0.000000
9/29/2011	1:43:43 PM	H2 MFC set to  0.000000
9/29/2011	1:43:43 PM	BCl3 MFC set to  0.000000
9/29/2011	1:43:43 PM	PHl3 MFC set to  0.000000
9/29/2011	1:43:43 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:43:43 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:43:43 PM	Tube furnace set to 200
9/29/2011	1:44:13 PM	H2 valve closed
9/29/2011	1:44:13 PM	BCl3 valve closed
9/29/2011	1:44:13 PM	PH3 valve closed
9/29/2011	1:44:13 PM	SiCl4 pre valve closed
9/29/2011	1:44:13 PM	SiCl4 post valve closed
9/29/2011	1:44:13 PM	Bypass valve closed
9/29/2011	1:44:13 PM	Bubbler valve closed
9/29/2011	1:44:13 PM	Helium valve opened
9/29/2011	1:44:13 PM	Main Vac valve opened
9/29/2011	1:44:13 PM	Helium MFC set to  20.000000
9/29/2011	1:44:13 PM	H2 MFC set to  0.000000
9/29/2011	1:44:13 PM	BCl3 MFC set to  0.000000
9/29/2011	1:44:13 PM	PHl3 MFC set to  0.000000
9/29/2011	1:44:13 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:44:13 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:44:13 PM	Tube furnace set to 200
9/29/2011	1:44:43 PM	Helium valve closed
9/29/2011	1:44:43 PM	H2 valve closed
9/29/2011	1:44:43 PM	BCl3 valve closed
9/29/2011	1:44:43 PM	PH3 valve closed
9/29/2011	1:44:43 PM	SiCl4 pre valve closed
9/29/2011	1:44:43 PM	SiCl4 post valve closed
9/29/2011	1:44:43 PM	Bypass valve closed
9/29/2011	1:44:43 PM	Bubbler valve closed
9/29/2011	1:44:43 PM	Main Vac valve opened
9/29/2011	1:44:43 PM	Helium MFC set to  0.000000
9/29/2011	1:44:43 PM	H2 MFC set to  0.000000
9/29/2011	1:44:43 PM	BCl3 MFC set to  0.000000
9/29/2011	1:44:43 PM	PHl3 MFC set to  0.000000
9/29/2011	1:44:43 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:44:43 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:44:43 PM	Tube furnace set to 200
9/29/2011	1:45:13 PM	H2 valve closed
9/29/2011	1:45:13 PM	BCl3 valve closed
9/29/2011	1:45:13 PM	PH3 valve closed
9/29/2011	1:45:13 PM	SiCl4 pre valve closed
9/29/2011	1:45:13 PM	SiCl4 post valve closed
9/29/2011	1:45:13 PM	Bypass valve closed
9/29/2011	1:45:13 PM	Bubbler valve closed
9/29/2011	1:45:13 PM	Helium valve opened
9/29/2011	1:45:13 PM	Main Vac valve opened
9/29/2011	1:45:13 PM	Helium MFC set to  20.000000
9/29/2011	1:45:13 PM	H2 MFC set to  0.000000
9/29/2011	1:45:13 PM	BCl3 MFC set to  0.000000
9/29/2011	1:45:13 PM	PHl3 MFC set to  0.000000
9/29/2011	1:45:13 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:45:13 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:45:13 PM	Tube furnace set to 200
9/29/2011	1:45:43 PM	Helium valve closed
9/29/2011	1:45:43 PM	H2 valve closed
9/29/2011	1:45:43 PM	BCl3 valve closed
9/29/2011	1:45:43 PM	PH3 valve closed
9/29/2011	1:45:43 PM	SiCl4 pre valve closed
9/29/2011	1:45:43 PM	SiCl4 post valve closed
9/29/2011	1:45:43 PM	Bypass valve closed
9/29/2011	1:45:43 PM	Bubbler valve closed
9/29/2011	1:45:43 PM	Main Vac valve opened
9/29/2011	1:45:43 PM	Helium MFC set to  0.000000
9/29/2011	1:45:43 PM	H2 MFC set to  0.000000
9/29/2011	1:45:43 PM	BCl3 MFC set to  0.000000
9/29/2011	1:45:43 PM	PHl3 MFC set to  0.000000
9/29/2011	1:45:43 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:45:43 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:45:44 PM	Tube furnace set to 200
9/29/2011	1:46:14 PM	H2 valve closed
9/29/2011	1:46:14 PM	BCl3 valve closed
9/29/2011	1:46:14 PM	PH3 valve closed
9/29/2011	1:46:14 PM	SiCl4 pre valve closed
9/29/2011	1:46:14 PM	SiCl4 post valve closed
9/29/2011	1:46:14 PM	Bypass valve closed
9/29/2011	1:46:14 PM	Bubbler valve closed
9/29/2011	1:46:14 PM	Helium valve opened
9/29/2011	1:46:14 PM	Main Vac valve opened
9/29/2011	1:46:14 PM	Helium MFC set to  20.000000
9/29/2011	1:46:14 PM	H2 MFC set to  0.000000
9/29/2011	1:46:14 PM	BCl3 MFC set to  0.000000
9/29/2011	1:46:14 PM	PHl3 MFC set to  0.000000
9/29/2011	1:46:14 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:46:14 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:46:14 PM	Tube furnace set to 200
9/29/2011	1:46:44 PM	Helium valve closed
9/29/2011	1:46:44 PM	H2 valve closed
9/29/2011	1:46:44 PM	BCl3 valve closed
9/29/2011	1:46:44 PM	PH3 valve closed
9/29/2011	1:46:44 PM	SiCl4 pre valve closed
9/29/2011	1:46:44 PM	SiCl4 post valve closed
9/29/2011	1:46:44 PM	Bypass valve closed
9/29/2011	1:46:44 PM	Bubbler valve closed
9/29/2011	1:46:44 PM	Main Vac valve opened
9/29/2011	1:46:44 PM	Helium MFC set to  0.000000
9/29/2011	1:46:44 PM	H2 MFC set to  0.000000
9/29/2011	1:46:44 PM	BCl3 MFC set to  0.000000
9/29/2011	1:46:44 PM	PHl3 MFC set to  0.000000
9/29/2011	1:46:44 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:46:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:46:44 PM	Tube furnace set to 200
9/29/2011	1:47:14 PM	H2 valve closed
9/29/2011	1:47:14 PM	BCl3 valve closed
9/29/2011	1:47:14 PM	PH3 valve closed
9/29/2011	1:47:14 PM	SiCl4 pre valve closed
9/29/2011	1:47:14 PM	SiCl4 post valve closed
9/29/2011	1:47:14 PM	Bypass valve closed
9/29/2011	1:47:14 PM	Bubbler valve closed
9/29/2011	1:47:14 PM	Helium valve opened
9/29/2011	1:47:14 PM	Main Vac valve opened
9/29/2011	1:47:14 PM	Helium MFC set to  20.000000
9/29/2011	1:47:14 PM	H2 MFC set to  0.000000
9/29/2011	1:47:14 PM	BCl3 MFC set to  0.000000
9/29/2011	1:47:14 PM	PHl3 MFC set to  0.000000
9/29/2011	1:47:14 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:47:14 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:47:14 PM	Tube furnace set to 200
9/29/2011	1:47:44 PM	Helium valve closed
9/29/2011	1:47:44 PM	H2 valve closed
9/29/2011	1:47:44 PM	BCl3 valve closed
9/29/2011	1:47:44 PM	PH3 valve closed
9/29/2011	1:47:44 PM	SiCl4 pre valve closed
9/29/2011	1:47:44 PM	SiCl4 post valve closed
9/29/2011	1:47:44 PM	Bypass valve closed
9/29/2011	1:47:44 PM	Bubbler valve closed
9/29/2011	1:47:44 PM	Main Vac valve opened
9/29/2011	1:47:44 PM	Helium MFC set to  0.000000
9/29/2011	1:47:44 PM	H2 MFC set to  0.000000
9/29/2011	1:47:44 PM	BCl3 MFC set to  0.000000
9/29/2011	1:47:44 PM	PHl3 MFC set to  0.000000
9/29/2011	1:47:44 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:47:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:47:44 PM	Tube furnace set to 200
9/29/2011	1:48:14 PM	H2 valve closed
9/29/2011	1:48:14 PM	BCl3 valve closed
9/29/2011	1:48:15 PM	PH3 valve closed
9/29/2011	1:48:15 PM	SiCl4 pre valve closed
9/29/2011	1:48:15 PM	SiCl4 post valve closed
9/29/2011	1:48:15 PM	Bypass valve closed
9/29/2011	1:48:15 PM	Bubbler valve closed
9/29/2011	1:48:15 PM	Helium valve opened
9/29/2011	1:48:15 PM	Main Vac valve opened
9/29/2011	1:48:15 PM	Helium MFC set to  20.000000
9/29/2011	1:48:15 PM	H2 MFC set to  0.000000
9/29/2011	1:48:15 PM	BCl3 MFC set to  0.000000
9/29/2011	1:48:15 PM	PHl3 MFC set to  0.000000
9/29/2011	1:48:15 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:48:15 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:48:15 PM	Tube furnace set to 200
9/29/2011	1:48:45 PM	Helium valve closed
9/29/2011	1:48:45 PM	H2 valve closed
9/29/2011	1:48:45 PM	BCl3 valve closed
9/29/2011	1:48:45 PM	PH3 valve closed
9/29/2011	1:48:45 PM	SiCl4 pre valve closed
9/29/2011	1:48:45 PM	SiCl4 post valve closed
9/29/2011	1:48:45 PM	Bypass valve closed
9/29/2011	1:48:45 PM	Bubbler valve closed
9/29/2011	1:48:45 PM	Main Vac valve opened
9/29/2011	1:48:45 PM	Helium MFC set to  0.000000
9/29/2011	1:48:45 PM	H2 MFC set to  0.000000
9/29/2011	1:48:45 PM	BCl3 MFC set to  0.000000
9/29/2011	1:48:45 PM	PHl3 MFC set to  0.000000
9/29/2011	1:48:45 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:48:45 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:48:45 PM	Tube furnace set to 200
9/29/2011	1:48:46 PM	Run finished at 1:48 PM
9/29/2011	1:50:09 PM	Main Vac valve closed
9/29/2011	1:50:19 PM	Main Vac valve opened
9/29/2011	1:51:33 PM	Tube furnace set to 0
9/29/2011	1:51:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	1:51:35 PM	Recipe started at 1:51 PM
9/29/2011	1:51:35 PM	Helium valve closed
9/29/2011	1:51:35 PM	H2 valve closed
9/29/2011	1:51:35 PM	BCl3 valve closed
9/29/2011	1:51:35 PM	PH3 valve closed
9/29/2011	1:51:35 PM	SiCl4 pre valve closed
9/29/2011	1:51:35 PM	SiCl4 post valve closed
9/29/2011	1:51:35 PM	Main Vac valve closed
9/29/2011	1:51:35 PM	Bypass valve closed
9/29/2011	1:51:35 PM	Bubbler valve closed
9/29/2011	1:51:35 PM	Helium MFC set to  0.000000
9/29/2011	1:51:35 PM	H2 MFC set to  0.000000
9/29/2011	1:51:35 PM	BCl3 MFC set to  0.000000
9/29/2011	1:51:35 PM	PHl3 MFC set to  0.000000
9/29/2011	1:51:35 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:51:35 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:51:36 PM	Tube furnace set to 0
9/29/2011	1:51:39 PM	H2 valve closed
9/29/2011	1:51:39 PM	BCl3 valve closed
9/29/2011	1:51:39 PM	PH3 valve closed
9/29/2011	1:51:39 PM	SiCl4 pre valve closed
9/29/2011	1:51:39 PM	SiCl4 post valve closed
9/29/2011	1:51:39 PM	Main Vac valve closed
9/29/2011	1:51:39 PM	Bypass valve closed
9/29/2011	1:51:39 PM	Bubbler valve closed
9/29/2011	1:51:39 PM	Helium valve opened
9/29/2011	1:51:39 PM	Helium MFC set to  500.000000
9/29/2011	1:51:39 PM	H2 MFC set to  0.000000
9/29/2011	1:51:39 PM	BCl3 MFC set to  0.000000
9/29/2011	1:51:39 PM	PHl3 MFC set to  0.000000
9/29/2011	1:51:39 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:51:39 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:51:39 PM	Tube furnace set to 0
9/29/2011	1:52:40 PM	Helium valve closed
9/29/2011	1:52:40 PM	H2 valve closed
9/29/2011	1:52:40 PM	BCl3 valve closed
9/29/2011	1:52:40 PM	PH3 valve closed
9/29/2011	1:52:40 PM	SiCl4 pre valve closed
9/29/2011	1:52:40 PM	SiCl4 post valve closed
9/29/2011	1:52:40 PM	Main Vac valve closed
9/29/2011	1:52:40 PM	Bypass valve closed
9/29/2011	1:52:40 PM	Bubbler valve closed
9/29/2011	1:52:40 PM	Helium MFC set to  0.000000
9/29/2011	1:52:40 PM	H2 MFC set to  0.000000
9/29/2011	1:52:40 PM	BCl3 MFC set to  0.000000
9/29/2011	1:52:40 PM	PHl3 MFC set to  0.000000
9/29/2011	1:52:40 PM	SiCl4 MFC set to  0.000000
9/29/2011	1:52:40 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	1:52:40 PM	Tube furnace set to 0
9/29/2011	1:52:41 PM	Run finished at 1:52 PM
9/29/2011	1:52:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	2:05:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	2:05:54 PM	Recipe started at 2:05 PM
9/29/2011	2:05:54 PM	Helium valve closed
9/29/2011	2:05:54 PM	H2 valve closed
9/29/2011	2:05:54 PM	BCl3 valve closed
9/29/2011	2:05:54 PM	PH3 valve closed
9/29/2011	2:05:54 PM	SiCl4 pre valve closed
9/29/2011	2:05:54 PM	SiCl4 post valve closed
9/29/2011	2:05:54 PM	Main Vac valve closed
9/29/2011	2:05:54 PM	Bubbler valve closed
9/29/2011	2:05:54 PM	Bypass valve opened
9/29/2011	2:05:54 PM	Helium MFC set to  0.000000
9/29/2011	2:05:54 PM	H2 MFC set to  0.000000
9/29/2011	2:05:54 PM	BCl3 MFC set to  0.000000
9/29/2011	2:05:54 PM	PHl3 MFC set to  0.000000
9/29/2011	2:05:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:05:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:05:54 PM	Tube furnace set to 0
9/29/2011	2:07:07 PM	Helium valve closed
9/29/2011	2:07:07 PM	H2 valve closed
9/29/2011	2:07:07 PM	BCl3 valve closed
9/29/2011	2:07:07 PM	PH3 valve closed
9/29/2011	2:07:07 PM	SiCl4 pre valve closed
9/29/2011	2:07:07 PM	SiCl4 post valve closed
9/29/2011	2:07:07 PM	Main Vac valve closed
9/29/2011	2:07:07 PM	Bubbler valve closed
9/29/2011	2:07:07 PM	Bypass valve opened
9/29/2011	2:07:07 PM	Helium MFC set to  0.000000
9/29/2011	2:07:07 PM	H2 MFC set to  0.000000
9/29/2011	2:07:07 PM	BCl3 MFC set to  0.000000
9/29/2011	2:07:07 PM	PHl3 MFC set to  0.000000
9/29/2011	2:07:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:07:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:07:07 PM	Tube furnace set to 0
9/29/2011	2:08:07 PM	Helium valve closed
9/29/2011	2:08:07 PM	H2 valve closed
9/29/2011	2:08:07 PM	BCl3 valve closed
9/29/2011	2:08:07 PM	PH3 valve closed
9/29/2011	2:08:07 PM	SiCl4 pre valve closed
9/29/2011	2:08:07 PM	SiCl4 post valve closed
9/29/2011	2:08:07 PM	Bypass valve closed
9/29/2011	2:08:07 PM	Bubbler valve closed
9/29/2011	2:08:07 PM	Main Vac valve opened
9/29/2011	2:08:07 PM	Helium MFC set to  0.000000
9/29/2011	2:08:07 PM	H2 MFC set to  0.000000
9/29/2011	2:08:07 PM	BCl3 MFC set to  0.000000
9/29/2011	2:08:07 PM	PHl3 MFC set to  0.000000
9/29/2011	2:08:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:08:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:08:08 PM	Tube furnace set to 0
9/29/2011	2:08:09 PM	Run finished at 2:08 PM
9/29/2011	2:08:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	2:09:34 PM	Tube furnace set to 150
9/29/2011	2:43:06 PM	Recipe started at 2:43 PM
9/29/2011	2:43:06 PM	Helium valve closed
9/29/2011	2:43:06 PM	H2 valve closed
9/29/2011	2:43:06 PM	BCl3 valve closed
9/29/2011	2:43:06 PM	PH3 valve closed
9/29/2011	2:43:06 PM	SiCl4 pre valve closed
9/29/2011	2:43:06 PM	SiCl4 post valve closed
9/29/2011	2:43:06 PM	Bypass valve closed
9/29/2011	2:43:06 PM	Bubbler valve closed
9/29/2011	2:43:06 PM	Main Vac valve opened
9/29/2011	2:43:06 PM	Helium MFC set to  0.000000
9/29/2011	2:43:06 PM	H2 MFC set to  0.000000
9/29/2011	2:43:06 PM	BCl3 MFC set to  0.000000
9/29/2011	2:43:06 PM	PHl3 MFC set to  0.000000
9/29/2011	2:43:06 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:43:06 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:43:06 PM	Tube furnace set to 200
9/29/2011	2:43:36 PM	H2 valve closed
9/29/2011	2:43:36 PM	BCl3 valve closed
9/29/2011	2:43:36 PM	PH3 valve closed
9/29/2011	2:43:36 PM	SiCl4 pre valve closed
9/29/2011	2:43:36 PM	SiCl4 post valve closed
9/29/2011	2:43:36 PM	Bypass valve closed
9/29/2011	2:43:36 PM	Bubbler valve closed
9/29/2011	2:43:36 PM	Helium valve opened
9/29/2011	2:43:36 PM	Main Vac valve opened
9/29/2011	2:43:36 PM	Helium MFC set to  20.000000
9/29/2011	2:43:36 PM	H2 MFC set to  0.000000
9/29/2011	2:43:36 PM	BCl3 MFC set to  0.000000
9/29/2011	2:43:36 PM	PHl3 MFC set to  0.000000
9/29/2011	2:43:36 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:43:36 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:43:36 PM	Tube furnace set to 200
9/29/2011	2:44:06 PM	Helium valve closed
9/29/2011	2:44:06 PM	H2 valve closed
9/29/2011	2:44:06 PM	BCl3 valve closed
9/29/2011	2:44:06 PM	PH3 valve closed
9/29/2011	2:44:06 PM	SiCl4 pre valve closed
9/29/2011	2:44:06 PM	SiCl4 post valve closed
9/29/2011	2:44:06 PM	Bypass valve closed
9/29/2011	2:44:06 PM	Bubbler valve closed
9/29/2011	2:44:06 PM	Main Vac valve opened
9/29/2011	2:44:06 PM	Helium MFC set to  0.000000
9/29/2011	2:44:06 PM	H2 MFC set to  0.000000
9/29/2011	2:44:06 PM	BCl3 MFC set to  0.000000
9/29/2011	2:44:06 PM	PHl3 MFC set to  0.000000
9/29/2011	2:44:06 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:44:06 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:44:06 PM	Tube furnace set to 200
9/29/2011	2:44:36 PM	H2 valve closed
9/29/2011	2:44:36 PM	BCl3 valve closed
9/29/2011	2:44:36 PM	PH3 valve closed
9/29/2011	2:44:36 PM	SiCl4 pre valve closed
9/29/2011	2:44:36 PM	SiCl4 post valve closed
9/29/2011	2:44:36 PM	Bypass valve closed
9/29/2011	2:44:36 PM	Bubbler valve closed
9/29/2011	2:44:36 PM	Helium valve opened
9/29/2011	2:44:36 PM	Main Vac valve opened
9/29/2011	2:44:36 PM	Helium MFC set to  20.000000
9/29/2011	2:44:36 PM	H2 MFC set to  0.000000
9/29/2011	2:44:36 PM	BCl3 MFC set to  0.000000
9/29/2011	2:44:36 PM	PHl3 MFC set to  0.000000
9/29/2011	2:44:36 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:44:36 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:44:36 PM	Tube furnace set to 200
9/29/2011	2:45:06 PM	Helium valve closed
9/29/2011	2:45:06 PM	H2 valve closed
9/29/2011	2:45:06 PM	BCl3 valve closed
9/29/2011	2:45:06 PM	PH3 valve closed
9/29/2011	2:45:06 PM	SiCl4 pre valve closed
9/29/2011	2:45:06 PM	SiCl4 post valve closed
9/29/2011	2:45:06 PM	Bypass valve closed
9/29/2011	2:45:06 PM	Bubbler valve closed
9/29/2011	2:45:06 PM	Main Vac valve opened
9/29/2011	2:45:06 PM	Helium MFC set to  0.000000
9/29/2011	2:45:07 PM	H2 MFC set to  0.000000
9/29/2011	2:45:07 PM	BCl3 MFC set to  0.000000
9/29/2011	2:45:07 PM	PHl3 MFC set to  0.000000
9/29/2011	2:45:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:45:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:45:07 PM	Tube furnace set to 200
9/29/2011	2:45:37 PM	H2 valve closed
9/29/2011	2:45:37 PM	BCl3 valve closed
9/29/2011	2:45:37 PM	PH3 valve closed
9/29/2011	2:45:37 PM	SiCl4 pre valve closed
9/29/2011	2:45:37 PM	SiCl4 post valve closed
9/29/2011	2:45:37 PM	Bypass valve closed
9/29/2011	2:45:37 PM	Bubbler valve closed
9/29/2011	2:45:37 PM	Helium valve opened
9/29/2011	2:45:37 PM	Main Vac valve opened
9/29/2011	2:45:37 PM	Helium MFC set to  20.000000
9/29/2011	2:45:37 PM	H2 MFC set to  0.000000
9/29/2011	2:45:37 PM	BCl3 MFC set to  0.000000
9/29/2011	2:45:37 PM	PHl3 MFC set to  0.000000
9/29/2011	2:45:37 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:45:37 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:45:37 PM	Tube furnace set to 200
9/29/2011	2:46:07 PM	Helium valve closed
9/29/2011	2:46:07 PM	H2 valve closed
9/29/2011	2:46:07 PM	BCl3 valve closed
9/29/2011	2:46:07 PM	PH3 valve closed
9/29/2011	2:46:07 PM	SiCl4 pre valve closed
9/29/2011	2:46:07 PM	SiCl4 post valve closed
9/29/2011	2:46:07 PM	Bypass valve closed
9/29/2011	2:46:07 PM	Bubbler valve closed
9/29/2011	2:46:07 PM	Main Vac valve opened
9/29/2011	2:46:07 PM	Helium MFC set to  0.000000
9/29/2011	2:46:07 PM	H2 MFC set to  0.000000
9/29/2011	2:46:07 PM	BCl3 MFC set to  0.000000
9/29/2011	2:46:07 PM	PHl3 MFC set to  0.000000
9/29/2011	2:46:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:46:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:46:07 PM	Tube furnace set to 200
9/29/2011	2:46:37 PM	H2 valve closed
9/29/2011	2:46:37 PM	BCl3 valve closed
9/29/2011	2:46:37 PM	PH3 valve closed
9/29/2011	2:46:37 PM	SiCl4 pre valve closed
9/29/2011	2:46:37 PM	SiCl4 post valve closed
9/29/2011	2:46:37 PM	Bypass valve closed
9/29/2011	2:46:37 PM	Bubbler valve closed
9/29/2011	2:46:37 PM	Helium valve opened
9/29/2011	2:46:37 PM	Main Vac valve opened
9/29/2011	2:46:37 PM	Helium MFC set to  20.000000
9/29/2011	2:46:37 PM	H2 MFC set to  0.000000
9/29/2011	2:46:37 PM	BCl3 MFC set to  0.000000
9/29/2011	2:46:37 PM	PHl3 MFC set to  0.000000
9/29/2011	2:46:37 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:46:37 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:46:37 PM	Tube furnace set to 200
9/29/2011	2:47:07 PM	Helium valve closed
9/29/2011	2:47:07 PM	H2 valve closed
9/29/2011	2:47:07 PM	BCl3 valve closed
9/29/2011	2:47:07 PM	PH3 valve closed
9/29/2011	2:47:07 PM	SiCl4 pre valve closed
9/29/2011	2:47:07 PM	SiCl4 post valve closed
9/29/2011	2:47:07 PM	Bypass valve closed
9/29/2011	2:47:07 PM	Bubbler valve closed
9/29/2011	2:47:07 PM	Main Vac valve opened
9/29/2011	2:47:07 PM	Helium MFC set to  0.000000
9/29/2011	2:47:07 PM	H2 MFC set to  0.000000
9/29/2011	2:47:07 PM	BCl3 MFC set to  0.000000
9/29/2011	2:47:07 PM	PHl3 MFC set to  0.000000
9/29/2011	2:47:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:47:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:47:07 PM	Tube furnace set to 200
9/29/2011	2:47:38 PM	H2 valve closed
9/29/2011	2:47:38 PM	BCl3 valve closed
9/29/2011	2:47:38 PM	PH3 valve closed
9/29/2011	2:47:38 PM	SiCl4 pre valve closed
9/29/2011	2:47:38 PM	SiCl4 post valve closed
9/29/2011	2:47:38 PM	Bypass valve closed
9/29/2011	2:47:38 PM	Bubbler valve closed
9/29/2011	2:47:38 PM	Helium valve opened
9/29/2011	2:47:38 PM	Main Vac valve opened
9/29/2011	2:47:38 PM	Helium MFC set to  20.000000
9/29/2011	2:47:38 PM	H2 MFC set to  0.000000
9/29/2011	2:47:38 PM	BCl3 MFC set to  0.000000
9/29/2011	2:47:38 PM	PHl3 MFC set to  0.000000
9/29/2011	2:47:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:47:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:47:38 PM	Tube furnace set to 200
9/29/2011	2:48:08 PM	Helium valve closed
9/29/2011	2:48:08 PM	H2 valve closed
9/29/2011	2:48:08 PM	BCl3 valve closed
9/29/2011	2:48:08 PM	PH3 valve closed
9/29/2011	2:48:08 PM	SiCl4 pre valve closed
9/29/2011	2:48:08 PM	SiCl4 post valve closed
9/29/2011	2:48:08 PM	Bypass valve closed
9/29/2011	2:48:08 PM	Bubbler valve closed
9/29/2011	2:48:08 PM	Main Vac valve opened
9/29/2011	2:48:08 PM	Helium MFC set to  0.000000
9/29/2011	2:48:08 PM	H2 MFC set to  0.000000
9/29/2011	2:48:08 PM	BCl3 MFC set to  0.000000
9/29/2011	2:48:08 PM	PHl3 MFC set to  0.000000
9/29/2011	2:48:08 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:48:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:48:08 PM	Tube furnace set to 200
9/29/2011	2:48:38 PM	H2 valve closed
9/29/2011	2:48:38 PM	BCl3 valve closed
9/29/2011	2:48:38 PM	PH3 valve closed
9/29/2011	2:48:38 PM	SiCl4 pre valve closed
9/29/2011	2:48:38 PM	SiCl4 post valve closed
9/29/2011	2:48:38 PM	Bypass valve closed
9/29/2011	2:48:38 PM	Bubbler valve closed
9/29/2011	2:48:38 PM	Helium valve opened
9/29/2011	2:48:38 PM	Main Vac valve opened
9/29/2011	2:48:38 PM	Helium MFC set to  20.000000
9/29/2011	2:48:38 PM	H2 MFC set to  0.000000
9/29/2011	2:48:38 PM	BCl3 MFC set to  0.000000
9/29/2011	2:48:38 PM	PHl3 MFC set to  0.000000
9/29/2011	2:48:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:48:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:48:38 PM	Tube furnace set to 200
9/29/2011	2:49:08 PM	Helium valve closed
9/29/2011	2:49:08 PM	H2 valve closed
9/29/2011	2:49:08 PM	BCl3 valve closed
9/29/2011	2:49:08 PM	PH3 valve closed
9/29/2011	2:49:08 PM	SiCl4 pre valve closed
9/29/2011	2:49:08 PM	SiCl4 post valve closed
9/29/2011	2:49:08 PM	Bypass valve closed
9/29/2011	2:49:08 PM	Bubbler valve closed
9/29/2011	2:49:08 PM	Main Vac valve opened
9/29/2011	2:49:08 PM	Helium MFC set to  0.000000
9/29/2011	2:49:08 PM	H2 MFC set to  0.000000
9/29/2011	2:49:08 PM	BCl3 MFC set to  0.000000
9/29/2011	2:49:08 PM	PHl3 MFC set to  0.000000
9/29/2011	2:49:08 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:49:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:49:08 PM	Tube furnace set to 200
9/29/2011	2:49:38 PM	H2 valve closed
9/29/2011	2:49:38 PM	BCl3 valve closed
9/29/2011	2:49:38 PM	PH3 valve closed
9/29/2011	2:49:38 PM	SiCl4 pre valve closed
9/29/2011	2:49:38 PM	SiCl4 post valve closed
9/29/2011	2:49:38 PM	Bypass valve closed
9/29/2011	2:49:38 PM	Bubbler valve closed
9/29/2011	2:49:38 PM	Helium valve opened
9/29/2011	2:49:38 PM	Main Vac valve opened
9/29/2011	2:49:38 PM	Helium MFC set to  20.000000
9/29/2011	2:49:38 PM	H2 MFC set to  0.000000
9/29/2011	2:49:38 PM	BCl3 MFC set to  0.000000
9/29/2011	2:49:38 PM	PHl3 MFC set to  0.000000
9/29/2011	2:49:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:49:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:49:39 PM	Tube furnace set to 200
9/29/2011	2:50:09 PM	Helium valve closed
9/29/2011	2:50:09 PM	H2 valve closed
9/29/2011	2:50:09 PM	BCl3 valve closed
9/29/2011	2:50:09 PM	PH3 valve closed
9/29/2011	2:50:09 PM	SiCl4 pre valve closed
9/29/2011	2:50:09 PM	SiCl4 post valve closed
9/29/2011	2:50:09 PM	Bypass valve closed
9/29/2011	2:50:09 PM	Bubbler valve closed
9/29/2011	2:50:09 PM	Main Vac valve opened
9/29/2011	2:50:09 PM	Helium MFC set to  0.000000
9/29/2011	2:50:09 PM	H2 MFC set to  0.000000
9/29/2011	2:50:09 PM	BCl3 MFC set to  0.000000
9/29/2011	2:50:09 PM	PHl3 MFC set to  0.000000
9/29/2011	2:50:09 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:50:09 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:50:09 PM	Tube furnace set to 200
9/29/2011	2:50:39 PM	H2 valve closed
9/29/2011	2:50:39 PM	BCl3 valve closed
9/29/2011	2:50:39 PM	PH3 valve closed
9/29/2011	2:50:39 PM	SiCl4 pre valve closed
9/29/2011	2:50:39 PM	SiCl4 post valve closed
9/29/2011	2:50:39 PM	Bypass valve closed
9/29/2011	2:50:39 PM	Bubbler valve closed
9/29/2011	2:50:39 PM	Helium valve opened
9/29/2011	2:50:39 PM	Main Vac valve opened
9/29/2011	2:50:39 PM	Helium MFC set to  20.000000
9/29/2011	2:50:39 PM	H2 MFC set to  0.000000
9/29/2011	2:50:39 PM	BCl3 MFC set to  0.000000
9/29/2011	2:50:39 PM	PHl3 MFC set to  0.000000
9/29/2011	2:50:39 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:50:39 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:50:39 PM	Tube furnace set to 200
9/29/2011	2:51:09 PM	Helium valve closed
9/29/2011	2:51:09 PM	H2 valve closed
9/29/2011	2:51:09 PM	BCl3 valve closed
9/29/2011	2:51:09 PM	PH3 valve closed
9/29/2011	2:51:09 PM	SiCl4 pre valve closed
9/29/2011	2:51:09 PM	SiCl4 post valve closed
9/29/2011	2:51:09 PM	Bypass valve closed
9/29/2011	2:51:09 PM	Bubbler valve closed
9/29/2011	2:51:09 PM	Main Vac valve opened
9/29/2011	2:51:09 PM	Helium MFC set to  0.000000
9/29/2011	2:51:09 PM	H2 MFC set to  0.000000
9/29/2011	2:51:09 PM	BCl3 MFC set to  0.000000
9/29/2011	2:51:09 PM	PHl3 MFC set to  0.000000
9/29/2011	2:51:09 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:51:09 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:51:09 PM	Tube furnace set to 200
9/29/2011	2:51:39 PM	H2 valve closed
9/29/2011	2:51:39 PM	BCl3 valve closed
9/29/2011	2:51:39 PM	PH3 valve closed
9/29/2011	2:51:39 PM	SiCl4 pre valve closed
9/29/2011	2:51:39 PM	SiCl4 post valve closed
9/29/2011	2:51:39 PM	Bypass valve closed
9/29/2011	2:51:39 PM	Bubbler valve closed
9/29/2011	2:51:39 PM	Helium valve opened
9/29/2011	2:51:39 PM	Main Vac valve opened
9/29/2011	2:51:39 PM	Helium MFC set to  20.000000
9/29/2011	2:51:39 PM	H2 MFC set to  0.000000
9/29/2011	2:51:39 PM	BCl3 MFC set to  0.000000
9/29/2011	2:51:39 PM	PHl3 MFC set to  0.000000
9/29/2011	2:51:39 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:51:39 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:51:39 PM	Tube furnace set to 200
9/29/2011	2:52:09 PM	Helium valve closed
9/29/2011	2:52:09 PM	H2 valve closed
9/29/2011	2:52:09 PM	BCl3 valve closed
9/29/2011	2:52:09 PM	PH3 valve closed
9/29/2011	2:52:09 PM	SiCl4 pre valve closed
9/29/2011	2:52:09 PM	SiCl4 post valve closed
9/29/2011	2:52:09 PM	Bypass valve closed
9/29/2011	2:52:09 PM	Bubbler valve closed
9/29/2011	2:52:09 PM	Main Vac valve opened
9/29/2011	2:52:09 PM	Helium MFC set to  0.000000
9/29/2011	2:52:09 PM	H2 MFC set to  0.000000
9/29/2011	2:52:09 PM	BCl3 MFC set to  0.000000
9/29/2011	2:52:09 PM	PHl3 MFC set to  0.000000
9/29/2011	2:52:09 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:52:09 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:52:10 PM	Tube furnace set to 200
9/29/2011	2:52:40 PM	H2 valve closed
9/29/2011	2:52:40 PM	BCl3 valve closed
9/29/2011	2:52:40 PM	PH3 valve closed
9/29/2011	2:52:40 PM	SiCl4 pre valve closed
9/29/2011	2:52:40 PM	SiCl4 post valve closed
9/29/2011	2:52:40 PM	Bypass valve closed
9/29/2011	2:52:40 PM	Bubbler valve closed
9/29/2011	2:52:40 PM	Helium valve opened
9/29/2011	2:52:40 PM	Main Vac valve opened
9/29/2011	2:52:40 PM	Helium MFC set to  20.000000
9/29/2011	2:52:40 PM	H2 MFC set to  0.000000
9/29/2011	2:52:40 PM	BCl3 MFC set to  0.000000
9/29/2011	2:52:40 PM	PHl3 MFC set to  0.000000
9/29/2011	2:52:40 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:52:40 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:52:40 PM	Tube furnace set to 200
9/29/2011	2:53:10 PM	Helium valve closed
9/29/2011	2:53:10 PM	H2 valve closed
9/29/2011	2:53:10 PM	BCl3 valve closed
9/29/2011	2:53:10 PM	PH3 valve closed
9/29/2011	2:53:10 PM	SiCl4 pre valve closed
9/29/2011	2:53:10 PM	SiCl4 post valve closed
9/29/2011	2:53:10 PM	Bypass valve closed
9/29/2011	2:53:10 PM	Bubbler valve closed
9/29/2011	2:53:10 PM	Main Vac valve opened
9/29/2011	2:53:10 PM	Helium MFC set to  0.000000
9/29/2011	2:53:10 PM	H2 MFC set to  0.000000
9/29/2011	2:53:10 PM	BCl3 MFC set to  0.000000
9/29/2011	2:53:10 PM	PHl3 MFC set to  0.000000
9/29/2011	2:53:10 PM	SiCl4 MFC set to  0.000000
9/29/2011	2:53:10 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	2:53:10 PM	Tube furnace set to 200
9/29/2011	2:53:11 PM	Run finished at 2:53 PM
9/29/2011	2:54:25 PM	Helium MFC set to  20.000000
9/29/2011	2:54:27 PM	Helium valve opened
9/29/2011	2:54:43 PM	Tube furnace set to 300
9/29/2011	2:55:29 PM	Helium valve closed
9/29/2011	2:56:01 PM	Main Vac valve closed
9/29/2011	2:56:11 PM	Main Vac valve opened
9/29/2011	3:18:50 PM	Main Vac valve closed
9/29/2011	3:18:58 PM	Main Vac valve opened
9/29/2011	3:19:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/29/2011	3:19:20 PM	Recipe started at 3:19 PM
9/29/2011	3:19:20 PM	Helium valve closed
9/29/2011	3:19:20 PM	H2 valve closed
9/29/2011	3:19:20 PM	BCl3 valve closed
9/29/2011	3:19:20 PM	PH3 valve closed
9/29/2011	3:19:20 PM	SiCl4 pre valve closed
9/29/2011	3:19:20 PM	SiCl4 post valve closed
9/29/2011	3:19:20 PM	Main Vac valve closed
9/29/2011	3:19:20 PM	Bubbler valve closed
9/29/2011	3:19:20 PM	Bypass valve opened
9/29/2011	3:19:20 PM	Helium MFC set to  0.000000
9/29/2011	3:19:20 PM	H2 MFC set to  0.000000
9/29/2011	3:19:20 PM	BCl3 MFC set to  0.000000
9/29/2011	3:19:20 PM	PHl3 MFC set to  0.000000
9/29/2011	3:19:20 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:19:20 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:19:20 PM	Tube furnace set to 0
9/29/2011	3:19:20 PM	Helium valve closed
9/29/2011	3:19:20 PM	H2 valve closed
9/29/2011	3:19:20 PM	BCl3 valve closed
9/29/2011	3:19:20 PM	PH3 valve closed
9/29/2011	3:19:20 PM	SiCl4 pre valve closed
9/29/2011	3:19:20 PM	SiCl4 post valve closed
9/29/2011	3:19:20 PM	Main Vac valve closed
9/29/2011	3:19:20 PM	Bubbler valve closed
9/29/2011	3:19:20 PM	Bypass valve opened
9/29/2011	3:19:20 PM	Helium MFC set to  0.000000
9/29/2011	3:19:20 PM	H2 MFC set to  0.000000
9/29/2011	3:19:20 PM	BCl3 MFC set to  0.000000
9/29/2011	3:19:20 PM	PHl3 MFC set to  0.000000
9/29/2011	3:19:20 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:19:20 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:19:20 PM	Tube furnace set to 0
9/29/2011	3:19:50 PM	Helium valve closed
9/29/2011	3:19:50 PM	H2 valve closed
9/29/2011	3:19:50 PM	BCl3 valve closed
9/29/2011	3:19:50 PM	PH3 valve closed
9/29/2011	3:19:50 PM	SiCl4 pre valve closed
9/29/2011	3:19:50 PM	SiCl4 post valve closed
9/29/2011	3:19:50 PM	Bypass valve closed
9/29/2011	3:19:50 PM	Bubbler valve closed
9/29/2011	3:19:50 PM	Main Vac valve opened
9/29/2011	3:19:50 PM	Helium MFC set to  0.000000
9/29/2011	3:19:50 PM	H2 MFC set to  0.000000
9/29/2011	3:19:50 PM	BCl3 MFC set to  0.000000
9/29/2011	3:19:50 PM	PHl3 MFC set to  0.000000
9/29/2011	3:19:50 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:19:50 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:19:51 PM	Tube furnace set to 0
9/29/2011	3:20:21 PM	H2 valve closed
9/29/2011	3:20:21 PM	BCl3 valve closed
9/29/2011	3:20:21 PM	PH3 valve closed
9/29/2011	3:20:21 PM	SiCl4 pre valve closed
9/29/2011	3:20:21 PM	SiCl4 post valve closed
9/29/2011	3:20:21 PM	Bypass valve closed
9/29/2011	3:20:21 PM	Bubbler valve closed
9/29/2011	3:20:21 PM	Helium valve opened
9/29/2011	3:20:21 PM	Main Vac valve opened
9/29/2011	3:20:21 PM	Helium MFC set to  20.000000
9/29/2011	3:20:21 PM	H2 MFC set to  0.000000
9/29/2011	3:20:21 PM	BCl3 MFC set to  0.000000
9/29/2011	3:20:21 PM	PHl3 MFC set to  0.000000
9/29/2011	3:20:21 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:20:21 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:20:21 PM	Tube furnace set to 0
9/29/2011	3:20:51 PM	Helium valve closed
9/29/2011	3:20:51 PM	H2 valve closed
9/29/2011	3:20:51 PM	BCl3 valve closed
9/29/2011	3:20:51 PM	PH3 valve closed
9/29/2011	3:20:51 PM	SiCl4 pre valve closed
9/29/2011	3:20:51 PM	SiCl4 post valve closed
9/29/2011	3:20:51 PM	Bypass valve closed
9/29/2011	3:20:51 PM	Bubbler valve closed
9/29/2011	3:20:51 PM	Main Vac valve opened
9/29/2011	3:20:51 PM	Helium MFC set to  0.000000
9/29/2011	3:20:51 PM	H2 MFC set to  0.000000
9/29/2011	3:20:51 PM	BCl3 MFC set to  0.000000
9/29/2011	3:20:51 PM	PHl3 MFC set to  0.000000
9/29/2011	3:20:51 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:20:51 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:20:51 PM	Tube furnace set to 0
9/29/2011	3:21:21 PM	H2 valve closed
9/29/2011	3:21:21 PM	BCl3 valve closed
9/29/2011	3:21:21 PM	PH3 valve closed
9/29/2011	3:21:21 PM	SiCl4 pre valve closed
9/29/2011	3:21:21 PM	SiCl4 post valve closed
9/29/2011	3:21:21 PM	Bypass valve closed
9/29/2011	3:21:21 PM	Bubbler valve closed
9/29/2011	3:21:21 PM	Helium valve opened
9/29/2011	3:21:21 PM	Main Vac valve opened
9/29/2011	3:21:21 PM	Helium MFC set to  20.000000
9/29/2011	3:21:21 PM	H2 MFC set to  0.000000
9/29/2011	3:21:21 PM	BCl3 MFC set to  0.000000
9/29/2011	3:21:21 PM	PHl3 MFC set to  0.000000
9/29/2011	3:21:21 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:21:21 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:21:21 PM	Tube furnace set to 0
9/29/2011	3:21:51 PM	Helium valve closed
9/29/2011	3:21:51 PM	H2 valve closed
9/29/2011	3:21:51 PM	BCl3 valve closed
9/29/2011	3:21:51 PM	PH3 valve closed
9/29/2011	3:21:51 PM	SiCl4 pre valve closed
9/29/2011	3:21:51 PM	SiCl4 post valve closed
9/29/2011	3:21:51 PM	Bypass valve closed
9/29/2011	3:21:51 PM	Bubbler valve closed
9/29/2011	3:21:51 PM	Main Vac valve opened
9/29/2011	3:21:51 PM	Helium MFC set to  0.000000
9/29/2011	3:21:51 PM	H2 MFC set to  0.000000
9/29/2011	3:21:51 PM	BCl3 MFC set to  0.000000
9/29/2011	3:21:51 PM	PHl3 MFC set to  0.000000
9/29/2011	3:21:51 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:21:51 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:21:51 PM	Tube furnace set to 0
9/29/2011	3:22:21 PM	H2 valve closed
9/29/2011	3:22:21 PM	BCl3 valve closed
9/29/2011	3:22:21 PM	PH3 valve closed
9/29/2011	3:22:21 PM	SiCl4 pre valve closed
9/29/2011	3:22:21 PM	SiCl4 post valve closed
9/29/2011	3:22:21 PM	Bypass valve closed
9/29/2011	3:22:21 PM	Bubbler valve closed
9/29/2011	3:22:21 PM	Helium valve opened
9/29/2011	3:22:21 PM	Main Vac valve opened
9/29/2011	3:22:21 PM	Helium MFC set to  20.000000
9/29/2011	3:22:21 PM	H2 MFC set to  0.000000
9/29/2011	3:22:21 PM	BCl3 MFC set to  0.000000
9/29/2011	3:22:21 PM	PHl3 MFC set to  0.000000
9/29/2011	3:22:21 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:22:21 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:22:22 PM	Tube furnace set to 0
9/29/2011	3:22:52 PM	Helium valve closed
9/29/2011	3:22:52 PM	H2 valve closed
9/29/2011	3:22:52 PM	BCl3 valve closed
9/29/2011	3:22:52 PM	PH3 valve closed
9/29/2011	3:22:52 PM	SiCl4 pre valve closed
9/29/2011	3:22:52 PM	SiCl4 post valve closed
9/29/2011	3:22:52 PM	Bypass valve closed
9/29/2011	3:22:52 PM	Bubbler valve closed
9/29/2011	3:22:52 PM	Main Vac valve opened
9/29/2011	3:22:52 PM	Helium MFC set to  0.000000
9/29/2011	3:22:52 PM	H2 MFC set to  0.000000
9/29/2011	3:22:52 PM	BCl3 MFC set to  0.000000
9/29/2011	3:22:52 PM	PHl3 MFC set to  0.000000
9/29/2011	3:22:52 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:22:52 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:22:52 PM	Tube furnace set to 0
9/29/2011	3:23:22 PM	H2 valve closed
9/29/2011	3:23:22 PM	BCl3 valve closed
9/29/2011	3:23:22 PM	PH3 valve closed
9/29/2011	3:23:22 PM	SiCl4 pre valve closed
9/29/2011	3:23:22 PM	SiCl4 post valve closed
9/29/2011	3:23:22 PM	Bypass valve closed
9/29/2011	3:23:22 PM	Bubbler valve closed
9/29/2011	3:23:22 PM	Helium valve opened
9/29/2011	3:23:22 PM	Main Vac valve opened
9/29/2011	3:23:22 PM	Helium MFC set to  20.000000
9/29/2011	3:23:22 PM	H2 MFC set to  0.000000
9/29/2011	3:23:22 PM	BCl3 MFC set to  0.000000
9/29/2011	3:23:22 PM	PHl3 MFC set to  0.000000
9/29/2011	3:23:22 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:23:22 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:23:22 PM	Tube furnace set to 0
9/29/2011	3:23:52 PM	Helium valve closed
9/29/2011	3:23:52 PM	H2 valve closed
9/29/2011	3:23:52 PM	BCl3 valve closed
9/29/2011	3:23:52 PM	PH3 valve closed
9/29/2011	3:23:52 PM	SiCl4 pre valve closed
9/29/2011	3:23:52 PM	SiCl4 post valve closed
9/29/2011	3:23:52 PM	Bypass valve closed
9/29/2011	3:23:52 PM	Bubbler valve closed
9/29/2011	3:23:52 PM	Main Vac valve opened
9/29/2011	3:23:52 PM	Helium MFC set to  0.000000
9/29/2011	3:23:52 PM	H2 MFC set to  0.000000
9/29/2011	3:23:52 PM	BCl3 MFC set to  0.000000
9/29/2011	3:23:52 PM	PHl3 MFC set to  0.000000
9/29/2011	3:23:52 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:23:52 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:23:52 PM	Tube furnace set to 0
9/29/2011	3:24:22 PM	H2 valve closed
9/29/2011	3:24:22 PM	BCl3 valve closed
9/29/2011	3:24:22 PM	PH3 valve closed
9/29/2011	3:24:22 PM	SiCl4 pre valve closed
9/29/2011	3:24:22 PM	SiCl4 post valve closed
9/29/2011	3:24:22 PM	Bypass valve closed
9/29/2011	3:24:22 PM	Bubbler valve closed
9/29/2011	3:24:22 PM	Helium valve opened
9/29/2011	3:24:22 PM	Main Vac valve opened
9/29/2011	3:24:22 PM	Helium MFC set to  20.000000
9/29/2011	3:24:22 PM	H2 MFC set to  0.000000
9/29/2011	3:24:22 PM	BCl3 MFC set to  0.000000
9/29/2011	3:24:22 PM	PHl3 MFC set to  0.000000
9/29/2011	3:24:22 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:24:22 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:24:23 PM	Tube furnace set to 0
9/29/2011	3:24:53 PM	Helium valve closed
9/29/2011	3:24:53 PM	H2 valve closed
9/29/2011	3:24:53 PM	BCl3 valve closed
9/29/2011	3:24:53 PM	PH3 valve closed
9/29/2011	3:24:53 PM	SiCl4 pre valve closed
9/29/2011	3:24:53 PM	SiCl4 post valve closed
9/29/2011	3:24:53 PM	Bypass valve closed
9/29/2011	3:24:53 PM	Bubbler valve closed
9/29/2011	3:24:53 PM	Main Vac valve opened
9/29/2011	3:24:53 PM	Helium MFC set to  0.000000
9/29/2011	3:24:53 PM	H2 MFC set to  0.000000
9/29/2011	3:24:53 PM	BCl3 MFC set to  0.000000
9/29/2011	3:24:53 PM	PHl3 MFC set to  0.000000
9/29/2011	3:24:53 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:24:53 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:24:53 PM	Tube furnace set to 0
9/29/2011	3:25:23 PM	H2 valve closed
9/29/2011	3:25:23 PM	BCl3 valve closed
9/29/2011	3:25:23 PM	PH3 valve closed
9/29/2011	3:25:23 PM	SiCl4 pre valve closed
9/29/2011	3:25:23 PM	SiCl4 post valve closed
9/29/2011	3:25:23 PM	Bypass valve closed
9/29/2011	3:25:23 PM	Bubbler valve closed
9/29/2011	3:25:23 PM	Helium valve opened
9/29/2011	3:25:23 PM	Main Vac valve opened
9/29/2011	3:25:23 PM	Helium MFC set to  20.000000
9/29/2011	3:25:23 PM	H2 MFC set to  0.000000
9/29/2011	3:25:23 PM	BCl3 MFC set to  0.000000
9/29/2011	3:25:23 PM	PHl3 MFC set to  0.000000
9/29/2011	3:25:23 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:25:23 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:25:23 PM	Tube furnace set to 0
9/29/2011	3:25:53 PM	Helium valve closed
9/29/2011	3:25:53 PM	H2 valve closed
9/29/2011	3:25:53 PM	BCl3 valve closed
9/29/2011	3:25:53 PM	PH3 valve closed
9/29/2011	3:25:53 PM	SiCl4 pre valve closed
9/29/2011	3:25:53 PM	SiCl4 post valve closed
9/29/2011	3:25:53 PM	Bypass valve closed
9/29/2011	3:25:53 PM	Bubbler valve closed
9/29/2011	3:25:53 PM	Main Vac valve opened
9/29/2011	3:25:53 PM	Helium MFC set to  0.000000
9/29/2011	3:25:53 PM	H2 MFC set to  0.000000
9/29/2011	3:25:53 PM	BCl3 MFC set to  0.000000
9/29/2011	3:25:53 PM	PHl3 MFC set to  0.000000
9/29/2011	3:25:53 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:25:53 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:25:53 PM	Tube furnace set to 0
9/29/2011	3:26:23 PM	H2 valve closed
9/29/2011	3:26:23 PM	BCl3 valve closed
9/29/2011	3:26:23 PM	PH3 valve closed
9/29/2011	3:26:23 PM	SiCl4 pre valve closed
9/29/2011	3:26:23 PM	SiCl4 post valve closed
9/29/2011	3:26:23 PM	Bypass valve closed
9/29/2011	3:26:23 PM	Bubbler valve closed
9/29/2011	3:26:23 PM	Helium valve opened
9/29/2011	3:26:23 PM	Main Vac valve opened
9/29/2011	3:26:23 PM	Helium MFC set to  20.000000
9/29/2011	3:26:23 PM	H2 MFC set to  0.000000
9/29/2011	3:26:23 PM	BCl3 MFC set to  0.000000
9/29/2011	3:26:23 PM	PHl3 MFC set to  0.000000
9/29/2011	3:26:23 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:26:23 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:26:23 PM	Tube furnace set to 0
9/29/2011	3:26:53 PM	Helium valve closed
9/29/2011	3:26:53 PM	H2 valve closed
9/29/2011	3:26:53 PM	BCl3 valve closed
9/29/2011	3:26:53 PM	PH3 valve closed
9/29/2011	3:26:53 PM	SiCl4 pre valve closed
9/29/2011	3:26:53 PM	SiCl4 post valve closed
9/29/2011	3:26:53 PM	Bypass valve closed
9/29/2011	3:26:53 PM	Bubbler valve closed
9/29/2011	3:26:53 PM	Main Vac valve opened
9/29/2011	3:26:53 PM	Helium MFC set to  0.000000
9/29/2011	3:26:53 PM	H2 MFC set to  0.000000
9/29/2011	3:26:53 PM	BCl3 MFC set to  0.000000
9/29/2011	3:26:53 PM	PHl3 MFC set to  0.000000
9/29/2011	3:26:53 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:26:53 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:26:54 PM	Tube furnace set to 0
9/29/2011	3:27:24 PM	H2 valve closed
9/29/2011	3:27:24 PM	BCl3 valve closed
9/29/2011	3:27:24 PM	PH3 valve closed
9/29/2011	3:27:24 PM	SiCl4 pre valve closed
9/29/2011	3:27:24 PM	SiCl4 post valve closed
9/29/2011	3:27:24 PM	Bypass valve closed
9/29/2011	3:27:24 PM	Bubbler valve closed
9/29/2011	3:27:24 PM	Helium valve opened
9/29/2011	3:27:24 PM	Main Vac valve opened
9/29/2011	3:27:24 PM	Helium MFC set to  20.000000
9/29/2011	3:27:24 PM	H2 MFC set to  0.000000
9/29/2011	3:27:24 PM	BCl3 MFC set to  0.000000
9/29/2011	3:27:24 PM	PHl3 MFC set to  0.000000
9/29/2011	3:27:24 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:27:24 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:27:24 PM	Tube furnace set to 0
9/29/2011	3:27:54 PM	Helium valve closed
9/29/2011	3:27:54 PM	H2 valve closed
9/29/2011	3:27:54 PM	BCl3 valve closed
9/29/2011	3:27:54 PM	PH3 valve closed
9/29/2011	3:27:54 PM	SiCl4 pre valve closed
9/29/2011	3:27:54 PM	SiCl4 post valve closed
9/29/2011	3:27:54 PM	Bypass valve closed
9/29/2011	3:27:54 PM	Bubbler valve closed
9/29/2011	3:27:54 PM	Main Vac valve opened
9/29/2011	3:27:54 PM	Helium MFC set to  0.000000
9/29/2011	3:27:54 PM	H2 MFC set to  0.000000
9/29/2011	3:27:54 PM	BCl3 MFC set to  0.000000
9/29/2011	3:27:54 PM	PHl3 MFC set to  0.000000
9/29/2011	3:27:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:27:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:27:54 PM	Tube furnace set to 0
9/29/2011	3:28:24 PM	H2 valve closed
9/29/2011	3:28:24 PM	BCl3 valve closed
9/29/2011	3:28:24 PM	PH3 valve closed
9/29/2011	3:28:24 PM	SiCl4 pre valve closed
9/29/2011	3:28:24 PM	SiCl4 post valve closed
9/29/2011	3:28:24 PM	Bypass valve closed
9/29/2011	3:28:24 PM	Bubbler valve closed
9/29/2011	3:28:24 PM	Helium valve opened
9/29/2011	3:28:24 PM	Main Vac valve opened
9/29/2011	3:28:24 PM	Helium MFC set to  20.000000
9/29/2011	3:28:24 PM	H2 MFC set to  0.000000
9/29/2011	3:28:24 PM	BCl3 MFC set to  0.000000
9/29/2011	3:28:24 PM	PHl3 MFC set to  0.000000
9/29/2011	3:28:24 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:28:24 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:28:24 PM	Tube furnace set to 0
9/29/2011	3:28:54 PM	Helium valve closed
9/29/2011	3:28:54 PM	H2 valve closed
9/29/2011	3:28:54 PM	BCl3 valve closed
9/29/2011	3:28:54 PM	PH3 valve closed
9/29/2011	3:28:54 PM	SiCl4 pre valve closed
9/29/2011	3:28:54 PM	SiCl4 post valve closed
9/29/2011	3:28:54 PM	Bypass valve closed
9/29/2011	3:28:54 PM	Bubbler valve closed
9/29/2011	3:28:54 PM	Main Vac valve opened
9/29/2011	3:28:54 PM	Helium MFC set to  0.000000
9/29/2011	3:28:54 PM	H2 MFC set to  0.000000
9/29/2011	3:28:54 PM	BCl3 MFC set to  0.000000
9/29/2011	3:28:54 PM	PHl3 MFC set to  0.000000
9/29/2011	3:28:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:28:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:28:54 PM	Tube furnace set to 0
9/29/2011	3:29:24 PM	H2 valve closed
9/29/2011	3:29:24 PM	BCl3 valve closed
9/29/2011	3:29:24 PM	PH3 valve closed
9/29/2011	3:29:24 PM	SiCl4 pre valve closed
9/29/2011	3:29:24 PM	SiCl4 post valve closed
9/29/2011	3:29:24 PM	Bypass valve closed
9/29/2011	3:29:24 PM	Bubbler valve closed
9/29/2011	3:29:24 PM	Helium valve opened
9/29/2011	3:29:24 PM	Main Vac valve opened
9/29/2011	3:29:24 PM	Helium MFC set to  20.000000
9/29/2011	3:29:25 PM	H2 MFC set to  0.000000
9/29/2011	3:29:25 PM	BCl3 MFC set to  0.000000
9/29/2011	3:29:25 PM	PHl3 MFC set to  0.000000
9/29/2011	3:29:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:29:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:29:25 PM	Tube furnace set to 0
9/29/2011	3:29:55 PM	Helium valve closed
9/29/2011	3:29:55 PM	H2 valve closed
9/29/2011	3:29:55 PM	BCl3 valve closed
9/29/2011	3:29:55 PM	PH3 valve closed
9/29/2011	3:29:55 PM	SiCl4 pre valve closed
9/29/2011	3:29:55 PM	SiCl4 post valve closed
9/29/2011	3:29:55 PM	Bypass valve closed
9/29/2011	3:29:55 PM	Bubbler valve closed
9/29/2011	3:29:55 PM	Main Vac valve opened
9/29/2011	3:29:55 PM	Helium MFC set to  0.000000
9/29/2011	3:29:55 PM	H2 MFC set to  0.000000
9/29/2011	3:29:55 PM	BCl3 MFC set to  0.000000
9/29/2011	3:29:55 PM	PHl3 MFC set to  0.000000
9/29/2011	3:29:55 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:29:55 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:29:55 PM	Tube furnace set to 0
9/29/2011	3:29:56 PM	Run finished at 3:29 PM
9/29/2011	3:29:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/29/2011	3:31:41 PM	Main Vac valve closed
9/29/2011	3:31:55 PM	Main Vac valve opened
9/29/2011	3:32:24 PM	Recipe started at 3:32 PM
9/29/2011	3:32:24 PM	Helium valve closed
9/29/2011	3:32:24 PM	H2 valve closed
9/29/2011	3:32:24 PM	BCl3 valve closed
9/29/2011	3:32:24 PM	PH3 valve closed
9/29/2011	3:32:24 PM	SiCl4 pre valve closed
9/29/2011	3:32:24 PM	SiCl4 post valve closed
9/29/2011	3:32:24 PM	Bypass valve closed
9/29/2011	3:32:24 PM	Bubbler valve closed
9/29/2011	3:32:24 PM	Main Vac valve opened
9/29/2011	3:32:24 PM	Helium MFC set to  0.000000
9/29/2011	3:32:24 PM	H2 MFC set to  0.000000
9/29/2011	3:32:24 PM	BCl3 MFC set to  0.000000
9/29/2011	3:32:24 PM	PHl3 MFC set to  0.000000
9/29/2011	3:32:24 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:32:24 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:32:24 PM	Tube furnace set to 200
9/29/2011	3:32:54 PM	H2 valve closed
9/29/2011	3:32:54 PM	BCl3 valve closed
9/29/2011	3:32:54 PM	PH3 valve closed
9/29/2011	3:32:54 PM	SiCl4 pre valve closed
9/29/2011	3:32:54 PM	SiCl4 post valve closed
9/29/2011	3:32:54 PM	Bypass valve closed
9/29/2011	3:32:54 PM	Bubbler valve closed
9/29/2011	3:32:54 PM	Helium valve opened
9/29/2011	3:32:54 PM	Main Vac valve opened
9/29/2011	3:32:54 PM	Helium MFC set to  20.000000
9/29/2011	3:32:54 PM	H2 MFC set to  0.000000
9/29/2011	3:32:54 PM	BCl3 MFC set to  0.000000
9/29/2011	3:32:54 PM	PHl3 MFC set to  0.000000
9/29/2011	3:32:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:32:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:32:54 PM	Tube furnace set to 200
9/29/2011	3:33:24 PM	Helium valve closed
9/29/2011	3:33:24 PM	H2 valve closed
9/29/2011	3:33:24 PM	BCl3 valve closed
9/29/2011	3:33:24 PM	PH3 valve closed
9/29/2011	3:33:24 PM	SiCl4 pre valve closed
9/29/2011	3:33:24 PM	SiCl4 post valve closed
9/29/2011	3:33:24 PM	Bypass valve closed
9/29/2011	3:33:24 PM	Bubbler valve closed
9/29/2011	3:33:24 PM	Main Vac valve opened
9/29/2011	3:33:24 PM	Helium MFC set to  0.000000
9/29/2011	3:33:24 PM	H2 MFC set to  0.000000
9/29/2011	3:33:24 PM	BCl3 MFC set to  0.000000
9/29/2011	3:33:24 PM	PHl3 MFC set to  0.000000
9/29/2011	3:33:24 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:33:24 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:33:24 PM	Tube furnace set to 200
9/29/2011	3:33:54 PM	H2 valve closed
9/29/2011	3:33:54 PM	BCl3 valve closed
9/29/2011	3:33:54 PM	PH3 valve closed
9/29/2011	3:33:54 PM	SiCl4 pre valve closed
9/29/2011	3:33:54 PM	SiCl4 post valve closed
9/29/2011	3:33:54 PM	Bypass valve closed
9/29/2011	3:33:54 PM	Bubbler valve closed
9/29/2011	3:33:54 PM	Helium valve opened
9/29/2011	3:33:54 PM	Main Vac valve opened
9/29/2011	3:33:54 PM	Helium MFC set to  20.000000
9/29/2011	3:33:54 PM	H2 MFC set to  0.000000
9/29/2011	3:33:54 PM	BCl3 MFC set to  0.000000
9/29/2011	3:33:54 PM	PHl3 MFC set to  0.000000
9/29/2011	3:33:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:33:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:33:55 PM	Tube furnace set to 200
9/29/2011	3:34:25 PM	Helium valve closed
9/29/2011	3:34:25 PM	H2 valve closed
9/29/2011	3:34:25 PM	BCl3 valve closed
9/29/2011	3:34:25 PM	PH3 valve closed
9/29/2011	3:34:25 PM	SiCl4 pre valve closed
9/29/2011	3:34:25 PM	SiCl4 post valve closed
9/29/2011	3:34:25 PM	Bypass valve closed
9/29/2011	3:34:25 PM	Bubbler valve closed
9/29/2011	3:34:25 PM	Main Vac valve opened
9/29/2011	3:34:25 PM	Helium MFC set to  0.000000
9/29/2011	3:34:25 PM	H2 MFC set to  0.000000
9/29/2011	3:34:25 PM	BCl3 MFC set to  0.000000
9/29/2011	3:34:25 PM	PHl3 MFC set to  0.000000
9/29/2011	3:34:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:34:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:34:25 PM	Tube furnace set to 200
9/29/2011	3:34:55 PM	H2 valve closed
9/29/2011	3:34:55 PM	BCl3 valve closed
9/29/2011	3:34:55 PM	PH3 valve closed
9/29/2011	3:34:55 PM	SiCl4 pre valve closed
9/29/2011	3:34:55 PM	SiCl4 post valve closed
9/29/2011	3:34:55 PM	Bypass valve closed
9/29/2011	3:34:55 PM	Bubbler valve closed
9/29/2011	3:34:55 PM	Helium valve opened
9/29/2011	3:34:55 PM	Main Vac valve opened
9/29/2011	3:34:55 PM	Helium MFC set to  20.000000
9/29/2011	3:34:55 PM	H2 MFC set to  0.000000
9/29/2011	3:34:55 PM	BCl3 MFC set to  0.000000
9/29/2011	3:34:55 PM	PHl3 MFC set to  0.000000
9/29/2011	3:34:55 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:34:55 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:34:55 PM	Tube furnace set to 200
9/29/2011	3:35:25 PM	Helium valve closed
9/29/2011	3:35:25 PM	H2 valve closed
9/29/2011	3:35:25 PM	BCl3 valve closed
9/29/2011	3:35:25 PM	PH3 valve closed
9/29/2011	3:35:25 PM	SiCl4 pre valve closed
9/29/2011	3:35:25 PM	SiCl4 post valve closed
9/29/2011	3:35:25 PM	Bypass valve closed
9/29/2011	3:35:25 PM	Bubbler valve closed
9/29/2011	3:35:25 PM	Main Vac valve opened
9/29/2011	3:35:25 PM	Helium MFC set to  0.000000
9/29/2011	3:35:25 PM	H2 MFC set to  0.000000
9/29/2011	3:35:25 PM	BCl3 MFC set to  0.000000
9/29/2011	3:35:25 PM	PHl3 MFC set to  0.000000
9/29/2011	3:35:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:35:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:35:25 PM	Tube furnace set to 200
9/29/2011	3:35:55 PM	H2 valve closed
9/29/2011	3:35:55 PM	BCl3 valve closed
9/29/2011	3:35:55 PM	PH3 valve closed
9/29/2011	3:35:55 PM	SiCl4 pre valve closed
9/29/2011	3:35:55 PM	SiCl4 post valve closed
9/29/2011	3:35:55 PM	Bypass valve closed
9/29/2011	3:35:55 PM	Bubbler valve closed
9/29/2011	3:35:55 PM	Helium valve opened
9/29/2011	3:35:55 PM	Main Vac valve opened
9/29/2011	3:35:55 PM	Helium MFC set to  20.000000
9/29/2011	3:35:55 PM	H2 MFC set to  0.000000
9/29/2011	3:35:55 PM	BCl3 MFC set to  0.000000
9/29/2011	3:35:55 PM	PHl3 MFC set to  0.000000
9/29/2011	3:35:55 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:35:55 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:35:55 PM	Tube furnace set to 200
9/29/2011	3:36:26 PM	Helium valve closed
9/29/2011	3:36:26 PM	H2 valve closed
9/29/2011	3:36:26 PM	BCl3 valve closed
9/29/2011	3:36:26 PM	PH3 valve closed
9/29/2011	3:36:26 PM	SiCl4 pre valve closed
9/29/2011	3:36:26 PM	SiCl4 post valve closed
9/29/2011	3:36:26 PM	Bypass valve closed
9/29/2011	3:36:26 PM	Bubbler valve closed
9/29/2011	3:36:26 PM	Main Vac valve opened
9/29/2011	3:36:26 PM	Helium MFC set to  0.000000
9/29/2011	3:36:26 PM	H2 MFC set to  0.000000
9/29/2011	3:36:26 PM	BCl3 MFC set to  0.000000
9/29/2011	3:36:26 PM	PHl3 MFC set to  0.000000
9/29/2011	3:36:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:36:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:36:26 PM	Tube furnace set to 200
9/29/2011	3:36:56 PM	H2 valve closed
9/29/2011	3:36:56 PM	BCl3 valve closed
9/29/2011	3:36:56 PM	PH3 valve closed
9/29/2011	3:36:56 PM	SiCl4 pre valve closed
9/29/2011	3:36:56 PM	SiCl4 post valve closed
9/29/2011	3:36:56 PM	Bypass valve closed
9/29/2011	3:36:56 PM	Bubbler valve closed
9/29/2011	3:36:56 PM	Helium valve opened
9/29/2011	3:36:56 PM	Main Vac valve opened
9/29/2011	3:36:56 PM	Helium MFC set to  20.000000
9/29/2011	3:36:56 PM	H2 MFC set to  0.000000
9/29/2011	3:36:56 PM	BCl3 MFC set to  0.000000
9/29/2011	3:36:56 PM	PHl3 MFC set to  0.000000
9/29/2011	3:36:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:36:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:36:56 PM	Tube furnace set to 200
9/29/2011	3:37:26 PM	Helium valve closed
9/29/2011	3:37:26 PM	H2 valve closed
9/29/2011	3:37:26 PM	BCl3 valve closed
9/29/2011	3:37:26 PM	PH3 valve closed
9/29/2011	3:37:26 PM	SiCl4 pre valve closed
9/29/2011	3:37:26 PM	SiCl4 post valve closed
9/29/2011	3:37:26 PM	Bypass valve closed
9/29/2011	3:37:26 PM	Bubbler valve closed
9/29/2011	3:37:26 PM	Main Vac valve opened
9/29/2011	3:37:26 PM	Helium MFC set to  0.000000
9/29/2011	3:37:26 PM	H2 MFC set to  0.000000
9/29/2011	3:37:26 PM	BCl3 MFC set to  0.000000
9/29/2011	3:37:26 PM	PHl3 MFC set to  0.000000
9/29/2011	3:37:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:37:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:37:26 PM	Tube furnace set to 200
9/29/2011	3:37:56 PM	H2 valve closed
9/29/2011	3:37:56 PM	BCl3 valve closed
9/29/2011	3:37:56 PM	PH3 valve closed
9/29/2011	3:37:56 PM	SiCl4 pre valve closed
9/29/2011	3:37:56 PM	SiCl4 post valve closed
9/29/2011	3:37:56 PM	Bypass valve closed
9/29/2011	3:37:56 PM	Bubbler valve closed
9/29/2011	3:37:56 PM	Helium valve opened
9/29/2011	3:37:56 PM	Main Vac valve opened
9/29/2011	3:37:56 PM	Helium MFC set to  20.000000
9/29/2011	3:37:56 PM	H2 MFC set to  0.000000
9/29/2011	3:37:56 PM	BCl3 MFC set to  0.000000
9/29/2011	3:37:56 PM	PHl3 MFC set to  0.000000
9/29/2011	3:37:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:37:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:37:56 PM	Tube furnace set to 200
9/29/2011	3:38:26 PM	Helium valve closed
9/29/2011	3:38:26 PM	H2 valve closed
9/29/2011	3:38:26 PM	BCl3 valve closed
9/29/2011	3:38:26 PM	PH3 valve closed
9/29/2011	3:38:26 PM	SiCl4 pre valve closed
9/29/2011	3:38:26 PM	SiCl4 post valve closed
9/29/2011	3:38:26 PM	Bypass valve closed
9/29/2011	3:38:26 PM	Bubbler valve closed
9/29/2011	3:38:26 PM	Main Vac valve opened
9/29/2011	3:38:26 PM	Helium MFC set to  0.000000
9/29/2011	3:38:26 PM	H2 MFC set to  0.000000
9/29/2011	3:38:26 PM	BCl3 MFC set to  0.000000
9/29/2011	3:38:26 PM	PHl3 MFC set to  0.000000
9/29/2011	3:38:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:38:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:38:27 PM	Tube furnace set to 200
9/29/2011	3:38:57 PM	H2 valve closed
9/29/2011	3:38:57 PM	BCl3 valve closed
9/29/2011	3:38:57 PM	PH3 valve closed
9/29/2011	3:38:57 PM	SiCl4 pre valve closed
9/29/2011	3:38:57 PM	SiCl4 post valve closed
9/29/2011	3:38:57 PM	Bypass valve closed
9/29/2011	3:38:57 PM	Bubbler valve closed
9/29/2011	3:38:57 PM	Helium valve opened
9/29/2011	3:38:57 PM	Main Vac valve opened
9/29/2011	3:38:57 PM	Helium MFC set to  20.000000
9/29/2011	3:38:57 PM	H2 MFC set to  0.000000
9/29/2011	3:38:57 PM	BCl3 MFC set to  0.000000
9/29/2011	3:38:57 PM	PHl3 MFC set to  0.000000
9/29/2011	3:38:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:38:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:38:57 PM	Tube furnace set to 200
9/29/2011	3:39:27 PM	Helium valve closed
9/29/2011	3:39:27 PM	H2 valve closed
9/29/2011	3:39:27 PM	BCl3 valve closed
9/29/2011	3:39:27 PM	PH3 valve closed
9/29/2011	3:39:27 PM	SiCl4 pre valve closed
9/29/2011	3:39:27 PM	SiCl4 post valve closed
9/29/2011	3:39:27 PM	Bypass valve closed
9/29/2011	3:39:27 PM	Bubbler valve closed
9/29/2011	3:39:27 PM	Main Vac valve opened
9/29/2011	3:39:27 PM	Helium MFC set to  0.000000
9/29/2011	3:39:27 PM	H2 MFC set to  0.000000
9/29/2011	3:39:27 PM	BCl3 MFC set to  0.000000
9/29/2011	3:39:27 PM	PHl3 MFC set to  0.000000
9/29/2011	3:39:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:39:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:39:27 PM	Tube furnace set to 200
9/29/2011	3:39:57 PM	H2 valve closed
9/29/2011	3:39:57 PM	BCl3 valve closed
9/29/2011	3:39:57 PM	PH3 valve closed
9/29/2011	3:39:57 PM	SiCl4 pre valve closed
9/29/2011	3:39:57 PM	SiCl4 post valve closed
9/29/2011	3:39:57 PM	Bypass valve closed
9/29/2011	3:39:57 PM	Bubbler valve closed
9/29/2011	3:39:57 PM	Helium valve opened
9/29/2011	3:39:57 PM	Main Vac valve opened
9/29/2011	3:39:57 PM	Helium MFC set to  20.000000
9/29/2011	3:39:57 PM	H2 MFC set to  0.000000
9/29/2011	3:39:57 PM	BCl3 MFC set to  0.000000
9/29/2011	3:39:57 PM	PHl3 MFC set to  0.000000
9/29/2011	3:39:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:39:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:39:57 PM	Tube furnace set to 200
9/29/2011	3:40:27 PM	Helium valve closed
9/29/2011	3:40:27 PM	H2 valve closed
9/29/2011	3:40:27 PM	BCl3 valve closed
9/29/2011	3:40:27 PM	PH3 valve closed
9/29/2011	3:40:27 PM	SiCl4 pre valve closed
9/29/2011	3:40:27 PM	SiCl4 post valve closed
9/29/2011	3:40:27 PM	Bypass valve closed
9/29/2011	3:40:27 PM	Bubbler valve closed
9/29/2011	3:40:27 PM	Main Vac valve opened
9/29/2011	3:40:27 PM	Helium MFC set to  0.000000
9/29/2011	3:40:27 PM	H2 MFC set to  0.000000
9/29/2011	3:40:27 PM	BCl3 MFC set to  0.000000
9/29/2011	3:40:27 PM	PHl3 MFC set to  0.000000
9/29/2011	3:40:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:40:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:40:27 PM	Tube furnace set to 200
9/29/2011	3:40:57 PM	H2 valve closed
9/29/2011	3:40:57 PM	BCl3 valve closed
9/29/2011	3:40:57 PM	PH3 valve closed
9/29/2011	3:40:57 PM	SiCl4 pre valve closed
9/29/2011	3:40:57 PM	SiCl4 post valve closed
9/29/2011	3:40:57 PM	Bypass valve closed
9/29/2011	3:40:57 PM	Bubbler valve closed
9/29/2011	3:40:57 PM	Helium valve opened
9/29/2011	3:40:57 PM	Main Vac valve opened
9/29/2011	3:40:57 PM	Helium MFC set to  20.000000
9/29/2011	3:40:57 PM	H2 MFC set to  0.000000
9/29/2011	3:40:57 PM	BCl3 MFC set to  0.000000
9/29/2011	3:40:57 PM	PHl3 MFC set to  0.000000
9/29/2011	3:40:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:40:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:40:58 PM	Tube furnace set to 200
9/29/2011	3:41:28 PM	Helium valve closed
9/29/2011	3:41:28 PM	H2 valve closed
9/29/2011	3:41:28 PM	BCl3 valve closed
9/29/2011	3:41:28 PM	PH3 valve closed
9/29/2011	3:41:28 PM	SiCl4 pre valve closed
9/29/2011	3:41:28 PM	SiCl4 post valve closed
9/29/2011	3:41:28 PM	Bypass valve closed
9/29/2011	3:41:28 PM	Bubbler valve closed
9/29/2011	3:41:28 PM	Main Vac valve opened
9/29/2011	3:41:28 PM	Helium MFC set to  0.000000
9/29/2011	3:41:28 PM	H2 MFC set to  0.000000
9/29/2011	3:41:28 PM	BCl3 MFC set to  0.000000
9/29/2011	3:41:28 PM	PHl3 MFC set to  0.000000
9/29/2011	3:41:28 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:41:28 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:41:28 PM	Tube furnace set to 200
9/29/2011	3:41:58 PM	H2 valve closed
9/29/2011	3:41:58 PM	BCl3 valve closed
9/29/2011	3:41:58 PM	PH3 valve closed
9/29/2011	3:41:58 PM	SiCl4 pre valve closed
9/29/2011	3:41:58 PM	SiCl4 post valve closed
9/29/2011	3:41:58 PM	Bypass valve closed
9/29/2011	3:41:58 PM	Bubbler valve closed
9/29/2011	3:41:58 PM	Helium valve opened
9/29/2011	3:41:58 PM	Main Vac valve opened
9/29/2011	3:41:58 PM	Helium MFC set to  20.000000
9/29/2011	3:41:58 PM	H2 MFC set to  0.000000
9/29/2011	3:41:58 PM	BCl3 MFC set to  0.000000
9/29/2011	3:41:58 PM	PHl3 MFC set to  0.000000
9/29/2011	3:41:58 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:41:58 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:41:58 PM	Tube furnace set to 200
9/29/2011	3:42:28 PM	Helium valve closed
9/29/2011	3:42:28 PM	H2 valve closed
9/29/2011	3:42:28 PM	BCl3 valve closed
9/29/2011	3:42:28 PM	PH3 valve closed
9/29/2011	3:42:28 PM	SiCl4 pre valve closed
9/29/2011	3:42:28 PM	SiCl4 post valve closed
9/29/2011	3:42:28 PM	Bypass valve closed
9/29/2011	3:42:28 PM	Bubbler valve closed
9/29/2011	3:42:28 PM	Main Vac valve opened
9/29/2011	3:42:28 PM	Helium MFC set to  0.000000
9/29/2011	3:42:28 PM	H2 MFC set to  0.000000
9/29/2011	3:42:28 PM	BCl3 MFC set to  0.000000
9/29/2011	3:42:28 PM	PHl3 MFC set to  0.000000
9/29/2011	3:42:28 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:42:28 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:42:28 PM	Tube furnace set to 200
9/29/2011	3:42:29 PM	Run finished at 3:42 PM
9/29/2011	3:44:03 PM	Main Vac valve closed
9/29/2011	3:44:17 PM	Main Vac valve opened
9/29/2011	3:46:52 PM	Recipe started at 3:46 PM
9/29/2011	3:46:52 PM	Helium valve closed
9/29/2011	3:46:52 PM	H2 valve closed
9/29/2011	3:46:52 PM	BCl3 valve closed
9/29/2011	3:46:52 PM	PH3 valve closed
9/29/2011	3:46:52 PM	SiCl4 pre valve closed
9/29/2011	3:46:52 PM	SiCl4 post valve closed
9/29/2011	3:46:52 PM	Bypass valve closed
9/29/2011	3:46:52 PM	Bubbler valve closed
9/29/2011	3:46:52 PM	Main Vac valve opened
9/29/2011	3:46:52 PM	Helium MFC set to  0.000000
9/29/2011	3:46:52 PM	H2 MFC set to  0.000000
9/29/2011	3:46:52 PM	BCl3 MFC set to  0.000000
9/29/2011	3:46:52 PM	PHl3 MFC set to  0.000000
9/29/2011	3:46:52 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:46:52 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:46:52 PM	Tube furnace set to 300
9/29/2011	3:47:04 PM	H2 valve closed
9/29/2011	3:47:04 PM	BCl3 valve closed
9/29/2011	3:47:04 PM	PH3 valve closed
9/29/2011	3:47:04 PM	SiCl4 pre valve closed
9/29/2011	3:47:04 PM	SiCl4 post valve closed
9/29/2011	3:47:04 PM	Bypass valve closed
9/29/2011	3:47:04 PM	Bubbler valve closed
9/29/2011	3:47:04 PM	Helium valve opened
9/29/2011	3:47:04 PM	Main Vac valve opened
9/29/2011	3:47:04 PM	Helium MFC set to  20.000000
9/29/2011	3:47:04 PM	H2 MFC set to  0.000000
9/29/2011	3:47:04 PM	BCl3 MFC set to  0.000000
9/29/2011	3:47:04 PM	PHl3 MFC set to  0.000000
9/29/2011	3:47:04 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:47:04 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:47:05 PM	Tube furnace set to 300
9/29/2011	3:47:35 PM	Helium valve closed
9/29/2011	3:47:35 PM	H2 valve closed
9/29/2011	3:47:35 PM	BCl3 valve closed
9/29/2011	3:47:35 PM	PH3 valve closed
9/29/2011	3:47:35 PM	SiCl4 pre valve closed
9/29/2011	3:47:35 PM	SiCl4 post valve closed
9/29/2011	3:47:35 PM	Bypass valve closed
9/29/2011	3:47:35 PM	Bubbler valve closed
9/29/2011	3:47:35 PM	Main Vac valve opened
9/29/2011	3:47:35 PM	Helium MFC set to  0.000000
9/29/2011	3:47:35 PM	H2 MFC set to  0.000000
9/29/2011	3:47:35 PM	BCl3 MFC set to  0.000000
9/29/2011	3:47:35 PM	PHl3 MFC set to  0.000000
9/29/2011	3:47:35 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:47:35 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:47:35 PM	Tube furnace set to 300
9/29/2011	3:48:05 PM	H2 valve closed
9/29/2011	3:48:05 PM	BCl3 valve closed
9/29/2011	3:48:05 PM	PH3 valve closed
9/29/2011	3:48:05 PM	SiCl4 pre valve closed
9/29/2011	3:48:05 PM	SiCl4 post valve closed
9/29/2011	3:48:05 PM	Bypass valve closed
9/29/2011	3:48:05 PM	Bubbler valve closed
9/29/2011	3:48:05 PM	Helium valve opened
9/29/2011	3:48:05 PM	Main Vac valve opened
9/29/2011	3:48:05 PM	Helium MFC set to  20.000000
9/29/2011	3:48:05 PM	H2 MFC set to  0.000000
9/29/2011	3:48:05 PM	BCl3 MFC set to  0.000000
9/29/2011	3:48:05 PM	PHl3 MFC set to  0.000000
9/29/2011	3:48:05 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:48:05 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:48:05 PM	Tube furnace set to 300
9/29/2011	3:48:35 PM	Helium valve closed
9/29/2011	3:48:35 PM	H2 valve closed
9/29/2011	3:48:35 PM	BCl3 valve closed
9/29/2011	3:48:35 PM	PH3 valve closed
9/29/2011	3:48:35 PM	SiCl4 pre valve closed
9/29/2011	3:48:35 PM	SiCl4 post valve closed
9/29/2011	3:48:35 PM	Bypass valve closed
9/29/2011	3:48:35 PM	Bubbler valve closed
9/29/2011	3:48:35 PM	Main Vac valve opened
9/29/2011	3:48:35 PM	Helium MFC set to  0.000000
9/29/2011	3:48:35 PM	H2 MFC set to  0.000000
9/29/2011	3:48:35 PM	BCl3 MFC set to  0.000000
9/29/2011	3:48:35 PM	PHl3 MFC set to  0.000000
9/29/2011	3:48:35 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:48:35 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:48:35 PM	Tube furnace set to 300
9/29/2011	3:49:05 PM	H2 valve closed
9/29/2011	3:49:05 PM	BCl3 valve closed
9/29/2011	3:49:05 PM	PH3 valve closed
9/29/2011	3:49:05 PM	SiCl4 pre valve closed
9/29/2011	3:49:05 PM	SiCl4 post valve closed
9/29/2011	3:49:05 PM	Bypass valve closed
9/29/2011	3:49:05 PM	Bubbler valve closed
9/29/2011	3:49:05 PM	Helium valve opened
9/29/2011	3:49:05 PM	Main Vac valve opened
9/29/2011	3:49:05 PM	Helium MFC set to  20.000000
9/29/2011	3:49:05 PM	H2 MFC set to  0.000000
9/29/2011	3:49:05 PM	BCl3 MFC set to  0.000000
9/29/2011	3:49:05 PM	PHl3 MFC set to  0.000000
9/29/2011	3:49:05 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:49:05 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:49:05 PM	Tube furnace set to 300
9/29/2011	3:49:35 PM	Helium valve closed
9/29/2011	3:49:35 PM	H2 valve closed
9/29/2011	3:49:35 PM	BCl3 valve closed
9/29/2011	3:49:35 PM	PH3 valve closed
9/29/2011	3:49:35 PM	SiCl4 pre valve closed
9/29/2011	3:49:35 PM	SiCl4 post valve closed
9/29/2011	3:49:35 PM	Bypass valve closed
9/29/2011	3:49:35 PM	Bubbler valve closed
9/29/2011	3:49:35 PM	Main Vac valve opened
9/29/2011	3:49:35 PM	Helium MFC set to  0.000000
9/29/2011	3:49:35 PM	H2 MFC set to  0.000000
9/29/2011	3:49:35 PM	BCl3 MFC set to  0.000000
9/29/2011	3:49:35 PM	PHl3 MFC set to  0.000000
9/29/2011	3:49:35 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:49:35 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:49:36 PM	Tube furnace set to 300
9/29/2011	3:50:06 PM	H2 valve closed
9/29/2011	3:50:06 PM	BCl3 valve closed
9/29/2011	3:50:06 PM	PH3 valve closed
9/29/2011	3:50:06 PM	SiCl4 pre valve closed
9/29/2011	3:50:06 PM	SiCl4 post valve closed
9/29/2011	3:50:06 PM	Bypass valve closed
9/29/2011	3:50:06 PM	Bubbler valve closed
9/29/2011	3:50:06 PM	Helium valve opened
9/29/2011	3:50:06 PM	Main Vac valve opened
9/29/2011	3:50:06 PM	Helium MFC set to  20.000000
9/29/2011	3:50:06 PM	H2 MFC set to  0.000000
9/29/2011	3:50:06 PM	BCl3 MFC set to  0.000000
9/29/2011	3:50:06 PM	PHl3 MFC set to  0.000000
9/29/2011	3:50:06 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:50:06 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:50:06 PM	Tube furnace set to 300
9/29/2011	3:50:36 PM	Helium valve closed
9/29/2011	3:50:36 PM	H2 valve closed
9/29/2011	3:50:36 PM	BCl3 valve closed
9/29/2011	3:50:36 PM	PH3 valve closed
9/29/2011	3:50:36 PM	SiCl4 pre valve closed
9/29/2011	3:50:36 PM	SiCl4 post valve closed
9/29/2011	3:50:36 PM	Bypass valve closed
9/29/2011	3:50:36 PM	Bubbler valve closed
9/29/2011	3:50:36 PM	Main Vac valve opened
9/29/2011	3:50:36 PM	Helium MFC set to  0.000000
9/29/2011	3:50:36 PM	H2 MFC set to  0.000000
9/29/2011	3:50:36 PM	BCl3 MFC set to  0.000000
9/29/2011	3:50:36 PM	PHl3 MFC set to  0.000000
9/29/2011	3:50:36 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:50:36 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:50:36 PM	Tube furnace set to 300
9/29/2011	3:51:06 PM	H2 valve closed
9/29/2011	3:51:06 PM	BCl3 valve closed
9/29/2011	3:51:06 PM	PH3 valve closed
9/29/2011	3:51:06 PM	SiCl4 pre valve closed
9/29/2011	3:51:06 PM	SiCl4 post valve closed
9/29/2011	3:51:06 PM	Bypass valve closed
9/29/2011	3:51:06 PM	Bubbler valve closed
9/29/2011	3:51:06 PM	Helium valve opened
9/29/2011	3:51:06 PM	Main Vac valve opened
9/29/2011	3:51:06 PM	Helium MFC set to  20.000000
9/29/2011	3:51:06 PM	H2 MFC set to  0.000000
9/29/2011	3:51:06 PM	BCl3 MFC set to  0.000000
9/29/2011	3:51:06 PM	PHl3 MFC set to  0.000000
9/29/2011	3:51:06 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:51:06 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:51:06 PM	Tube furnace set to 300
9/29/2011	3:51:36 PM	Helium valve closed
9/29/2011	3:51:36 PM	H2 valve closed
9/29/2011	3:51:36 PM	BCl3 valve closed
9/29/2011	3:51:36 PM	PH3 valve closed
9/29/2011	3:51:36 PM	SiCl4 pre valve closed
9/29/2011	3:51:36 PM	SiCl4 post valve closed
9/29/2011	3:51:36 PM	Bypass valve closed
9/29/2011	3:51:36 PM	Bubbler valve closed
9/29/2011	3:51:36 PM	Main Vac valve opened
9/29/2011	3:51:36 PM	Helium MFC set to  0.000000
9/29/2011	3:51:36 PM	H2 MFC set to  0.000000
9/29/2011	3:51:36 PM	BCl3 MFC set to  0.000000
9/29/2011	3:51:36 PM	PHl3 MFC set to  0.000000
9/29/2011	3:51:36 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:51:36 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:51:36 PM	Tube furnace set to 300
9/29/2011	3:52:07 PM	H2 valve closed
9/29/2011	3:52:07 PM	BCl3 valve closed
9/29/2011	3:52:07 PM	PH3 valve closed
9/29/2011	3:52:07 PM	SiCl4 pre valve closed
9/29/2011	3:52:07 PM	SiCl4 post valve closed
9/29/2011	3:52:07 PM	Bypass valve closed
9/29/2011	3:52:07 PM	Bubbler valve closed
9/29/2011	3:52:07 PM	Helium valve opened
9/29/2011	3:52:07 PM	Main Vac valve opened
9/29/2011	3:52:07 PM	Helium MFC set to  20.000000
9/29/2011	3:52:07 PM	H2 MFC set to  0.000000
9/29/2011	3:52:07 PM	BCl3 MFC set to  0.000000
9/29/2011	3:52:07 PM	PHl3 MFC set to  0.000000
9/29/2011	3:52:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:52:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:52:07 PM	Tube furnace set to 300
9/29/2011	3:52:37 PM	Helium valve closed
9/29/2011	3:52:37 PM	H2 valve closed
9/29/2011	3:52:37 PM	BCl3 valve closed
9/29/2011	3:52:37 PM	PH3 valve closed
9/29/2011	3:52:37 PM	SiCl4 pre valve closed
9/29/2011	3:52:37 PM	SiCl4 post valve closed
9/29/2011	3:52:37 PM	Bypass valve closed
9/29/2011	3:52:37 PM	Bubbler valve closed
9/29/2011	3:52:37 PM	Main Vac valve opened
9/29/2011	3:52:37 PM	Helium MFC set to  0.000000
9/29/2011	3:52:37 PM	H2 MFC set to  0.000000
9/29/2011	3:52:37 PM	BCl3 MFC set to  0.000000
9/29/2011	3:52:37 PM	PHl3 MFC set to  0.000000
9/29/2011	3:52:37 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:52:37 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:52:37 PM	Tube furnace set to 300
9/29/2011	3:53:07 PM	H2 valve closed
9/29/2011	3:53:07 PM	BCl3 valve closed
9/29/2011	3:53:07 PM	PH3 valve closed
9/29/2011	3:53:07 PM	SiCl4 pre valve closed
9/29/2011	3:53:07 PM	SiCl4 post valve closed
9/29/2011	3:53:07 PM	Bypass valve closed
9/29/2011	3:53:07 PM	Bubbler valve closed
9/29/2011	3:53:07 PM	Helium valve opened
9/29/2011	3:53:07 PM	Main Vac valve opened
9/29/2011	3:53:07 PM	Helium MFC set to  20.000000
9/29/2011	3:53:07 PM	H2 MFC set to  0.000000
9/29/2011	3:53:07 PM	BCl3 MFC set to  0.000000
9/29/2011	3:53:07 PM	PHl3 MFC set to  0.000000
9/29/2011	3:53:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:53:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:53:07 PM	Tube furnace set to 300
9/29/2011	3:53:37 PM	Helium valve closed
9/29/2011	3:53:37 PM	H2 valve closed
9/29/2011	3:53:37 PM	BCl3 valve closed
9/29/2011	3:53:37 PM	PH3 valve closed
9/29/2011	3:53:37 PM	SiCl4 pre valve closed
9/29/2011	3:53:37 PM	SiCl4 post valve closed
9/29/2011	3:53:37 PM	Bypass valve closed
9/29/2011	3:53:37 PM	Bubbler valve closed
9/29/2011	3:53:37 PM	Main Vac valve opened
9/29/2011	3:53:37 PM	Helium MFC set to  0.000000
9/29/2011	3:53:37 PM	H2 MFC set to  0.000000
9/29/2011	3:53:37 PM	BCl3 MFC set to  0.000000
9/29/2011	3:53:37 PM	PHl3 MFC set to  0.000000
9/29/2011	3:53:37 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:53:37 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:53:37 PM	Tube furnace set to 300
9/29/2011	3:54:07 PM	H2 valve closed
9/29/2011	3:54:07 PM	BCl3 valve closed
9/29/2011	3:54:07 PM	PH3 valve closed
9/29/2011	3:54:07 PM	SiCl4 pre valve closed
9/29/2011	3:54:07 PM	SiCl4 post valve closed
9/29/2011	3:54:07 PM	Bypass valve closed
9/29/2011	3:54:07 PM	Bubbler valve closed
9/29/2011	3:54:07 PM	Helium valve opened
9/29/2011	3:54:07 PM	Main Vac valve opened
9/29/2011	3:54:07 PM	Helium MFC set to  20.000000
9/29/2011	3:54:07 PM	H2 MFC set to  0.000000
9/29/2011	3:54:07 PM	BCl3 MFC set to  0.000000
9/29/2011	3:54:07 PM	PHl3 MFC set to  0.000000
9/29/2011	3:54:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:54:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:54:08 PM	Tube furnace set to 300
9/29/2011	3:54:38 PM	Helium valve closed
9/29/2011	3:54:38 PM	H2 valve closed
9/29/2011	3:54:38 PM	BCl3 valve closed
9/29/2011	3:54:38 PM	PH3 valve closed
9/29/2011	3:54:38 PM	SiCl4 pre valve closed
9/29/2011	3:54:38 PM	SiCl4 post valve closed
9/29/2011	3:54:38 PM	Bypass valve closed
9/29/2011	3:54:38 PM	Bubbler valve closed
9/29/2011	3:54:38 PM	Main Vac valve opened
9/29/2011	3:54:38 PM	Helium MFC set to  0.000000
9/29/2011	3:54:38 PM	H2 MFC set to  0.000000
9/29/2011	3:54:38 PM	BCl3 MFC set to  0.000000
9/29/2011	3:54:38 PM	PHl3 MFC set to  0.000000
9/29/2011	3:54:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:54:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:54:38 PM	Tube furnace set to 300
9/29/2011	3:55:08 PM	H2 valve closed
9/29/2011	3:55:08 PM	BCl3 valve closed
9/29/2011	3:55:08 PM	PH3 valve closed
9/29/2011	3:55:08 PM	SiCl4 pre valve closed
9/29/2011	3:55:08 PM	SiCl4 post valve closed
9/29/2011	3:55:08 PM	Bypass valve closed
9/29/2011	3:55:08 PM	Bubbler valve closed
9/29/2011	3:55:08 PM	Helium valve opened
9/29/2011	3:55:08 PM	Main Vac valve opened
9/29/2011	3:55:08 PM	Helium MFC set to  20.000000
9/29/2011	3:55:08 PM	H2 MFC set to  0.000000
9/29/2011	3:55:08 PM	BCl3 MFC set to  0.000000
9/29/2011	3:55:08 PM	PHl3 MFC set to  0.000000
9/29/2011	3:55:08 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:55:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:55:08 PM	Tube furnace set to 300
9/29/2011	3:55:38 PM	Helium valve closed
9/29/2011	3:55:38 PM	H2 valve closed
9/29/2011	3:55:38 PM	BCl3 valve closed
9/29/2011	3:55:38 PM	PH3 valve closed
9/29/2011	3:55:38 PM	SiCl4 pre valve closed
9/29/2011	3:55:38 PM	SiCl4 post valve closed
9/29/2011	3:55:38 PM	Bypass valve closed
9/29/2011	3:55:38 PM	Bubbler valve closed
9/29/2011	3:55:38 PM	Main Vac valve opened
9/29/2011	3:55:38 PM	Helium MFC set to  0.000000
9/29/2011	3:55:38 PM	H2 MFC set to  0.000000
9/29/2011	3:55:38 PM	BCl3 MFC set to  0.000000
9/29/2011	3:55:38 PM	PHl3 MFC set to  0.000000
9/29/2011	3:55:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:55:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:55:38 PM	Tube furnace set to 300
9/29/2011	3:56:08 PM	H2 valve closed
9/29/2011	3:56:08 PM	BCl3 valve closed
9/29/2011	3:56:08 PM	PH3 valve closed
9/29/2011	3:56:08 PM	SiCl4 pre valve closed
9/29/2011	3:56:08 PM	SiCl4 post valve closed
9/29/2011	3:56:08 PM	Bypass valve closed
9/29/2011	3:56:08 PM	Bubbler valve closed
9/29/2011	3:56:08 PM	Helium valve opened
9/29/2011	3:56:08 PM	Main Vac valve opened
9/29/2011	3:56:08 PM	Helium MFC set to  20.000000
9/29/2011	3:56:08 PM	H2 MFC set to  0.000000
9/29/2011	3:56:08 PM	BCl3 MFC set to  0.000000
9/29/2011	3:56:08 PM	PHl3 MFC set to  0.000000
9/29/2011	3:56:08 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:56:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:56:08 PM	Tube furnace set to 300
9/29/2011	3:56:38 PM	Helium valve closed
9/29/2011	3:56:38 PM	H2 valve closed
9/29/2011	3:56:38 PM	BCl3 valve closed
9/29/2011	3:56:38 PM	PH3 valve closed
9/29/2011	3:56:38 PM	SiCl4 pre valve closed
9/29/2011	3:56:38 PM	SiCl4 post valve closed
9/29/2011	3:56:38 PM	Bypass valve closed
9/29/2011	3:56:38 PM	Bubbler valve closed
9/29/2011	3:56:38 PM	Main Vac valve opened
9/29/2011	3:56:38 PM	Helium MFC set to  0.000000
9/29/2011	3:56:38 PM	H2 MFC set to  0.000000
9/29/2011	3:56:38 PM	BCl3 MFC set to  0.000000
9/29/2011	3:56:38 PM	PHl3 MFC set to  0.000000
9/29/2011	3:56:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	3:56:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	3:56:39 PM	Tube furnace set to 300
9/29/2011	3:56:40 PM	Run finished at 3:56 PM
9/29/2011	4:00:47 PM	Main Vac valve closed
9/29/2011	4:01:23 PM	Recipe started at 4:01 PM
9/29/2011	4:01:23 PM	Helium valve closed
9/29/2011	4:01:23 PM	H2 valve closed
9/29/2011	4:01:23 PM	BCl3 valve closed
9/29/2011	4:01:23 PM	PH3 valve closed
9/29/2011	4:01:23 PM	SiCl4 pre valve closed
9/29/2011	4:01:23 PM	SiCl4 post valve closed
9/29/2011	4:01:23 PM	Bypass valve closed
9/29/2011	4:01:23 PM	Bubbler valve closed
9/29/2011	4:01:23 PM	Main Vac valve opened
9/29/2011	4:01:23 PM	Helium MFC set to  0.000000
9/29/2011	4:01:23 PM	H2 MFC set to  0.000000
9/29/2011	4:01:23 PM	BCl3 MFC set to  0.000000
9/29/2011	4:01:23 PM	PHl3 MFC set to  0.000000
9/29/2011	4:01:23 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:01:23 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:01:24 PM	Tube furnace set to 300
9/29/2011	4:01:25 PM	H2 valve closed
9/29/2011	4:01:25 PM	BCl3 valve closed
9/29/2011	4:01:25 PM	PH3 valve closed
9/29/2011	4:01:25 PM	SiCl4 pre valve closed
9/29/2011	4:01:25 PM	SiCl4 post valve closed
9/29/2011	4:01:25 PM	Bypass valve closed
9/29/2011	4:01:25 PM	Bubbler valve closed
9/29/2011	4:01:25 PM	Helium valve opened
9/29/2011	4:01:25 PM	Main Vac valve opened
9/29/2011	4:01:25 PM	Helium MFC set to  20.000000
9/29/2011	4:01:25 PM	H2 MFC set to  0.000000
9/29/2011	4:01:25 PM	BCl3 MFC set to  0.000000
9/29/2011	4:01:25 PM	PHl3 MFC set to  0.000000
9/29/2011	4:01:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:01:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:01:26 PM	Tube furnace set to 300
9/29/2011	4:01:56 PM	Helium valve closed
9/29/2011	4:01:56 PM	H2 valve closed
9/29/2011	4:01:56 PM	BCl3 valve closed
9/29/2011	4:01:56 PM	PH3 valve closed
9/29/2011	4:01:56 PM	SiCl4 pre valve closed
9/29/2011	4:01:56 PM	SiCl4 post valve closed
9/29/2011	4:01:56 PM	Bypass valve closed
9/29/2011	4:01:56 PM	Bubbler valve closed
9/29/2011	4:01:56 PM	Main Vac valve opened
9/29/2011	4:01:56 PM	Helium MFC set to  0.000000
9/29/2011	4:01:56 PM	H2 MFC set to  0.000000
9/29/2011	4:01:56 PM	BCl3 MFC set to  0.000000
9/29/2011	4:01:56 PM	PHl3 MFC set to  0.000000
9/29/2011	4:01:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:01:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:01:56 PM	Tube furnace set to 300
9/29/2011	4:02:26 PM	H2 valve closed
9/29/2011	4:02:26 PM	BCl3 valve closed
9/29/2011	4:02:26 PM	PH3 valve closed
9/29/2011	4:02:26 PM	SiCl4 pre valve closed
9/29/2011	4:02:26 PM	SiCl4 post valve closed
9/29/2011	4:02:26 PM	Bypass valve closed
9/29/2011	4:02:26 PM	Bubbler valve closed
9/29/2011	4:02:26 PM	Helium valve opened
9/29/2011	4:02:26 PM	Main Vac valve opened
9/29/2011	4:02:26 PM	Helium MFC set to  20.000000
9/29/2011	4:02:26 PM	H2 MFC set to  0.000000
9/29/2011	4:02:26 PM	BCl3 MFC set to  0.000000
9/29/2011	4:02:26 PM	PHl3 MFC set to  0.000000
9/29/2011	4:02:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:02:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:02:26 PM	Tube furnace set to 300
9/29/2011	4:02:56 PM	Helium valve closed
9/29/2011	4:02:56 PM	H2 valve closed
9/29/2011	4:02:56 PM	BCl3 valve closed
9/29/2011	4:02:56 PM	PH3 valve closed
9/29/2011	4:02:56 PM	SiCl4 pre valve closed
9/29/2011	4:02:56 PM	SiCl4 post valve closed
9/29/2011	4:02:56 PM	Bypass valve closed
9/29/2011	4:02:56 PM	Bubbler valve closed
9/29/2011	4:02:56 PM	Main Vac valve opened
9/29/2011	4:02:56 PM	Helium MFC set to  0.000000
9/29/2011	4:02:56 PM	H2 MFC set to  0.000000
9/29/2011	4:02:56 PM	BCl3 MFC set to  0.000000
9/29/2011	4:02:56 PM	PHl3 MFC set to  0.000000
9/29/2011	4:02:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:02:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:02:56 PM	Tube furnace set to 300
9/29/2011	4:03:26 PM	H2 valve closed
9/29/2011	4:03:26 PM	BCl3 valve closed
9/29/2011	4:03:26 PM	PH3 valve closed
9/29/2011	4:03:26 PM	SiCl4 pre valve closed
9/29/2011	4:03:26 PM	SiCl4 post valve closed
9/29/2011	4:03:26 PM	Bypass valve closed
9/29/2011	4:03:26 PM	Bubbler valve closed
9/29/2011	4:03:26 PM	Helium valve opened
9/29/2011	4:03:26 PM	Main Vac valve opened
9/29/2011	4:03:26 PM	Helium MFC set to  20.000000
9/29/2011	4:03:26 PM	H2 MFC set to  0.000000
9/29/2011	4:03:26 PM	BCl3 MFC set to  0.000000
9/29/2011	4:03:26 PM	PHl3 MFC set to  0.000000
9/29/2011	4:03:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:03:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:03:26 PM	Tube furnace set to 300
9/29/2011	4:03:56 PM	Helium valve closed
9/29/2011	4:03:56 PM	H2 valve closed
9/29/2011	4:03:56 PM	BCl3 valve closed
9/29/2011	4:03:56 PM	PH3 valve closed
9/29/2011	4:03:56 PM	SiCl4 pre valve closed
9/29/2011	4:03:56 PM	SiCl4 post valve closed
9/29/2011	4:03:56 PM	Bypass valve closed
9/29/2011	4:03:56 PM	Bubbler valve closed
9/29/2011	4:03:56 PM	Main Vac valve opened
9/29/2011	4:03:56 PM	Helium MFC set to  0.000000
9/29/2011	4:03:56 PM	H2 MFC set to  0.000000
9/29/2011	4:03:56 PM	BCl3 MFC set to  0.000000
9/29/2011	4:03:56 PM	PHl3 MFC set to  0.000000
9/29/2011	4:03:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:03:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:03:57 PM	Tube furnace set to 300
9/29/2011	4:04:27 PM	H2 valve closed
9/29/2011	4:04:27 PM	BCl3 valve closed
9/29/2011	4:04:27 PM	PH3 valve closed
9/29/2011	4:04:27 PM	SiCl4 pre valve closed
9/29/2011	4:04:27 PM	SiCl4 post valve closed
9/29/2011	4:04:27 PM	Bypass valve closed
9/29/2011	4:04:27 PM	Bubbler valve closed
9/29/2011	4:04:27 PM	Helium valve opened
9/29/2011	4:04:27 PM	Main Vac valve opened
9/29/2011	4:04:27 PM	Helium MFC set to  20.000000
9/29/2011	4:04:27 PM	H2 MFC set to  0.000000
9/29/2011	4:04:27 PM	BCl3 MFC set to  0.000000
9/29/2011	4:04:27 PM	PHl3 MFC set to  0.000000
9/29/2011	4:04:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:04:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:04:27 PM	Tube furnace set to 300
9/29/2011	4:04:57 PM	Helium valve closed
9/29/2011	4:04:57 PM	H2 valve closed
9/29/2011	4:04:57 PM	BCl3 valve closed
9/29/2011	4:04:57 PM	PH3 valve closed
9/29/2011	4:04:57 PM	SiCl4 pre valve closed
9/29/2011	4:04:57 PM	SiCl4 post valve closed
9/29/2011	4:04:57 PM	Bypass valve closed
9/29/2011	4:04:57 PM	Bubbler valve closed
9/29/2011	4:04:57 PM	Main Vac valve opened
9/29/2011	4:04:57 PM	Helium MFC set to  0.000000
9/29/2011	4:04:57 PM	H2 MFC set to  0.000000
9/29/2011	4:04:57 PM	BCl3 MFC set to  0.000000
9/29/2011	4:04:57 PM	PHl3 MFC set to  0.000000
9/29/2011	4:04:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:04:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:04:57 PM	Tube furnace set to 300
9/29/2011	4:05:27 PM	H2 valve closed
9/29/2011	4:05:27 PM	BCl3 valve closed
9/29/2011	4:05:27 PM	PH3 valve closed
9/29/2011	4:05:27 PM	SiCl4 pre valve closed
9/29/2011	4:05:27 PM	SiCl4 post valve closed
9/29/2011	4:05:27 PM	Bypass valve closed
9/29/2011	4:05:27 PM	Bubbler valve closed
9/29/2011	4:05:27 PM	Helium valve opened
9/29/2011	4:05:27 PM	Main Vac valve opened
9/29/2011	4:05:27 PM	Helium MFC set to  20.000000
9/29/2011	4:05:27 PM	H2 MFC set to  0.000000
9/29/2011	4:05:27 PM	BCl3 MFC set to  0.000000
9/29/2011	4:05:27 PM	PHl3 MFC set to  0.000000
9/29/2011	4:05:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:05:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:05:27 PM	Tube furnace set to 300
9/29/2011	4:05:57 PM	Helium valve closed
9/29/2011	4:05:57 PM	H2 valve closed
9/29/2011	4:05:57 PM	BCl3 valve closed
9/29/2011	4:05:57 PM	PH3 valve closed
9/29/2011	4:05:57 PM	SiCl4 pre valve closed
9/29/2011	4:05:57 PM	SiCl4 post valve closed
9/29/2011	4:05:57 PM	Bypass valve closed
9/29/2011	4:05:57 PM	Bubbler valve closed
9/29/2011	4:05:57 PM	Main Vac valve opened
9/29/2011	4:05:57 PM	Helium MFC set to  0.000000
9/29/2011	4:05:57 PM	H2 MFC set to  0.000000
9/29/2011	4:05:57 PM	BCl3 MFC set to  0.000000
9/29/2011	4:05:57 PM	PHl3 MFC set to  0.000000
9/29/2011	4:05:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:05:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:05:57 PM	Tube furnace set to 300
9/29/2011	4:06:27 PM	H2 valve closed
9/29/2011	4:06:27 PM	BCl3 valve closed
9/29/2011	4:06:27 PM	PH3 valve closed
9/29/2011	4:06:27 PM	SiCl4 pre valve closed
9/29/2011	4:06:27 PM	SiCl4 post valve closed
9/29/2011	4:06:27 PM	Bypass valve closed
9/29/2011	4:06:27 PM	Bubbler valve closed
9/29/2011	4:06:27 PM	Helium valve opened
9/29/2011	4:06:27 PM	Main Vac valve opened
9/29/2011	4:06:27 PM	Helium MFC set to  20.000000
9/29/2011	4:06:27 PM	H2 MFC set to  0.000000
9/29/2011	4:06:27 PM	BCl3 MFC set to  0.000000
9/29/2011	4:06:27 PM	PHl3 MFC set to  0.000000
9/29/2011	4:06:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:06:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:06:28 PM	Tube furnace set to 300
9/29/2011	4:06:58 PM	Helium valve closed
9/29/2011	4:06:58 PM	H2 valve closed
9/29/2011	4:06:58 PM	BCl3 valve closed
9/29/2011	4:06:58 PM	PH3 valve closed
9/29/2011	4:06:58 PM	SiCl4 pre valve closed
9/29/2011	4:06:58 PM	SiCl4 post valve closed
9/29/2011	4:06:58 PM	Bypass valve closed
9/29/2011	4:06:58 PM	Bubbler valve closed
9/29/2011	4:06:58 PM	Main Vac valve opened
9/29/2011	4:06:58 PM	Helium MFC set to  0.000000
9/29/2011	4:06:58 PM	H2 MFC set to  0.000000
9/29/2011	4:06:58 PM	BCl3 MFC set to  0.000000
9/29/2011	4:06:58 PM	PHl3 MFC set to  0.000000
9/29/2011	4:06:58 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:06:58 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:06:58 PM	Tube furnace set to 300
9/29/2011	4:07:28 PM	H2 valve closed
9/29/2011	4:07:28 PM	BCl3 valve closed
9/29/2011	4:07:28 PM	PH3 valve closed
9/29/2011	4:07:28 PM	SiCl4 pre valve closed
9/29/2011	4:07:28 PM	SiCl4 post valve closed
9/29/2011	4:07:28 PM	Bypass valve closed
9/29/2011	4:07:28 PM	Bubbler valve closed
9/29/2011	4:07:28 PM	Helium valve opened
9/29/2011	4:07:28 PM	Main Vac valve opened
9/29/2011	4:07:28 PM	Helium MFC set to  20.000000
9/29/2011	4:07:28 PM	H2 MFC set to  0.000000
9/29/2011	4:07:28 PM	BCl3 MFC set to  0.000000
9/29/2011	4:07:28 PM	PHl3 MFC set to  0.000000
9/29/2011	4:07:28 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:07:28 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:07:28 PM	Tube furnace set to 300
9/29/2011	4:07:58 PM	Helium valve closed
9/29/2011	4:07:58 PM	H2 valve closed
9/29/2011	4:07:58 PM	BCl3 valve closed
9/29/2011	4:07:58 PM	PH3 valve closed
9/29/2011	4:07:58 PM	SiCl4 pre valve closed
9/29/2011	4:07:58 PM	SiCl4 post valve closed
9/29/2011	4:07:58 PM	Bypass valve closed
9/29/2011	4:07:58 PM	Bubbler valve closed
9/29/2011	4:07:58 PM	Main Vac valve opened
9/29/2011	4:07:58 PM	Helium MFC set to  0.000000
9/29/2011	4:07:58 PM	H2 MFC set to  0.000000
9/29/2011	4:07:58 PM	BCl3 MFC set to  0.000000
9/29/2011	4:07:58 PM	PHl3 MFC set to  0.000000
9/29/2011	4:07:58 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:07:58 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:07:58 PM	Tube furnace set to 300
9/29/2011	4:08:28 PM	H2 valve closed
9/29/2011	4:08:28 PM	BCl3 valve closed
9/29/2011	4:08:28 PM	PH3 valve closed
9/29/2011	4:08:28 PM	SiCl4 pre valve closed
9/29/2011	4:08:28 PM	SiCl4 post valve closed
9/29/2011	4:08:28 PM	Bypass valve closed
9/29/2011	4:08:28 PM	Bubbler valve closed
9/29/2011	4:08:28 PM	Helium valve opened
9/29/2011	4:08:28 PM	Main Vac valve opened
9/29/2011	4:08:28 PM	Helium MFC set to  20.000000
9/29/2011	4:08:28 PM	H2 MFC set to  0.000000
9/29/2011	4:08:28 PM	BCl3 MFC set to  0.000000
9/29/2011	4:08:28 PM	PHl3 MFC set to  0.000000
9/29/2011	4:08:28 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:08:28 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:08:28 PM	Tube furnace set to 300
9/29/2011	4:08:58 PM	Helium valve closed
9/29/2011	4:08:58 PM	H2 valve closed
9/29/2011	4:08:58 PM	BCl3 valve closed
9/29/2011	4:08:58 PM	PH3 valve closed
9/29/2011	4:08:58 PM	SiCl4 pre valve closed
9/29/2011	4:08:58 PM	SiCl4 post valve closed
9/29/2011	4:08:58 PM	Bypass valve closed
9/29/2011	4:08:58 PM	Bubbler valve closed
9/29/2011	4:08:58 PM	Main Vac valve opened
9/29/2011	4:08:58 PM	Helium MFC set to  0.000000
9/29/2011	4:08:58 PM	H2 MFC set to  0.000000
9/29/2011	4:08:58 PM	BCl3 MFC set to  0.000000
9/29/2011	4:08:58 PM	PHl3 MFC set to  0.000000
9/29/2011	4:08:58 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:08:58 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:08:59 PM	Tube furnace set to 300
9/29/2011	4:09:29 PM	H2 valve closed
9/29/2011	4:09:29 PM	BCl3 valve closed
9/29/2011	4:09:29 PM	PH3 valve closed
9/29/2011	4:09:29 PM	SiCl4 pre valve closed
9/29/2011	4:09:29 PM	SiCl4 post valve closed
9/29/2011	4:09:29 PM	Bypass valve closed
9/29/2011	4:09:29 PM	Bubbler valve closed
9/29/2011	4:09:29 PM	Helium valve opened
9/29/2011	4:09:29 PM	Main Vac valve opened
9/29/2011	4:09:29 PM	Helium MFC set to  20.000000
9/29/2011	4:09:29 PM	H2 MFC set to  0.000000
9/29/2011	4:09:29 PM	BCl3 MFC set to  0.000000
9/29/2011	4:09:29 PM	PHl3 MFC set to  0.000000
9/29/2011	4:09:29 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:09:29 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:09:29 PM	Tube furnace set to 300
9/29/2011	4:09:59 PM	Helium valve closed
9/29/2011	4:09:59 PM	H2 valve closed
9/29/2011	4:09:59 PM	BCl3 valve closed
9/29/2011	4:09:59 PM	PH3 valve closed
9/29/2011	4:09:59 PM	SiCl4 pre valve closed
9/29/2011	4:09:59 PM	SiCl4 post valve closed
9/29/2011	4:09:59 PM	Bypass valve closed
9/29/2011	4:09:59 PM	Bubbler valve closed
9/29/2011	4:09:59 PM	Main Vac valve opened
9/29/2011	4:09:59 PM	Helium MFC set to  0.000000
9/29/2011	4:09:59 PM	H2 MFC set to  0.000000
9/29/2011	4:09:59 PM	BCl3 MFC set to  0.000000
9/29/2011	4:09:59 PM	PHl3 MFC set to  0.000000
9/29/2011	4:09:59 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:09:59 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:09:59 PM	Tube furnace set to 300
9/29/2011	4:10:29 PM	H2 valve closed
9/29/2011	4:10:29 PM	BCl3 valve closed
9/29/2011	4:10:29 PM	PH3 valve closed
9/29/2011	4:10:29 PM	SiCl4 pre valve closed
9/29/2011	4:10:29 PM	SiCl4 post valve closed
9/29/2011	4:10:29 PM	Bypass valve closed
9/29/2011	4:10:29 PM	Bubbler valve closed
9/29/2011	4:10:29 PM	Helium valve opened
9/29/2011	4:10:29 PM	Main Vac valve opened
9/29/2011	4:10:29 PM	Helium MFC set to  20.000000
9/29/2011	4:10:29 PM	H2 MFC set to  0.000000
9/29/2011	4:10:29 PM	BCl3 MFC set to  0.000000
9/29/2011	4:10:29 PM	PHl3 MFC set to  0.000000
9/29/2011	4:10:29 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:10:29 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:10:29 PM	Tube furnace set to 300
9/29/2011	4:10:59 PM	Helium valve closed
9/29/2011	4:10:59 PM	H2 valve closed
9/29/2011	4:10:59 PM	BCl3 valve closed
9/29/2011	4:10:59 PM	PH3 valve closed
9/29/2011	4:10:59 PM	SiCl4 pre valve closed
9/29/2011	4:10:59 PM	SiCl4 post valve closed
9/29/2011	4:10:59 PM	Bypass valve closed
9/29/2011	4:10:59 PM	Bubbler valve closed
9/29/2011	4:10:59 PM	Main Vac valve opened
9/29/2011	4:10:59 PM	Helium MFC set to  0.000000
9/29/2011	4:10:59 PM	H2 MFC set to  0.000000
9/29/2011	4:10:59 PM	BCl3 MFC set to  0.000000
9/29/2011	4:10:59 PM	PHl3 MFC set to  0.000000
9/29/2011	4:10:59 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:10:59 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:10:59 PM	Tube furnace set to 300
9/29/2011	4:11:00 PM	Run finished at 4:11 PM
9/29/2011	4:11:39 PM	Main Vac valve closed
9/29/2011	4:11:45 PM	Main Vac valve opened
9/29/2011	4:12:36 PM	Recipe started at 4:12 PM
9/29/2011	4:12:36 PM	Helium valve closed
9/29/2011	4:12:36 PM	H2 valve closed
9/29/2011	4:12:36 PM	BCl3 valve closed
9/29/2011	4:12:36 PM	PH3 valve closed
9/29/2011	4:12:36 PM	SiCl4 pre valve closed
9/29/2011	4:12:36 PM	SiCl4 post valve closed
9/29/2011	4:12:36 PM	Main Vac valve closed
9/29/2011	4:12:36 PM	Bypass valve closed
9/29/2011	4:12:36 PM	Bubbler valve closed
9/29/2011	4:12:36 PM	Helium MFC set to  0.000000
9/29/2011	4:12:36 PM	H2 MFC set to  0.000000
9/29/2011	4:12:36 PM	BCl3 MFC set to  0.000000
9/29/2011	4:12:36 PM	PHl3 MFC set to  0.000000
9/29/2011	4:12:36 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:12:36 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:12:36 PM	Tube furnace set to 0
9/29/2011	4:12:39 PM	Helium valve closed
9/29/2011	4:12:39 PM	BCl3 valve closed
9/29/2011	4:12:39 PM	PH3 valve closed
9/29/2011	4:12:39 PM	SiCl4 pre valve closed
9/29/2011	4:12:39 PM	SiCl4 post valve closed
9/29/2011	4:12:39 PM	Main Vac valve closed
9/29/2011	4:12:39 PM	Bypass valve closed
9/29/2011	4:12:39 PM	Bubbler valve closed
9/29/2011	4:12:39 PM	H2 valve opened
9/29/2011	4:12:39 PM	Helium MFC set to  0.000000
9/29/2011	4:12:39 PM	H2 MFC set to  500.000000
9/29/2011	4:12:39 PM	BCl3 MFC set to  0.000000
9/29/2011	4:12:39 PM	PHl3 MFC set to  0.000000
9/29/2011	4:12:39 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:12:39 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:12:40 PM	Tube furnace set to 0
9/29/2011	4:13:40 PM	Helium valve closed
9/29/2011	4:13:40 PM	BCl3 valve closed
9/29/2011	4:13:40 PM	PH3 valve closed
9/29/2011	4:13:40 PM	SiCl4 pre valve closed
9/29/2011	4:13:40 PM	SiCl4 post valve closed
9/29/2011	4:13:40 PM	Main Vac valve closed
9/29/2011	4:13:40 PM	Bypass valve closed
9/29/2011	4:13:40 PM	H2 valve opened
9/29/2011	4:13:40 PM	Bubbler valve opened
9/29/2011	4:13:40 PM	Helium MFC set to  0.000000
9/29/2011	4:13:40 PM	H2 MFC set to  500.000000
9/29/2011	4:13:40 PM	BCl3 MFC set to  0.000000
9/29/2011	4:13:40 PM	PHl3 MFC set to  0.000000
9/29/2011	4:13:40 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:13:40 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:13:40 PM	Tube furnace set to 0
9/29/2011	4:13:42 PM	Helium valve closed
9/29/2011	4:13:42 PM	BCl3 valve closed
9/29/2011	4:13:42 PM	PH3 valve closed
9/29/2011	4:13:42 PM	SiCl4 pre valve closed
9/29/2011	4:13:42 PM	SiCl4 post valve closed
9/29/2011	4:13:42 PM	Main Vac valve closed
9/29/2011	4:13:42 PM	Bypass valve closed
9/29/2011	4:13:42 PM	H2 valve opened
9/29/2011	4:13:42 PM	Bubbler valve opened
9/29/2011	4:13:42 PM	Helium MFC set to  0.000000
9/29/2011	4:13:42 PM	H2 MFC set to  500.000000
9/29/2011	4:13:42 PM	BCl3 MFC set to  0.000000
9/29/2011	4:13:42 PM	PHl3 MFC set to  0.000000
9/29/2011	4:13:42 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:13:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:13:42 PM	Tube furnace set to 1000
9/29/2011	4:33:42 PM	Helium valve closed
9/29/2011	4:33:42 PM	PH3 valve closed
9/29/2011	4:33:42 PM	Main Vac valve closed
9/29/2011	4:33:42 PM	Bypass valve closed
9/29/2011	4:33:42 PM	H2 valve opened
9/29/2011	4:33:42 PM	BCl3 valve opened
9/29/2011	4:33:42 PM	SiCl4 pre valve opened
9/29/2011	4:33:42 PM	SiCl4 post valve opened
9/29/2011	4:33:42 PM	Bubbler valve opened
9/29/2011	4:33:42 PM	Helium MFC set to  0.000000
9/29/2011	4:33:42 PM	H2 MFC set to  500.000000
9/29/2011	4:33:42 PM	BCl3 MFC set to  2.300000
9/29/2011	4:33:42 PM	PHl3 MFC set to  0.000000
9/29/2011	4:33:42 PM	SiCl4 MFC set to  50.000000
9/29/2011	4:33:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:33:42 PM	Tube furnace set to 1000
9/29/2011	4:49:42 PM	Helium valve closed
9/29/2011	4:49:42 PM	BCl3 valve closed
9/29/2011	4:49:42 PM	PH3 valve closed
9/29/2011	4:49:42 PM	SiCl4 pre valve closed
9/29/2011	4:49:42 PM	SiCl4 post valve closed
9/29/2011	4:49:42 PM	Main Vac valve closed
9/29/2011	4:49:42 PM	Bypass valve closed
9/29/2011	4:49:42 PM	H2 valve opened
9/29/2011	4:49:42 PM	Bubbler valve opened
9/29/2011	4:49:42 PM	Helium MFC set to  0.000000
9/29/2011	4:49:42 PM	H2 MFC set to  500.000000
9/29/2011	4:49:42 PM	BCl3 MFC set to  0.000000
9/29/2011	4:49:42 PM	PHl3 MFC set to  0.000000
9/29/2011	4:49:42 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:49:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:49:42 PM	Tube furnace set to 750
9/29/2011	4:54:42 PM	H2 valve closed
9/29/2011	4:54:42 PM	BCl3 valve closed
9/29/2011	4:54:42 PM	PH3 valve closed
9/29/2011	4:54:42 PM	SiCl4 pre valve closed
9/29/2011	4:54:42 PM	SiCl4 post valve closed
9/29/2011	4:54:42 PM	Main Vac valve closed
9/29/2011	4:54:42 PM	Bypass valve closed
9/29/2011	4:54:42 PM	Helium valve opened
9/29/2011	4:54:42 PM	Bubbler valve opened
9/29/2011	4:54:42 PM	Helium MFC set to  500.000000
9/29/2011	4:54:42 PM	H2 MFC set to  0.000000
9/29/2011	4:54:42 PM	BCl3 MFC set to  0.000000
9/29/2011	4:54:42 PM	PHl3 MFC set to  0.000000
9/29/2011	4:54:42 PM	SiCl4 MFC set to  0.000000
9/29/2011	4:54:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	4:54:42 PM	Tube furnace set to 0
9/29/2011	5:14:42 PM	Helium valve closed
9/29/2011	5:14:42 PM	H2 valve closed
9/29/2011	5:14:42 PM	BCl3 valve closed
9/29/2011	5:14:42 PM	PH3 valve closed
9/29/2011	5:14:42 PM	SiCl4 pre valve closed
9/29/2011	5:14:42 PM	SiCl4 post valve closed
9/29/2011	5:14:42 PM	Main Vac valve closed
9/29/2011	5:14:42 PM	Bypass valve closed
9/29/2011	5:14:42 PM	Bubbler valve closed
9/29/2011	5:14:42 PM	Helium MFC set to  0.000000
9/29/2011	5:14:42 PM	H2 MFC set to  0.000000
9/29/2011	5:14:42 PM	BCl3 MFC set to  0.000000
9/29/2011	5:14:42 PM	PHl3 MFC set to  0.000000
9/29/2011	5:14:42 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:14:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:14:42 PM	Tube furnace set to 0
9/29/2011	5:14:43 PM	Run finished at 5:14 PM
9/29/2011	5:14:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	5:14:51 PM	Recipe started at 5:14 PM
9/29/2011	5:14:51 PM	Helium valve closed
9/29/2011	5:14:51 PM	H2 valve closed
9/29/2011	5:14:51 PM	BCl3 valve closed
9/29/2011	5:14:51 PM	PH3 valve closed
9/29/2011	5:14:51 PM	SiCl4 pre valve closed
9/29/2011	5:14:51 PM	SiCl4 post valve closed
9/29/2011	5:14:51 PM	Main Vac valve closed
9/29/2011	5:14:51 PM	Bypass valve closed
9/29/2011	5:14:51 PM	Bubbler valve closed
9/29/2011	5:14:51 PM	Helium MFC set to  0.000000
9/29/2011	5:14:51 PM	H2 MFC set to  0.000000
9/29/2011	5:14:51 PM	BCl3 MFC set to  0.000000
9/29/2011	5:14:51 PM	PHl3 MFC set to  0.000000
9/29/2011	5:14:51 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:14:51 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:14:51 PM	Tube furnace set to 0
9/29/2011	5:14:54 PM	H2 valve closed
9/29/2011	5:14:54 PM	BCl3 valve closed
9/29/2011	5:14:54 PM	PH3 valve closed
9/29/2011	5:14:54 PM	SiCl4 pre valve closed
9/29/2011	5:14:54 PM	SiCl4 post valve closed
9/29/2011	5:14:54 PM	Main Vac valve closed
9/29/2011	5:14:54 PM	Bypass valve closed
9/29/2011	5:14:54 PM	Bubbler valve closed
9/29/2011	5:14:54 PM	Helium valve opened
9/29/2011	5:14:54 PM	Helium MFC set to  500.000000
9/29/2011	5:14:54 PM	H2 MFC set to  0.000000
9/29/2011	5:14:54 PM	BCl3 MFC set to  0.000000
9/29/2011	5:14:54 PM	PHl3 MFC set to  0.000000
9/29/2011	5:14:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:14:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:14:54 PM	Tube furnace set to 0
9/29/2011	5:14:54 PM	Helium valve closed
9/29/2011	5:14:54 PM	H2 valve closed
9/29/2011	5:14:54 PM	BCl3 valve closed
9/29/2011	5:14:54 PM	PH3 valve closed
9/29/2011	5:14:54 PM	SiCl4 pre valve closed
9/29/2011	5:14:54 PM	SiCl4 post valve closed
9/29/2011	5:14:54 PM	Main Vac valve closed
9/29/2011	5:14:54 PM	Bypass valve closed
9/29/2011	5:14:54 PM	Bubbler valve closed
9/29/2011	5:14:54 PM	Helium MFC set to  0.000000
9/29/2011	5:14:54 PM	H2 MFC set to  0.000000
9/29/2011	5:14:54 PM	BCl3 MFC set to  0.000000
9/29/2011	5:14:54 PM	PHl3 MFC set to  0.000000
9/29/2011	5:14:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:14:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:14:55 PM	Tube furnace set to 0
9/29/2011	5:14:56 PM	Run finished at 5:14 PM
9/29/2011	5:14:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	5:30:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	5:30:48 PM	Recipe started at 5:30 PM
9/29/2011	5:30:48 PM	Helium valve closed
9/29/2011	5:30:48 PM	H2 valve closed
9/29/2011	5:30:48 PM	BCl3 valve closed
9/29/2011	5:30:48 PM	PH3 valve closed
9/29/2011	5:30:48 PM	SiCl4 pre valve closed
9/29/2011	5:30:48 PM	SiCl4 post valve closed
9/29/2011	5:30:48 PM	Main Vac valve closed
9/29/2011	5:30:48 PM	Bubbler valve closed
9/29/2011	5:30:48 PM	Bypass valve opened
9/29/2011	5:30:48 PM	Helium MFC set to  0.000000
9/29/2011	5:30:48 PM	H2 MFC set to  0.000000
9/29/2011	5:30:48 PM	BCl3 MFC set to  0.000000
9/29/2011	5:30:48 PM	PHl3 MFC set to  0.000000
9/29/2011	5:30:48 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:30:48 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:30:48 PM	Tube furnace set to 0
9/29/2011	5:32:00 PM	Helium valve closed
9/29/2011	5:32:00 PM	H2 valve closed
9/29/2011	5:32:00 PM	BCl3 valve closed
9/29/2011	5:32:00 PM	PH3 valve closed
9/29/2011	5:32:00 PM	SiCl4 pre valve closed
9/29/2011	5:32:00 PM	SiCl4 post valve closed
9/29/2011	5:32:00 PM	Main Vac valve closed
9/29/2011	5:32:00 PM	Bubbler valve closed
9/29/2011	5:32:00 PM	Bypass valve opened
9/29/2011	5:32:00 PM	Helium MFC set to  0.000000
9/29/2011	5:32:00 PM	H2 MFC set to  0.000000
9/29/2011	5:32:00 PM	BCl3 MFC set to  0.000000
9/29/2011	5:32:00 PM	PHl3 MFC set to  0.000000
9/29/2011	5:32:00 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:32:00 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:32:01 PM	Tube furnace set to 0
9/29/2011	5:33:01 PM	Helium valve closed
9/29/2011	5:33:01 PM	H2 valve closed
9/29/2011	5:33:01 PM	BCl3 valve closed
9/29/2011	5:33:01 PM	PH3 valve closed
9/29/2011	5:33:01 PM	SiCl4 pre valve closed
9/29/2011	5:33:01 PM	SiCl4 post valve closed
9/29/2011	5:33:01 PM	Bypass valve closed
9/29/2011	5:33:01 PM	Bubbler valve closed
9/29/2011	5:33:01 PM	Main Vac valve opened
9/29/2011	5:33:01 PM	Helium MFC set to  0.000000
9/29/2011	5:33:01 PM	H2 MFC set to  0.000000
9/29/2011	5:33:01 PM	BCl3 MFC set to  0.000000
9/29/2011	5:33:01 PM	PHl3 MFC set to  0.000000
9/29/2011	5:33:01 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:33:01 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:33:01 PM	Tube furnace set to 0
9/29/2011	5:33:02 PM	Run finished at 5:33 PM
9/29/2011	5:33:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	5:33:47 PM	Recipe started at 5:33 PM
9/29/2011	5:33:47 PM	Helium valve closed
9/29/2011	5:33:47 PM	H2 valve closed
9/29/2011	5:33:47 PM	BCl3 valve closed
9/29/2011	5:33:47 PM	PH3 valve closed
9/29/2011	5:33:47 PM	SiCl4 pre valve closed
9/29/2011	5:33:47 PM	SiCl4 post valve closed
9/29/2011	5:33:47 PM	Bypass valve closed
9/29/2011	5:33:47 PM	Bubbler valve closed
9/29/2011	5:33:47 PM	Main Vac valve opened
9/29/2011	5:33:47 PM	Helium MFC set to  0.000000
9/29/2011	5:33:47 PM	H2 MFC set to  0.000000
9/29/2011	5:33:47 PM	BCl3 MFC set to  0.000000
9/29/2011	5:33:47 PM	PHl3 MFC set to  0.000000
9/29/2011	5:33:47 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:33:47 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:33:48 PM	Tube furnace set to 300
9/29/2011	5:33:55 PM	H2 valve closed
9/29/2011	5:33:55 PM	BCl3 valve closed
9/29/2011	5:33:55 PM	PH3 valve closed
9/29/2011	5:33:55 PM	SiCl4 pre valve closed
9/29/2011	5:33:55 PM	SiCl4 post valve closed
9/29/2011	5:33:55 PM	Bypass valve closed
9/29/2011	5:33:55 PM	Bubbler valve closed
9/29/2011	5:33:55 PM	Helium valve opened
9/29/2011	5:33:55 PM	Main Vac valve opened
9/29/2011	5:33:55 PM	Helium MFC set to  20.000000
9/29/2011	5:33:55 PM	H2 MFC set to  0.000000
9/29/2011	5:33:55 PM	BCl3 MFC set to  0.000000
9/29/2011	5:33:55 PM	PHl3 MFC set to  0.000000
9/29/2011	5:33:55 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:33:55 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:33:55 PM	Tube furnace set to 300
9/29/2011	5:34:25 PM	Helium valve closed
9/29/2011	5:34:25 PM	H2 valve closed
9/29/2011	5:34:25 PM	BCl3 valve closed
9/29/2011	5:34:25 PM	PH3 valve closed
9/29/2011	5:34:25 PM	SiCl4 pre valve closed
9/29/2011	5:34:25 PM	SiCl4 post valve closed
9/29/2011	5:34:25 PM	Bypass valve closed
9/29/2011	5:34:25 PM	Bubbler valve closed
9/29/2011	5:34:25 PM	Main Vac valve opened
9/29/2011	5:34:25 PM	Helium MFC set to  0.000000
9/29/2011	5:34:25 PM	H2 MFC set to  0.000000
9/29/2011	5:34:25 PM	BCl3 MFC set to  0.000000
9/29/2011	5:34:25 PM	PHl3 MFC set to  0.000000
9/29/2011	5:34:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:34:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:34:25 PM	Tube furnace set to 300
9/29/2011	5:34:56 PM	H2 valve closed
9/29/2011	5:34:56 PM	BCl3 valve closed
9/29/2011	5:34:56 PM	PH3 valve closed
9/29/2011	5:34:56 PM	SiCl4 pre valve closed
9/29/2011	5:34:56 PM	SiCl4 post valve closed
9/29/2011	5:34:56 PM	Bypass valve closed
9/29/2011	5:34:56 PM	Bubbler valve closed
9/29/2011	5:34:56 PM	Helium valve opened
9/29/2011	5:34:56 PM	Main Vac valve opened
9/29/2011	5:34:56 PM	Helium MFC set to  20.000000
9/29/2011	5:34:56 PM	H2 MFC set to  0.000000
9/29/2011	5:34:56 PM	BCl3 MFC set to  0.000000
9/29/2011	5:34:56 PM	PHl3 MFC set to  0.000000
9/29/2011	5:34:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:34:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:34:56 PM	Tube furnace set to 300
9/29/2011	5:35:26 PM	Helium valve closed
9/29/2011	5:35:26 PM	H2 valve closed
9/29/2011	5:35:26 PM	BCl3 valve closed
9/29/2011	5:35:26 PM	PH3 valve closed
9/29/2011	5:35:26 PM	SiCl4 pre valve closed
9/29/2011	5:35:26 PM	SiCl4 post valve closed
9/29/2011	5:35:26 PM	Bypass valve closed
9/29/2011	5:35:26 PM	Bubbler valve closed
9/29/2011	5:35:26 PM	Main Vac valve opened
9/29/2011	5:35:26 PM	Helium MFC set to  0.000000
9/29/2011	5:35:26 PM	H2 MFC set to  0.000000
9/29/2011	5:35:26 PM	BCl3 MFC set to  0.000000
9/29/2011	5:35:26 PM	PHl3 MFC set to  0.000000
9/29/2011	5:35:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:35:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:35:26 PM	Tube furnace set to 300
9/29/2011	5:35:56 PM	H2 valve closed
9/29/2011	5:35:56 PM	BCl3 valve closed
9/29/2011	5:35:56 PM	PH3 valve closed
9/29/2011	5:35:56 PM	SiCl4 pre valve closed
9/29/2011	5:35:56 PM	SiCl4 post valve closed
9/29/2011	5:35:56 PM	Bypass valve closed
9/29/2011	5:35:56 PM	Bubbler valve closed
9/29/2011	5:35:56 PM	Helium valve opened
9/29/2011	5:35:56 PM	Main Vac valve opened
9/29/2011	5:35:56 PM	Helium MFC set to  20.000000
9/29/2011	5:35:56 PM	H2 MFC set to  0.000000
9/29/2011	5:35:56 PM	BCl3 MFC set to  0.000000
9/29/2011	5:35:56 PM	PHl3 MFC set to  0.000000
9/29/2011	5:35:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:35:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:35:56 PM	Tube furnace set to 300
9/29/2011	5:36:26 PM	Helium valve closed
9/29/2011	5:36:26 PM	H2 valve closed
9/29/2011	5:36:26 PM	BCl3 valve closed
9/29/2011	5:36:26 PM	PH3 valve closed
9/29/2011	5:36:26 PM	SiCl4 pre valve closed
9/29/2011	5:36:26 PM	SiCl4 post valve closed
9/29/2011	5:36:26 PM	Bypass valve closed
9/29/2011	5:36:26 PM	Bubbler valve closed
9/29/2011	5:36:26 PM	Main Vac valve opened
9/29/2011	5:36:26 PM	Helium MFC set to  0.000000
9/29/2011	5:36:26 PM	H2 MFC set to  0.000000
9/29/2011	5:36:26 PM	BCl3 MFC set to  0.000000
9/29/2011	5:36:26 PM	PHl3 MFC set to  0.000000
9/29/2011	5:36:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:36:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:36:26 PM	Tube furnace set to 300
9/29/2011	5:36:56 PM	H2 valve closed
9/29/2011	5:36:56 PM	BCl3 valve closed
9/29/2011	5:36:56 PM	PH3 valve closed
9/29/2011	5:36:56 PM	SiCl4 pre valve closed
9/29/2011	5:36:56 PM	SiCl4 post valve closed
9/29/2011	5:36:56 PM	Bypass valve closed
9/29/2011	5:36:56 PM	Bubbler valve closed
9/29/2011	5:36:56 PM	Helium valve opened
9/29/2011	5:36:56 PM	Main Vac valve opened
9/29/2011	5:36:56 PM	Helium MFC set to  20.000000
9/29/2011	5:36:56 PM	H2 MFC set to  0.000000
9/29/2011	5:36:56 PM	BCl3 MFC set to  0.000000
9/29/2011	5:36:56 PM	PHl3 MFC set to  0.000000
9/29/2011	5:36:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:36:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:36:57 PM	Tube furnace set to 300
9/29/2011	5:37:27 PM	Helium valve closed
9/29/2011	5:37:27 PM	H2 valve closed
9/29/2011	5:37:27 PM	BCl3 valve closed
9/29/2011	5:37:27 PM	PH3 valve closed
9/29/2011	5:37:27 PM	SiCl4 pre valve closed
9/29/2011	5:37:27 PM	SiCl4 post valve closed
9/29/2011	5:37:27 PM	Bypass valve closed
9/29/2011	5:37:27 PM	Bubbler valve closed
9/29/2011	5:37:27 PM	Main Vac valve opened
9/29/2011	5:37:27 PM	Helium MFC set to  0.000000
9/29/2011	5:37:27 PM	H2 MFC set to  0.000000
9/29/2011	5:37:27 PM	BCl3 MFC set to  0.000000
9/29/2011	5:37:27 PM	PHl3 MFC set to  0.000000
9/29/2011	5:37:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:37:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:37:27 PM	Tube furnace set to 300
9/29/2011	5:37:57 PM	H2 valve closed
9/29/2011	5:37:57 PM	BCl3 valve closed
9/29/2011	5:37:57 PM	PH3 valve closed
9/29/2011	5:37:57 PM	SiCl4 pre valve closed
9/29/2011	5:37:57 PM	SiCl4 post valve closed
9/29/2011	5:37:57 PM	Bypass valve closed
9/29/2011	5:37:57 PM	Bubbler valve closed
9/29/2011	5:37:57 PM	Helium valve opened
9/29/2011	5:37:57 PM	Main Vac valve opened
9/29/2011	5:37:57 PM	Helium MFC set to  20.000000
9/29/2011	5:37:57 PM	H2 MFC set to  0.000000
9/29/2011	5:37:57 PM	BCl3 MFC set to  0.000000
9/29/2011	5:37:57 PM	PHl3 MFC set to  0.000000
9/29/2011	5:37:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:37:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:37:57 PM	Tube furnace set to 300
9/29/2011	5:38:27 PM	Helium valve closed
9/29/2011	5:38:27 PM	H2 valve closed
9/29/2011	5:38:27 PM	BCl3 valve closed
9/29/2011	5:38:27 PM	PH3 valve closed
9/29/2011	5:38:27 PM	SiCl4 pre valve closed
9/29/2011	5:38:27 PM	SiCl4 post valve closed
9/29/2011	5:38:27 PM	Bypass valve closed
9/29/2011	5:38:27 PM	Bubbler valve closed
9/29/2011	5:38:27 PM	Main Vac valve opened
9/29/2011	5:38:27 PM	Helium MFC set to  0.000000
9/29/2011	5:38:27 PM	H2 MFC set to  0.000000
9/29/2011	5:38:27 PM	BCl3 MFC set to  0.000000
9/29/2011	5:38:27 PM	PHl3 MFC set to  0.000000
9/29/2011	5:38:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:38:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:38:27 PM	Tube furnace set to 300
9/29/2011	5:38:57 PM	H2 valve closed
9/29/2011	5:38:57 PM	BCl3 valve closed
9/29/2011	5:38:57 PM	PH3 valve closed
9/29/2011	5:38:57 PM	SiCl4 pre valve closed
9/29/2011	5:38:57 PM	SiCl4 post valve closed
9/29/2011	5:38:57 PM	Bypass valve closed
9/29/2011	5:38:57 PM	Bubbler valve closed
9/29/2011	5:38:57 PM	Helium valve opened
9/29/2011	5:38:57 PM	Main Vac valve opened
9/29/2011	5:38:57 PM	Helium MFC set to  20.000000
9/29/2011	5:38:57 PM	H2 MFC set to  0.000000
9/29/2011	5:38:57 PM	BCl3 MFC set to  0.000000
9/29/2011	5:38:57 PM	PHl3 MFC set to  0.000000
9/29/2011	5:38:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:38:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:38:57 PM	Tube furnace set to 300
9/29/2011	5:39:27 PM	Helium valve closed
9/29/2011	5:39:27 PM	H2 valve closed
9/29/2011	5:39:27 PM	BCl3 valve closed
9/29/2011	5:39:27 PM	PH3 valve closed
9/29/2011	5:39:27 PM	SiCl4 pre valve closed
9/29/2011	5:39:27 PM	SiCl4 post valve closed
9/29/2011	5:39:27 PM	Bypass valve closed
9/29/2011	5:39:27 PM	Bubbler valve closed
9/29/2011	5:39:27 PM	Main Vac valve opened
9/29/2011	5:39:27 PM	Helium MFC set to  0.000000
9/29/2011	5:39:27 PM	H2 MFC set to  0.000000
9/29/2011	5:39:27 PM	BCl3 MFC set to  0.000000
9/29/2011	5:39:27 PM	PHl3 MFC set to  0.000000
9/29/2011	5:39:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:39:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:39:28 PM	Tube furnace set to 300
9/29/2011	5:39:58 PM	H2 valve closed
9/29/2011	5:39:58 PM	BCl3 valve closed
9/29/2011	5:39:58 PM	PH3 valve closed
9/29/2011	5:39:58 PM	SiCl4 pre valve closed
9/29/2011	5:39:58 PM	SiCl4 post valve closed
9/29/2011	5:39:58 PM	Bypass valve closed
9/29/2011	5:39:58 PM	Bubbler valve closed
9/29/2011	5:39:58 PM	Helium valve opened
9/29/2011	5:39:58 PM	Main Vac valve opened
9/29/2011	5:39:58 PM	Helium MFC set to  20.000000
9/29/2011	5:39:58 PM	H2 MFC set to  0.000000
9/29/2011	5:39:58 PM	BCl3 MFC set to  0.000000
9/29/2011	5:39:58 PM	PHl3 MFC set to  0.000000
9/29/2011	5:39:58 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:39:58 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:39:58 PM	Tube furnace set to 300
9/29/2011	5:40:28 PM	Helium valve closed
9/29/2011	5:40:28 PM	H2 valve closed
9/29/2011	5:40:28 PM	BCl3 valve closed
9/29/2011	5:40:28 PM	PH3 valve closed
9/29/2011	5:40:28 PM	SiCl4 pre valve closed
9/29/2011	5:40:28 PM	SiCl4 post valve closed
9/29/2011	5:40:28 PM	Bypass valve closed
9/29/2011	5:40:28 PM	Bubbler valve closed
9/29/2011	5:40:28 PM	Main Vac valve opened
9/29/2011	5:40:28 PM	Helium MFC set to  0.000000
9/29/2011	5:40:28 PM	H2 MFC set to  0.000000
9/29/2011	5:40:28 PM	BCl3 MFC set to  0.000000
9/29/2011	5:40:28 PM	PHl3 MFC set to  0.000000
9/29/2011	5:40:28 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:40:28 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:40:28 PM	Tube furnace set to 300
9/29/2011	5:40:58 PM	H2 valve closed
9/29/2011	5:40:58 PM	BCl3 valve closed
9/29/2011	5:40:58 PM	PH3 valve closed
9/29/2011	5:40:58 PM	SiCl4 pre valve closed
9/29/2011	5:40:58 PM	SiCl4 post valve closed
9/29/2011	5:40:58 PM	Bypass valve closed
9/29/2011	5:40:58 PM	Bubbler valve closed
9/29/2011	5:40:58 PM	Helium valve opened
9/29/2011	5:40:58 PM	Main Vac valve opened
9/29/2011	5:40:58 PM	Helium MFC set to  20.000000
9/29/2011	5:40:58 PM	H2 MFC set to  0.000000
9/29/2011	5:40:58 PM	BCl3 MFC set to  0.000000
9/29/2011	5:40:58 PM	PHl3 MFC set to  0.000000
9/29/2011	5:40:58 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:40:58 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:40:58 PM	Tube furnace set to 300
9/29/2011	5:41:28 PM	Helium valve closed
9/29/2011	5:41:28 PM	H2 valve closed
9/29/2011	5:41:28 PM	BCl3 valve closed
9/29/2011	5:41:28 PM	PH3 valve closed
9/29/2011	5:41:28 PM	SiCl4 pre valve closed
9/29/2011	5:41:28 PM	SiCl4 post valve closed
9/29/2011	5:41:28 PM	Bypass valve closed
9/29/2011	5:41:28 PM	Bubbler valve closed
9/29/2011	5:41:28 PM	Main Vac valve opened
9/29/2011	5:41:28 PM	Helium MFC set to  0.000000
9/29/2011	5:41:28 PM	H2 MFC set to  0.000000
9/29/2011	5:41:28 PM	BCl3 MFC set to  0.000000
9/29/2011	5:41:28 PM	PHl3 MFC set to  0.000000
9/29/2011	5:41:28 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:41:28 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:41:28 PM	Tube furnace set to 300
9/29/2011	5:41:58 PM	H2 valve closed
9/29/2011	5:41:58 PM	BCl3 valve closed
9/29/2011	5:41:58 PM	PH3 valve closed
9/29/2011	5:41:58 PM	SiCl4 pre valve closed
9/29/2011	5:41:58 PM	SiCl4 post valve closed
9/29/2011	5:41:58 PM	Bypass valve closed
9/29/2011	5:41:58 PM	Bubbler valve closed
9/29/2011	5:41:58 PM	Helium valve opened
9/29/2011	5:41:58 PM	Main Vac valve opened
9/29/2011	5:41:58 PM	Helium MFC set to  20.000000
9/29/2011	5:41:58 PM	H2 MFC set to  0.000000
9/29/2011	5:41:58 PM	BCl3 MFC set to  0.000000
9/29/2011	5:41:58 PM	PHl3 MFC set to  0.000000
9/29/2011	5:41:58 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:41:58 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:41:59 PM	Tube furnace set to 300
9/29/2011	5:42:29 PM	Helium valve closed
9/29/2011	5:42:29 PM	H2 valve closed
9/29/2011	5:42:29 PM	BCl3 valve closed
9/29/2011	5:42:29 PM	PH3 valve closed
9/29/2011	5:42:29 PM	SiCl4 pre valve closed
9/29/2011	5:42:29 PM	SiCl4 post valve closed
9/29/2011	5:42:29 PM	Bypass valve closed
9/29/2011	5:42:29 PM	Bubbler valve closed
9/29/2011	5:42:29 PM	Main Vac valve opened
9/29/2011	5:42:29 PM	Helium MFC set to  0.000000
9/29/2011	5:42:29 PM	H2 MFC set to  0.000000
9/29/2011	5:42:29 PM	BCl3 MFC set to  0.000000
9/29/2011	5:42:29 PM	PHl3 MFC set to  0.000000
9/29/2011	5:42:29 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:42:29 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:42:29 PM	Tube furnace set to 300
9/29/2011	5:42:59 PM	H2 valve closed
9/29/2011	5:42:59 PM	BCl3 valve closed
9/29/2011	5:42:59 PM	PH3 valve closed
9/29/2011	5:42:59 PM	SiCl4 pre valve closed
9/29/2011	5:42:59 PM	SiCl4 post valve closed
9/29/2011	5:42:59 PM	Bypass valve closed
9/29/2011	5:42:59 PM	Bubbler valve closed
9/29/2011	5:42:59 PM	Helium valve opened
9/29/2011	5:42:59 PM	Main Vac valve opened
9/29/2011	5:42:59 PM	Helium MFC set to  20.000000
9/29/2011	5:42:59 PM	H2 MFC set to  0.000000
9/29/2011	5:42:59 PM	BCl3 MFC set to  0.000000
9/29/2011	5:42:59 PM	PHl3 MFC set to  0.000000
9/29/2011	5:42:59 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:42:59 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:42:59 PM	Tube furnace set to 300
9/29/2011	5:43:29 PM	Helium valve closed
9/29/2011	5:43:29 PM	H2 valve closed
9/29/2011	5:43:29 PM	BCl3 valve closed
9/29/2011	5:43:29 PM	PH3 valve closed
9/29/2011	5:43:29 PM	SiCl4 pre valve closed
9/29/2011	5:43:29 PM	SiCl4 post valve closed
9/29/2011	5:43:29 PM	Bypass valve closed
9/29/2011	5:43:29 PM	Bubbler valve closed
9/29/2011	5:43:29 PM	Main Vac valve opened
9/29/2011	5:43:29 PM	Helium MFC set to  0.000000
9/29/2011	5:43:29 PM	H2 MFC set to  0.000000
9/29/2011	5:43:29 PM	BCl3 MFC set to  0.000000
9/29/2011	5:43:29 PM	PHl3 MFC set to  0.000000
9/29/2011	5:43:29 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:43:29 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:43:29 PM	Tube furnace set to 300
9/29/2011	5:43:30 PM	Run finished at 5:43 PM
9/29/2011	5:45:08 PM	Recipe started at 5:45 PM
9/29/2011	5:45:08 PM	Helium valve closed
9/29/2011	5:45:08 PM	H2 valve closed
9/29/2011	5:45:08 PM	BCl3 valve closed
9/29/2011	5:45:08 PM	PH3 valve closed
9/29/2011	5:45:08 PM	SiCl4 pre valve closed
9/29/2011	5:45:08 PM	SiCl4 post valve closed
9/29/2011	5:45:08 PM	Bypass valve closed
9/29/2011	5:45:08 PM	Bubbler valve closed
9/29/2011	5:45:08 PM	Main Vac valve opened
9/29/2011	5:45:08 PM	Helium MFC set to  0.000000
9/29/2011	5:45:08 PM	H2 MFC set to  0.000000
9/29/2011	5:45:08 PM	BCl3 MFC set to  0.000000
9/29/2011	5:45:08 PM	PHl3 MFC set to  0.000000
9/29/2011	5:45:08 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:45:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:45:08 PM	Tube furnace set to 300
9/29/2011	5:45:38 PM	H2 valve closed
9/29/2011	5:45:38 PM	BCl3 valve closed
9/29/2011	5:45:38 PM	PH3 valve closed
9/29/2011	5:45:38 PM	SiCl4 pre valve closed
9/29/2011	5:45:38 PM	SiCl4 post valve closed
9/29/2011	5:45:38 PM	Bypass valve closed
9/29/2011	5:45:38 PM	Bubbler valve closed
9/29/2011	5:45:38 PM	Helium valve opened
9/29/2011	5:45:38 PM	Main Vac valve opened
9/29/2011	5:45:38 PM	Helium MFC set to  20.000000
9/29/2011	5:45:38 PM	H2 MFC set to  0.000000
9/29/2011	5:45:38 PM	BCl3 MFC set to  0.000000
9/29/2011	5:45:38 PM	PHl3 MFC set to  0.000000
9/29/2011	5:45:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:45:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:45:38 PM	Tube furnace set to 300
9/29/2011	5:46:08 PM	Helium valve closed
9/29/2011	5:46:08 PM	H2 valve closed
9/29/2011	5:46:08 PM	BCl3 valve closed
9/29/2011	5:46:08 PM	PH3 valve closed
9/29/2011	5:46:08 PM	SiCl4 pre valve closed
9/29/2011	5:46:08 PM	SiCl4 post valve closed
9/29/2011	5:46:08 PM	Bypass valve closed
9/29/2011	5:46:08 PM	Bubbler valve closed
9/29/2011	5:46:08 PM	Main Vac valve opened
9/29/2011	5:46:08 PM	Helium MFC set to  0.000000
9/29/2011	5:46:08 PM	H2 MFC set to  0.000000
9/29/2011	5:46:08 PM	BCl3 MFC set to  0.000000
9/29/2011	5:46:08 PM	PHl3 MFC set to  0.000000
9/29/2011	5:46:08 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:46:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:46:08 PM	Tube furnace set to 300
9/29/2011	5:46:38 PM	H2 valve closed
9/29/2011	5:46:38 PM	BCl3 valve closed
9/29/2011	5:46:38 PM	PH3 valve closed
9/29/2011	5:46:38 PM	SiCl4 pre valve closed
9/29/2011	5:46:38 PM	SiCl4 post valve closed
9/29/2011	5:46:38 PM	Bypass valve closed
9/29/2011	5:46:38 PM	Bubbler valve closed
9/29/2011	5:46:38 PM	Helium valve opened
9/29/2011	5:46:38 PM	Main Vac valve opened
9/29/2011	5:46:38 PM	Helium MFC set to  20.000000
9/29/2011	5:46:38 PM	H2 MFC set to  0.000000
9/29/2011	5:46:38 PM	BCl3 MFC set to  0.000000
9/29/2011	5:46:38 PM	PHl3 MFC set to  0.000000
9/29/2011	5:46:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:46:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:46:38 PM	Tube furnace set to 300
9/29/2011	5:47:08 PM	Helium valve closed
9/29/2011	5:47:08 PM	H2 valve closed
9/29/2011	5:47:08 PM	BCl3 valve closed
9/29/2011	5:47:08 PM	PH3 valve closed
9/29/2011	5:47:08 PM	SiCl4 pre valve closed
9/29/2011	5:47:08 PM	SiCl4 post valve closed
9/29/2011	5:47:08 PM	Bypass valve closed
9/29/2011	5:47:08 PM	Bubbler valve closed
9/29/2011	5:47:08 PM	Main Vac valve opened
9/29/2011	5:47:08 PM	Helium MFC set to  0.000000
9/29/2011	5:47:08 PM	H2 MFC set to  0.000000
9/29/2011	5:47:08 PM	BCl3 MFC set to  0.000000
9/29/2011	5:47:08 PM	PHl3 MFC set to  0.000000
9/29/2011	5:47:08 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:47:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:47:09 PM	Tube furnace set to 300
9/29/2011	5:47:39 PM	H2 valve closed
9/29/2011	5:47:39 PM	BCl3 valve closed
9/29/2011	5:47:39 PM	PH3 valve closed
9/29/2011	5:47:39 PM	SiCl4 pre valve closed
9/29/2011	5:47:39 PM	SiCl4 post valve closed
9/29/2011	5:47:39 PM	Bypass valve closed
9/29/2011	5:47:39 PM	Bubbler valve closed
9/29/2011	5:47:39 PM	Helium valve opened
9/29/2011	5:47:39 PM	Main Vac valve opened
9/29/2011	5:47:39 PM	Helium MFC set to  20.000000
9/29/2011	5:47:39 PM	H2 MFC set to  0.000000
9/29/2011	5:47:39 PM	BCl3 MFC set to  0.000000
9/29/2011	5:47:39 PM	PHl3 MFC set to  0.000000
9/29/2011	5:47:39 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:47:39 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:47:39 PM	Tube furnace set to 300
9/29/2011	5:48:09 PM	Helium valve closed
9/29/2011	5:48:09 PM	H2 valve closed
9/29/2011	5:48:09 PM	BCl3 valve closed
9/29/2011	5:48:09 PM	PH3 valve closed
9/29/2011	5:48:09 PM	SiCl4 pre valve closed
9/29/2011	5:48:09 PM	SiCl4 post valve closed
9/29/2011	5:48:09 PM	Bypass valve closed
9/29/2011	5:48:09 PM	Bubbler valve closed
9/29/2011	5:48:09 PM	Main Vac valve opened
9/29/2011	5:48:09 PM	Helium MFC set to  0.000000
9/29/2011	5:48:09 PM	H2 MFC set to  0.000000
9/29/2011	5:48:09 PM	BCl3 MFC set to  0.000000
9/29/2011	5:48:09 PM	PHl3 MFC set to  0.000000
9/29/2011	5:48:09 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:48:09 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:48:09 PM	Tube furnace set to 300
9/29/2011	5:48:39 PM	H2 valve closed
9/29/2011	5:48:39 PM	BCl3 valve closed
9/29/2011	5:48:39 PM	PH3 valve closed
9/29/2011	5:48:39 PM	SiCl4 pre valve closed
9/29/2011	5:48:39 PM	SiCl4 post valve closed
9/29/2011	5:48:39 PM	Bypass valve closed
9/29/2011	5:48:39 PM	Bubbler valve closed
9/29/2011	5:48:39 PM	Helium valve opened
9/29/2011	5:48:39 PM	Main Vac valve opened
9/29/2011	5:48:39 PM	Helium MFC set to  20.000000
9/29/2011	5:48:39 PM	H2 MFC set to  0.000000
9/29/2011	5:48:39 PM	BCl3 MFC set to  0.000000
9/29/2011	5:48:39 PM	PHl3 MFC set to  0.000000
9/29/2011	5:48:39 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:48:39 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:48:39 PM	Tube furnace set to 300
9/29/2011	5:49:09 PM	Helium valve closed
9/29/2011	5:49:09 PM	H2 valve closed
9/29/2011	5:49:09 PM	BCl3 valve closed
9/29/2011	5:49:09 PM	PH3 valve closed
9/29/2011	5:49:09 PM	SiCl4 pre valve closed
9/29/2011	5:49:09 PM	SiCl4 post valve closed
9/29/2011	5:49:09 PM	Bypass valve closed
9/29/2011	5:49:09 PM	Bubbler valve closed
9/29/2011	5:49:09 PM	Main Vac valve opened
9/29/2011	5:49:09 PM	Helium MFC set to  0.000000
9/29/2011	5:49:09 PM	H2 MFC set to  0.000000
9/29/2011	5:49:09 PM	BCl3 MFC set to  0.000000
9/29/2011	5:49:09 PM	PHl3 MFC set to  0.000000
9/29/2011	5:49:09 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:49:09 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:49:09 PM	Tube furnace set to 300
9/29/2011	5:49:39 PM	H2 valve closed
9/29/2011	5:49:39 PM	BCl3 valve closed
9/29/2011	5:49:39 PM	PH3 valve closed
9/29/2011	5:49:39 PM	SiCl4 pre valve closed
9/29/2011	5:49:39 PM	SiCl4 post valve closed
9/29/2011	5:49:39 PM	Bypass valve closed
9/29/2011	5:49:39 PM	Bubbler valve closed
9/29/2011	5:49:39 PM	Helium valve opened
9/29/2011	5:49:39 PM	Main Vac valve opened
9/29/2011	5:49:39 PM	Helium MFC set to  20.000000
9/29/2011	5:49:39 PM	H2 MFC set to  0.000000
9/29/2011	5:49:39 PM	BCl3 MFC set to  0.000000
9/29/2011	5:49:39 PM	PHl3 MFC set to  0.000000
9/29/2011	5:49:39 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:49:39 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:49:40 PM	Tube furnace set to 300
9/29/2011	5:50:10 PM	Helium valve closed
9/29/2011	5:50:10 PM	H2 valve closed
9/29/2011	5:50:10 PM	BCl3 valve closed
9/29/2011	5:50:10 PM	PH3 valve closed
9/29/2011	5:50:10 PM	SiCl4 pre valve closed
9/29/2011	5:50:10 PM	SiCl4 post valve closed
9/29/2011	5:50:10 PM	Bypass valve closed
9/29/2011	5:50:10 PM	Bubbler valve closed
9/29/2011	5:50:10 PM	Main Vac valve opened
9/29/2011	5:50:10 PM	Helium MFC set to  0.000000
9/29/2011	5:50:10 PM	H2 MFC set to  0.000000
9/29/2011	5:50:10 PM	BCl3 MFC set to  0.000000
9/29/2011	5:50:10 PM	PHl3 MFC set to  0.000000
9/29/2011	5:50:10 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:50:10 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:50:10 PM	Tube furnace set to 300
9/29/2011	5:50:40 PM	H2 valve closed
9/29/2011	5:50:40 PM	BCl3 valve closed
9/29/2011	5:50:40 PM	PH3 valve closed
9/29/2011	5:50:40 PM	SiCl4 pre valve closed
9/29/2011	5:50:40 PM	SiCl4 post valve closed
9/29/2011	5:50:40 PM	Bypass valve closed
9/29/2011	5:50:40 PM	Bubbler valve closed
9/29/2011	5:50:40 PM	Helium valve opened
9/29/2011	5:50:40 PM	Main Vac valve opened
9/29/2011	5:50:40 PM	Helium MFC set to  20.000000
9/29/2011	5:50:40 PM	H2 MFC set to  0.000000
9/29/2011	5:50:40 PM	BCl3 MFC set to  0.000000
9/29/2011	5:50:40 PM	PHl3 MFC set to  0.000000
9/29/2011	5:50:40 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:50:40 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:50:40 PM	Tube furnace set to 300
9/29/2011	5:51:10 PM	Helium valve closed
9/29/2011	5:51:10 PM	H2 valve closed
9/29/2011	5:51:10 PM	BCl3 valve closed
9/29/2011	5:51:10 PM	PH3 valve closed
9/29/2011	5:51:10 PM	SiCl4 pre valve closed
9/29/2011	5:51:10 PM	SiCl4 post valve closed
9/29/2011	5:51:10 PM	Bypass valve closed
9/29/2011	5:51:10 PM	Bubbler valve closed
9/29/2011	5:51:10 PM	Main Vac valve opened
9/29/2011	5:51:10 PM	Helium MFC set to  0.000000
9/29/2011	5:51:10 PM	H2 MFC set to  0.000000
9/29/2011	5:51:10 PM	BCl3 MFC set to  0.000000
9/29/2011	5:51:10 PM	PHl3 MFC set to  0.000000
9/29/2011	5:51:10 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:51:10 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:51:10 PM	Tube furnace set to 300
9/29/2011	5:51:40 PM	H2 valve closed
9/29/2011	5:51:40 PM	BCl3 valve closed
9/29/2011	5:51:40 PM	PH3 valve closed
9/29/2011	5:51:40 PM	SiCl4 pre valve closed
9/29/2011	5:51:40 PM	SiCl4 post valve closed
9/29/2011	5:51:40 PM	Bypass valve closed
9/29/2011	5:51:40 PM	Bubbler valve closed
9/29/2011	5:51:40 PM	Helium valve opened
9/29/2011	5:51:40 PM	Main Vac valve opened
9/29/2011	5:51:40 PM	Helium MFC set to  20.000000
9/29/2011	5:51:40 PM	H2 MFC set to  0.000000
9/29/2011	5:51:40 PM	BCl3 MFC set to  0.000000
9/29/2011	5:51:40 PM	PHl3 MFC set to  0.000000
9/29/2011	5:51:40 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:51:40 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:51:41 PM	Tube furnace set to 300
9/29/2011	5:52:11 PM	Helium valve closed
9/29/2011	5:52:11 PM	H2 valve closed
9/29/2011	5:52:11 PM	BCl3 valve closed
9/29/2011	5:52:11 PM	PH3 valve closed
9/29/2011	5:52:11 PM	SiCl4 pre valve closed
9/29/2011	5:52:11 PM	SiCl4 post valve closed
9/29/2011	5:52:11 PM	Bypass valve closed
9/29/2011	5:52:11 PM	Bubbler valve closed
9/29/2011	5:52:11 PM	Main Vac valve opened
9/29/2011	5:52:11 PM	Helium MFC set to  0.000000
9/29/2011	5:52:11 PM	H2 MFC set to  0.000000
9/29/2011	5:52:11 PM	BCl3 MFC set to  0.000000
9/29/2011	5:52:11 PM	PHl3 MFC set to  0.000000
9/29/2011	5:52:11 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:52:11 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:52:11 PM	Tube furnace set to 300
9/29/2011	5:52:41 PM	H2 valve closed
9/29/2011	5:52:41 PM	BCl3 valve closed
9/29/2011	5:52:41 PM	PH3 valve closed
9/29/2011	5:52:41 PM	SiCl4 pre valve closed
9/29/2011	5:52:41 PM	SiCl4 post valve closed
9/29/2011	5:52:41 PM	Bypass valve closed
9/29/2011	5:52:41 PM	Bubbler valve closed
9/29/2011	5:52:41 PM	Helium valve opened
9/29/2011	5:52:41 PM	Main Vac valve opened
9/29/2011	5:52:41 PM	Helium MFC set to  20.000000
9/29/2011	5:52:41 PM	H2 MFC set to  0.000000
9/29/2011	5:52:41 PM	BCl3 MFC set to  0.000000
9/29/2011	5:52:41 PM	PHl3 MFC set to  0.000000
9/29/2011	5:52:41 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:52:41 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:52:41 PM	Tube furnace set to 300
9/29/2011	5:53:11 PM	Helium valve closed
9/29/2011	5:53:11 PM	H2 valve closed
9/29/2011	5:53:11 PM	BCl3 valve closed
9/29/2011	5:53:11 PM	PH3 valve closed
9/29/2011	5:53:11 PM	SiCl4 pre valve closed
9/29/2011	5:53:11 PM	SiCl4 post valve closed
9/29/2011	5:53:11 PM	Bypass valve closed
9/29/2011	5:53:11 PM	Bubbler valve closed
9/29/2011	5:53:11 PM	Main Vac valve opened
9/29/2011	5:53:11 PM	Helium MFC set to  0.000000
9/29/2011	5:53:11 PM	H2 MFC set to  0.000000
9/29/2011	5:53:11 PM	BCl3 MFC set to  0.000000
9/29/2011	5:53:11 PM	PHl3 MFC set to  0.000000
9/29/2011	5:53:11 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:53:11 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:53:11 PM	Tube furnace set to 300
9/29/2011	5:53:41 PM	H2 valve closed
9/29/2011	5:53:41 PM	BCl3 valve closed
9/29/2011	5:53:41 PM	PH3 valve closed
9/29/2011	5:53:41 PM	SiCl4 pre valve closed
9/29/2011	5:53:41 PM	SiCl4 post valve closed
9/29/2011	5:53:41 PM	Bypass valve closed
9/29/2011	5:53:41 PM	Bubbler valve closed
9/29/2011	5:53:41 PM	Helium valve opened
9/29/2011	5:53:41 PM	Main Vac valve opened
9/29/2011	5:53:41 PM	Helium MFC set to  20.000000
9/29/2011	5:53:41 PM	H2 MFC set to  0.000000
9/29/2011	5:53:41 PM	BCl3 MFC set to  0.000000
9/29/2011	5:53:41 PM	PHl3 MFC set to  0.000000
9/29/2011	5:53:41 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:53:41 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:53:41 PM	Tube furnace set to 300
9/29/2011	5:54:11 PM	Helium valve closed
9/29/2011	5:54:11 PM	H2 valve closed
9/29/2011	5:54:11 PM	BCl3 valve closed
9/29/2011	5:54:11 PM	PH3 valve closed
9/29/2011	5:54:11 PM	SiCl4 pre valve closed
9/29/2011	5:54:11 PM	SiCl4 post valve closed
9/29/2011	5:54:11 PM	Bypass valve closed
9/29/2011	5:54:11 PM	Bubbler valve closed
9/29/2011	5:54:11 PM	Main Vac valve opened
9/29/2011	5:54:11 PM	Helium MFC set to  0.000000
9/29/2011	5:54:11 PM	H2 MFC set to  0.000000
9/29/2011	5:54:11 PM	BCl3 MFC set to  0.000000
9/29/2011	5:54:11 PM	PHl3 MFC set to  0.000000
9/29/2011	5:54:11 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:54:11 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:54:12 PM	Tube furnace set to 300
9/29/2011	5:54:42 PM	H2 valve closed
9/29/2011	5:54:42 PM	BCl3 valve closed
9/29/2011	5:54:42 PM	PH3 valve closed
9/29/2011	5:54:42 PM	SiCl4 pre valve closed
9/29/2011	5:54:42 PM	SiCl4 post valve closed
9/29/2011	5:54:42 PM	Bypass valve closed
9/29/2011	5:54:42 PM	Bubbler valve closed
9/29/2011	5:54:42 PM	Helium valve opened
9/29/2011	5:54:42 PM	Main Vac valve opened
9/29/2011	5:54:42 PM	Helium MFC set to  20.000000
9/29/2011	5:54:42 PM	H2 MFC set to  0.000000
9/29/2011	5:54:42 PM	BCl3 MFC set to  0.000000
9/29/2011	5:54:42 PM	PHl3 MFC set to  0.000000
9/29/2011	5:54:42 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:54:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:54:42 PM	Tube furnace set to 300
9/29/2011	5:55:12 PM	Helium valve closed
9/29/2011	5:55:12 PM	H2 valve closed
9/29/2011	5:55:12 PM	BCl3 valve closed
9/29/2011	5:55:12 PM	PH3 valve closed
9/29/2011	5:55:12 PM	SiCl4 pre valve closed
9/29/2011	5:55:12 PM	SiCl4 post valve closed
9/29/2011	5:55:12 PM	Bypass valve closed
9/29/2011	5:55:12 PM	Bubbler valve closed
9/29/2011	5:55:12 PM	Main Vac valve opened
9/29/2011	5:55:12 PM	Helium MFC set to  0.000000
9/29/2011	5:55:12 PM	H2 MFC set to  0.000000
9/29/2011	5:55:12 PM	BCl3 MFC set to  0.000000
9/29/2011	5:55:12 PM	PHl3 MFC set to  0.000000
9/29/2011	5:55:12 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:55:12 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:55:12 PM	Tube furnace set to 300
9/29/2011	5:55:13 PM	Run finished at 5:55 PM
9/29/2011	5:56:30 PM	Main Vac valve closed
9/29/2011	5:56:36 PM	Main Vac valve opened
9/29/2011	5:57:09 PM	Recipe started at 5:57 PM
9/29/2011	5:57:09 PM	Helium valve closed
9/29/2011	5:57:09 PM	H2 valve closed
9/29/2011	5:57:09 PM	BCl3 valve closed
9/29/2011	5:57:09 PM	PH3 valve closed
9/29/2011	5:57:09 PM	SiCl4 pre valve closed
9/29/2011	5:57:09 PM	SiCl4 post valve closed
9/29/2011	5:57:09 PM	Bypass valve closed
9/29/2011	5:57:09 PM	Bubbler valve closed
9/29/2011	5:57:09 PM	Main Vac valve opened
9/29/2011	5:57:09 PM	Helium MFC set to  0.000000
9/29/2011	5:57:09 PM	H2 MFC set to  0.000000
9/29/2011	5:57:09 PM	BCl3 MFC set to  0.000000
9/29/2011	5:57:09 PM	PHl3 MFC set to  0.000000
9/29/2011	5:57:09 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:57:09 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:57:10 PM	Tube furnace set to 300
9/29/2011	5:57:12 PM	H2 valve closed
9/29/2011	5:57:12 PM	BCl3 valve closed
9/29/2011	5:57:12 PM	PH3 valve closed
9/29/2011	5:57:12 PM	SiCl4 pre valve closed
9/29/2011	5:57:12 PM	SiCl4 post valve closed
9/29/2011	5:57:12 PM	Bypass valve closed
9/29/2011	5:57:12 PM	Bubbler valve closed
9/29/2011	5:57:12 PM	Helium valve opened
9/29/2011	5:57:12 PM	Main Vac valve opened
9/29/2011	5:57:12 PM	Helium MFC set to  20.000000
9/29/2011	5:57:12 PM	H2 MFC set to  0.000000
9/29/2011	5:57:12 PM	BCl3 MFC set to  0.000000
9/29/2011	5:57:12 PM	PHl3 MFC set to  0.000000
9/29/2011	5:57:12 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:57:12 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:57:12 PM	Tube furnace set to 300
9/29/2011	5:57:42 PM	Helium valve closed
9/29/2011	5:57:42 PM	H2 valve closed
9/29/2011	5:57:42 PM	BCl3 valve closed
9/29/2011	5:57:42 PM	PH3 valve closed
9/29/2011	5:57:42 PM	SiCl4 pre valve closed
9/29/2011	5:57:42 PM	SiCl4 post valve closed
9/29/2011	5:57:42 PM	Bypass valve closed
9/29/2011	5:57:42 PM	Bubbler valve closed
9/29/2011	5:57:42 PM	Main Vac valve opened
9/29/2011	5:57:42 PM	Helium MFC set to  0.000000
9/29/2011	5:57:42 PM	H2 MFC set to  0.000000
9/29/2011	5:57:42 PM	BCl3 MFC set to  0.000000
9/29/2011	5:57:42 PM	PHl3 MFC set to  0.000000
9/29/2011	5:57:42 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:57:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:57:42 PM	Tube furnace set to 300
9/29/2011	5:58:12 PM	H2 valve closed
9/29/2011	5:58:12 PM	BCl3 valve closed
9/29/2011	5:58:12 PM	PH3 valve closed
9/29/2011	5:58:12 PM	SiCl4 pre valve closed
9/29/2011	5:58:12 PM	SiCl4 post valve closed
9/29/2011	5:58:12 PM	Bypass valve closed
9/29/2011	5:58:12 PM	Bubbler valve closed
9/29/2011	5:58:12 PM	Helium valve opened
9/29/2011	5:58:12 PM	Main Vac valve opened
9/29/2011	5:58:12 PM	Helium MFC set to  20.000000
9/29/2011	5:58:12 PM	H2 MFC set to  0.000000
9/29/2011	5:58:12 PM	BCl3 MFC set to  0.000000
9/29/2011	5:58:12 PM	PHl3 MFC set to  0.000000
9/29/2011	5:58:12 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:58:12 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:58:12 PM	Tube furnace set to 300
9/29/2011	5:58:42 PM	Helium valve closed
9/29/2011	5:58:42 PM	H2 valve closed
9/29/2011	5:58:42 PM	BCl3 valve closed
9/29/2011	5:58:42 PM	PH3 valve closed
9/29/2011	5:58:42 PM	SiCl4 pre valve closed
9/29/2011	5:58:42 PM	SiCl4 post valve closed
9/29/2011	5:58:42 PM	Bypass valve closed
9/29/2011	5:58:42 PM	Bubbler valve closed
9/29/2011	5:58:42 PM	Main Vac valve opened
9/29/2011	5:58:42 PM	Helium MFC set to  0.000000
9/29/2011	5:58:42 PM	H2 MFC set to  0.000000
9/29/2011	5:58:42 PM	BCl3 MFC set to  0.000000
9/29/2011	5:58:42 PM	PHl3 MFC set to  0.000000
9/29/2011	5:58:42 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:58:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:58:42 PM	Tube furnace set to 300
9/29/2011	5:59:12 PM	H2 valve closed
9/29/2011	5:59:12 PM	BCl3 valve closed
9/29/2011	5:59:12 PM	PH3 valve closed
9/29/2011	5:59:12 PM	SiCl4 pre valve closed
9/29/2011	5:59:12 PM	SiCl4 post valve closed
9/29/2011	5:59:12 PM	Bypass valve closed
9/29/2011	5:59:12 PM	Bubbler valve closed
9/29/2011	5:59:12 PM	Helium valve opened
9/29/2011	5:59:12 PM	Main Vac valve opened
9/29/2011	5:59:12 PM	Helium MFC set to  20.000000
9/29/2011	5:59:12 PM	H2 MFC set to  0.000000
9/29/2011	5:59:12 PM	BCl3 MFC set to  0.000000
9/29/2011	5:59:12 PM	PHl3 MFC set to  0.000000
9/29/2011	5:59:12 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:59:12 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:59:13 PM	Tube furnace set to 300
9/29/2011	5:59:43 PM	Helium valve closed
9/29/2011	5:59:43 PM	H2 valve closed
9/29/2011	5:59:43 PM	BCl3 valve closed
9/29/2011	5:59:43 PM	PH3 valve closed
9/29/2011	5:59:43 PM	SiCl4 pre valve closed
9/29/2011	5:59:43 PM	SiCl4 post valve closed
9/29/2011	5:59:43 PM	Bypass valve closed
9/29/2011	5:59:43 PM	Bubbler valve closed
9/29/2011	5:59:43 PM	Main Vac valve opened
9/29/2011	5:59:43 PM	Helium MFC set to  0.000000
9/29/2011	5:59:43 PM	H2 MFC set to  0.000000
9/29/2011	5:59:43 PM	BCl3 MFC set to  0.000000
9/29/2011	5:59:43 PM	PHl3 MFC set to  0.000000
9/29/2011	5:59:43 PM	SiCl4 MFC set to  0.000000
9/29/2011	5:59:43 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	5:59:43 PM	Tube furnace set to 300
9/29/2011	6:00:13 PM	H2 valve closed
9/29/2011	6:00:13 PM	BCl3 valve closed
9/29/2011	6:00:13 PM	PH3 valve closed
9/29/2011	6:00:13 PM	SiCl4 pre valve closed
9/29/2011	6:00:13 PM	SiCl4 post valve closed
9/29/2011	6:00:13 PM	Bypass valve closed
9/29/2011	6:00:13 PM	Bubbler valve closed
9/29/2011	6:00:13 PM	Helium valve opened
9/29/2011	6:00:13 PM	Main Vac valve opened
9/29/2011	6:00:13 PM	Helium MFC set to  20.000000
9/29/2011	6:00:13 PM	H2 MFC set to  0.000000
9/29/2011	6:00:13 PM	BCl3 MFC set to  0.000000
9/29/2011	6:00:13 PM	PHl3 MFC set to  0.000000
9/29/2011	6:00:13 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:00:13 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:00:13 PM	Tube furnace set to 300
9/29/2011	6:00:43 PM	Helium valve closed
9/29/2011	6:00:43 PM	H2 valve closed
9/29/2011	6:00:43 PM	BCl3 valve closed
9/29/2011	6:00:43 PM	PH3 valve closed
9/29/2011	6:00:43 PM	SiCl4 pre valve closed
9/29/2011	6:00:43 PM	SiCl4 post valve closed
9/29/2011	6:00:43 PM	Bypass valve closed
9/29/2011	6:00:43 PM	Bubbler valve closed
9/29/2011	6:00:43 PM	Main Vac valve opened
9/29/2011	6:00:43 PM	Helium MFC set to  0.000000
9/29/2011	6:00:43 PM	H2 MFC set to  0.000000
9/29/2011	6:00:43 PM	BCl3 MFC set to  0.000000
9/29/2011	6:00:43 PM	PHl3 MFC set to  0.000000
9/29/2011	6:00:43 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:00:43 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:00:43 PM	Tube furnace set to 300
9/29/2011	6:01:13 PM	H2 valve closed
9/29/2011	6:01:13 PM	BCl3 valve closed
9/29/2011	6:01:13 PM	PH3 valve closed
9/29/2011	6:01:13 PM	SiCl4 pre valve closed
9/29/2011	6:01:13 PM	SiCl4 post valve closed
9/29/2011	6:01:13 PM	Bypass valve closed
9/29/2011	6:01:13 PM	Bubbler valve closed
9/29/2011	6:01:13 PM	Helium valve opened
9/29/2011	6:01:13 PM	Main Vac valve opened
9/29/2011	6:01:13 PM	Helium MFC set to  20.000000
9/29/2011	6:01:13 PM	H2 MFC set to  0.000000
9/29/2011	6:01:13 PM	BCl3 MFC set to  0.000000
9/29/2011	6:01:13 PM	PHl3 MFC set to  0.000000
9/29/2011	6:01:13 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:01:13 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:01:13 PM	Tube furnace set to 300
9/29/2011	6:01:43 PM	Helium valve closed
9/29/2011	6:01:43 PM	H2 valve closed
9/29/2011	6:01:43 PM	BCl3 valve closed
9/29/2011	6:01:43 PM	PH3 valve closed
9/29/2011	6:01:43 PM	SiCl4 pre valve closed
9/29/2011	6:01:43 PM	SiCl4 post valve closed
9/29/2011	6:01:43 PM	Bypass valve closed
9/29/2011	6:01:43 PM	Bubbler valve closed
9/29/2011	6:01:43 PM	Main Vac valve opened
9/29/2011	6:01:43 PM	Helium MFC set to  0.000000
9/29/2011	6:01:43 PM	H2 MFC set to  0.000000
9/29/2011	6:01:43 PM	BCl3 MFC set to  0.000000
9/29/2011	6:01:43 PM	PHl3 MFC set to  0.000000
9/29/2011	6:01:43 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:01:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:01:44 PM	Tube furnace set to 300
9/29/2011	6:02:14 PM	H2 valve closed
9/29/2011	6:02:14 PM	BCl3 valve closed
9/29/2011	6:02:14 PM	PH3 valve closed
9/29/2011	6:02:14 PM	SiCl4 pre valve closed
9/29/2011	6:02:14 PM	SiCl4 post valve closed
9/29/2011	6:02:14 PM	Bypass valve closed
9/29/2011	6:02:14 PM	Bubbler valve closed
9/29/2011	6:02:14 PM	Helium valve opened
9/29/2011	6:02:14 PM	Main Vac valve opened
9/29/2011	6:02:14 PM	Helium MFC set to  20.000000
9/29/2011	6:02:14 PM	H2 MFC set to  0.000000
9/29/2011	6:02:14 PM	BCl3 MFC set to  0.000000
9/29/2011	6:02:14 PM	PHl3 MFC set to  0.000000
9/29/2011	6:02:14 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:02:14 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:02:14 PM	Tube furnace set to 300
9/29/2011	6:02:44 PM	Helium valve closed
9/29/2011	6:02:44 PM	H2 valve closed
9/29/2011	6:02:44 PM	BCl3 valve closed
9/29/2011	6:02:44 PM	PH3 valve closed
9/29/2011	6:02:44 PM	SiCl4 pre valve closed
9/29/2011	6:02:44 PM	SiCl4 post valve closed
9/29/2011	6:02:44 PM	Bypass valve closed
9/29/2011	6:02:44 PM	Bubbler valve closed
9/29/2011	6:02:44 PM	Main Vac valve opened
9/29/2011	6:02:44 PM	Helium MFC set to  0.000000
9/29/2011	6:02:44 PM	H2 MFC set to  0.000000
9/29/2011	6:02:44 PM	BCl3 MFC set to  0.000000
9/29/2011	6:02:44 PM	PHl3 MFC set to  0.000000
9/29/2011	6:02:44 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:02:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:02:44 PM	Tube furnace set to 300
9/29/2011	6:03:14 PM	H2 valve closed
9/29/2011	6:03:14 PM	BCl3 valve closed
9/29/2011	6:03:14 PM	PH3 valve closed
9/29/2011	6:03:14 PM	SiCl4 pre valve closed
9/29/2011	6:03:14 PM	SiCl4 post valve closed
9/29/2011	6:03:14 PM	Bypass valve closed
9/29/2011	6:03:14 PM	Bubbler valve closed
9/29/2011	6:03:14 PM	Helium valve opened
9/29/2011	6:03:14 PM	Main Vac valve opened
9/29/2011	6:03:14 PM	Helium MFC set to  20.000000
9/29/2011	6:03:14 PM	H2 MFC set to  0.000000
9/29/2011	6:03:14 PM	BCl3 MFC set to  0.000000
9/29/2011	6:03:14 PM	PHl3 MFC set to  0.000000
9/29/2011	6:03:14 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:03:14 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:03:14 PM	Tube furnace set to 300
9/29/2011	6:03:44 PM	Helium valve closed
9/29/2011	6:03:44 PM	H2 valve closed
9/29/2011	6:03:44 PM	BCl3 valve closed
9/29/2011	6:03:44 PM	PH3 valve closed
9/29/2011	6:03:44 PM	SiCl4 pre valve closed
9/29/2011	6:03:44 PM	SiCl4 post valve closed
9/29/2011	6:03:44 PM	Bypass valve closed
9/29/2011	6:03:44 PM	Bubbler valve closed
9/29/2011	6:03:44 PM	Main Vac valve opened
9/29/2011	6:03:44 PM	Helium MFC set to  0.000000
9/29/2011	6:03:44 PM	H2 MFC set to  0.000000
9/29/2011	6:03:44 PM	BCl3 MFC set to  0.000000
9/29/2011	6:03:44 PM	PHl3 MFC set to  0.000000
9/29/2011	6:03:44 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:03:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:03:44 PM	Tube furnace set to 300
9/29/2011	6:04:15 PM	H2 valve closed
9/29/2011	6:04:15 PM	BCl3 valve closed
9/29/2011	6:04:15 PM	PH3 valve closed
9/29/2011	6:04:15 PM	SiCl4 pre valve closed
9/29/2011	6:04:15 PM	SiCl4 post valve closed
9/29/2011	6:04:15 PM	Bypass valve closed
9/29/2011	6:04:15 PM	Bubbler valve closed
9/29/2011	6:04:15 PM	Helium valve opened
9/29/2011	6:04:15 PM	Main Vac valve opened
9/29/2011	6:04:15 PM	Helium MFC set to  20.000000
9/29/2011	6:04:15 PM	H2 MFC set to  0.000000
9/29/2011	6:04:15 PM	BCl3 MFC set to  0.000000
9/29/2011	6:04:15 PM	PHl3 MFC set to  0.000000
9/29/2011	6:04:15 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:04:15 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:04:15 PM	Tube furnace set to 300
9/29/2011	6:04:45 PM	Helium valve closed
9/29/2011	6:04:45 PM	H2 valve closed
9/29/2011	6:04:45 PM	BCl3 valve closed
9/29/2011	6:04:45 PM	PH3 valve closed
9/29/2011	6:04:45 PM	SiCl4 pre valve closed
9/29/2011	6:04:45 PM	SiCl4 post valve closed
9/29/2011	6:04:45 PM	Bypass valve closed
9/29/2011	6:04:45 PM	Bubbler valve closed
9/29/2011	6:04:45 PM	Main Vac valve opened
9/29/2011	6:04:45 PM	Helium MFC set to  0.000000
9/29/2011	6:04:45 PM	H2 MFC set to  0.000000
9/29/2011	6:04:45 PM	BCl3 MFC set to  0.000000
9/29/2011	6:04:45 PM	PHl3 MFC set to  0.000000
9/29/2011	6:04:45 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:04:45 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:04:45 PM	Tube furnace set to 300
9/29/2011	6:05:15 PM	H2 valve closed
9/29/2011	6:05:15 PM	BCl3 valve closed
9/29/2011	6:05:15 PM	PH3 valve closed
9/29/2011	6:05:15 PM	SiCl4 pre valve closed
9/29/2011	6:05:15 PM	SiCl4 post valve closed
9/29/2011	6:05:15 PM	Bypass valve closed
9/29/2011	6:05:15 PM	Bubbler valve closed
9/29/2011	6:05:15 PM	Helium valve opened
9/29/2011	6:05:15 PM	Main Vac valve opened
9/29/2011	6:05:15 PM	Helium MFC set to  20.000000
9/29/2011	6:05:15 PM	H2 MFC set to  0.000000
9/29/2011	6:05:15 PM	BCl3 MFC set to  0.000000
9/29/2011	6:05:15 PM	PHl3 MFC set to  0.000000
9/29/2011	6:05:15 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:05:15 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:05:15 PM	Tube furnace set to 300
9/29/2011	6:05:45 PM	Helium valve closed
9/29/2011	6:05:45 PM	H2 valve closed
9/29/2011	6:05:45 PM	BCl3 valve closed
9/29/2011	6:05:45 PM	PH3 valve closed
9/29/2011	6:05:45 PM	SiCl4 pre valve closed
9/29/2011	6:05:45 PM	SiCl4 post valve closed
9/29/2011	6:05:45 PM	Bypass valve closed
9/29/2011	6:05:45 PM	Bubbler valve closed
9/29/2011	6:05:45 PM	Main Vac valve opened
9/29/2011	6:05:45 PM	Helium MFC set to  0.000000
9/29/2011	6:05:45 PM	H2 MFC set to  0.000000
9/29/2011	6:05:45 PM	BCl3 MFC set to  0.000000
9/29/2011	6:05:45 PM	PHl3 MFC set to  0.000000
9/29/2011	6:05:45 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:05:45 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:05:45 PM	Tube furnace set to 300
9/29/2011	6:06:15 PM	H2 valve closed
9/29/2011	6:06:15 PM	BCl3 valve closed
9/29/2011	6:06:15 PM	PH3 valve closed
9/29/2011	6:06:15 PM	SiCl4 pre valve closed
9/29/2011	6:06:15 PM	SiCl4 post valve closed
9/29/2011	6:06:15 PM	Bypass valve closed
9/29/2011	6:06:15 PM	Bubbler valve closed
9/29/2011	6:06:15 PM	Helium valve opened
9/29/2011	6:06:15 PM	Main Vac valve opened
9/29/2011	6:06:15 PM	Helium MFC set to  20.000000
9/29/2011	6:06:15 PM	H2 MFC set to  0.000000
9/29/2011	6:06:15 PM	BCl3 MFC set to  0.000000
9/29/2011	6:06:15 PM	PHl3 MFC set to  0.000000
9/29/2011	6:06:15 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:06:15 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:06:16 PM	Tube furnace set to 300
9/29/2011	6:06:46 PM	Helium valve closed
9/29/2011	6:06:46 PM	H2 valve closed
9/29/2011	6:06:46 PM	BCl3 valve closed
9/29/2011	6:06:46 PM	PH3 valve closed
9/29/2011	6:06:46 PM	SiCl4 pre valve closed
9/29/2011	6:06:46 PM	SiCl4 post valve closed
9/29/2011	6:06:46 PM	Bypass valve closed
9/29/2011	6:06:46 PM	Bubbler valve closed
9/29/2011	6:06:46 PM	Main Vac valve opened
9/29/2011	6:06:46 PM	Helium MFC set to  0.000000
9/29/2011	6:06:46 PM	H2 MFC set to  0.000000
9/29/2011	6:06:46 PM	BCl3 MFC set to  0.000000
9/29/2011	6:06:46 PM	PHl3 MFC set to  0.000000
9/29/2011	6:06:46 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:06:46 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:06:46 PM	Tube furnace set to 300
9/29/2011	6:06:47 PM	Run finished at 6:06 PM
9/29/2011	6:11:49 PM	Main Vac valve closed
9/29/2011	6:11:54 PM	Main Vac valve opened
9/29/2011	6:14:54 PM	Recipe started at 6:14 PM
9/29/2011	6:14:54 PM	Helium valve closed
9/29/2011	6:14:54 PM	H2 valve closed
9/29/2011	6:14:54 PM	BCl3 valve closed
9/29/2011	6:14:54 PM	PH3 valve closed
9/29/2011	6:14:54 PM	SiCl4 pre valve closed
9/29/2011	6:14:54 PM	SiCl4 post valve closed
9/29/2011	6:14:54 PM	Main Vac valve closed
9/29/2011	6:14:54 PM	Bypass valve closed
9/29/2011	6:14:54 PM	Bubbler valve closed
9/29/2011	6:14:54 PM	Helium MFC set to  0.000000
9/29/2011	6:14:54 PM	H2 MFC set to  0.000000
9/29/2011	6:14:54 PM	BCl3 MFC set to  0.000000
9/29/2011	6:14:54 PM	PHl3 MFC set to  0.000000
9/29/2011	6:14:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:14:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:14:55 PM	Tube furnace set to 0
9/29/2011	6:14:58 PM	Helium valve closed
9/29/2011	6:14:58 PM	BCl3 valve closed
9/29/2011	6:14:58 PM	PH3 valve closed
9/29/2011	6:14:58 PM	SiCl4 pre valve closed
9/29/2011	6:14:58 PM	SiCl4 post valve closed
9/29/2011	6:14:58 PM	Main Vac valve closed
9/29/2011	6:14:58 PM	Bypass valve closed
9/29/2011	6:14:58 PM	Bubbler valve closed
9/29/2011	6:14:58 PM	H2 valve opened
9/29/2011	6:14:58 PM	Helium MFC set to  0.000000
9/29/2011	6:14:58 PM	H2 MFC set to  500.000000
9/29/2011	6:14:58 PM	BCl3 MFC set to  0.000000
9/29/2011	6:14:58 PM	PHl3 MFC set to  0.000000
9/29/2011	6:14:58 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:14:58 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:14:58 PM	Tube furnace set to 0
9/29/2011	6:15:59 PM	Helium valve closed
9/29/2011	6:15:59 PM	BCl3 valve closed
9/29/2011	6:15:59 PM	PH3 valve closed
9/29/2011	6:15:59 PM	SiCl4 pre valve closed
9/29/2011	6:15:59 PM	SiCl4 post valve closed
9/29/2011	6:15:59 PM	Main Vac valve closed
9/29/2011	6:15:59 PM	Bypass valve closed
9/29/2011	6:15:59 PM	H2 valve opened
9/29/2011	6:15:59 PM	Bubbler valve opened
9/29/2011	6:15:59 PM	Helium MFC set to  0.000000
9/29/2011	6:15:59 PM	H2 MFC set to  500.000000
9/29/2011	6:15:59 PM	BCl3 MFC set to  0.000000
9/29/2011	6:15:59 PM	PHl3 MFC set to  0.000000
9/29/2011	6:15:59 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:15:59 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:15:59 PM	Tube furnace set to 0
9/29/2011	6:16:00 PM	Helium valve closed
9/29/2011	6:16:00 PM	BCl3 valve closed
9/29/2011	6:16:00 PM	PH3 valve closed
9/29/2011	6:16:00 PM	SiCl4 pre valve closed
9/29/2011	6:16:00 PM	SiCl4 post valve closed
9/29/2011	6:16:00 PM	Main Vac valve closed
9/29/2011	6:16:00 PM	Bypass valve closed
9/29/2011	6:16:00 PM	H2 valve opened
9/29/2011	6:16:00 PM	Bubbler valve opened
9/29/2011	6:16:00 PM	Helium MFC set to  0.000000
9/29/2011	6:16:00 PM	H2 MFC set to  500.000000
9/29/2011	6:16:00 PM	BCl3 MFC set to  0.000000
9/29/2011	6:16:00 PM	PHl3 MFC set to  0.000000
9/29/2011	6:16:00 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:16:00 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:16:00 PM	Tube furnace set to 1000
9/29/2011	6:36:00 PM	Helium valve closed
9/29/2011	6:36:00 PM	PH3 valve closed
9/29/2011	6:36:00 PM	Main Vac valve closed
9/29/2011	6:36:00 PM	Bypass valve closed
9/29/2011	6:36:00 PM	H2 valve opened
9/29/2011	6:36:00 PM	BCl3 valve opened
9/29/2011	6:36:00 PM	SiCl4 pre valve opened
9/29/2011	6:36:00 PM	SiCl4 post valve opened
9/29/2011	6:36:00 PM	Bubbler valve opened
9/29/2011	6:36:00 PM	Helium MFC set to  0.000000
9/29/2011	6:36:00 PM	H2 MFC set to  500.000000
9/29/2011	6:36:00 PM	BCl3 MFC set to  2.300000
9/29/2011	6:36:00 PM	PHl3 MFC set to  0.000000
9/29/2011	6:36:00 PM	SiCl4 MFC set to  50.000000
9/29/2011	6:36:00 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:36:00 PM	Tube furnace set to 1000
9/29/2011	6:52:00 PM	Helium valve closed
9/29/2011	6:52:00 PM	BCl3 valve closed
9/29/2011	6:52:00 PM	PH3 valve closed
9/29/2011	6:52:00 PM	SiCl4 pre valve closed
9/29/2011	6:52:00 PM	SiCl4 post valve closed
9/29/2011	6:52:00 PM	Main Vac valve closed
9/29/2011	6:52:00 PM	Bypass valve closed
9/29/2011	6:52:00 PM	H2 valve opened
9/29/2011	6:52:00 PM	Bubbler valve opened
9/29/2011	6:52:00 PM	Helium MFC set to  0.000000
9/29/2011	6:52:00 PM	H2 MFC set to  500.000000
9/29/2011	6:52:00 PM	BCl3 MFC set to  0.000000
9/29/2011	6:52:00 PM	PHl3 MFC set to  0.000000
9/29/2011	6:52:00 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:52:00 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:52:01 PM	Tube furnace set to 750
9/29/2011	6:57:01 PM	H2 valve closed
9/29/2011	6:57:01 PM	BCl3 valve closed
9/29/2011	6:57:01 PM	PH3 valve closed
9/29/2011	6:57:01 PM	SiCl4 pre valve closed
9/29/2011	6:57:01 PM	SiCl4 post valve closed
9/29/2011	6:57:01 PM	Main Vac valve closed
9/29/2011	6:57:01 PM	Bypass valve closed
9/29/2011	6:57:01 PM	Helium valve opened
9/29/2011	6:57:01 PM	Bubbler valve opened
9/29/2011	6:57:01 PM	Helium MFC set to  500.000000
9/29/2011	6:57:01 PM	H2 MFC set to  0.000000
9/29/2011	6:57:01 PM	BCl3 MFC set to  0.000000
9/29/2011	6:57:01 PM	PHl3 MFC set to  0.000000
9/29/2011	6:57:01 PM	SiCl4 MFC set to  0.000000
9/29/2011	6:57:01 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	6:57:01 PM	Tube furnace set to 0
9/29/2011	7:08:20 PM	Helium valve closed
9/29/2011	7:08:20 PM	H2 valve closed
9/29/2011	7:08:20 PM	BCl3 valve closed
9/29/2011	7:08:20 PM	PH3 valve closed
9/29/2011	7:08:20 PM	SiCl4 pre valve closed
9/29/2011	7:08:20 PM	SiCl4 post valve closed
9/29/2011	7:08:20 PM	Main Vac valve closed
9/29/2011	7:08:20 PM	Bypass valve closed
9/29/2011	7:08:20 PM	Bubbler valve closed
9/29/2011	7:08:20 PM	Helium MFC set to  0.000000
9/29/2011	7:08:20 PM	H2 MFC set to  0.000000
9/29/2011	7:08:20 PM	BCl3 MFC set to  0.000000
9/29/2011	7:08:20 PM	PHl3 MFC set to  0.000000
9/29/2011	7:08:20 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:08:20 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:08:20 PM	Tube furnace set to 0
9/29/2011	7:08:21 PM	Run finished at 7:08 PM
9/29/2011	7:08:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	7:08:28 PM	Recipe started at 7:08 PM
9/29/2011	7:08:28 PM	Helium valve closed
9/29/2011	7:08:28 PM	H2 valve closed
9/29/2011	7:08:28 PM	BCl3 valve closed
9/29/2011	7:08:28 PM	PH3 valve closed
9/29/2011	7:08:28 PM	SiCl4 pre valve closed
9/29/2011	7:08:28 PM	SiCl4 post valve closed
9/29/2011	7:08:28 PM	Main Vac valve closed
9/29/2011	7:08:28 PM	Bypass valve closed
9/29/2011	7:08:28 PM	Bubbler valve closed
9/29/2011	7:08:28 PM	Helium MFC set to  0.000000
9/29/2011	7:08:28 PM	H2 MFC set to  0.000000
9/29/2011	7:08:28 PM	BCl3 MFC set to  0.000000
9/29/2011	7:08:28 PM	PHl3 MFC set to  0.000000
9/29/2011	7:08:28 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:08:28 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:08:28 PM	Tube furnace set to 0
9/29/2011	7:08:31 PM	H2 valve closed
9/29/2011	7:08:31 PM	BCl3 valve closed
9/29/2011	7:08:31 PM	PH3 valve closed
9/29/2011	7:08:31 PM	SiCl4 pre valve closed
9/29/2011	7:08:31 PM	SiCl4 post valve closed
9/29/2011	7:08:31 PM	Main Vac valve closed
9/29/2011	7:08:31 PM	Bypass valve closed
9/29/2011	7:08:31 PM	Bubbler valve closed
9/29/2011	7:08:31 PM	Helium valve opened
9/29/2011	7:08:31 PM	Helium MFC set to  500.000000
9/29/2011	7:08:31 PM	H2 MFC set to  0.000000
9/29/2011	7:08:31 PM	BCl3 MFC set to  0.000000
9/29/2011	7:08:31 PM	PHl3 MFC set to  0.000000
9/29/2011	7:08:31 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:08:31 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:08:31 PM	Tube furnace set to 0
9/29/2011	7:08:31 PM	Helium valve closed
9/29/2011	7:08:31 PM	H2 valve closed
9/29/2011	7:08:31 PM	BCl3 valve closed
9/29/2011	7:08:31 PM	PH3 valve closed
9/29/2011	7:08:31 PM	SiCl4 pre valve closed
9/29/2011	7:08:31 PM	SiCl4 post valve closed
9/29/2011	7:08:31 PM	Main Vac valve closed
9/29/2011	7:08:31 PM	Bypass valve closed
9/29/2011	7:08:31 PM	Bubbler valve closed
9/29/2011	7:08:31 PM	Helium MFC set to  0.000000
9/29/2011	7:08:31 PM	H2 MFC set to  0.000000
9/29/2011	7:08:31 PM	BCl3 MFC set to  0.000000
9/29/2011	7:08:31 PM	PHl3 MFC set to  0.000000
9/29/2011	7:08:31 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:08:31 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:08:31 PM	Tube furnace set to 0
9/29/2011	7:08:32 PM	Run finished at 7:08 PM
9/29/2011	7:08:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	7:33:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	7:33:06 PM	Recipe started at 7:33 PM
9/29/2011	7:33:06 PM	Helium valve closed
9/29/2011	7:33:06 PM	H2 valve closed
9/29/2011	7:33:06 PM	BCl3 valve closed
9/29/2011	7:33:06 PM	PH3 valve closed
9/29/2011	7:33:06 PM	SiCl4 pre valve closed
9/29/2011	7:33:06 PM	SiCl4 post valve closed
9/29/2011	7:33:06 PM	Main Vac valve closed
9/29/2011	7:33:06 PM	Bubbler valve closed
9/29/2011	7:33:06 PM	Bypass valve opened
9/29/2011	7:33:06 PM	Helium MFC set to  0.000000
9/29/2011	7:33:06 PM	H2 MFC set to  0.000000
9/29/2011	7:33:06 PM	BCl3 MFC set to  0.000000
9/29/2011	7:33:06 PM	PHl3 MFC set to  0.000000
9/29/2011	7:33:06 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:33:06 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:33:06 PM	Tube furnace set to 0
9/29/2011	7:34:22 PM	Helium valve closed
9/29/2011	7:34:22 PM	H2 valve closed
9/29/2011	7:34:22 PM	BCl3 valve closed
9/29/2011	7:34:22 PM	PH3 valve closed
9/29/2011	7:34:22 PM	SiCl4 pre valve closed
9/29/2011	7:34:22 PM	SiCl4 post valve closed
9/29/2011	7:34:22 PM	Main Vac valve closed
9/29/2011	7:34:22 PM	Bubbler valve closed
9/29/2011	7:34:22 PM	Bypass valve opened
9/29/2011	7:34:22 PM	Helium MFC set to  0.000000
9/29/2011	7:34:22 PM	H2 MFC set to  0.000000
9/29/2011	7:34:22 PM	BCl3 MFC set to  0.000000
9/29/2011	7:34:22 PM	PHl3 MFC set to  0.000000
9/29/2011	7:34:22 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:34:22 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:34:22 PM	Tube furnace set to 0
9/29/2011	7:35:22 PM	Helium valve closed
9/29/2011	7:35:22 PM	H2 valve closed
9/29/2011	7:35:22 PM	BCl3 valve closed
9/29/2011	7:35:22 PM	PH3 valve closed
9/29/2011	7:35:22 PM	SiCl4 pre valve closed
9/29/2011	7:35:22 PM	SiCl4 post valve closed
9/29/2011	7:35:22 PM	Bypass valve closed
9/29/2011	7:35:22 PM	Bubbler valve closed
9/29/2011	7:35:22 PM	Main Vac valve opened
9/29/2011	7:35:22 PM	Helium MFC set to  0.000000
9/29/2011	7:35:22 PM	H2 MFC set to  0.000000
9/29/2011	7:35:22 PM	BCl3 MFC set to  0.000000
9/29/2011	7:35:22 PM	PHl3 MFC set to  0.000000
9/29/2011	7:35:22 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:35:22 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:35:22 PM	Tube furnace set to 0
9/29/2011	7:35:23 PM	Run finished at 7:35 PM
9/29/2011	7:35:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	7:36:30 PM	Recipe started at 7:36 PM
9/29/2011	7:36:30 PM	Helium valve closed
9/29/2011	7:36:30 PM	H2 valve closed
9/29/2011	7:36:30 PM	BCl3 valve closed
9/29/2011	7:36:30 PM	PH3 valve closed
9/29/2011	7:36:30 PM	SiCl4 pre valve closed
9/29/2011	7:36:30 PM	SiCl4 post valve closed
9/29/2011	7:36:30 PM	Bypass valve closed
9/29/2011	7:36:30 PM	Bubbler valve closed
9/29/2011	7:36:30 PM	Main Vac valve opened
9/29/2011	7:36:30 PM	Helium MFC set to  0.000000
9/29/2011	7:36:30 PM	H2 MFC set to  0.000000
9/29/2011	7:36:30 PM	BCl3 MFC set to  0.000000
9/29/2011	7:36:30 PM	PHl3 MFC set to  0.000000
9/29/2011	7:36:30 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:36:30 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:36:30 PM	Tube furnace set to 300
9/29/2011	7:37:00 PM	H2 valve closed
9/29/2011	7:37:00 PM	BCl3 valve closed
9/29/2011	7:37:00 PM	PH3 valve closed
9/29/2011	7:37:00 PM	SiCl4 pre valve closed
9/29/2011	7:37:00 PM	SiCl4 post valve closed
9/29/2011	7:37:00 PM	Bypass valve closed
9/29/2011	7:37:00 PM	Bubbler valve closed
9/29/2011	7:37:00 PM	Helium valve opened
9/29/2011	7:37:00 PM	Main Vac valve opened
9/29/2011	7:37:00 PM	Helium MFC set to  20.000000
9/29/2011	7:37:00 PM	H2 MFC set to  0.000000
9/29/2011	7:37:00 PM	BCl3 MFC set to  0.000000
9/29/2011	7:37:00 PM	PHl3 MFC set to  0.000000
9/29/2011	7:37:00 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:37:00 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:37:00 PM	Tube furnace set to 300
9/29/2011	7:37:30 PM	Helium valve closed
9/29/2011	7:37:30 PM	H2 valve closed
9/29/2011	7:37:30 PM	BCl3 valve closed
9/29/2011	7:37:30 PM	PH3 valve closed
9/29/2011	7:37:30 PM	SiCl4 pre valve closed
9/29/2011	7:37:30 PM	SiCl4 post valve closed
9/29/2011	7:37:30 PM	Bypass valve closed
9/29/2011	7:37:30 PM	Bubbler valve closed
9/29/2011	7:37:30 PM	Main Vac valve opened
9/29/2011	7:37:30 PM	Helium MFC set to  0.000000
9/29/2011	7:37:30 PM	H2 MFC set to  0.000000
9/29/2011	7:37:30 PM	BCl3 MFC set to  0.000000
9/29/2011	7:37:30 PM	PHl3 MFC set to  0.000000
9/29/2011	7:37:30 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:37:30 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:37:30 PM	Tube furnace set to 300
9/29/2011	7:38:00 PM	H2 valve closed
9/29/2011	7:38:00 PM	BCl3 valve closed
9/29/2011	7:38:00 PM	PH3 valve closed
9/29/2011	7:38:00 PM	SiCl4 pre valve closed
9/29/2011	7:38:00 PM	SiCl4 post valve closed
9/29/2011	7:38:00 PM	Bypass valve closed
9/29/2011	7:38:00 PM	Bubbler valve closed
9/29/2011	7:38:00 PM	Helium valve opened
9/29/2011	7:38:00 PM	Main Vac valve opened
9/29/2011	7:38:00 PM	Helium MFC set to  20.000000
9/29/2011	7:38:00 PM	H2 MFC set to  0.000000
9/29/2011	7:38:00 PM	BCl3 MFC set to  0.000000
9/29/2011	7:38:00 PM	PHl3 MFC set to  0.000000
9/29/2011	7:38:00 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:38:00 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:38:01 PM	Tube furnace set to 300
9/29/2011	7:38:31 PM	Helium valve closed
9/29/2011	7:38:31 PM	H2 valve closed
9/29/2011	7:38:31 PM	BCl3 valve closed
9/29/2011	7:38:31 PM	PH3 valve closed
9/29/2011	7:38:31 PM	SiCl4 pre valve closed
9/29/2011	7:38:31 PM	SiCl4 post valve closed
9/29/2011	7:38:31 PM	Bypass valve closed
9/29/2011	7:38:31 PM	Bubbler valve closed
9/29/2011	7:38:31 PM	Main Vac valve opened
9/29/2011	7:38:31 PM	Helium MFC set to  0.000000
9/29/2011	7:38:31 PM	H2 MFC set to  0.000000
9/29/2011	7:38:31 PM	BCl3 MFC set to  0.000000
9/29/2011	7:38:31 PM	PHl3 MFC set to  0.000000
9/29/2011	7:38:31 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:38:31 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:38:31 PM	Tube furnace set to 300
9/29/2011	7:39:01 PM	H2 valve closed
9/29/2011	7:39:01 PM	BCl3 valve closed
9/29/2011	7:39:01 PM	PH3 valve closed
9/29/2011	7:39:01 PM	SiCl4 pre valve closed
9/29/2011	7:39:01 PM	SiCl4 post valve closed
9/29/2011	7:39:01 PM	Bypass valve closed
9/29/2011	7:39:01 PM	Bubbler valve closed
9/29/2011	7:39:01 PM	Helium valve opened
9/29/2011	7:39:01 PM	Main Vac valve opened
9/29/2011	7:39:01 PM	Helium MFC set to  20.000000
9/29/2011	7:39:01 PM	H2 MFC set to  0.000000
9/29/2011	7:39:01 PM	BCl3 MFC set to  0.000000
9/29/2011	7:39:01 PM	PHl3 MFC set to  0.000000
9/29/2011	7:39:01 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:39:01 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:39:01 PM	Tube furnace set to 300
9/29/2011	7:39:31 PM	Helium valve closed
9/29/2011	7:39:31 PM	H2 valve closed
9/29/2011	7:39:31 PM	BCl3 valve closed
9/29/2011	7:39:31 PM	PH3 valve closed
9/29/2011	7:39:31 PM	SiCl4 pre valve closed
9/29/2011	7:39:31 PM	SiCl4 post valve closed
9/29/2011	7:39:31 PM	Bypass valve closed
9/29/2011	7:39:31 PM	Bubbler valve closed
9/29/2011	7:39:31 PM	Main Vac valve opened
9/29/2011	7:39:31 PM	Helium MFC set to  0.000000
9/29/2011	7:39:31 PM	H2 MFC set to  0.000000
9/29/2011	7:39:31 PM	BCl3 MFC set to  0.000000
9/29/2011	7:39:31 PM	PHl3 MFC set to  0.000000
9/29/2011	7:39:31 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:39:31 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:39:31 PM	Tube furnace set to 300
9/29/2011	7:40:01 PM	H2 valve closed
9/29/2011	7:40:01 PM	BCl3 valve closed
9/29/2011	7:40:01 PM	PH3 valve closed
9/29/2011	7:40:01 PM	SiCl4 pre valve closed
9/29/2011	7:40:01 PM	SiCl4 post valve closed
9/29/2011	7:40:01 PM	Bypass valve closed
9/29/2011	7:40:01 PM	Bubbler valve closed
9/29/2011	7:40:01 PM	Helium valve opened
9/29/2011	7:40:01 PM	Main Vac valve opened
9/29/2011	7:40:01 PM	Helium MFC set to  20.000000
9/29/2011	7:40:01 PM	H2 MFC set to  0.000000
9/29/2011	7:40:01 PM	BCl3 MFC set to  0.000000
9/29/2011	7:40:01 PM	PHl3 MFC set to  0.000000
9/29/2011	7:40:01 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:40:01 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:40:01 PM	Tube furnace set to 300
9/29/2011	7:40:31 PM	Helium valve closed
9/29/2011	7:40:31 PM	H2 valve closed
9/29/2011	7:40:31 PM	BCl3 valve closed
9/29/2011	7:40:31 PM	PH3 valve closed
9/29/2011	7:40:31 PM	SiCl4 pre valve closed
9/29/2011	7:40:31 PM	SiCl4 post valve closed
9/29/2011	7:40:31 PM	Bypass valve closed
9/29/2011	7:40:32 PM	Bubbler valve closed
9/29/2011	7:40:32 PM	Main Vac valve opened
9/29/2011	7:40:32 PM	Helium MFC set to  0.000000
9/29/2011	7:40:32 PM	H2 MFC set to  0.000000
9/29/2011	7:40:32 PM	BCl3 MFC set to  0.000000
9/29/2011	7:40:32 PM	PHl3 MFC set to  0.000000
9/29/2011	7:40:32 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:40:32 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:40:32 PM	Tube furnace set to 300
9/29/2011	7:41:02 PM	H2 valve closed
9/29/2011	7:41:02 PM	BCl3 valve closed
9/29/2011	7:41:02 PM	PH3 valve closed
9/29/2011	7:41:02 PM	SiCl4 pre valve closed
9/29/2011	7:41:02 PM	SiCl4 post valve closed
9/29/2011	7:41:02 PM	Bypass valve closed
9/29/2011	7:41:02 PM	Bubbler valve closed
9/29/2011	7:41:02 PM	Helium valve opened
9/29/2011	7:41:02 PM	Main Vac valve opened
9/29/2011	7:41:02 PM	Helium MFC set to  20.000000
9/29/2011	7:41:02 PM	H2 MFC set to  0.000000
9/29/2011	7:41:02 PM	BCl3 MFC set to  0.000000
9/29/2011	7:41:02 PM	PHl3 MFC set to  0.000000
9/29/2011	7:41:02 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:41:02 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:41:02 PM	Tube furnace set to 300
9/29/2011	7:41:32 PM	Helium valve closed
9/29/2011	7:41:32 PM	H2 valve closed
9/29/2011	7:41:32 PM	BCl3 valve closed
9/29/2011	7:41:32 PM	PH3 valve closed
9/29/2011	7:41:32 PM	SiCl4 pre valve closed
9/29/2011	7:41:32 PM	SiCl4 post valve closed
9/29/2011	7:41:32 PM	Bypass valve closed
9/29/2011	7:41:32 PM	Bubbler valve closed
9/29/2011	7:41:32 PM	Main Vac valve opened
9/29/2011	7:41:32 PM	Helium MFC set to  0.000000
9/29/2011	7:41:32 PM	H2 MFC set to  0.000000
9/29/2011	7:41:32 PM	BCl3 MFC set to  0.000000
9/29/2011	7:41:32 PM	PHl3 MFC set to  0.000000
9/29/2011	7:41:32 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:41:32 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:41:32 PM	Tube furnace set to 300
9/29/2011	7:42:02 PM	H2 valve closed
9/29/2011	7:42:02 PM	BCl3 valve closed
9/29/2011	7:42:02 PM	PH3 valve closed
9/29/2011	7:42:02 PM	SiCl4 pre valve closed
9/29/2011	7:42:02 PM	SiCl4 post valve closed
9/29/2011	7:42:02 PM	Bypass valve closed
9/29/2011	7:42:02 PM	Bubbler valve closed
9/29/2011	7:42:02 PM	Helium valve opened
9/29/2011	7:42:02 PM	Main Vac valve opened
9/29/2011	7:42:02 PM	Helium MFC set to  20.000000
9/29/2011	7:42:02 PM	H2 MFC set to  0.000000
9/29/2011	7:42:02 PM	BCl3 MFC set to  0.000000
9/29/2011	7:42:02 PM	PHl3 MFC set to  0.000000
9/29/2011	7:42:02 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:42:02 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:42:02 PM	Tube furnace set to 300
9/29/2011	7:42:32 PM	Helium valve closed
9/29/2011	7:42:32 PM	H2 valve closed
9/29/2011	7:42:32 PM	BCl3 valve closed
9/29/2011	7:42:32 PM	PH3 valve closed
9/29/2011	7:42:32 PM	SiCl4 pre valve closed
9/29/2011	7:42:32 PM	SiCl4 post valve closed
9/29/2011	7:42:32 PM	Bypass valve closed
9/29/2011	7:42:32 PM	Bubbler valve closed
9/29/2011	7:42:32 PM	Main Vac valve opened
9/29/2011	7:42:32 PM	Helium MFC set to  0.000000
9/29/2011	7:42:32 PM	H2 MFC set to  0.000000
9/29/2011	7:42:32 PM	BCl3 MFC set to  0.000000
9/29/2011	7:42:32 PM	PHl3 MFC set to  0.000000
9/29/2011	7:42:32 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:42:32 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:42:33 PM	Tube furnace set to 300
9/29/2011	7:43:03 PM	H2 valve closed
9/29/2011	7:43:03 PM	BCl3 valve closed
9/29/2011	7:43:03 PM	PH3 valve closed
9/29/2011	7:43:03 PM	SiCl4 pre valve closed
9/29/2011	7:43:03 PM	SiCl4 post valve closed
9/29/2011	7:43:03 PM	Bypass valve closed
9/29/2011	7:43:03 PM	Bubbler valve closed
9/29/2011	7:43:03 PM	Helium valve opened
9/29/2011	7:43:03 PM	Main Vac valve opened
9/29/2011	7:43:03 PM	Helium MFC set to  20.000000
9/29/2011	7:43:03 PM	H2 MFC set to  0.000000
9/29/2011	7:43:03 PM	BCl3 MFC set to  0.000000
9/29/2011	7:43:03 PM	PHl3 MFC set to  0.000000
9/29/2011	7:43:03 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:43:03 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:43:03 PM	Tube furnace set to 300
9/29/2011	7:43:33 PM	Helium valve closed
9/29/2011	7:43:33 PM	H2 valve closed
9/29/2011	7:43:33 PM	BCl3 valve closed
9/29/2011	7:43:33 PM	PH3 valve closed
9/29/2011	7:43:33 PM	SiCl4 pre valve closed
9/29/2011	7:43:33 PM	SiCl4 post valve closed
9/29/2011	7:43:33 PM	Bypass valve closed
9/29/2011	7:43:33 PM	Bubbler valve closed
9/29/2011	7:43:33 PM	Main Vac valve opened
9/29/2011	7:43:33 PM	Helium MFC set to  0.000000
9/29/2011	7:43:33 PM	H2 MFC set to  0.000000
9/29/2011	7:43:33 PM	BCl3 MFC set to  0.000000
9/29/2011	7:43:33 PM	PHl3 MFC set to  0.000000
9/29/2011	7:43:33 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:43:33 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:43:33 PM	Tube furnace set to 300
9/29/2011	7:44:03 PM	H2 valve closed
9/29/2011	7:44:03 PM	BCl3 valve closed
9/29/2011	7:44:03 PM	PH3 valve closed
9/29/2011	7:44:03 PM	SiCl4 pre valve closed
9/29/2011	7:44:03 PM	SiCl4 post valve closed
9/29/2011	7:44:03 PM	Bypass valve closed
9/29/2011	7:44:03 PM	Bubbler valve closed
9/29/2011	7:44:03 PM	Helium valve opened
9/29/2011	7:44:03 PM	Main Vac valve opened
9/29/2011	7:44:03 PM	Helium MFC set to  20.000000
9/29/2011	7:44:03 PM	H2 MFC set to  0.000000
9/29/2011	7:44:03 PM	BCl3 MFC set to  0.000000
9/29/2011	7:44:03 PM	PHl3 MFC set to  0.000000
9/29/2011	7:44:03 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:44:03 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:44:03 PM	Tube furnace set to 300
9/29/2011	7:44:33 PM	Helium valve closed
9/29/2011	7:44:33 PM	H2 valve closed
9/29/2011	7:44:33 PM	BCl3 valve closed
9/29/2011	7:44:33 PM	PH3 valve closed
9/29/2011	7:44:33 PM	SiCl4 pre valve closed
9/29/2011	7:44:33 PM	SiCl4 post valve closed
9/29/2011	7:44:33 PM	Bypass valve closed
9/29/2011	7:44:33 PM	Bubbler valve closed
9/29/2011	7:44:33 PM	Main Vac valve opened
9/29/2011	7:44:33 PM	Helium MFC set to  0.000000
9/29/2011	7:44:33 PM	H2 MFC set to  0.000000
9/29/2011	7:44:33 PM	BCl3 MFC set to  0.000000
9/29/2011	7:44:33 PM	PHl3 MFC set to  0.000000
9/29/2011	7:44:33 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:44:33 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:44:33 PM	Tube furnace set to 300
9/29/2011	7:45:03 PM	H2 valve closed
9/29/2011	7:45:03 PM	BCl3 valve closed
9/29/2011	7:45:03 PM	PH3 valve closed
9/29/2011	7:45:03 PM	SiCl4 pre valve closed
9/29/2011	7:45:03 PM	SiCl4 post valve closed
9/29/2011	7:45:03 PM	Bypass valve closed
9/29/2011	7:45:03 PM	Bubbler valve closed
9/29/2011	7:45:03 PM	Helium valve opened
9/29/2011	7:45:03 PM	Main Vac valve opened
9/29/2011	7:45:03 PM	Helium MFC set to  20.000000
9/29/2011	7:45:03 PM	H2 MFC set to  0.000000
9/29/2011	7:45:03 PM	BCl3 MFC set to  0.000000
9/29/2011	7:45:03 PM	PHl3 MFC set to  0.000000
9/29/2011	7:45:03 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:45:03 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:45:04 PM	Tube furnace set to 300
9/29/2011	7:45:34 PM	Helium valve closed
9/29/2011	7:45:34 PM	H2 valve closed
9/29/2011	7:45:34 PM	BCl3 valve closed
9/29/2011	7:45:34 PM	PH3 valve closed
9/29/2011	7:45:34 PM	SiCl4 pre valve closed
9/29/2011	7:45:34 PM	SiCl4 post valve closed
9/29/2011	7:45:34 PM	Bypass valve closed
9/29/2011	7:45:34 PM	Bubbler valve closed
9/29/2011	7:45:34 PM	Main Vac valve opened
9/29/2011	7:45:34 PM	Helium MFC set to  0.000000
9/29/2011	7:45:34 PM	H2 MFC set to  0.000000
9/29/2011	7:45:34 PM	BCl3 MFC set to  0.000000
9/29/2011	7:45:34 PM	PHl3 MFC set to  0.000000
9/29/2011	7:45:34 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:45:34 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:45:34 PM	Tube furnace set to 300
9/29/2011	7:46:04 PM	H2 valve closed
9/29/2011	7:46:04 PM	BCl3 valve closed
9/29/2011	7:46:04 PM	PH3 valve closed
9/29/2011	7:46:04 PM	SiCl4 pre valve closed
9/29/2011	7:46:04 PM	SiCl4 post valve closed
9/29/2011	7:46:04 PM	Bypass valve closed
9/29/2011	7:46:04 PM	Bubbler valve closed
9/29/2011	7:46:04 PM	Helium valve opened
9/29/2011	7:46:04 PM	Main Vac valve opened
9/29/2011	7:46:04 PM	Helium MFC set to  20.000000
9/29/2011	7:46:04 PM	H2 MFC set to  0.000000
9/29/2011	7:46:04 PM	BCl3 MFC set to  0.000000
9/29/2011	7:46:04 PM	PHl3 MFC set to  0.000000
9/29/2011	7:46:04 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:46:04 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:46:04 PM	Tube furnace set to 300
9/29/2011	7:46:34 PM	Helium valve closed
9/29/2011	7:46:34 PM	H2 valve closed
9/29/2011	7:46:34 PM	BCl3 valve closed
9/29/2011	7:46:34 PM	PH3 valve closed
9/29/2011	7:46:34 PM	SiCl4 pre valve closed
9/29/2011	7:46:34 PM	SiCl4 post valve closed
9/29/2011	7:46:34 PM	Bypass valve closed
9/29/2011	7:46:34 PM	Bubbler valve closed
9/29/2011	7:46:34 PM	Main Vac valve opened
9/29/2011	7:46:34 PM	Helium MFC set to  0.000000
9/29/2011	7:46:34 PM	H2 MFC set to  0.000000
9/29/2011	7:46:34 PM	BCl3 MFC set to  0.000000
9/29/2011	7:46:34 PM	PHl3 MFC set to  0.000000
9/29/2011	7:46:34 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:46:34 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:46:34 PM	Tube furnace set to 300
9/29/2011	7:46:35 PM	Run finished at 7:46 PM
9/29/2011	7:58:23 PM	Recipe started at 7:58 PM
9/29/2011	7:58:23 PM	Helium valve closed
9/29/2011	7:58:23 PM	H2 valve closed
9/29/2011	7:58:23 PM	BCl3 valve closed
9/29/2011	7:58:23 PM	PH3 valve closed
9/29/2011	7:58:23 PM	SiCl4 pre valve closed
9/29/2011	7:58:23 PM	SiCl4 post valve closed
9/29/2011	7:58:23 PM	Bypass valve closed
9/29/2011	7:58:23 PM	Bubbler valve closed
9/29/2011	7:58:23 PM	Main Vac valve opened
9/29/2011	7:58:23 PM	Helium MFC set to  0.000000
9/29/2011	7:58:23 PM	H2 MFC set to  0.000000
9/29/2011	7:58:23 PM	BCl3 MFC set to  0.000000
9/29/2011	7:58:23 PM	PHl3 MFC set to  0.000000
9/29/2011	7:58:23 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:58:23 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:58:23 PM	Tube furnace set to 300
9/29/2011	7:58:53 PM	H2 valve closed
9/29/2011	7:58:53 PM	BCl3 valve closed
9/29/2011	7:58:53 PM	PH3 valve closed
9/29/2011	7:58:53 PM	SiCl4 pre valve closed
9/29/2011	7:58:53 PM	SiCl4 post valve closed
9/29/2011	7:58:53 PM	Bypass valve closed
9/29/2011	7:58:53 PM	Bubbler valve closed
9/29/2011	7:58:53 PM	Helium valve opened
9/29/2011	7:58:53 PM	Main Vac valve opened
9/29/2011	7:58:53 PM	Helium MFC set to  20.000000
9/29/2011	7:58:53 PM	H2 MFC set to  0.000000
9/29/2011	7:58:53 PM	BCl3 MFC set to  0.000000
9/29/2011	7:58:53 PM	PHl3 MFC set to  0.000000
9/29/2011	7:58:53 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:58:53 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:58:53 PM	Tube furnace set to 300
9/29/2011	7:59:23 PM	Helium valve closed
9/29/2011	7:59:23 PM	H2 valve closed
9/29/2011	7:59:23 PM	BCl3 valve closed
9/29/2011	7:59:23 PM	PH3 valve closed
9/29/2011	7:59:23 PM	SiCl4 pre valve closed
9/29/2011	7:59:23 PM	SiCl4 post valve closed
9/29/2011	7:59:23 PM	Bypass valve closed
9/29/2011	7:59:23 PM	Bubbler valve closed
9/29/2011	7:59:23 PM	Main Vac valve opened
9/29/2011	7:59:23 PM	Helium MFC set to  0.000000
9/29/2011	7:59:23 PM	H2 MFC set to  0.000000
9/29/2011	7:59:23 PM	BCl3 MFC set to  0.000000
9/29/2011	7:59:23 PM	PHl3 MFC set to  0.000000
9/29/2011	7:59:23 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:59:23 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:59:23 PM	Tube furnace set to 300
9/29/2011	7:59:53 PM	H2 valve closed
9/29/2011	7:59:53 PM	BCl3 valve closed
9/29/2011	7:59:53 PM	PH3 valve closed
9/29/2011	7:59:53 PM	SiCl4 pre valve closed
9/29/2011	7:59:53 PM	SiCl4 post valve closed
9/29/2011	7:59:53 PM	Bypass valve closed
9/29/2011	7:59:53 PM	Bubbler valve closed
9/29/2011	7:59:53 PM	Helium valve opened
9/29/2011	7:59:53 PM	Main Vac valve opened
9/29/2011	7:59:53 PM	Helium MFC set to  20.000000
9/29/2011	7:59:53 PM	H2 MFC set to  0.000000
9/29/2011	7:59:53 PM	BCl3 MFC set to  0.000000
9/29/2011	7:59:53 PM	PHl3 MFC set to  0.000000
9/29/2011	7:59:53 PM	SiCl4 MFC set to  0.000000
9/29/2011	7:59:53 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	7:59:53 PM	Tube furnace set to 300
9/29/2011	8:00:23 PM	Helium valve closed
9/29/2011	8:00:23 PM	H2 valve closed
9/29/2011	8:00:23 PM	BCl3 valve closed
9/29/2011	8:00:23 PM	PH3 valve closed
9/29/2011	8:00:23 PM	SiCl4 pre valve closed
9/29/2011	8:00:23 PM	SiCl4 post valve closed
9/29/2011	8:00:23 PM	Bypass valve closed
9/29/2011	8:00:23 PM	Bubbler valve closed
9/29/2011	8:00:23 PM	Main Vac valve opened
9/29/2011	8:00:23 PM	Helium MFC set to  0.000000
9/29/2011	8:00:23 PM	H2 MFC set to  0.000000
9/29/2011	8:00:23 PM	BCl3 MFC set to  0.000000
9/29/2011	8:00:23 PM	PHl3 MFC set to  0.000000
9/29/2011	8:00:23 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:00:23 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:00:24 PM	Tube furnace set to 300
9/29/2011	8:00:54 PM	H2 valve closed
9/29/2011	8:00:54 PM	BCl3 valve closed
9/29/2011	8:00:54 PM	PH3 valve closed
9/29/2011	8:00:54 PM	SiCl4 pre valve closed
9/29/2011	8:00:54 PM	SiCl4 post valve closed
9/29/2011	8:00:54 PM	Bypass valve closed
9/29/2011	8:00:54 PM	Bubbler valve closed
9/29/2011	8:00:54 PM	Helium valve opened
9/29/2011	8:00:54 PM	Main Vac valve opened
9/29/2011	8:00:54 PM	Helium MFC set to  20.000000
9/29/2011	8:00:54 PM	H2 MFC set to  0.000000
9/29/2011	8:00:54 PM	BCl3 MFC set to  0.000000
9/29/2011	8:00:54 PM	PHl3 MFC set to  0.000000
9/29/2011	8:00:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:00:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:00:54 PM	Tube furnace set to 300
9/29/2011	8:01:24 PM	Helium valve closed
9/29/2011	8:01:24 PM	H2 valve closed
9/29/2011	8:01:24 PM	BCl3 valve closed
9/29/2011	8:01:24 PM	PH3 valve closed
9/29/2011	8:01:24 PM	SiCl4 pre valve closed
9/29/2011	8:01:24 PM	SiCl4 post valve closed
9/29/2011	8:01:24 PM	Bypass valve closed
9/29/2011	8:01:24 PM	Bubbler valve closed
9/29/2011	8:01:24 PM	Main Vac valve opened
9/29/2011	8:01:24 PM	Helium MFC set to  0.000000
9/29/2011	8:01:24 PM	H2 MFC set to  0.000000
9/29/2011	8:01:24 PM	BCl3 MFC set to  0.000000
9/29/2011	8:01:24 PM	PHl3 MFC set to  0.000000
9/29/2011	8:01:24 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:01:24 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:01:24 PM	Tube furnace set to 300
9/29/2011	8:01:54 PM	H2 valve closed
9/29/2011	8:01:54 PM	BCl3 valve closed
9/29/2011	8:01:54 PM	PH3 valve closed
9/29/2011	8:01:54 PM	SiCl4 pre valve closed
9/29/2011	8:01:54 PM	SiCl4 post valve closed
9/29/2011	8:01:54 PM	Bypass valve closed
9/29/2011	8:01:54 PM	Bubbler valve closed
9/29/2011	8:01:54 PM	Helium valve opened
9/29/2011	8:01:54 PM	Main Vac valve opened
9/29/2011	8:01:54 PM	Helium MFC set to  20.000000
9/29/2011	8:01:54 PM	H2 MFC set to  0.000000
9/29/2011	8:01:54 PM	BCl3 MFC set to  0.000000
9/29/2011	8:01:54 PM	PHl3 MFC set to  0.000000
9/29/2011	8:01:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:01:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:01:54 PM	Tube furnace set to 300
9/29/2011	8:02:24 PM	Helium valve closed
9/29/2011	8:02:24 PM	H2 valve closed
9/29/2011	8:02:24 PM	BCl3 valve closed
9/29/2011	8:02:24 PM	PH3 valve closed
9/29/2011	8:02:24 PM	SiCl4 pre valve closed
9/29/2011	8:02:24 PM	SiCl4 post valve closed
9/29/2011	8:02:24 PM	Bypass valve closed
9/29/2011	8:02:24 PM	Bubbler valve closed
9/29/2011	8:02:24 PM	Main Vac valve opened
9/29/2011	8:02:24 PM	Helium MFC set to  0.000000
9/29/2011	8:02:24 PM	H2 MFC set to  0.000000
9/29/2011	8:02:24 PM	BCl3 MFC set to  0.000000
9/29/2011	8:02:24 PM	PHl3 MFC set to  0.000000
9/29/2011	8:02:24 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:02:24 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:02:24 PM	Tube furnace set to 300
9/29/2011	8:02:54 PM	H2 valve closed
9/29/2011	8:02:54 PM	BCl3 valve closed
9/29/2011	8:02:54 PM	PH3 valve closed
9/29/2011	8:02:54 PM	SiCl4 pre valve closed
9/29/2011	8:02:54 PM	SiCl4 post valve closed
9/29/2011	8:02:54 PM	Bypass valve closed
9/29/2011	8:02:54 PM	Bubbler valve closed
9/29/2011	8:02:54 PM	Helium valve opened
9/29/2011	8:02:54 PM	Main Vac valve opened
9/29/2011	8:02:54 PM	Helium MFC set to  20.000000
9/29/2011	8:02:54 PM	H2 MFC set to  0.000000
9/29/2011	8:02:54 PM	BCl3 MFC set to  0.000000
9/29/2011	8:02:54 PM	PHl3 MFC set to  0.000000
9/29/2011	8:02:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:02:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:02:55 PM	Tube furnace set to 300
9/29/2011	8:03:25 PM	Helium valve closed
9/29/2011	8:03:25 PM	H2 valve closed
9/29/2011	8:03:25 PM	BCl3 valve closed
9/29/2011	8:03:25 PM	PH3 valve closed
9/29/2011	8:03:25 PM	SiCl4 pre valve closed
9/29/2011	8:03:25 PM	SiCl4 post valve closed
9/29/2011	8:03:25 PM	Bypass valve closed
9/29/2011	8:03:25 PM	Bubbler valve closed
9/29/2011	8:03:25 PM	Main Vac valve opened
9/29/2011	8:03:25 PM	Helium MFC set to  0.000000
9/29/2011	8:03:25 PM	H2 MFC set to  0.000000
9/29/2011	8:03:25 PM	BCl3 MFC set to  0.000000
9/29/2011	8:03:25 PM	PHl3 MFC set to  0.000000
9/29/2011	8:03:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:03:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:03:25 PM	Tube furnace set to 300
9/29/2011	8:03:55 PM	H2 valve closed
9/29/2011	8:03:55 PM	BCl3 valve closed
9/29/2011	8:03:55 PM	PH3 valve closed
9/29/2011	8:03:55 PM	SiCl4 pre valve closed
9/29/2011	8:03:55 PM	SiCl4 post valve closed
9/29/2011	8:03:55 PM	Bypass valve closed
9/29/2011	8:03:55 PM	Bubbler valve closed
9/29/2011	8:03:55 PM	Helium valve opened
9/29/2011	8:03:55 PM	Main Vac valve opened
9/29/2011	8:03:55 PM	Helium MFC set to  20.000000
9/29/2011	8:03:55 PM	H2 MFC set to  0.000000
9/29/2011	8:03:55 PM	BCl3 MFC set to  0.000000
9/29/2011	8:03:55 PM	PHl3 MFC set to  0.000000
9/29/2011	8:03:55 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:03:55 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:03:55 PM	Tube furnace set to 300
9/29/2011	8:04:25 PM	Helium valve closed
9/29/2011	8:04:25 PM	H2 valve closed
9/29/2011	8:04:25 PM	BCl3 valve closed
9/29/2011	8:04:25 PM	PH3 valve closed
9/29/2011	8:04:25 PM	SiCl4 pre valve closed
9/29/2011	8:04:25 PM	SiCl4 post valve closed
9/29/2011	8:04:25 PM	Bypass valve closed
9/29/2011	8:04:25 PM	Bubbler valve closed
9/29/2011	8:04:25 PM	Main Vac valve opened
9/29/2011	8:04:25 PM	Helium MFC set to  0.000000
9/29/2011	8:04:25 PM	H2 MFC set to  0.000000
9/29/2011	8:04:25 PM	BCl3 MFC set to  0.000000
9/29/2011	8:04:25 PM	PHl3 MFC set to  0.000000
9/29/2011	8:04:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:04:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:04:25 PM	Tube furnace set to 300
9/29/2011	8:04:55 PM	H2 valve closed
9/29/2011	8:04:55 PM	BCl3 valve closed
9/29/2011	8:04:55 PM	PH3 valve closed
9/29/2011	8:04:55 PM	SiCl4 pre valve closed
9/29/2011	8:04:55 PM	SiCl4 post valve closed
9/29/2011	8:04:55 PM	Bypass valve closed
9/29/2011	8:04:55 PM	Bubbler valve closed
9/29/2011	8:04:55 PM	Helium valve opened
9/29/2011	8:04:55 PM	Main Vac valve opened
9/29/2011	8:04:55 PM	Helium MFC set to  20.000000
9/29/2011	8:04:55 PM	H2 MFC set to  0.000000
9/29/2011	8:04:55 PM	BCl3 MFC set to  0.000000
9/29/2011	8:04:55 PM	PHl3 MFC set to  0.000000
9/29/2011	8:04:55 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:04:55 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:04:55 PM	Tube furnace set to 300
9/29/2011	8:05:25 PM	Helium valve closed
9/29/2011	8:05:25 PM	H2 valve closed
9/29/2011	8:05:25 PM	BCl3 valve closed
9/29/2011	8:05:25 PM	PH3 valve closed
9/29/2011	8:05:25 PM	SiCl4 pre valve closed
9/29/2011	8:05:25 PM	SiCl4 post valve closed
9/29/2011	8:05:25 PM	Bypass valve closed
9/29/2011	8:05:25 PM	Bubbler valve closed
9/29/2011	8:05:25 PM	Main Vac valve opened
9/29/2011	8:05:25 PM	Helium MFC set to  0.000000
9/29/2011	8:05:25 PM	H2 MFC set to  0.000000
9/29/2011	8:05:25 PM	BCl3 MFC set to  0.000000
9/29/2011	8:05:25 PM	PHl3 MFC set to  0.000000
9/29/2011	8:05:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:05:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:05:26 PM	Tube furnace set to 300
9/29/2011	8:05:56 PM	H2 valve closed
9/29/2011	8:05:56 PM	BCl3 valve closed
9/29/2011	8:05:56 PM	PH3 valve closed
9/29/2011	8:05:56 PM	SiCl4 pre valve closed
9/29/2011	8:05:56 PM	SiCl4 post valve closed
9/29/2011	8:05:56 PM	Bypass valve closed
9/29/2011	8:05:56 PM	Bubbler valve closed
9/29/2011	8:05:56 PM	Helium valve opened
9/29/2011	8:05:56 PM	Main Vac valve opened
9/29/2011	8:05:56 PM	Helium MFC set to  20.000000
9/29/2011	8:05:56 PM	H2 MFC set to  0.000000
9/29/2011	8:05:56 PM	BCl3 MFC set to  0.000000
9/29/2011	8:05:56 PM	PHl3 MFC set to  0.000000
9/29/2011	8:05:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:05:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:05:56 PM	Tube furnace set to 300
9/29/2011	8:06:26 PM	Helium valve closed
9/29/2011	8:06:26 PM	H2 valve closed
9/29/2011	8:06:26 PM	BCl3 valve closed
9/29/2011	8:06:26 PM	PH3 valve closed
9/29/2011	8:06:26 PM	SiCl4 pre valve closed
9/29/2011	8:06:26 PM	SiCl4 post valve closed
9/29/2011	8:06:26 PM	Bypass valve closed
9/29/2011	8:06:26 PM	Bubbler valve closed
9/29/2011	8:06:26 PM	Main Vac valve opened
9/29/2011	8:06:26 PM	Helium MFC set to  0.000000
9/29/2011	8:06:26 PM	H2 MFC set to  0.000000
9/29/2011	8:06:26 PM	BCl3 MFC set to  0.000000
9/29/2011	8:06:26 PM	PHl3 MFC set to  0.000000
9/29/2011	8:06:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:06:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:06:26 PM	Tube furnace set to 300
9/29/2011	8:06:56 PM	H2 valve closed
9/29/2011	8:06:56 PM	BCl3 valve closed
9/29/2011	8:06:56 PM	PH3 valve closed
9/29/2011	8:06:56 PM	SiCl4 pre valve closed
9/29/2011	8:06:56 PM	SiCl4 post valve closed
9/29/2011	8:06:56 PM	Bypass valve closed
9/29/2011	8:06:56 PM	Bubbler valve closed
9/29/2011	8:06:56 PM	Helium valve opened
9/29/2011	8:06:56 PM	Main Vac valve opened
9/29/2011	8:06:56 PM	Helium MFC set to  20.000000
9/29/2011	8:06:56 PM	H2 MFC set to  0.000000
9/29/2011	8:06:56 PM	BCl3 MFC set to  0.000000
9/29/2011	8:06:56 PM	PHl3 MFC set to  0.000000
9/29/2011	8:06:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:06:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:06:56 PM	Tube furnace set to 300
9/29/2011	8:07:26 PM	Helium valve closed
9/29/2011	8:07:26 PM	H2 valve closed
9/29/2011	8:07:26 PM	BCl3 valve closed
9/29/2011	8:07:26 PM	PH3 valve closed
9/29/2011	8:07:26 PM	SiCl4 pre valve closed
9/29/2011	8:07:26 PM	SiCl4 post valve closed
9/29/2011	8:07:26 PM	Bypass valve closed
9/29/2011	8:07:26 PM	Bubbler valve closed
9/29/2011	8:07:26 PM	Main Vac valve opened
9/29/2011	8:07:26 PM	Helium MFC set to  0.000000
9/29/2011	8:07:26 PM	H2 MFC set to  0.000000
9/29/2011	8:07:26 PM	BCl3 MFC set to  0.000000
9/29/2011	8:07:26 PM	PHl3 MFC set to  0.000000
9/29/2011	8:07:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:07:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:07:26 PM	Tube furnace set to 300
9/29/2011	8:07:57 PM	H2 valve closed
9/29/2011	8:07:57 PM	BCl3 valve closed
9/29/2011	8:07:57 PM	PH3 valve closed
9/29/2011	8:07:57 PM	SiCl4 pre valve closed
9/29/2011	8:07:57 PM	SiCl4 post valve closed
9/29/2011	8:07:57 PM	Bypass valve closed
9/29/2011	8:07:57 PM	Bubbler valve closed
9/29/2011	8:07:57 PM	Helium valve opened
9/29/2011	8:07:57 PM	Main Vac valve opened
9/29/2011	8:07:57 PM	Helium MFC set to  20.000000
9/29/2011	8:07:57 PM	H2 MFC set to  0.000000
9/29/2011	8:07:57 PM	BCl3 MFC set to  0.000000
9/29/2011	8:07:57 PM	PHl3 MFC set to  0.000000
9/29/2011	8:07:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:07:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:07:57 PM	Tube furnace set to 300
9/29/2011	8:08:27 PM	Helium valve closed
9/29/2011	8:08:27 PM	H2 valve closed
9/29/2011	8:08:27 PM	BCl3 valve closed
9/29/2011	8:08:27 PM	PH3 valve closed
9/29/2011	8:08:27 PM	SiCl4 pre valve closed
9/29/2011	8:08:27 PM	SiCl4 post valve closed
9/29/2011	8:08:27 PM	Bypass valve closed
9/29/2011	8:08:27 PM	Bubbler valve closed
9/29/2011	8:08:27 PM	Main Vac valve opened
9/29/2011	8:08:27 PM	Helium MFC set to  0.000000
9/29/2011	8:08:27 PM	H2 MFC set to  0.000000
9/29/2011	8:08:27 PM	BCl3 MFC set to  0.000000
9/29/2011	8:08:27 PM	PHl3 MFC set to  0.000000
9/29/2011	8:08:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:08:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:08:27 PM	Tube furnace set to 300
9/29/2011	8:08:28 PM	Run finished at 8:08 PM
9/29/2011	8:13:02 PM	Recipe started at 8:13 PM
9/29/2011	8:13:02 PM	Helium valve closed
9/29/2011	8:13:02 PM	H2 valve closed
9/29/2011	8:13:02 PM	BCl3 valve closed
9/29/2011	8:13:02 PM	PH3 valve closed
9/29/2011	8:13:02 PM	SiCl4 pre valve closed
9/29/2011	8:13:02 PM	SiCl4 post valve closed
9/29/2011	8:13:02 PM	Main Vac valve closed
9/29/2011	8:13:02 PM	Bypass valve closed
9/29/2011	8:13:02 PM	Bubbler valve closed
9/29/2011	8:13:02 PM	Helium MFC set to  0.000000
9/29/2011	8:13:02 PM	H2 MFC set to  0.000000
9/29/2011	8:13:02 PM	BCl3 MFC set to  0.000000
9/29/2011	8:13:02 PM	PHl3 MFC set to  0.000000
9/29/2011	8:13:02 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:13:02 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:13:02 PM	Tube furnace set to 0
9/29/2011	8:13:05 PM	Helium valve closed
9/29/2011	8:13:05 PM	BCl3 valve closed
9/29/2011	8:13:05 PM	PH3 valve closed
9/29/2011	8:13:05 PM	SiCl4 pre valve closed
9/29/2011	8:13:05 PM	SiCl4 post valve closed
9/29/2011	8:13:05 PM	Main Vac valve closed
9/29/2011	8:13:05 PM	Bypass valve closed
9/29/2011	8:13:05 PM	Bubbler valve closed
9/29/2011	8:13:05 PM	H2 valve opened
9/29/2011	8:13:05 PM	Helium MFC set to  0.000000
9/29/2011	8:13:05 PM	H2 MFC set to  500.000000
9/29/2011	8:13:05 PM	BCl3 MFC set to  0.000000
9/29/2011	8:13:05 PM	PHl3 MFC set to  0.000000
9/29/2011	8:13:05 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:13:05 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:13:05 PM	Tube furnace set to 0
9/29/2011	8:14:06 PM	Helium valve closed
9/29/2011	8:14:06 PM	BCl3 valve closed
9/29/2011	8:14:06 PM	PH3 valve closed
9/29/2011	8:14:06 PM	SiCl4 pre valve closed
9/29/2011	8:14:06 PM	SiCl4 post valve closed
9/29/2011	8:14:06 PM	Main Vac valve closed
9/29/2011	8:14:06 PM	Bypass valve closed
9/29/2011	8:14:06 PM	H2 valve opened
9/29/2011	8:14:06 PM	Bubbler valve opened
9/29/2011	8:14:06 PM	Helium MFC set to  0.000000
9/29/2011	8:14:06 PM	H2 MFC set to  500.000000
9/29/2011	8:14:06 PM	BCl3 MFC set to  0.000000
9/29/2011	8:14:06 PM	PHl3 MFC set to  0.000000
9/29/2011	8:14:06 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:14:06 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:14:06 PM	Tube furnace set to 0
9/29/2011	8:14:07 PM	Helium valve closed
9/29/2011	8:14:07 PM	BCl3 valve closed
9/29/2011	8:14:07 PM	PH3 valve closed
9/29/2011	8:14:07 PM	SiCl4 pre valve closed
9/29/2011	8:14:07 PM	SiCl4 post valve closed
9/29/2011	8:14:07 PM	Main Vac valve closed
9/29/2011	8:14:07 PM	Bypass valve closed
9/29/2011	8:14:07 PM	H2 valve opened
9/29/2011	8:14:07 PM	Bubbler valve opened
9/29/2011	8:14:07 PM	Helium MFC set to  0.000000
9/29/2011	8:14:07 PM	H2 MFC set to  500.000000
9/29/2011	8:14:07 PM	BCl3 MFC set to  0.000000
9/29/2011	8:14:07 PM	PHl3 MFC set to  0.000000
9/29/2011	8:14:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:14:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:14:08 PM	Tube furnace set to 1000
9/29/2011	8:34:08 PM	Helium valve closed
9/29/2011	8:34:08 PM	PH3 valve closed
9/29/2011	8:34:08 PM	Main Vac valve closed
9/29/2011	8:34:08 PM	Bypass valve closed
9/29/2011	8:34:08 PM	H2 valve opened
9/29/2011	8:34:08 PM	BCl3 valve opened
9/29/2011	8:34:08 PM	SiCl4 pre valve opened
9/29/2011	8:34:08 PM	SiCl4 post valve opened
9/29/2011	8:34:08 PM	Bubbler valve opened
9/29/2011	8:34:08 PM	Helium MFC set to  0.000000
9/29/2011	8:34:08 PM	H2 MFC set to  500.000000
9/29/2011	8:34:08 PM	BCl3 MFC set to  2.300000
9/29/2011	8:34:08 PM	PHl3 MFC set to  0.000000
9/29/2011	8:34:08 PM	SiCl4 MFC set to  50.000000
9/29/2011	8:34:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:34:08 PM	Tube furnace set to 1000
9/29/2011	8:50:08 PM	Helium valve closed
9/29/2011	8:50:08 PM	BCl3 valve closed
9/29/2011	8:50:08 PM	PH3 valve closed
9/29/2011	8:50:08 PM	SiCl4 pre valve closed
9/29/2011	8:50:08 PM	SiCl4 post valve closed
9/29/2011	8:50:08 PM	Main Vac valve closed
9/29/2011	8:50:08 PM	Bypass valve closed
9/29/2011	8:50:08 PM	H2 valve opened
9/29/2011	8:50:08 PM	Bubbler valve opened
9/29/2011	8:50:08 PM	Helium MFC set to  0.000000
9/29/2011	8:50:08 PM	H2 MFC set to  500.000000
9/29/2011	8:50:08 PM	BCl3 MFC set to  0.000000
9/29/2011	8:50:08 PM	PHl3 MFC set to  0.000000
9/29/2011	8:50:08 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:50:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:50:08 PM	Tube furnace set to 750
9/29/2011	8:55:08 PM	H2 valve closed
9/29/2011	8:55:08 PM	BCl3 valve closed
9/29/2011	8:55:08 PM	PH3 valve closed
9/29/2011	8:55:08 PM	SiCl4 pre valve closed
9/29/2011	8:55:08 PM	SiCl4 post valve closed
9/29/2011	8:55:08 PM	Main Vac valve closed
9/29/2011	8:55:08 PM	Bypass valve closed
9/29/2011	8:55:08 PM	Helium valve opened
9/29/2011	8:55:08 PM	Bubbler valve opened
9/29/2011	8:55:08 PM	Helium MFC set to  500.000000
9/29/2011	8:55:08 PM	H2 MFC set to  0.000000
9/29/2011	8:55:08 PM	BCl3 MFC set to  0.000000
9/29/2011	8:55:08 PM	PHl3 MFC set to  0.000000
9/29/2011	8:55:08 PM	SiCl4 MFC set to  0.000000
9/29/2011	8:55:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	8:55:08 PM	Tube furnace set to 0
9/29/2011	9:15:08 PM	Helium valve closed
9/29/2011	9:15:08 PM	H2 valve closed
9/29/2011	9:15:08 PM	BCl3 valve closed
9/29/2011	9:15:08 PM	PH3 valve closed
9/29/2011	9:15:08 PM	SiCl4 pre valve closed
9/29/2011	9:15:08 PM	SiCl4 post valve closed
9/29/2011	9:15:08 PM	Main Vac valve closed
9/29/2011	9:15:08 PM	Bypass valve closed
9/29/2011	9:15:08 PM	Bubbler valve closed
9/29/2011	9:15:08 PM	Helium MFC set to  0.000000
9/29/2011	9:15:08 PM	H2 MFC set to  0.000000
9/29/2011	9:15:08 PM	BCl3 MFC set to  0.000000
9/29/2011	9:15:08 PM	PHl3 MFC set to  0.000000
9/29/2011	9:15:08 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:15:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:15:08 PM	Tube furnace set to 0
9/29/2011	9:15:09 PM	Run finished at 9:15 PM
9/29/2011	9:33:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	9:33:26 PM	Recipe started at 9:33 PM
9/29/2011	9:33:26 PM	Helium valve closed
9/29/2011	9:33:26 PM	H2 valve closed
9/29/2011	9:33:26 PM	BCl3 valve closed
9/29/2011	9:33:26 PM	PH3 valve closed
9/29/2011	9:33:26 PM	SiCl4 pre valve closed
9/29/2011	9:33:26 PM	SiCl4 post valve closed
9/29/2011	9:33:26 PM	Main Vac valve closed
9/29/2011	9:33:26 PM	Bypass valve closed
9/29/2011	9:33:26 PM	Bubbler valve closed
9/29/2011	9:33:26 PM	Helium MFC set to  0.000000
9/29/2011	9:33:26 PM	H2 MFC set to  0.000000
9/29/2011	9:33:26 PM	BCl3 MFC set to  0.000000
9/29/2011	9:33:26 PM	PHl3 MFC set to  0.000000
9/29/2011	9:33:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:33:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:33:27 PM	Tube furnace set to 0
9/29/2011	9:33:30 PM	H2 valve closed
9/29/2011	9:33:30 PM	BCl3 valve closed
9/29/2011	9:33:30 PM	PH3 valve closed
9/29/2011	9:33:30 PM	SiCl4 pre valve closed
9/29/2011	9:33:30 PM	SiCl4 post valve closed
9/29/2011	9:33:30 PM	Main Vac valve closed
9/29/2011	9:33:30 PM	Bypass valve closed
9/29/2011	9:33:30 PM	Bubbler valve closed
9/29/2011	9:33:30 PM	Helium valve opened
9/29/2011	9:33:30 PM	Helium MFC set to  500.000000
9/29/2011	9:33:30 PM	H2 MFC set to  0.000000
9/29/2011	9:33:30 PM	BCl3 MFC set to  0.000000
9/29/2011	9:33:30 PM	PHl3 MFC set to  0.000000
9/29/2011	9:33:30 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:33:30 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:33:30 PM	Tube furnace set to 0
9/29/2011	9:33:31 PM	Helium valve closed
9/29/2011	9:33:31 PM	H2 valve closed
9/29/2011	9:33:31 PM	BCl3 valve closed
9/29/2011	9:33:31 PM	PH3 valve closed
9/29/2011	9:33:31 PM	SiCl4 pre valve closed
9/29/2011	9:33:31 PM	SiCl4 post valve closed
9/29/2011	9:33:31 PM	Main Vac valve closed
9/29/2011	9:33:31 PM	Bypass valve closed
9/29/2011	9:33:31 PM	Bubbler valve closed
9/29/2011	9:33:31 PM	Helium MFC set to  0.000000
9/29/2011	9:33:31 PM	H2 MFC set to  0.000000
9/29/2011	9:33:31 PM	BCl3 MFC set to  0.000000
9/29/2011	9:33:31 PM	PHl3 MFC set to  0.000000
9/29/2011	9:33:31 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:33:31 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:33:31 PM	Tube furnace set to 0
9/29/2011	9:33:32 PM	Run finished at 9:33 PM
9/29/2011	9:33:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	9:41:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	9:41:42 PM	Recipe started at 9:41 PM
9/29/2011	9:41:42 PM	Helium valve closed
9/29/2011	9:41:42 PM	H2 valve closed
9/29/2011	9:41:42 PM	BCl3 valve closed
9/29/2011	9:41:42 PM	PH3 valve closed
9/29/2011	9:41:42 PM	SiCl4 pre valve closed
9/29/2011	9:41:42 PM	SiCl4 post valve closed
9/29/2011	9:41:42 PM	Main Vac valve closed
9/29/2011	9:41:42 PM	Bubbler valve closed
9/29/2011	9:41:42 PM	Bypass valve opened
9/29/2011	9:41:42 PM	Helium MFC set to  0.000000
9/29/2011	9:41:42 PM	H2 MFC set to  0.000000
9/29/2011	9:41:42 PM	BCl3 MFC set to  0.000000
9/29/2011	9:41:42 PM	PHl3 MFC set to  0.000000
9/29/2011	9:41:42 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:41:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:41:42 PM	Tube furnace set to 0
9/29/2011	9:42:50 PM	Helium valve closed
9/29/2011	9:42:50 PM	H2 valve closed
9/29/2011	9:42:50 PM	BCl3 valve closed
9/29/2011	9:42:50 PM	PH3 valve closed
9/29/2011	9:42:50 PM	SiCl4 pre valve closed
9/29/2011	9:42:50 PM	SiCl4 post valve closed
9/29/2011	9:42:50 PM	Main Vac valve closed
9/29/2011	9:42:50 PM	Bubbler valve closed
9/29/2011	9:42:50 PM	Bypass valve opened
9/29/2011	9:42:50 PM	Helium MFC set to  0.000000
9/29/2011	9:42:50 PM	H2 MFC set to  0.000000
9/29/2011	9:42:50 PM	BCl3 MFC set to  0.000000
9/29/2011	9:42:50 PM	PHl3 MFC set to  0.000000
9/29/2011	9:42:50 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:42:50 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:42:50 PM	Tube furnace set to 0
9/29/2011	9:43:50 PM	Helium valve closed
9/29/2011	9:43:50 PM	H2 valve closed
9/29/2011	9:43:50 PM	BCl3 valve closed
9/29/2011	9:43:50 PM	PH3 valve closed
9/29/2011	9:43:50 PM	SiCl4 pre valve closed
9/29/2011	9:43:50 PM	SiCl4 post valve closed
9/29/2011	9:43:50 PM	Bypass valve closed
9/29/2011	9:43:50 PM	Bubbler valve closed
9/29/2011	9:43:50 PM	Main Vac valve opened
9/29/2011	9:43:50 PM	Helium MFC set to  0.000000
9/29/2011	9:43:50 PM	H2 MFC set to  0.000000
9/29/2011	9:43:50 PM	BCl3 MFC set to  0.000000
9/29/2011	9:43:50 PM	PHl3 MFC set to  0.000000
9/29/2011	9:43:50 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:43:50 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:43:50 PM	Tube furnace set to 0
9/29/2011	9:43:51 PM	Run finished at 9:43 PM
9/29/2011	9:43:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	9:46:26 PM	Recipe started at 9:46 PM
9/29/2011	9:46:26 PM	Helium valve closed
9/29/2011	9:46:26 PM	H2 valve closed
9/29/2011	9:46:26 PM	BCl3 valve closed
9/29/2011	9:46:26 PM	PH3 valve closed
9/29/2011	9:46:26 PM	SiCl4 pre valve closed
9/29/2011	9:46:26 PM	SiCl4 post valve closed
9/29/2011	9:46:26 PM	Bypass valve closed
9/29/2011	9:46:26 PM	Bubbler valve closed
9/29/2011	9:46:26 PM	Main Vac valve opened
9/29/2011	9:46:26 PM	Helium MFC set to  0.000000
9/29/2011	9:46:26 PM	H2 MFC set to  0.000000
9/29/2011	9:46:26 PM	BCl3 MFC set to  0.000000
9/29/2011	9:46:26 PM	PHl3 MFC set to  0.000000
9/29/2011	9:46:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:46:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:46:27 PM	Tube furnace set to 300
9/29/2011	9:46:57 PM	H2 valve closed
9/29/2011	9:46:57 PM	BCl3 valve closed
9/29/2011	9:46:57 PM	PH3 valve closed
9/29/2011	9:46:57 PM	SiCl4 pre valve closed
9/29/2011	9:46:57 PM	SiCl4 post valve closed
9/29/2011	9:46:57 PM	Bypass valve closed
9/29/2011	9:46:57 PM	Bubbler valve closed
9/29/2011	9:46:57 PM	Helium valve opened
9/29/2011	9:46:57 PM	Main Vac valve opened
9/29/2011	9:46:57 PM	Helium MFC set to  20.000000
9/29/2011	9:46:57 PM	H2 MFC set to  0.000000
9/29/2011	9:46:57 PM	BCl3 MFC set to  0.000000
9/29/2011	9:46:57 PM	PHl3 MFC set to  0.000000
9/29/2011	9:46:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:46:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:46:57 PM	Tube furnace set to 300
9/29/2011	9:47:27 PM	Helium valve closed
9/29/2011	9:47:27 PM	H2 valve closed
9/29/2011	9:47:27 PM	BCl3 valve closed
9/29/2011	9:47:27 PM	PH3 valve closed
9/29/2011	9:47:27 PM	SiCl4 pre valve closed
9/29/2011	9:47:27 PM	SiCl4 post valve closed
9/29/2011	9:47:27 PM	Bypass valve closed
9/29/2011	9:47:27 PM	Bubbler valve closed
9/29/2011	9:47:27 PM	Main Vac valve opened
9/29/2011	9:47:27 PM	Helium MFC set to  0.000000
9/29/2011	9:47:27 PM	H2 MFC set to  0.000000
9/29/2011	9:47:27 PM	BCl3 MFC set to  0.000000
9/29/2011	9:47:27 PM	PHl3 MFC set to  0.000000
9/29/2011	9:47:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:47:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:47:27 PM	Tube furnace set to 300
9/29/2011	9:47:57 PM	H2 valve closed
9/29/2011	9:47:57 PM	BCl3 valve closed
9/29/2011	9:47:57 PM	PH3 valve closed
9/29/2011	9:47:57 PM	SiCl4 pre valve closed
9/29/2011	9:47:57 PM	SiCl4 post valve closed
9/29/2011	9:47:57 PM	Bypass valve closed
9/29/2011	9:47:57 PM	Bubbler valve closed
9/29/2011	9:47:57 PM	Helium valve opened
9/29/2011	9:47:57 PM	Main Vac valve opened
9/29/2011	9:47:57 PM	Helium MFC set to  20.000000
9/29/2011	9:47:57 PM	H2 MFC set to  0.000000
9/29/2011	9:47:57 PM	BCl3 MFC set to  0.000000
9/29/2011	9:47:57 PM	PHl3 MFC set to  0.000000
9/29/2011	9:47:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:47:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:47:57 PM	Tube furnace set to 300
9/29/2011	9:48:27 PM	Helium valve closed
9/29/2011	9:48:27 PM	H2 valve closed
9/29/2011	9:48:27 PM	BCl3 valve closed
9/29/2011	9:48:27 PM	PH3 valve closed
9/29/2011	9:48:27 PM	SiCl4 pre valve closed
9/29/2011	9:48:27 PM	SiCl4 post valve closed
9/29/2011	9:48:27 PM	Bypass valve closed
9/29/2011	9:48:27 PM	Bubbler valve closed
9/29/2011	9:48:27 PM	Main Vac valve opened
9/29/2011	9:48:27 PM	Helium MFC set to  0.000000
9/29/2011	9:48:27 PM	H2 MFC set to  0.000000
9/29/2011	9:48:27 PM	BCl3 MFC set to  0.000000
9/29/2011	9:48:27 PM	PHl3 MFC set to  0.000000
9/29/2011	9:48:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:48:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:48:27 PM	Tube furnace set to 300
9/29/2011	9:48:57 PM	H2 valve closed
9/29/2011	9:48:57 PM	BCl3 valve closed
9/29/2011	9:48:57 PM	PH3 valve closed
9/29/2011	9:48:57 PM	SiCl4 pre valve closed
9/29/2011	9:48:57 PM	SiCl4 post valve closed
9/29/2011	9:48:57 PM	Bypass valve closed
9/29/2011	9:48:57 PM	Bubbler valve closed
9/29/2011	9:48:57 PM	Helium valve opened
9/29/2011	9:48:57 PM	Main Vac valve opened
9/29/2011	9:48:57 PM	Helium MFC set to  20.000000
9/29/2011	9:48:57 PM	H2 MFC set to  0.000000
9/29/2011	9:48:57 PM	BCl3 MFC set to  0.000000
9/29/2011	9:48:57 PM	PHl3 MFC set to  0.000000
9/29/2011	9:48:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:48:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:48:58 PM	Tube furnace set to 300
9/29/2011	9:49:28 PM	Helium valve closed
9/29/2011	9:49:28 PM	H2 valve closed
9/29/2011	9:49:28 PM	BCl3 valve closed
9/29/2011	9:49:28 PM	PH3 valve closed
9/29/2011	9:49:28 PM	SiCl4 pre valve closed
9/29/2011	9:49:28 PM	SiCl4 post valve closed
9/29/2011	9:49:28 PM	Bypass valve closed
9/29/2011	9:49:28 PM	Bubbler valve closed
9/29/2011	9:49:28 PM	Main Vac valve opened
9/29/2011	9:49:28 PM	Helium MFC set to  0.000000
9/29/2011	9:49:28 PM	H2 MFC set to  0.000000
9/29/2011	9:49:28 PM	BCl3 MFC set to  0.000000
9/29/2011	9:49:28 PM	PHl3 MFC set to  0.000000
9/29/2011	9:49:28 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:49:28 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:49:28 PM	Tube furnace set to 300
9/29/2011	9:49:58 PM	H2 valve closed
9/29/2011	9:49:58 PM	BCl3 valve closed
9/29/2011	9:49:58 PM	PH3 valve closed
9/29/2011	9:49:58 PM	SiCl4 pre valve closed
9/29/2011	9:49:58 PM	SiCl4 post valve closed
9/29/2011	9:49:58 PM	Bypass valve closed
9/29/2011	9:49:58 PM	Bubbler valve closed
9/29/2011	9:49:58 PM	Helium valve opened
9/29/2011	9:49:58 PM	Main Vac valve opened
9/29/2011	9:49:58 PM	Helium MFC set to  20.000000
9/29/2011	9:49:58 PM	H2 MFC set to  0.000000
9/29/2011	9:49:58 PM	BCl3 MFC set to  0.000000
9/29/2011	9:49:58 PM	PHl3 MFC set to  0.000000
9/29/2011	9:49:58 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:49:58 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:49:58 PM	Tube furnace set to 300
9/29/2011	9:50:28 PM	Helium valve closed
9/29/2011	9:50:28 PM	H2 valve closed
9/29/2011	9:50:28 PM	BCl3 valve closed
9/29/2011	9:50:28 PM	PH3 valve closed
9/29/2011	9:50:28 PM	SiCl4 pre valve closed
9/29/2011	9:50:28 PM	SiCl4 post valve closed
9/29/2011	9:50:28 PM	Bypass valve closed
9/29/2011	9:50:28 PM	Bubbler valve closed
9/29/2011	9:50:28 PM	Main Vac valve opened
9/29/2011	9:50:28 PM	Helium MFC set to  0.000000
9/29/2011	9:50:28 PM	H2 MFC set to  0.000000
9/29/2011	9:50:28 PM	BCl3 MFC set to  0.000000
9/29/2011	9:50:28 PM	PHl3 MFC set to  0.000000
9/29/2011	9:50:28 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:50:28 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:50:28 PM	Tube furnace set to 300
9/29/2011	9:50:58 PM	H2 valve closed
9/29/2011	9:50:58 PM	BCl3 valve closed
9/29/2011	9:50:58 PM	PH3 valve closed
9/29/2011	9:50:58 PM	SiCl4 pre valve closed
9/29/2011	9:50:58 PM	SiCl4 post valve closed
9/29/2011	9:50:58 PM	Bypass valve closed
9/29/2011	9:50:58 PM	Bubbler valve closed
9/29/2011	9:50:58 PM	Helium valve opened
9/29/2011	9:50:58 PM	Main Vac valve opened
9/29/2011	9:50:58 PM	Helium MFC set to  20.000000
9/29/2011	9:50:58 PM	H2 MFC set to  0.000000
9/29/2011	9:50:58 PM	BCl3 MFC set to  0.000000
9/29/2011	9:50:58 PM	PHl3 MFC set to  0.000000
9/29/2011	9:50:58 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:50:58 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:50:58 PM	Tube furnace set to 300
9/29/2011	9:51:28 PM	Helium valve closed
9/29/2011	9:51:28 PM	H2 valve closed
9/29/2011	9:51:28 PM	BCl3 valve closed
9/29/2011	9:51:28 PM	PH3 valve closed
9/29/2011	9:51:28 PM	SiCl4 pre valve closed
9/29/2011	9:51:28 PM	SiCl4 post valve closed
9/29/2011	9:51:28 PM	Bypass valve closed
9/29/2011	9:51:28 PM	Bubbler valve closed
9/29/2011	9:51:28 PM	Main Vac valve opened
9/29/2011	9:51:28 PM	Helium MFC set to  0.000000
9/29/2011	9:51:28 PM	H2 MFC set to  0.000000
9/29/2011	9:51:28 PM	BCl3 MFC set to  0.000000
9/29/2011	9:51:28 PM	PHl3 MFC set to  0.000000
9/29/2011	9:51:28 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:51:28 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:51:29 PM	Tube furnace set to 300
9/29/2011	9:51:59 PM	H2 valve closed
9/29/2011	9:51:59 PM	BCl3 valve closed
9/29/2011	9:51:59 PM	PH3 valve closed
9/29/2011	9:51:59 PM	SiCl4 pre valve closed
9/29/2011	9:51:59 PM	SiCl4 post valve closed
9/29/2011	9:51:59 PM	Bypass valve closed
9/29/2011	9:51:59 PM	Bubbler valve closed
9/29/2011	9:51:59 PM	Helium valve opened
9/29/2011	9:51:59 PM	Main Vac valve opened
9/29/2011	9:51:59 PM	Helium MFC set to  20.000000
9/29/2011	9:51:59 PM	H2 MFC set to  0.000000
9/29/2011	9:51:59 PM	BCl3 MFC set to  0.000000
9/29/2011	9:51:59 PM	PHl3 MFC set to  0.000000
9/29/2011	9:51:59 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:51:59 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:51:59 PM	Tube furnace set to 300
9/29/2011	9:52:29 PM	Helium valve closed
9/29/2011	9:52:29 PM	H2 valve closed
9/29/2011	9:52:29 PM	BCl3 valve closed
9/29/2011	9:52:29 PM	PH3 valve closed
9/29/2011	9:52:29 PM	SiCl4 pre valve closed
9/29/2011	9:52:29 PM	SiCl4 post valve closed
9/29/2011	9:52:29 PM	Bypass valve closed
9/29/2011	9:52:29 PM	Bubbler valve closed
9/29/2011	9:52:29 PM	Main Vac valve opened
9/29/2011	9:52:29 PM	Helium MFC set to  0.000000
9/29/2011	9:52:29 PM	H2 MFC set to  0.000000
9/29/2011	9:52:29 PM	BCl3 MFC set to  0.000000
9/29/2011	9:52:29 PM	PHl3 MFC set to  0.000000
9/29/2011	9:52:29 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:52:29 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:52:29 PM	Tube furnace set to 300
9/29/2011	9:52:59 PM	H2 valve closed
9/29/2011	9:52:59 PM	BCl3 valve closed
9/29/2011	9:52:59 PM	PH3 valve closed
9/29/2011	9:52:59 PM	SiCl4 pre valve closed
9/29/2011	9:52:59 PM	SiCl4 post valve closed
9/29/2011	9:52:59 PM	Bypass valve closed
9/29/2011	9:52:59 PM	Bubbler valve closed
9/29/2011	9:52:59 PM	Helium valve opened
9/29/2011	9:52:59 PM	Main Vac valve opened
9/29/2011	9:52:59 PM	Helium MFC set to  20.000000
9/29/2011	9:52:59 PM	H2 MFC set to  0.000000
9/29/2011	9:52:59 PM	BCl3 MFC set to  0.000000
9/29/2011	9:52:59 PM	PHl3 MFC set to  0.000000
9/29/2011	9:52:59 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:52:59 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:52:59 PM	Tube furnace set to 300
9/29/2011	9:53:29 PM	Helium valve closed
9/29/2011	9:53:29 PM	H2 valve closed
9/29/2011	9:53:29 PM	BCl3 valve closed
9/29/2011	9:53:29 PM	PH3 valve closed
9/29/2011	9:53:29 PM	SiCl4 pre valve closed
9/29/2011	9:53:29 PM	SiCl4 post valve closed
9/29/2011	9:53:29 PM	Bypass valve closed
9/29/2011	9:53:29 PM	Bubbler valve closed
9/29/2011	9:53:29 PM	Main Vac valve opened
9/29/2011	9:53:29 PM	Helium MFC set to  0.000000
9/29/2011	9:53:29 PM	H2 MFC set to  0.000000
9/29/2011	9:53:29 PM	BCl3 MFC set to  0.000000
9/29/2011	9:53:29 PM	PHl3 MFC set to  0.000000
9/29/2011	9:53:29 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:53:29 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:53:29 PM	Tube furnace set to 300
9/29/2011	9:53:59 PM	H2 valve closed
9/29/2011	9:53:59 PM	BCl3 valve closed
9/29/2011	9:53:59 PM	PH3 valve closed
9/29/2011	9:53:59 PM	SiCl4 pre valve closed
9/29/2011	9:53:59 PM	SiCl4 post valve closed
9/29/2011	9:53:59 PM	Bypass valve closed
9/29/2011	9:53:59 PM	Bubbler valve closed
9/29/2011	9:53:59 PM	Helium valve opened
9/29/2011	9:53:59 PM	Main Vac valve opened
9/29/2011	9:53:59 PM	Helium MFC set to  20.000000
9/29/2011	9:53:59 PM	H2 MFC set to  0.000000
9/29/2011	9:53:59 PM	BCl3 MFC set to  0.000000
9/29/2011	9:53:59 PM	PHl3 MFC set to  0.000000
9/29/2011	9:53:59 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:53:59 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:54:00 PM	Tube furnace set to 300
9/29/2011	9:54:30 PM	Helium valve closed
9/29/2011	9:54:30 PM	H2 valve closed
9/29/2011	9:54:30 PM	BCl3 valve closed
9/29/2011	9:54:30 PM	PH3 valve closed
9/29/2011	9:54:30 PM	SiCl4 pre valve closed
9/29/2011	9:54:30 PM	SiCl4 post valve closed
9/29/2011	9:54:30 PM	Bypass valve closed
9/29/2011	9:54:30 PM	Bubbler valve closed
9/29/2011	9:54:30 PM	Main Vac valve opened
9/29/2011	9:54:30 PM	Helium MFC set to  0.000000
9/29/2011	9:54:30 PM	H2 MFC set to  0.000000
9/29/2011	9:54:30 PM	BCl3 MFC set to  0.000000
9/29/2011	9:54:30 PM	PHl3 MFC set to  0.000000
9/29/2011	9:54:30 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:54:30 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:54:30 PM	Tube furnace set to 300
9/29/2011	9:55:00 PM	H2 valve closed
9/29/2011	9:55:00 PM	BCl3 valve closed
9/29/2011	9:55:00 PM	PH3 valve closed
9/29/2011	9:55:00 PM	SiCl4 pre valve closed
9/29/2011	9:55:00 PM	SiCl4 post valve closed
9/29/2011	9:55:00 PM	Bypass valve closed
9/29/2011	9:55:00 PM	Bubbler valve closed
9/29/2011	9:55:00 PM	Helium valve opened
9/29/2011	9:55:00 PM	Main Vac valve opened
9/29/2011	9:55:00 PM	Helium MFC set to  20.000000
9/29/2011	9:55:00 PM	H2 MFC set to  0.000000
9/29/2011	9:55:00 PM	BCl3 MFC set to  0.000000
9/29/2011	9:55:00 PM	PHl3 MFC set to  0.000000
9/29/2011	9:55:00 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:55:00 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:55:00 PM	Tube furnace set to 300
9/29/2011	9:55:30 PM	Helium valve closed
9/29/2011	9:55:30 PM	H2 valve closed
9/29/2011	9:55:30 PM	BCl3 valve closed
9/29/2011	9:55:30 PM	PH3 valve closed
9/29/2011	9:55:30 PM	SiCl4 pre valve closed
9/29/2011	9:55:30 PM	SiCl4 post valve closed
9/29/2011	9:55:30 PM	Bypass valve closed
9/29/2011	9:55:30 PM	Bubbler valve closed
9/29/2011	9:55:30 PM	Main Vac valve opened
9/29/2011	9:55:30 PM	Helium MFC set to  0.000000
9/29/2011	9:55:30 PM	H2 MFC set to  0.000000
9/29/2011	9:55:30 PM	BCl3 MFC set to  0.000000
9/29/2011	9:55:30 PM	PHl3 MFC set to  0.000000
9/29/2011	9:55:30 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:55:30 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:55:30 PM	Tube furnace set to 300
9/29/2011	9:56:00 PM	H2 valve closed
9/29/2011	9:56:00 PM	BCl3 valve closed
9/29/2011	9:56:00 PM	PH3 valve closed
9/29/2011	9:56:00 PM	SiCl4 pre valve closed
9/29/2011	9:56:00 PM	SiCl4 post valve closed
9/29/2011	9:56:00 PM	Bypass valve closed
9/29/2011	9:56:00 PM	Bubbler valve closed
9/29/2011	9:56:00 PM	Helium valve opened
9/29/2011	9:56:00 PM	Main Vac valve opened
9/29/2011	9:56:00 PM	Helium MFC set to  20.000000
9/29/2011	9:56:00 PM	H2 MFC set to  0.000000
9/29/2011	9:56:00 PM	BCl3 MFC set to  0.000000
9/29/2011	9:56:00 PM	PHl3 MFC set to  0.000000
9/29/2011	9:56:00 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:56:00 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:56:00 PM	Tube furnace set to 300
9/29/2011	9:56:30 PM	Helium valve closed
9/29/2011	9:56:30 PM	H2 valve closed
9/29/2011	9:56:30 PM	BCl3 valve closed
9/29/2011	9:56:30 PM	PH3 valve closed
9/29/2011	9:56:30 PM	SiCl4 pre valve closed
9/29/2011	9:56:30 PM	SiCl4 post valve closed
9/29/2011	9:56:30 PM	Bypass valve closed
9/29/2011	9:56:30 PM	Bubbler valve closed
9/29/2011	9:56:30 PM	Main Vac valve opened
9/29/2011	9:56:30 PM	Helium MFC set to  0.000000
9/29/2011	9:56:30 PM	H2 MFC set to  0.000000
9/29/2011	9:56:30 PM	BCl3 MFC set to  0.000000
9/29/2011	9:56:30 PM	PHl3 MFC set to  0.000000
9/29/2011	9:56:30 PM	SiCl4 MFC set to  0.000000
9/29/2011	9:56:30 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	9:56:31 PM	Tube furnace set to 300
9/29/2011	9:56:32 PM	Run finished at 9:56 PM
9/29/2011	10:00:50 PM	Recipe started at 10:00 PM
9/29/2011	10:00:50 PM	Helium valve closed
9/29/2011	10:00:50 PM	H2 valve closed
9/29/2011	10:00:50 PM	BCl3 valve closed
9/29/2011	10:00:50 PM	PH3 valve closed
9/29/2011	10:00:50 PM	SiCl4 pre valve closed
9/29/2011	10:00:50 PM	SiCl4 post valve closed
9/29/2011	10:00:50 PM	Bypass valve closed
9/29/2011	10:00:50 PM	Bubbler valve closed
9/29/2011	10:00:50 PM	Main Vac valve opened
9/29/2011	10:00:50 PM	Helium MFC set to  0.000000
9/29/2011	10:00:50 PM	H2 MFC set to  0.000000
9/29/2011	10:00:50 PM	BCl3 MFC set to  0.000000
9/29/2011	10:00:50 PM	PHl3 MFC set to  0.000000
9/29/2011	10:00:50 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:00:50 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:00:51 PM	Tube furnace set to 300
9/29/2011	10:00:52 PM	H2 valve closed
9/29/2011	10:00:52 PM	BCl3 valve closed
9/29/2011	10:00:52 PM	PH3 valve closed
9/29/2011	10:00:52 PM	SiCl4 pre valve closed
9/29/2011	10:00:52 PM	SiCl4 post valve closed
9/29/2011	10:00:52 PM	Bypass valve closed
9/29/2011	10:00:52 PM	Bubbler valve closed
9/29/2011	10:00:52 PM	Helium valve opened
9/29/2011	10:00:52 PM	Main Vac valve opened
9/29/2011	10:00:52 PM	Helium MFC set to  20.000000
9/29/2011	10:00:52 PM	H2 MFC set to  0.000000
9/29/2011	10:00:52 PM	BCl3 MFC set to  0.000000
9/29/2011	10:00:52 PM	PHl3 MFC set to  0.000000
9/29/2011	10:00:52 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:00:52 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:00:52 PM	Tube furnace set to 300
9/29/2011	10:01:22 PM	Helium valve closed
9/29/2011	10:01:22 PM	H2 valve closed
9/29/2011	10:01:22 PM	BCl3 valve closed
9/29/2011	10:01:22 PM	PH3 valve closed
9/29/2011	10:01:22 PM	SiCl4 pre valve closed
9/29/2011	10:01:22 PM	SiCl4 post valve closed
9/29/2011	10:01:22 PM	Bypass valve closed
9/29/2011	10:01:22 PM	Bubbler valve closed
9/29/2011	10:01:22 PM	Main Vac valve opened
9/29/2011	10:01:22 PM	Helium MFC set to  0.000000
9/29/2011	10:01:22 PM	H2 MFC set to  0.000000
9/29/2011	10:01:22 PM	BCl3 MFC set to  0.000000
9/29/2011	10:01:22 PM	PHl3 MFC set to  0.000000
9/29/2011	10:01:22 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:01:22 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:01:23 PM	Tube furnace set to 300
9/29/2011	10:01:53 PM	H2 valve closed
9/29/2011	10:01:53 PM	BCl3 valve closed
9/29/2011	10:01:53 PM	PH3 valve closed
9/29/2011	10:01:53 PM	SiCl4 pre valve closed
9/29/2011	10:01:53 PM	SiCl4 post valve closed
9/29/2011	10:01:53 PM	Bypass valve closed
9/29/2011	10:01:53 PM	Bubbler valve closed
9/29/2011	10:01:53 PM	Helium valve opened
9/29/2011	10:01:53 PM	Main Vac valve opened
9/29/2011	10:01:53 PM	Helium MFC set to  20.000000
9/29/2011	10:01:53 PM	H2 MFC set to  0.000000
9/29/2011	10:01:53 PM	BCl3 MFC set to  0.000000
9/29/2011	10:01:53 PM	PHl3 MFC set to  0.000000
9/29/2011	10:01:53 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:01:53 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:01:53 PM	Tube furnace set to 300
9/29/2011	10:02:23 PM	Helium valve closed
9/29/2011	10:02:23 PM	H2 valve closed
9/29/2011	10:02:23 PM	BCl3 valve closed
9/29/2011	10:02:23 PM	PH3 valve closed
9/29/2011	10:02:23 PM	SiCl4 pre valve closed
9/29/2011	10:02:23 PM	SiCl4 post valve closed
9/29/2011	10:02:23 PM	Bypass valve closed
9/29/2011	10:02:23 PM	Bubbler valve closed
9/29/2011	10:02:23 PM	Main Vac valve opened
9/29/2011	10:02:23 PM	Helium MFC set to  0.000000
9/29/2011	10:02:23 PM	H2 MFC set to  0.000000
9/29/2011	10:02:23 PM	BCl3 MFC set to  0.000000
9/29/2011	10:02:23 PM	PHl3 MFC set to  0.000000
9/29/2011	10:02:23 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:02:23 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:02:23 PM	Tube furnace set to 300
9/29/2011	10:02:53 PM	H2 valve closed
9/29/2011	10:02:53 PM	BCl3 valve closed
9/29/2011	10:02:53 PM	PH3 valve closed
9/29/2011	10:02:53 PM	SiCl4 pre valve closed
9/29/2011	10:02:53 PM	SiCl4 post valve closed
9/29/2011	10:02:53 PM	Bypass valve closed
9/29/2011	10:02:53 PM	Bubbler valve closed
9/29/2011	10:02:53 PM	Helium valve opened
9/29/2011	10:02:53 PM	Main Vac valve opened
9/29/2011	10:02:53 PM	Helium MFC set to  20.000000
9/29/2011	10:02:53 PM	H2 MFC set to  0.000000
9/29/2011	10:02:53 PM	BCl3 MFC set to  0.000000
9/29/2011	10:02:53 PM	PHl3 MFC set to  0.000000
9/29/2011	10:02:53 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:02:53 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:02:53 PM	Tube furnace set to 300
9/29/2011	10:03:23 PM	Helium valve closed
9/29/2011	10:03:23 PM	H2 valve closed
9/29/2011	10:03:23 PM	BCl3 valve closed
9/29/2011	10:03:23 PM	PH3 valve closed
9/29/2011	10:03:23 PM	SiCl4 pre valve closed
9/29/2011	10:03:23 PM	SiCl4 post valve closed
9/29/2011	10:03:23 PM	Bypass valve closed
9/29/2011	10:03:23 PM	Bubbler valve closed
9/29/2011	10:03:23 PM	Main Vac valve opened
9/29/2011	10:03:23 PM	Helium MFC set to  0.000000
9/29/2011	10:03:23 PM	H2 MFC set to  0.000000
9/29/2011	10:03:23 PM	BCl3 MFC set to  0.000000
9/29/2011	10:03:23 PM	PHl3 MFC set to  0.000000
9/29/2011	10:03:23 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:03:23 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:03:23 PM	Tube furnace set to 300
9/29/2011	10:03:53 PM	H2 valve closed
9/29/2011	10:03:53 PM	BCl3 valve closed
9/29/2011	10:03:53 PM	PH3 valve closed
9/29/2011	10:03:53 PM	SiCl4 pre valve closed
9/29/2011	10:03:53 PM	SiCl4 post valve closed
9/29/2011	10:03:53 PM	Bypass valve closed
9/29/2011	10:03:53 PM	Bubbler valve closed
9/29/2011	10:03:53 PM	Helium valve opened
9/29/2011	10:03:53 PM	Main Vac valve opened
9/29/2011	10:03:53 PM	Helium MFC set to  20.000000
9/29/2011	10:03:53 PM	H2 MFC set to  0.000000
9/29/2011	10:03:53 PM	BCl3 MFC set to  0.000000
9/29/2011	10:03:53 PM	PHl3 MFC set to  0.000000
9/29/2011	10:03:53 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:03:53 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:03:54 PM	Tube furnace set to 300
9/29/2011	10:04:24 PM	Helium valve closed
9/29/2011	10:04:24 PM	H2 valve closed
9/29/2011	10:04:24 PM	BCl3 valve closed
9/29/2011	10:04:24 PM	PH3 valve closed
9/29/2011	10:04:24 PM	SiCl4 pre valve closed
9/29/2011	10:04:24 PM	SiCl4 post valve closed
9/29/2011	10:04:24 PM	Bypass valve closed
9/29/2011	10:04:24 PM	Bubbler valve closed
9/29/2011	10:04:24 PM	Main Vac valve opened
9/29/2011	10:04:24 PM	Helium MFC set to  0.000000
9/29/2011	10:04:24 PM	H2 MFC set to  0.000000
9/29/2011	10:04:24 PM	BCl3 MFC set to  0.000000
9/29/2011	10:04:24 PM	PHl3 MFC set to  0.000000
9/29/2011	10:04:24 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:04:24 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:04:24 PM	Tube furnace set to 300
9/29/2011	10:04:54 PM	H2 valve closed
9/29/2011	10:04:54 PM	BCl3 valve closed
9/29/2011	10:04:54 PM	PH3 valve closed
9/29/2011	10:04:54 PM	SiCl4 pre valve closed
9/29/2011	10:04:54 PM	SiCl4 post valve closed
9/29/2011	10:04:54 PM	Bypass valve closed
9/29/2011	10:04:54 PM	Bubbler valve closed
9/29/2011	10:04:54 PM	Helium valve opened
9/29/2011	10:04:54 PM	Main Vac valve opened
9/29/2011	10:04:54 PM	Helium MFC set to  20.000000
9/29/2011	10:04:54 PM	H2 MFC set to  0.000000
9/29/2011	10:04:54 PM	BCl3 MFC set to  0.000000
9/29/2011	10:04:54 PM	PHl3 MFC set to  0.000000
9/29/2011	10:04:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:04:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:04:54 PM	Tube furnace set to 300
9/29/2011	10:05:24 PM	Helium valve closed
9/29/2011	10:05:24 PM	H2 valve closed
9/29/2011	10:05:24 PM	BCl3 valve closed
9/29/2011	10:05:24 PM	PH3 valve closed
9/29/2011	10:05:24 PM	SiCl4 pre valve closed
9/29/2011	10:05:24 PM	SiCl4 post valve closed
9/29/2011	10:05:24 PM	Bypass valve closed
9/29/2011	10:05:24 PM	Bubbler valve closed
9/29/2011	10:05:24 PM	Main Vac valve opened
9/29/2011	10:05:24 PM	Helium MFC set to  0.000000
9/29/2011	10:05:24 PM	H2 MFC set to  0.000000
9/29/2011	10:05:24 PM	BCl3 MFC set to  0.000000
9/29/2011	10:05:24 PM	PHl3 MFC set to  0.000000
9/29/2011	10:05:24 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:05:24 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:05:24 PM	Tube furnace set to 300
9/29/2011	10:05:54 PM	H2 valve closed
9/29/2011	10:05:54 PM	BCl3 valve closed
9/29/2011	10:05:54 PM	PH3 valve closed
9/29/2011	10:05:54 PM	SiCl4 pre valve closed
9/29/2011	10:05:54 PM	SiCl4 post valve closed
9/29/2011	10:05:54 PM	Bypass valve closed
9/29/2011	10:05:54 PM	Bubbler valve closed
9/29/2011	10:05:54 PM	Helium valve opened
9/29/2011	10:05:54 PM	Main Vac valve opened
9/29/2011	10:05:54 PM	Helium MFC set to  20.000000
9/29/2011	10:05:54 PM	H2 MFC set to  0.000000
9/29/2011	10:05:54 PM	BCl3 MFC set to  0.000000
9/29/2011	10:05:54 PM	PHl3 MFC set to  0.000000
9/29/2011	10:05:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:05:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:05:54 PM	Tube furnace set to 300
9/29/2011	10:06:24 PM	Helium valve closed
9/29/2011	10:06:24 PM	H2 valve closed
9/29/2011	10:06:24 PM	BCl3 valve closed
9/29/2011	10:06:24 PM	PH3 valve closed
9/29/2011	10:06:24 PM	SiCl4 pre valve closed
9/29/2011	10:06:24 PM	SiCl4 post valve closed
9/29/2011	10:06:24 PM	Bypass valve closed
9/29/2011	10:06:24 PM	Bubbler valve closed
9/29/2011	10:06:24 PM	Main Vac valve opened
9/29/2011	10:06:24 PM	Helium MFC set to  0.000000
9/29/2011	10:06:24 PM	H2 MFC set to  0.000000
9/29/2011	10:06:24 PM	BCl3 MFC set to  0.000000
9/29/2011	10:06:24 PM	PHl3 MFC set to  0.000000
9/29/2011	10:06:24 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:06:24 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:06:25 PM	Tube furnace set to 300
9/29/2011	10:06:55 PM	H2 valve closed
9/29/2011	10:06:55 PM	BCl3 valve closed
9/29/2011	10:06:55 PM	PH3 valve closed
9/29/2011	10:06:55 PM	SiCl4 pre valve closed
9/29/2011	10:06:55 PM	SiCl4 post valve closed
9/29/2011	10:06:55 PM	Bypass valve closed
9/29/2011	10:06:55 PM	Bubbler valve closed
9/29/2011	10:06:55 PM	Helium valve opened
9/29/2011	10:06:55 PM	Main Vac valve opened
9/29/2011	10:06:55 PM	Helium MFC set to  20.000000
9/29/2011	10:06:55 PM	H2 MFC set to  0.000000
9/29/2011	10:06:55 PM	BCl3 MFC set to  0.000000
9/29/2011	10:06:55 PM	PHl3 MFC set to  0.000000
9/29/2011	10:06:55 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:06:55 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:06:55 PM	Tube furnace set to 300
9/29/2011	10:07:25 PM	Helium valve closed
9/29/2011	10:07:25 PM	H2 valve closed
9/29/2011	10:07:25 PM	BCl3 valve closed
9/29/2011	10:07:25 PM	PH3 valve closed
9/29/2011	10:07:25 PM	SiCl4 pre valve closed
9/29/2011	10:07:25 PM	SiCl4 post valve closed
9/29/2011	10:07:25 PM	Bypass valve closed
9/29/2011	10:07:25 PM	Bubbler valve closed
9/29/2011	10:07:25 PM	Main Vac valve opened
9/29/2011	10:07:25 PM	Helium MFC set to  0.000000
9/29/2011	10:07:25 PM	H2 MFC set to  0.000000
9/29/2011	10:07:25 PM	BCl3 MFC set to  0.000000
9/29/2011	10:07:25 PM	PHl3 MFC set to  0.000000
9/29/2011	10:07:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:07:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:07:25 PM	Tube furnace set to 300
9/29/2011	10:07:55 PM	H2 valve closed
9/29/2011	10:07:55 PM	BCl3 valve closed
9/29/2011	10:07:55 PM	PH3 valve closed
9/29/2011	10:07:55 PM	SiCl4 pre valve closed
9/29/2011	10:07:55 PM	SiCl4 post valve closed
9/29/2011	10:07:55 PM	Bypass valve closed
9/29/2011	10:07:55 PM	Bubbler valve closed
9/29/2011	10:07:55 PM	Helium valve opened
9/29/2011	10:07:55 PM	Main Vac valve opened
9/29/2011	10:07:55 PM	Helium MFC set to  20.000000
9/29/2011	10:07:55 PM	H2 MFC set to  0.000000
9/29/2011	10:07:55 PM	BCl3 MFC set to  0.000000
9/29/2011	10:07:55 PM	PHl3 MFC set to  0.000000
9/29/2011	10:07:55 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:07:55 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:07:55 PM	Tube furnace set to 300
9/29/2011	10:08:25 PM	Helium valve closed
9/29/2011	10:08:25 PM	H2 valve closed
9/29/2011	10:08:25 PM	BCl3 valve closed
9/29/2011	10:08:25 PM	PH3 valve closed
9/29/2011	10:08:25 PM	SiCl4 pre valve closed
9/29/2011	10:08:25 PM	SiCl4 post valve closed
9/29/2011	10:08:25 PM	Bypass valve closed
9/29/2011	10:08:25 PM	Bubbler valve closed
9/29/2011	10:08:25 PM	Main Vac valve opened
9/29/2011	10:08:25 PM	Helium MFC set to  0.000000
9/29/2011	10:08:25 PM	H2 MFC set to  0.000000
9/29/2011	10:08:25 PM	BCl3 MFC set to  0.000000
9/29/2011	10:08:25 PM	PHl3 MFC set to  0.000000
9/29/2011	10:08:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:08:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:08:25 PM	Tube furnace set to 300
9/29/2011	10:08:55 PM	H2 valve closed
9/29/2011	10:08:55 PM	BCl3 valve closed
9/29/2011	10:08:55 PM	PH3 valve closed
9/29/2011	10:08:55 PM	SiCl4 pre valve closed
9/29/2011	10:08:55 PM	SiCl4 post valve closed
9/29/2011	10:08:55 PM	Bypass valve closed
9/29/2011	10:08:55 PM	Bubbler valve closed
9/29/2011	10:08:55 PM	Helium valve opened
9/29/2011	10:08:55 PM	Main Vac valve opened
9/29/2011	10:08:55 PM	Helium MFC set to  20.000000
9/29/2011	10:08:55 PM	H2 MFC set to  0.000000
9/29/2011	10:08:55 PM	BCl3 MFC set to  0.000000
9/29/2011	10:08:55 PM	PHl3 MFC set to  0.000000
9/29/2011	10:08:55 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:08:55 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:08:56 PM	Tube furnace set to 300
9/29/2011	10:09:26 PM	Helium valve closed
9/29/2011	10:09:26 PM	H2 valve closed
9/29/2011	10:09:26 PM	BCl3 valve closed
9/29/2011	10:09:26 PM	PH3 valve closed
9/29/2011	10:09:26 PM	SiCl4 pre valve closed
9/29/2011	10:09:26 PM	SiCl4 post valve closed
9/29/2011	10:09:26 PM	Bypass valve closed
9/29/2011	10:09:26 PM	Bubbler valve closed
9/29/2011	10:09:26 PM	Main Vac valve opened
9/29/2011	10:09:26 PM	Helium MFC set to  0.000000
9/29/2011	10:09:26 PM	H2 MFC set to  0.000000
9/29/2011	10:09:26 PM	BCl3 MFC set to  0.000000
9/29/2011	10:09:26 PM	PHl3 MFC set to  0.000000
9/29/2011	10:09:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:09:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:09:26 PM	Tube furnace set to 300
9/29/2011	10:09:56 PM	H2 valve closed
9/29/2011	10:09:56 PM	BCl3 valve closed
9/29/2011	10:09:56 PM	PH3 valve closed
9/29/2011	10:09:56 PM	SiCl4 pre valve closed
9/29/2011	10:09:56 PM	SiCl4 post valve closed
9/29/2011	10:09:56 PM	Bypass valve closed
9/29/2011	10:09:56 PM	Bubbler valve closed
9/29/2011	10:09:56 PM	Helium valve opened
9/29/2011	10:09:56 PM	Main Vac valve opened
9/29/2011	10:09:56 PM	Helium MFC set to  20.000000
9/29/2011	10:09:56 PM	H2 MFC set to  0.000000
9/29/2011	10:09:56 PM	BCl3 MFC set to  0.000000
9/29/2011	10:09:56 PM	PHl3 MFC set to  0.000000
9/29/2011	10:09:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:09:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:09:56 PM	Tube furnace set to 300
9/29/2011	10:10:26 PM	Helium valve closed
9/29/2011	10:10:26 PM	H2 valve closed
9/29/2011	10:10:26 PM	BCl3 valve closed
9/29/2011	10:10:26 PM	PH3 valve closed
9/29/2011	10:10:26 PM	SiCl4 pre valve closed
9/29/2011	10:10:26 PM	SiCl4 post valve closed
9/29/2011	10:10:26 PM	Bypass valve closed
9/29/2011	10:10:26 PM	Bubbler valve closed
9/29/2011	10:10:26 PM	Main Vac valve opened
9/29/2011	10:10:26 PM	Helium MFC set to  0.000000
9/29/2011	10:10:26 PM	H2 MFC set to  0.000000
9/29/2011	10:10:26 PM	BCl3 MFC set to  0.000000
9/29/2011	10:10:26 PM	PHl3 MFC set to  0.000000
9/29/2011	10:10:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:10:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:10:26 PM	Tube furnace set to 300
9/29/2011	10:10:27 PM	Run finished at 10:10 PM
9/29/2011	10:15:36 PM	Main Vac valve closed
9/29/2011	10:15:40 PM	Main Vac valve opened
9/29/2011	10:16:02 PM	Recipe started at 10:15 PM
9/29/2011	10:16:02 PM	Helium valve closed
9/29/2011	10:16:02 PM	H2 valve closed
9/29/2011	10:16:02 PM	BCl3 valve closed
9/29/2011	10:16:02 PM	PH3 valve closed
9/29/2011	10:16:02 PM	SiCl4 pre valve closed
9/29/2011	10:16:02 PM	SiCl4 post valve closed
9/29/2011	10:16:02 PM	Bypass valve closed
9/29/2011	10:16:02 PM	Bubbler valve closed
9/29/2011	10:16:02 PM	Main Vac valve opened
9/29/2011	10:16:02 PM	Helium MFC set to  0.000000
9/29/2011	10:16:02 PM	H2 MFC set to  0.000000
9/29/2011	10:16:02 PM	BCl3 MFC set to  0.000000
9/29/2011	10:16:02 PM	PHl3 MFC set to  0.000000
9/29/2011	10:16:02 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:16:02 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:16:02 PM	Tube furnace set to 300
9/29/2011	10:16:04 PM	H2 valve closed
9/29/2011	10:16:04 PM	BCl3 valve closed
9/29/2011	10:16:04 PM	PH3 valve closed
9/29/2011	10:16:04 PM	SiCl4 pre valve closed
9/29/2011	10:16:04 PM	SiCl4 post valve closed
9/29/2011	10:16:04 PM	Bypass valve closed
9/29/2011	10:16:04 PM	Bubbler valve closed
9/29/2011	10:16:05 PM	Helium valve opened
9/29/2011	10:16:05 PM	Main Vac valve opened
9/29/2011	10:16:05 PM	Helium MFC set to  20.000000
9/29/2011	10:16:05 PM	H2 MFC set to  0.000000
9/29/2011	10:16:05 PM	BCl3 MFC set to  0.000000
9/29/2011	10:16:05 PM	PHl3 MFC set to  0.000000
9/29/2011	10:16:05 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:16:05 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:16:05 PM	Tube furnace set to 300
9/29/2011	10:16:35 PM	Helium valve closed
9/29/2011	10:16:35 PM	H2 valve closed
9/29/2011	10:16:35 PM	BCl3 valve closed
9/29/2011	10:16:35 PM	PH3 valve closed
9/29/2011	10:16:35 PM	SiCl4 pre valve closed
9/29/2011	10:16:35 PM	SiCl4 post valve closed
9/29/2011	10:16:35 PM	Bypass valve closed
9/29/2011	10:16:35 PM	Bubbler valve closed
9/29/2011	10:16:35 PM	Main Vac valve opened
9/29/2011	10:16:35 PM	Helium MFC set to  0.000000
9/29/2011	10:16:35 PM	H2 MFC set to  0.000000
9/29/2011	10:16:35 PM	BCl3 MFC set to  0.000000
9/29/2011	10:16:35 PM	PHl3 MFC set to  0.000000
9/29/2011	10:16:35 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:16:35 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:16:35 PM	Tube furnace set to 300
9/29/2011	10:17:05 PM	H2 valve closed
9/29/2011	10:17:05 PM	BCl3 valve closed
9/29/2011	10:17:05 PM	PH3 valve closed
9/29/2011	10:17:05 PM	SiCl4 pre valve closed
9/29/2011	10:17:05 PM	SiCl4 post valve closed
9/29/2011	10:17:05 PM	Bypass valve closed
9/29/2011	10:17:05 PM	Bubbler valve closed
9/29/2011	10:17:05 PM	Helium valve opened
9/29/2011	10:17:05 PM	Main Vac valve opened
9/29/2011	10:17:05 PM	Helium MFC set to  20.000000
9/29/2011	10:17:05 PM	H2 MFC set to  0.000000
9/29/2011	10:17:05 PM	BCl3 MFC set to  0.000000
9/29/2011	10:17:05 PM	PHl3 MFC set to  0.000000
9/29/2011	10:17:05 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:17:05 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:17:05 PM	Tube furnace set to 300
9/29/2011	10:17:35 PM	Helium valve closed
9/29/2011	10:17:35 PM	H2 valve closed
9/29/2011	10:17:35 PM	BCl3 valve closed
9/29/2011	10:17:35 PM	PH3 valve closed
9/29/2011	10:17:35 PM	SiCl4 pre valve closed
9/29/2011	10:17:35 PM	SiCl4 post valve closed
9/29/2011	10:17:35 PM	Bypass valve closed
9/29/2011	10:17:35 PM	Bubbler valve closed
9/29/2011	10:17:35 PM	Main Vac valve opened
9/29/2011	10:17:35 PM	Helium MFC set to  0.000000
9/29/2011	10:17:35 PM	H2 MFC set to  0.000000
9/29/2011	10:17:35 PM	BCl3 MFC set to  0.000000
9/29/2011	10:17:35 PM	PHl3 MFC set to  0.000000
9/29/2011	10:17:35 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:17:35 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:17:35 PM	Tube furnace set to 300
9/29/2011	10:18:05 PM	H2 valve closed
9/29/2011	10:18:05 PM	BCl3 valve closed
9/29/2011	10:18:05 PM	PH3 valve closed
9/29/2011	10:18:05 PM	SiCl4 pre valve closed
9/29/2011	10:18:05 PM	SiCl4 post valve closed
9/29/2011	10:18:05 PM	Bypass valve closed
9/29/2011	10:18:05 PM	Bubbler valve closed
9/29/2011	10:18:05 PM	Helium valve opened
9/29/2011	10:18:05 PM	Main Vac valve opened
9/29/2011	10:18:05 PM	Helium MFC set to  20.000000
9/29/2011	10:18:05 PM	H2 MFC set to  0.000000
9/29/2011	10:18:05 PM	BCl3 MFC set to  0.000000
9/29/2011	10:18:05 PM	PHl3 MFC set to  0.000000
9/29/2011	10:18:05 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:18:05 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:18:05 PM	Tube furnace set to 300
9/29/2011	10:18:36 PM	Helium valve closed
9/29/2011	10:18:36 PM	H2 valve closed
9/29/2011	10:18:36 PM	BCl3 valve closed
9/29/2011	10:18:36 PM	PH3 valve closed
9/29/2011	10:18:36 PM	SiCl4 pre valve closed
9/29/2011	10:18:36 PM	SiCl4 post valve closed
9/29/2011	10:18:36 PM	Bypass valve closed
9/29/2011	10:18:36 PM	Bubbler valve closed
9/29/2011	10:18:36 PM	Main Vac valve opened
9/29/2011	10:18:36 PM	Helium MFC set to  0.000000
9/29/2011	10:18:36 PM	H2 MFC set to  0.000000
9/29/2011	10:18:36 PM	BCl3 MFC set to  0.000000
9/29/2011	10:18:36 PM	PHl3 MFC set to  0.000000
9/29/2011	10:18:36 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:18:36 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:18:36 PM	Tube furnace set to 300
9/29/2011	10:19:06 PM	H2 valve closed
9/29/2011	10:19:06 PM	BCl3 valve closed
9/29/2011	10:19:06 PM	PH3 valve closed
9/29/2011	10:19:06 PM	SiCl4 pre valve closed
9/29/2011	10:19:06 PM	SiCl4 post valve closed
9/29/2011	10:19:06 PM	Bypass valve closed
9/29/2011	10:19:06 PM	Bubbler valve closed
9/29/2011	10:19:06 PM	Helium valve opened
9/29/2011	10:19:06 PM	Main Vac valve opened
9/29/2011	10:19:06 PM	Helium MFC set to  20.000000
9/29/2011	10:19:06 PM	H2 MFC set to  0.000000
9/29/2011	10:19:06 PM	BCl3 MFC set to  0.000000
9/29/2011	10:19:06 PM	PHl3 MFC set to  0.000000
9/29/2011	10:19:06 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:19:06 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:19:06 PM	Tube furnace set to 300
9/29/2011	10:19:36 PM	Helium valve closed
9/29/2011	10:19:36 PM	H2 valve closed
9/29/2011	10:19:36 PM	BCl3 valve closed
9/29/2011	10:19:36 PM	PH3 valve closed
9/29/2011	10:19:36 PM	SiCl4 pre valve closed
9/29/2011	10:19:36 PM	SiCl4 post valve closed
9/29/2011	10:19:36 PM	Bypass valve closed
9/29/2011	10:19:36 PM	Bubbler valve closed
9/29/2011	10:19:36 PM	Main Vac valve opened
9/29/2011	10:19:36 PM	Helium MFC set to  0.000000
9/29/2011	10:19:36 PM	H2 MFC set to  0.000000
9/29/2011	10:19:36 PM	BCl3 MFC set to  0.000000
9/29/2011	10:19:36 PM	PHl3 MFC set to  0.000000
9/29/2011	10:19:36 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:19:36 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:19:36 PM	Tube furnace set to 300
9/29/2011	10:20:06 PM	H2 valve closed
9/29/2011	10:20:06 PM	BCl3 valve closed
9/29/2011	10:20:06 PM	PH3 valve closed
9/29/2011	10:20:06 PM	SiCl4 pre valve closed
9/29/2011	10:20:06 PM	SiCl4 post valve closed
9/29/2011	10:20:06 PM	Bypass valve closed
9/29/2011	10:20:06 PM	Bubbler valve closed
9/29/2011	10:20:06 PM	Helium valve opened
9/29/2011	10:20:06 PM	Main Vac valve opened
9/29/2011	10:20:06 PM	Helium MFC set to  20.000000
9/29/2011	10:20:06 PM	H2 MFC set to  0.000000
9/29/2011	10:20:06 PM	BCl3 MFC set to  0.000000
9/29/2011	10:20:06 PM	PHl3 MFC set to  0.000000
9/29/2011	10:20:06 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:20:06 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:20:06 PM	Tube furnace set to 300
9/29/2011	10:20:36 PM	Helium valve closed
9/29/2011	10:20:36 PM	H2 valve closed
9/29/2011	10:20:36 PM	BCl3 valve closed
9/29/2011	10:20:36 PM	PH3 valve closed
9/29/2011	10:20:36 PM	SiCl4 pre valve closed
9/29/2011	10:20:36 PM	SiCl4 post valve closed
9/29/2011	10:20:36 PM	Bypass valve closed
9/29/2011	10:20:36 PM	Bubbler valve closed
9/29/2011	10:20:36 PM	Main Vac valve opened
9/29/2011	10:20:36 PM	Helium MFC set to  0.000000
9/29/2011	10:20:36 PM	H2 MFC set to  0.000000
9/29/2011	10:20:36 PM	BCl3 MFC set to  0.000000
9/29/2011	10:20:36 PM	PHl3 MFC set to  0.000000
9/29/2011	10:20:36 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:20:36 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:20:37 PM	Tube furnace set to 300
9/29/2011	10:21:07 PM	H2 valve closed
9/29/2011	10:21:07 PM	BCl3 valve closed
9/29/2011	10:21:07 PM	PH3 valve closed
9/29/2011	10:21:07 PM	SiCl4 pre valve closed
9/29/2011	10:21:07 PM	SiCl4 post valve closed
9/29/2011	10:21:07 PM	Bypass valve closed
9/29/2011	10:21:07 PM	Bubbler valve closed
9/29/2011	10:21:07 PM	Helium valve opened
9/29/2011	10:21:07 PM	Main Vac valve opened
9/29/2011	10:21:07 PM	Helium MFC set to  20.000000
9/29/2011	10:21:07 PM	H2 MFC set to  0.000000
9/29/2011	10:21:07 PM	BCl3 MFC set to  0.000000
9/29/2011	10:21:07 PM	PHl3 MFC set to  0.000000
9/29/2011	10:21:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:21:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:21:07 PM	Tube furnace set to 300
9/29/2011	10:21:37 PM	Helium valve closed
9/29/2011	10:21:37 PM	H2 valve closed
9/29/2011	10:21:37 PM	BCl3 valve closed
9/29/2011	10:21:37 PM	PH3 valve closed
9/29/2011	10:21:37 PM	SiCl4 pre valve closed
9/29/2011	10:21:37 PM	SiCl4 post valve closed
9/29/2011	10:21:37 PM	Bypass valve closed
9/29/2011	10:21:37 PM	Bubbler valve closed
9/29/2011	10:21:37 PM	Main Vac valve opened
9/29/2011	10:21:37 PM	Helium MFC set to  0.000000
9/29/2011	10:21:37 PM	H2 MFC set to  0.000000
9/29/2011	10:21:37 PM	BCl3 MFC set to  0.000000
9/29/2011	10:21:37 PM	PHl3 MFC set to  0.000000
9/29/2011	10:21:37 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:21:37 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:21:37 PM	Tube furnace set to 300
9/29/2011	10:22:07 PM	H2 valve closed
9/29/2011	10:22:07 PM	BCl3 valve closed
9/29/2011	10:22:07 PM	PH3 valve closed
9/29/2011	10:22:07 PM	SiCl4 pre valve closed
9/29/2011	10:22:07 PM	SiCl4 post valve closed
9/29/2011	10:22:07 PM	Bypass valve closed
9/29/2011	10:22:07 PM	Bubbler valve closed
9/29/2011	10:22:07 PM	Helium valve opened
9/29/2011	10:22:07 PM	Main Vac valve opened
9/29/2011	10:22:07 PM	Helium MFC set to  20.000000
9/29/2011	10:22:07 PM	H2 MFC set to  0.000000
9/29/2011	10:22:07 PM	BCl3 MFC set to  0.000000
9/29/2011	10:22:07 PM	PHl3 MFC set to  0.000000
9/29/2011	10:22:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:22:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:22:07 PM	Tube furnace set to 300
9/29/2011	10:22:37 PM	Helium valve closed
9/29/2011	10:22:37 PM	H2 valve closed
9/29/2011	10:22:37 PM	BCl3 valve closed
9/29/2011	10:22:37 PM	PH3 valve closed
9/29/2011	10:22:37 PM	SiCl4 pre valve closed
9/29/2011	10:22:37 PM	SiCl4 post valve closed
9/29/2011	10:22:37 PM	Bypass valve closed
9/29/2011	10:22:37 PM	Bubbler valve closed
9/29/2011	10:22:37 PM	Main Vac valve opened
9/29/2011	10:22:37 PM	Helium MFC set to  0.000000
9/29/2011	10:22:37 PM	H2 MFC set to  0.000000
9/29/2011	10:22:37 PM	BCl3 MFC set to  0.000000
9/29/2011	10:22:37 PM	PHl3 MFC set to  0.000000
9/29/2011	10:22:37 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:22:37 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:22:37 PM	Tube furnace set to 300
9/29/2011	10:23:07 PM	H2 valve closed
9/29/2011	10:23:07 PM	BCl3 valve closed
9/29/2011	10:23:07 PM	PH3 valve closed
9/29/2011	10:23:07 PM	SiCl4 pre valve closed
9/29/2011	10:23:07 PM	SiCl4 post valve closed
9/29/2011	10:23:07 PM	Bypass valve closed
9/29/2011	10:23:07 PM	Bubbler valve closed
9/29/2011	10:23:07 PM	Helium valve opened
9/29/2011	10:23:07 PM	Main Vac valve opened
9/29/2011	10:23:07 PM	Helium MFC set to  20.000000
9/29/2011	10:23:07 PM	H2 MFC set to  0.000000
9/29/2011	10:23:07 PM	BCl3 MFC set to  0.000000
9/29/2011	10:23:07 PM	PHl3 MFC set to  0.000000
9/29/2011	10:23:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:23:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:23:08 PM	Tube furnace set to 300
9/29/2011	10:23:38 PM	Helium valve closed
9/29/2011	10:23:38 PM	H2 valve closed
9/29/2011	10:23:38 PM	BCl3 valve closed
9/29/2011	10:23:38 PM	PH3 valve closed
9/29/2011	10:23:38 PM	SiCl4 pre valve closed
9/29/2011	10:23:38 PM	SiCl4 post valve closed
9/29/2011	10:23:38 PM	Bypass valve closed
9/29/2011	10:23:38 PM	Bubbler valve closed
9/29/2011	10:23:38 PM	Main Vac valve opened
9/29/2011	10:23:38 PM	Helium MFC set to  0.000000
9/29/2011	10:23:38 PM	H2 MFC set to  0.000000
9/29/2011	10:23:38 PM	BCl3 MFC set to  0.000000
9/29/2011	10:23:38 PM	PHl3 MFC set to  0.000000
9/29/2011	10:23:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:23:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:23:38 PM	Tube furnace set to 300
9/29/2011	10:24:08 PM	H2 valve closed
9/29/2011	10:24:08 PM	BCl3 valve closed
9/29/2011	10:24:08 PM	PH3 valve closed
9/29/2011	10:24:08 PM	SiCl4 pre valve closed
9/29/2011	10:24:08 PM	SiCl4 post valve closed
9/29/2011	10:24:08 PM	Bypass valve closed
9/29/2011	10:24:08 PM	Bubbler valve closed
9/29/2011	10:24:08 PM	Helium valve opened
9/29/2011	10:24:08 PM	Main Vac valve opened
9/29/2011	10:24:08 PM	Helium MFC set to  20.000000
9/29/2011	10:24:08 PM	H2 MFC set to  0.000000
9/29/2011	10:24:08 PM	BCl3 MFC set to  0.000000
9/29/2011	10:24:08 PM	PHl3 MFC set to  0.000000
9/29/2011	10:24:08 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:24:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:24:08 PM	Tube furnace set to 300
9/29/2011	10:24:38 PM	Helium valve closed
9/29/2011	10:24:38 PM	H2 valve closed
9/29/2011	10:24:38 PM	BCl3 valve closed
9/29/2011	10:24:38 PM	PH3 valve closed
9/29/2011	10:24:38 PM	SiCl4 pre valve closed
9/29/2011	10:24:38 PM	SiCl4 post valve closed
9/29/2011	10:24:38 PM	Bypass valve closed
9/29/2011	10:24:38 PM	Bubbler valve closed
9/29/2011	10:24:38 PM	Main Vac valve opened
9/29/2011	10:24:38 PM	Helium MFC set to  0.000000
9/29/2011	10:24:38 PM	H2 MFC set to  0.000000
9/29/2011	10:24:38 PM	BCl3 MFC set to  0.000000
9/29/2011	10:24:38 PM	PHl3 MFC set to  0.000000
9/29/2011	10:24:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:24:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:24:38 PM	Tube furnace set to 300
9/29/2011	10:25:08 PM	H2 valve closed
9/29/2011	10:25:08 PM	BCl3 valve closed
9/29/2011	10:25:08 PM	PH3 valve closed
9/29/2011	10:25:08 PM	SiCl4 pre valve closed
9/29/2011	10:25:08 PM	SiCl4 post valve closed
9/29/2011	10:25:08 PM	Bypass valve closed
9/29/2011	10:25:08 PM	Bubbler valve closed
9/29/2011	10:25:08 PM	Helium valve opened
9/29/2011	10:25:08 PM	Main Vac valve opened
9/29/2011	10:25:08 PM	Helium MFC set to  20.000000
9/29/2011	10:25:08 PM	H2 MFC set to  0.000000
9/29/2011	10:25:08 PM	BCl3 MFC set to  0.000000
9/29/2011	10:25:08 PM	PHl3 MFC set to  0.000000
9/29/2011	10:25:08 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:25:08 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:25:08 PM	Tube furnace set to 300
9/29/2011	10:25:38 PM	Helium valve closed
9/29/2011	10:25:38 PM	H2 valve closed
9/29/2011	10:25:38 PM	BCl3 valve closed
9/29/2011	10:25:38 PM	PH3 valve closed
9/29/2011	10:25:38 PM	SiCl4 pre valve closed
9/29/2011	10:25:38 PM	SiCl4 post valve closed
9/29/2011	10:25:38 PM	Bypass valve closed
9/29/2011	10:25:38 PM	Bubbler valve closed
9/29/2011	10:25:38 PM	Main Vac valve opened
9/29/2011	10:25:38 PM	Helium MFC set to  0.000000
9/29/2011	10:25:38 PM	H2 MFC set to  0.000000
9/29/2011	10:25:38 PM	BCl3 MFC set to  0.000000
9/29/2011	10:25:38 PM	PHl3 MFC set to  0.000000
9/29/2011	10:25:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:25:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:25:39 PM	Tube furnace set to 300
9/29/2011	10:25:40 PM	Run finished at 10:25 PM
9/29/2011	10:26:27 PM	Main Vac valve closed
9/29/2011	10:26:33 PM	Main Vac valve opened
9/29/2011	10:27:47 PM	Recipe started at 10:27 PM
9/29/2011	10:27:47 PM	Helium valve closed
9/29/2011	10:27:47 PM	H2 valve closed
9/29/2011	10:27:47 PM	BCl3 valve closed
9/29/2011	10:27:47 PM	PH3 valve closed
9/29/2011	10:27:47 PM	SiCl4 pre valve closed
9/29/2011	10:27:47 PM	SiCl4 post valve closed
9/29/2011	10:27:47 PM	Main Vac valve closed
9/29/2011	10:27:47 PM	Bypass valve closed
9/29/2011	10:27:47 PM	Bubbler valve closed
9/29/2011	10:27:47 PM	Helium MFC set to  0.000000
9/29/2011	10:27:47 PM	H2 MFC set to  0.000000
9/29/2011	10:27:47 PM	BCl3 MFC set to  0.000000
9/29/2011	10:27:47 PM	PHl3 MFC set to  0.000000
9/29/2011	10:27:47 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:27:47 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:27:47 PM	Tube furnace set to 0
9/29/2011	10:27:50 PM	Helium valve closed
9/29/2011	10:27:50 PM	BCl3 valve closed
9/29/2011	10:27:50 PM	PH3 valve closed
9/29/2011	10:27:50 PM	SiCl4 pre valve closed
9/29/2011	10:27:50 PM	SiCl4 post valve closed
9/29/2011	10:27:50 PM	Main Vac valve closed
9/29/2011	10:27:50 PM	Bypass valve closed
9/29/2011	10:27:50 PM	Bubbler valve closed
9/29/2011	10:27:50 PM	H2 valve opened
9/29/2011	10:27:50 PM	Helium MFC set to  0.000000
9/29/2011	10:27:50 PM	H2 MFC set to  500.000000
9/29/2011	10:27:50 PM	BCl3 MFC set to  0.000000
9/29/2011	10:27:50 PM	PHl3 MFC set to  0.000000
9/29/2011	10:27:50 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:27:50 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:27:50 PM	Tube furnace set to 0
9/29/2011	10:28:52 PM	Helium valve closed
9/29/2011	10:28:52 PM	BCl3 valve closed
9/29/2011	10:28:52 PM	PH3 valve closed
9/29/2011	10:28:52 PM	SiCl4 pre valve closed
9/29/2011	10:28:52 PM	SiCl4 post valve closed
9/29/2011	10:28:52 PM	Main Vac valve closed
9/29/2011	10:28:52 PM	Bypass valve closed
9/29/2011	10:28:52 PM	H2 valve opened
9/29/2011	10:28:52 PM	Bubbler valve opened
9/29/2011	10:28:52 PM	Helium MFC set to  0.000000
9/29/2011	10:28:52 PM	H2 MFC set to  500.000000
9/29/2011	10:28:52 PM	BCl3 MFC set to  0.000000
9/29/2011	10:28:52 PM	PHl3 MFC set to  0.000000
9/29/2011	10:28:52 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:28:52 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:28:52 PM	Tube furnace set to 0
9/29/2011	10:28:53 PM	Helium valve closed
9/29/2011	10:28:53 PM	BCl3 valve closed
9/29/2011	10:28:53 PM	PH3 valve closed
9/29/2011	10:28:53 PM	SiCl4 pre valve closed
9/29/2011	10:28:53 PM	SiCl4 post valve closed
9/29/2011	10:28:53 PM	Main Vac valve closed
9/29/2011	10:28:53 PM	Bypass valve closed
9/29/2011	10:28:53 PM	H2 valve opened
9/29/2011	10:28:53 PM	Bubbler valve opened
9/29/2011	10:28:53 PM	Helium MFC set to  0.000000
9/29/2011	10:28:53 PM	H2 MFC set to  500.000000
9/29/2011	10:28:53 PM	BCl3 MFC set to  0.000000
9/29/2011	10:28:53 PM	PHl3 MFC set to  0.000000
9/29/2011	10:28:53 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:28:53 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:28:53 PM	Tube furnace set to 1000
9/29/2011	10:48:53 PM	Helium valve closed
9/29/2011	10:48:53 PM	PH3 valve closed
9/29/2011	10:48:53 PM	Main Vac valve closed
9/29/2011	10:48:53 PM	Bypass valve closed
9/29/2011	10:48:53 PM	H2 valve opened
9/29/2011	10:48:53 PM	BCl3 valve opened
9/29/2011	10:48:53 PM	SiCl4 pre valve opened
9/29/2011	10:48:53 PM	SiCl4 post valve opened
9/29/2011	10:48:53 PM	Bubbler valve opened
9/29/2011	10:48:53 PM	Helium MFC set to  0.000000
9/29/2011	10:48:53 PM	H2 MFC set to  500.000000
9/29/2011	10:48:53 PM	BCl3 MFC set to  2.300000
9/29/2011	10:48:53 PM	PHl3 MFC set to  0.000000
9/29/2011	10:48:53 PM	SiCl4 MFC set to  50.000000
9/29/2011	10:48:53 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:48:53 PM	Tube furnace set to 1000
9/29/2011	10:53:53 PM	Helium valve closed
9/29/2011	10:53:53 PM	BCl3 valve closed
9/29/2011	10:53:53 PM	PH3 valve closed
9/29/2011	10:53:53 PM	SiCl4 pre valve closed
9/29/2011	10:53:53 PM	SiCl4 post valve closed
9/29/2011	10:53:53 PM	Main Vac valve closed
9/29/2011	10:53:53 PM	Bypass valve closed
9/29/2011	10:53:53 PM	H2 valve opened
9/29/2011	10:53:53 PM	Bubbler valve opened
9/29/2011	10:53:53 PM	Helium MFC set to  0.000000
9/29/2011	10:53:53 PM	H2 MFC set to  500.000000
9/29/2011	10:53:53 PM	BCl3 MFC set to  0.000000
9/29/2011	10:53:53 PM	PHl3 MFC set to  0.000000
9/29/2011	10:53:53 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:53:53 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:53:53 PM	Tube furnace set to 750
9/29/2011	10:58:53 PM	H2 valve closed
9/29/2011	10:58:53 PM	BCl3 valve closed
9/29/2011	10:58:53 PM	PH3 valve closed
9/29/2011	10:58:53 PM	SiCl4 pre valve closed
9/29/2011	10:58:53 PM	SiCl4 post valve closed
9/29/2011	10:58:53 PM	Main Vac valve closed
9/29/2011	10:58:53 PM	Bypass valve closed
9/29/2011	10:58:53 PM	Helium valve opened
9/29/2011	10:58:53 PM	Bubbler valve opened
9/29/2011	10:58:53 PM	Helium MFC set to  500.000000
9/29/2011	10:58:53 PM	H2 MFC set to  0.000000
9/29/2011	10:58:53 PM	BCl3 MFC set to  0.000000
9/29/2011	10:58:53 PM	PHl3 MFC set to  0.000000
9/29/2011	10:58:53 PM	SiCl4 MFC set to  0.000000
9/29/2011	10:58:53 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	10:58:53 PM	Tube furnace set to 0
9/29/2011	11:06:07 PM	Helium valve closed
9/29/2011	11:06:07 PM	H2 valve closed
9/29/2011	11:06:07 PM	BCl3 valve closed
9/29/2011	11:06:07 PM	PH3 valve closed
9/29/2011	11:06:07 PM	SiCl4 pre valve closed
9/29/2011	11:06:07 PM	SiCl4 post valve closed
9/29/2011	11:06:07 PM	Main Vac valve closed
9/29/2011	11:06:07 PM	Bypass valve closed
9/29/2011	11:06:07 PM	Bubbler valve closed
9/29/2011	11:06:07 PM	Helium MFC set to  0.000000
9/29/2011	11:06:07 PM	H2 MFC set to  0.000000
9/29/2011	11:06:07 PM	BCl3 MFC set to  0.000000
9/29/2011	11:06:07 PM	PHl3 MFC set to  0.000000
9/29/2011	11:06:07 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:06:07 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:06:07 PM	Tube furnace set to 0
9/29/2011	11:06:08 PM	Run finished at 11:06 PM
9/29/2011	11:06:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	11:06:13 PM	Recipe started at 11:06 PM
9/29/2011	11:06:13 PM	Helium valve closed
9/29/2011	11:06:13 PM	H2 valve closed
9/29/2011	11:06:13 PM	BCl3 valve closed
9/29/2011	11:06:13 PM	PH3 valve closed
9/29/2011	11:06:13 PM	SiCl4 pre valve closed
9/29/2011	11:06:13 PM	SiCl4 post valve closed
9/29/2011	11:06:13 PM	Main Vac valve closed
9/29/2011	11:06:13 PM	Bypass valve closed
9/29/2011	11:06:13 PM	Bubbler valve closed
9/29/2011	11:06:13 PM	Helium MFC set to  0.000000
9/29/2011	11:06:13 PM	H2 MFC set to  0.000000
9/29/2011	11:06:13 PM	BCl3 MFC set to  0.000000
9/29/2011	11:06:13 PM	PHl3 MFC set to  0.000000
9/29/2011	11:06:13 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:06:13 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:06:13 PM	Tube furnace set to 0
9/29/2011	11:06:16 PM	H2 valve closed
9/29/2011	11:06:16 PM	BCl3 valve closed
9/29/2011	11:06:16 PM	PH3 valve closed
9/29/2011	11:06:16 PM	SiCl4 pre valve closed
9/29/2011	11:06:16 PM	SiCl4 post valve closed
9/29/2011	11:06:16 PM	Main Vac valve closed
9/29/2011	11:06:16 PM	Bypass valve closed
9/29/2011	11:06:16 PM	Bubbler valve closed
9/29/2011	11:06:16 PM	Helium valve opened
9/29/2011	11:06:16 PM	Helium MFC set to  500.000000
9/29/2011	11:06:16 PM	H2 MFC set to  0.000000
9/29/2011	11:06:16 PM	BCl3 MFC set to  0.000000
9/29/2011	11:06:16 PM	PHl3 MFC set to  0.000000
9/29/2011	11:06:16 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:06:16 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:06:16 PM	Tube furnace set to 0
9/29/2011	11:06:16 PM	Helium valve closed
9/29/2011	11:06:16 PM	H2 valve closed
9/29/2011	11:06:16 PM	BCl3 valve closed
9/29/2011	11:06:16 PM	PH3 valve closed
9/29/2011	11:06:16 PM	SiCl4 pre valve closed
9/29/2011	11:06:16 PM	SiCl4 post valve closed
9/29/2011	11:06:16 PM	Main Vac valve closed
9/29/2011	11:06:16 PM	Bypass valve closed
9/29/2011	11:06:16 PM	Bubbler valve closed
9/29/2011	11:06:16 PM	Helium MFC set to  0.000000
9/29/2011	11:06:16 PM	H2 MFC set to  0.000000
9/29/2011	11:06:16 PM	BCl3 MFC set to  0.000000
9/29/2011	11:06:16 PM	PHl3 MFC set to  0.000000
9/29/2011	11:06:16 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:06:16 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:06:16 PM	Tube furnace set to 0
9/29/2011	11:06:17 PM	Run finished at 11:06 PM
9/29/2011	11:06:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2011	11:28:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	11:28:21 PM	Recipe started at 11:28 PM
9/29/2011	11:28:21 PM	Helium valve closed
9/29/2011	11:28:21 PM	H2 valve closed
9/29/2011	11:28:21 PM	BCl3 valve closed
9/29/2011	11:28:21 PM	PH3 valve closed
9/29/2011	11:28:21 PM	SiCl4 pre valve closed
9/29/2011	11:28:21 PM	SiCl4 post valve closed
9/29/2011	11:28:21 PM	Main Vac valve closed
9/29/2011	11:28:21 PM	Bubbler valve closed
9/29/2011	11:28:21 PM	Bypass valve opened
9/29/2011	11:28:21 PM	Helium MFC set to  0.000000
9/29/2011	11:28:21 PM	H2 MFC set to  0.000000
9/29/2011	11:28:21 PM	BCl3 MFC set to  0.000000
9/29/2011	11:28:21 PM	PHl3 MFC set to  0.000000
9/29/2011	11:28:21 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:28:21 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:28:21 PM	Tube furnace set to 0
9/29/2011	11:29:38 PM	Helium valve closed
9/29/2011	11:29:38 PM	H2 valve closed
9/29/2011	11:29:38 PM	BCl3 valve closed
9/29/2011	11:29:38 PM	PH3 valve closed
9/29/2011	11:29:38 PM	SiCl4 pre valve closed
9/29/2011	11:29:38 PM	SiCl4 post valve closed
9/29/2011	11:29:38 PM	Main Vac valve closed
9/29/2011	11:29:38 PM	Bubbler valve closed
9/29/2011	11:29:38 PM	Bypass valve opened
9/29/2011	11:29:38 PM	Helium MFC set to  0.000000
9/29/2011	11:29:38 PM	H2 MFC set to  0.000000
9/29/2011	11:29:38 PM	BCl3 MFC set to  0.000000
9/29/2011	11:29:38 PM	PHl3 MFC set to  0.000000
9/29/2011	11:29:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:29:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:29:38 PM	Tube furnace set to 0
9/29/2011	11:30:38 PM	Helium valve closed
9/29/2011	11:30:38 PM	H2 valve closed
9/29/2011	11:30:38 PM	BCl3 valve closed
9/29/2011	11:30:38 PM	PH3 valve closed
9/29/2011	11:30:38 PM	SiCl4 pre valve closed
9/29/2011	11:30:38 PM	SiCl4 post valve closed
9/29/2011	11:30:38 PM	Bypass valve closed
9/29/2011	11:30:38 PM	Bubbler valve closed
9/29/2011	11:30:38 PM	Main Vac valve opened
9/29/2011	11:30:38 PM	Helium MFC set to  0.000000
9/29/2011	11:30:38 PM	H2 MFC set to  0.000000
9/29/2011	11:30:38 PM	BCl3 MFC set to  0.000000
9/29/2011	11:30:38 PM	PHl3 MFC set to  0.000000
9/29/2011	11:30:38 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:30:38 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:30:38 PM	Tube furnace set to 0
9/29/2011	11:30:39 PM	Run finished at 11:30 PM
9/29/2011	11:30:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2011	11:35:42 PM	Recipe started at 11:35 PM
9/29/2011	11:35:42 PM	Helium valve closed
9/29/2011	11:35:42 PM	H2 valve closed
9/29/2011	11:35:42 PM	BCl3 valve closed
9/29/2011	11:35:42 PM	PH3 valve closed
9/29/2011	11:35:42 PM	SiCl4 pre valve closed
9/29/2011	11:35:42 PM	SiCl4 post valve closed
9/29/2011	11:35:42 PM	Bypass valve closed
9/29/2011	11:35:42 PM	Bubbler valve closed
9/29/2011	11:35:42 PM	Main Vac valve opened
9/29/2011	11:35:42 PM	Helium MFC set to  0.000000
9/29/2011	11:35:42 PM	H2 MFC set to  0.000000
9/29/2011	11:35:42 PM	BCl3 MFC set to  0.000000
9/29/2011	11:35:42 PM	PHl3 MFC set to  0.000000
9/29/2011	11:35:42 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:35:42 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:35:43 PM	Tube furnace set to 200
9/29/2011	11:36:13 PM	H2 valve closed
9/29/2011	11:36:13 PM	BCl3 valve closed
9/29/2011	11:36:13 PM	PH3 valve closed
9/29/2011	11:36:13 PM	SiCl4 pre valve closed
9/29/2011	11:36:13 PM	SiCl4 post valve closed
9/29/2011	11:36:13 PM	Bypass valve closed
9/29/2011	11:36:13 PM	Bubbler valve closed
9/29/2011	11:36:13 PM	Helium valve opened
9/29/2011	11:36:13 PM	Main Vac valve opened
9/29/2011	11:36:13 PM	Helium MFC set to  20.000000
9/29/2011	11:36:13 PM	H2 MFC set to  0.000000
9/29/2011	11:36:13 PM	BCl3 MFC set to  0.000000
9/29/2011	11:36:13 PM	PHl3 MFC set to  0.000000
9/29/2011	11:36:13 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:36:13 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:36:13 PM	Tube furnace set to 200
9/29/2011	11:36:43 PM	Helium valve closed
9/29/2011	11:36:43 PM	H2 valve closed
9/29/2011	11:36:43 PM	BCl3 valve closed
9/29/2011	11:36:43 PM	PH3 valve closed
9/29/2011	11:36:43 PM	SiCl4 pre valve closed
9/29/2011	11:36:43 PM	SiCl4 post valve closed
9/29/2011	11:36:43 PM	Bypass valve closed
9/29/2011	11:36:43 PM	Bubbler valve closed
9/29/2011	11:36:43 PM	Main Vac valve opened
9/29/2011	11:36:43 PM	Helium MFC set to  0.000000
9/29/2011	11:36:43 PM	H2 MFC set to  0.000000
9/29/2011	11:36:43 PM	BCl3 MFC set to  0.000000
9/29/2011	11:36:43 PM	PHl3 MFC set to  0.000000
9/29/2011	11:36:43 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:36:43 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:36:43 PM	Tube furnace set to 200
9/29/2011	11:37:13 PM	H2 valve closed
9/29/2011	11:37:13 PM	BCl3 valve closed
9/29/2011	11:37:13 PM	PH3 valve closed
9/29/2011	11:37:13 PM	SiCl4 pre valve closed
9/29/2011	11:37:13 PM	SiCl4 post valve closed
9/29/2011	11:37:13 PM	Bypass valve closed
9/29/2011	11:37:13 PM	Bubbler valve closed
9/29/2011	11:37:13 PM	Helium valve opened
9/29/2011	11:37:13 PM	Main Vac valve opened
9/29/2011	11:37:13 PM	Helium MFC set to  20.000000
9/29/2011	11:37:13 PM	H2 MFC set to  0.000000
9/29/2011	11:37:13 PM	BCl3 MFC set to  0.000000
9/29/2011	11:37:13 PM	PHl3 MFC set to  0.000000
9/29/2011	11:37:13 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:37:13 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:37:13 PM	Tube furnace set to 200
9/29/2011	11:37:43 PM	Helium valve closed
9/29/2011	11:37:43 PM	H2 valve closed
9/29/2011	11:37:43 PM	BCl3 valve closed
9/29/2011	11:37:43 PM	PH3 valve closed
9/29/2011	11:37:43 PM	SiCl4 pre valve closed
9/29/2011	11:37:43 PM	SiCl4 post valve closed
9/29/2011	11:37:43 PM	Bypass valve closed
9/29/2011	11:37:43 PM	Bubbler valve closed
9/29/2011	11:37:43 PM	Main Vac valve opened
9/29/2011	11:37:43 PM	Helium MFC set to  0.000000
9/29/2011	11:37:43 PM	H2 MFC set to  0.000000
9/29/2011	11:37:43 PM	BCl3 MFC set to  0.000000
9/29/2011	11:37:43 PM	PHl3 MFC set to  0.000000
9/29/2011	11:37:43 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:37:43 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:37:43 PM	Tube furnace set to 200
9/29/2011	11:38:13 PM	H2 valve closed
9/29/2011	11:38:13 PM	BCl3 valve closed
9/29/2011	11:38:13 PM	PH3 valve closed
9/29/2011	11:38:13 PM	SiCl4 pre valve closed
9/29/2011	11:38:13 PM	SiCl4 post valve closed
9/29/2011	11:38:13 PM	Bypass valve closed
9/29/2011	11:38:13 PM	Bubbler valve closed
9/29/2011	11:38:13 PM	Helium valve opened
9/29/2011	11:38:13 PM	Main Vac valve opened
9/29/2011	11:38:13 PM	Helium MFC set to  20.000000
9/29/2011	11:38:13 PM	H2 MFC set to  0.000000
9/29/2011	11:38:13 PM	BCl3 MFC set to  0.000000
9/29/2011	11:38:13 PM	PHl3 MFC set to  0.000000
9/29/2011	11:38:13 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:38:13 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:38:14 PM	Tube furnace set to 200
9/29/2011	11:38:44 PM	Helium valve closed
9/29/2011	11:38:44 PM	H2 valve closed
9/29/2011	11:38:44 PM	BCl3 valve closed
9/29/2011	11:38:44 PM	PH3 valve closed
9/29/2011	11:38:44 PM	SiCl4 pre valve closed
9/29/2011	11:38:44 PM	SiCl4 post valve closed
9/29/2011	11:38:44 PM	Bypass valve closed
9/29/2011	11:38:44 PM	Bubbler valve closed
9/29/2011	11:38:44 PM	Main Vac valve opened
9/29/2011	11:38:44 PM	Helium MFC set to  0.000000
9/29/2011	11:38:44 PM	H2 MFC set to  0.000000
9/29/2011	11:38:44 PM	BCl3 MFC set to  0.000000
9/29/2011	11:38:44 PM	PHl3 MFC set to  0.000000
9/29/2011	11:38:44 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:38:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:38:44 PM	Tube furnace set to 200
9/29/2011	11:39:14 PM	H2 valve closed
9/29/2011	11:39:14 PM	BCl3 valve closed
9/29/2011	11:39:14 PM	PH3 valve closed
9/29/2011	11:39:14 PM	SiCl4 pre valve closed
9/29/2011	11:39:14 PM	SiCl4 post valve closed
9/29/2011	11:39:14 PM	Bypass valve closed
9/29/2011	11:39:14 PM	Bubbler valve closed
9/29/2011	11:39:14 PM	Helium valve opened
9/29/2011	11:39:14 PM	Main Vac valve opened
9/29/2011	11:39:14 PM	Helium MFC set to  20.000000
9/29/2011	11:39:14 PM	H2 MFC set to  0.000000
9/29/2011	11:39:14 PM	BCl3 MFC set to  0.000000
9/29/2011	11:39:14 PM	PHl3 MFC set to  0.000000
9/29/2011	11:39:14 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:39:14 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:39:14 PM	Tube furnace set to 200
9/29/2011	11:39:44 PM	Helium valve closed
9/29/2011	11:39:44 PM	H2 valve closed
9/29/2011	11:39:44 PM	BCl3 valve closed
9/29/2011	11:39:44 PM	PH3 valve closed
9/29/2011	11:39:44 PM	SiCl4 pre valve closed
9/29/2011	11:39:44 PM	SiCl4 post valve closed
9/29/2011	11:39:44 PM	Bypass valve closed
9/29/2011	11:39:44 PM	Bubbler valve closed
9/29/2011	11:39:44 PM	Main Vac valve opened
9/29/2011	11:39:44 PM	Helium MFC set to  0.000000
9/29/2011	11:39:44 PM	H2 MFC set to  0.000000
9/29/2011	11:39:44 PM	BCl3 MFC set to  0.000000
9/29/2011	11:39:44 PM	PHl3 MFC set to  0.000000
9/29/2011	11:39:44 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:39:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:39:44 PM	Tube furnace set to 200
9/29/2011	11:40:14 PM	H2 valve closed
9/29/2011	11:40:14 PM	BCl3 valve closed
9/29/2011	11:40:14 PM	PH3 valve closed
9/29/2011	11:40:14 PM	SiCl4 pre valve closed
9/29/2011	11:40:14 PM	SiCl4 post valve closed
9/29/2011	11:40:14 PM	Bypass valve closed
9/29/2011	11:40:14 PM	Bubbler valve closed
9/29/2011	11:40:14 PM	Helium valve opened
9/29/2011	11:40:14 PM	Main Vac valve opened
9/29/2011	11:40:14 PM	Helium MFC set to  20.000000
9/29/2011	11:40:14 PM	H2 MFC set to  0.000000
9/29/2011	11:40:14 PM	BCl3 MFC set to  0.000000
9/29/2011	11:40:14 PM	PHl3 MFC set to  0.000000
9/29/2011	11:40:14 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:40:14 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:40:14 PM	Tube furnace set to 200
9/29/2011	11:40:44 PM	Helium valve closed
9/29/2011	11:40:44 PM	H2 valve closed
9/29/2011	11:40:44 PM	BCl3 valve closed
9/29/2011	11:40:44 PM	PH3 valve closed
9/29/2011	11:40:44 PM	SiCl4 pre valve closed
9/29/2011	11:40:44 PM	SiCl4 post valve closed
9/29/2011	11:40:44 PM	Bypass valve closed
9/29/2011	11:40:44 PM	Bubbler valve closed
9/29/2011	11:40:44 PM	Main Vac valve opened
9/29/2011	11:40:44 PM	Helium MFC set to  0.000000
9/29/2011	11:40:44 PM	H2 MFC set to  0.000000
9/29/2011	11:40:44 PM	BCl3 MFC set to  0.000000
9/29/2011	11:40:44 PM	PHl3 MFC set to  0.000000
9/29/2011	11:40:44 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:40:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:40:45 PM	Tube furnace set to 200
9/29/2011	11:41:15 PM	H2 valve closed
9/29/2011	11:41:15 PM	BCl3 valve closed
9/29/2011	11:41:15 PM	PH3 valve closed
9/29/2011	11:41:15 PM	SiCl4 pre valve closed
9/29/2011	11:41:15 PM	SiCl4 post valve closed
9/29/2011	11:41:15 PM	Bypass valve closed
9/29/2011	11:41:15 PM	Bubbler valve closed
9/29/2011	11:41:15 PM	Helium valve opened
9/29/2011	11:41:15 PM	Main Vac valve opened
9/29/2011	11:41:15 PM	Helium MFC set to  20.000000
9/29/2011	11:41:15 PM	H2 MFC set to  0.000000
9/29/2011	11:41:15 PM	BCl3 MFC set to  0.000000
9/29/2011	11:41:15 PM	PHl3 MFC set to  0.000000
9/29/2011	11:41:15 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:41:15 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:41:15 PM	Tube furnace set to 200
9/29/2011	11:41:45 PM	Helium valve closed
9/29/2011	11:41:45 PM	H2 valve closed
9/29/2011	11:41:45 PM	BCl3 valve closed
9/29/2011	11:41:45 PM	PH3 valve closed
9/29/2011	11:41:45 PM	SiCl4 pre valve closed
9/29/2011	11:41:45 PM	SiCl4 post valve closed
9/29/2011	11:41:45 PM	Bypass valve closed
9/29/2011	11:41:45 PM	Bubbler valve closed
9/29/2011	11:41:45 PM	Main Vac valve opened
9/29/2011	11:41:45 PM	Helium MFC set to  0.000000
9/29/2011	11:41:45 PM	H2 MFC set to  0.000000
9/29/2011	11:41:45 PM	BCl3 MFC set to  0.000000
9/29/2011	11:41:45 PM	PHl3 MFC set to  0.000000
9/29/2011	11:41:45 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:41:45 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:41:45 PM	Tube furnace set to 200
9/29/2011	11:42:15 PM	H2 valve closed
9/29/2011	11:42:15 PM	BCl3 valve closed
9/29/2011	11:42:15 PM	PH3 valve closed
9/29/2011	11:42:15 PM	SiCl4 pre valve closed
9/29/2011	11:42:15 PM	SiCl4 post valve closed
9/29/2011	11:42:15 PM	Bypass valve closed
9/29/2011	11:42:15 PM	Bubbler valve closed
9/29/2011	11:42:15 PM	Helium valve opened
9/29/2011	11:42:15 PM	Main Vac valve opened
9/29/2011	11:42:15 PM	Helium MFC set to  20.000000
9/29/2011	11:42:15 PM	H2 MFC set to  0.000000
9/29/2011	11:42:15 PM	BCl3 MFC set to  0.000000
9/29/2011	11:42:15 PM	PHl3 MFC set to  0.000000
9/29/2011	11:42:15 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:42:15 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:42:15 PM	Tube furnace set to 200
9/29/2011	11:42:45 PM	Helium valve closed
9/29/2011	11:42:45 PM	H2 valve closed
9/29/2011	11:42:45 PM	BCl3 valve closed
9/29/2011	11:42:45 PM	PH3 valve closed
9/29/2011	11:42:45 PM	SiCl4 pre valve closed
9/29/2011	11:42:45 PM	SiCl4 post valve closed
9/29/2011	11:42:45 PM	Bypass valve closed
9/29/2011	11:42:45 PM	Bubbler valve closed
9/29/2011	11:42:45 PM	Main Vac valve opened
9/29/2011	11:42:45 PM	Helium MFC set to  0.000000
9/29/2011	11:42:45 PM	H2 MFC set to  0.000000
9/29/2011	11:42:45 PM	BCl3 MFC set to  0.000000
9/29/2011	11:42:45 PM	PHl3 MFC set to  0.000000
9/29/2011	11:42:45 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:42:45 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:42:45 PM	Tube furnace set to 200
9/29/2011	11:43:15 PM	H2 valve closed
9/29/2011	11:43:15 PM	BCl3 valve closed
9/29/2011	11:43:15 PM	PH3 valve closed
9/29/2011	11:43:15 PM	SiCl4 pre valve closed
9/29/2011	11:43:15 PM	SiCl4 post valve closed
9/29/2011	11:43:15 PM	Bypass valve closed
9/29/2011	11:43:15 PM	Bubbler valve closed
9/29/2011	11:43:15 PM	Helium valve opened
9/29/2011	11:43:15 PM	Main Vac valve opened
9/29/2011	11:43:15 PM	Helium MFC set to  20.000000
9/29/2011	11:43:15 PM	H2 MFC set to  0.000000
9/29/2011	11:43:15 PM	BCl3 MFC set to  0.000000
9/29/2011	11:43:15 PM	PHl3 MFC set to  0.000000
9/29/2011	11:43:15 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:43:15 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:43:16 PM	Tube furnace set to 200
9/29/2011	11:43:46 PM	Helium valve closed
9/29/2011	11:43:46 PM	H2 valve closed
9/29/2011	11:43:46 PM	BCl3 valve closed
9/29/2011	11:43:46 PM	PH3 valve closed
9/29/2011	11:43:46 PM	SiCl4 pre valve closed
9/29/2011	11:43:46 PM	SiCl4 post valve closed
9/29/2011	11:43:46 PM	Bypass valve closed
9/29/2011	11:43:46 PM	Bubbler valve closed
9/29/2011	11:43:46 PM	Main Vac valve opened
9/29/2011	11:43:46 PM	Helium MFC set to  0.000000
9/29/2011	11:43:46 PM	H2 MFC set to  0.000000
9/29/2011	11:43:46 PM	BCl3 MFC set to  0.000000
9/29/2011	11:43:46 PM	PHl3 MFC set to  0.000000
9/29/2011	11:43:46 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:43:46 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:43:46 PM	Tube furnace set to 200
9/29/2011	11:44:16 PM	H2 valve closed
9/29/2011	11:44:16 PM	BCl3 valve closed
9/29/2011	11:44:16 PM	PH3 valve closed
9/29/2011	11:44:16 PM	SiCl4 pre valve closed
9/29/2011	11:44:16 PM	SiCl4 post valve closed
9/29/2011	11:44:16 PM	Bypass valve closed
9/29/2011	11:44:16 PM	Bubbler valve closed
9/29/2011	11:44:16 PM	Helium valve opened
9/29/2011	11:44:16 PM	Main Vac valve opened
9/29/2011	11:44:16 PM	Helium MFC set to  20.000000
9/29/2011	11:44:16 PM	H2 MFC set to  0.000000
9/29/2011	11:44:16 PM	BCl3 MFC set to  0.000000
9/29/2011	11:44:16 PM	PHl3 MFC set to  0.000000
9/29/2011	11:44:16 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:44:16 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:44:16 PM	Tube furnace set to 200
9/29/2011	11:44:46 PM	Helium valve closed
9/29/2011	11:44:46 PM	H2 valve closed
9/29/2011	11:44:46 PM	BCl3 valve closed
9/29/2011	11:44:46 PM	PH3 valve closed
9/29/2011	11:44:46 PM	SiCl4 pre valve closed
9/29/2011	11:44:46 PM	SiCl4 post valve closed
9/29/2011	11:44:46 PM	Bypass valve closed
9/29/2011	11:44:46 PM	Bubbler valve closed
9/29/2011	11:44:46 PM	Main Vac valve opened
9/29/2011	11:44:46 PM	Helium MFC set to  0.000000
9/29/2011	11:44:46 PM	H2 MFC set to  0.000000
9/29/2011	11:44:46 PM	BCl3 MFC set to  0.000000
9/29/2011	11:44:46 PM	PHl3 MFC set to  0.000000
9/29/2011	11:44:46 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:44:46 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:44:46 PM	Tube furnace set to 200
9/29/2011	11:45:16 PM	H2 valve closed
9/29/2011	11:45:16 PM	BCl3 valve closed
9/29/2011	11:45:16 PM	PH3 valve closed
9/29/2011	11:45:16 PM	SiCl4 pre valve closed
9/29/2011	11:45:16 PM	SiCl4 post valve closed
9/29/2011	11:45:16 PM	Bypass valve closed
9/29/2011	11:45:16 PM	Bubbler valve closed
9/29/2011	11:45:16 PM	Helium valve opened
9/29/2011	11:45:16 PM	Main Vac valve opened
9/29/2011	11:45:16 PM	Helium MFC set to  20.000000
9/29/2011	11:45:16 PM	H2 MFC set to  0.000000
9/29/2011	11:45:16 PM	BCl3 MFC set to  0.000000
9/29/2011	11:45:16 PM	PHl3 MFC set to  0.000000
9/29/2011	11:45:16 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:45:16 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:45:16 PM	Tube furnace set to 200
9/29/2011	11:45:46 PM	Helium valve closed
9/29/2011	11:45:46 PM	H2 valve closed
9/29/2011	11:45:46 PM	BCl3 valve closed
9/29/2011	11:45:46 PM	PH3 valve closed
9/29/2011	11:45:46 PM	SiCl4 pre valve closed
9/29/2011	11:45:46 PM	SiCl4 post valve closed
9/29/2011	11:45:46 PM	Bypass valve closed
9/29/2011	11:45:46 PM	Bubbler valve closed
9/29/2011	11:45:46 PM	Main Vac valve opened
9/29/2011	11:45:46 PM	Helium MFC set to  0.000000
9/29/2011	11:45:46 PM	H2 MFC set to  0.000000
9/29/2011	11:45:46 PM	BCl3 MFC set to  0.000000
9/29/2011	11:45:46 PM	PHl3 MFC set to  0.000000
9/29/2011	11:45:46 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:45:46 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:45:47 PM	Tube furnace set to 200
9/29/2011	11:45:48 PM	Run finished at 11:45 PM
9/29/2011	11:46:23 PM	Recipe started at 11:46 PM
9/29/2011	11:46:23 PM	Helium valve closed
9/29/2011	11:46:23 PM	H2 valve closed
9/29/2011	11:46:23 PM	BCl3 valve closed
9/29/2011	11:46:23 PM	PH3 valve closed
9/29/2011	11:46:23 PM	SiCl4 pre valve closed
9/29/2011	11:46:23 PM	SiCl4 post valve closed
9/29/2011	11:46:23 PM	Bypass valve closed
9/29/2011	11:46:23 PM	Bubbler valve closed
9/29/2011	11:46:23 PM	Main Vac valve opened
9/29/2011	11:46:23 PM	Helium MFC set to  0.000000
9/29/2011	11:46:23 PM	H2 MFC set to  0.000000
9/29/2011	11:46:23 PM	BCl3 MFC set to  0.000000
9/29/2011	11:46:23 PM	PHl3 MFC set to  0.000000
9/29/2011	11:46:23 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:46:23 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:46:23 PM	Tube furnace set to 300
9/29/2011	11:46:53 PM	H2 valve closed
9/29/2011	11:46:53 PM	BCl3 valve closed
9/29/2011	11:46:53 PM	PH3 valve closed
9/29/2011	11:46:53 PM	SiCl4 pre valve closed
9/29/2011	11:46:53 PM	SiCl4 post valve closed
9/29/2011	11:46:53 PM	Bypass valve closed
9/29/2011	11:46:53 PM	Bubbler valve closed
9/29/2011	11:46:53 PM	Helium valve opened
9/29/2011	11:46:53 PM	Main Vac valve opened
9/29/2011	11:46:53 PM	Helium MFC set to  20.000000
9/29/2011	11:46:54 PM	H2 MFC set to  0.000000
9/29/2011	11:46:54 PM	BCl3 MFC set to  0.000000
9/29/2011	11:46:54 PM	PHl3 MFC set to  0.000000
9/29/2011	11:46:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:46:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:46:54 PM	Tube furnace set to 300
9/29/2011	11:47:24 PM	Helium valve closed
9/29/2011	11:47:24 PM	H2 valve closed
9/29/2011	11:47:24 PM	BCl3 valve closed
9/29/2011	11:47:24 PM	PH3 valve closed
9/29/2011	11:47:24 PM	SiCl4 pre valve closed
9/29/2011	11:47:24 PM	SiCl4 post valve closed
9/29/2011	11:47:24 PM	Bypass valve closed
9/29/2011	11:47:24 PM	Bubbler valve closed
9/29/2011	11:47:24 PM	Main Vac valve opened
9/29/2011	11:47:24 PM	Helium MFC set to  0.000000
9/29/2011	11:47:24 PM	H2 MFC set to  0.000000
9/29/2011	11:47:24 PM	BCl3 MFC set to  0.000000
9/29/2011	11:47:24 PM	PHl3 MFC set to  0.000000
9/29/2011	11:47:24 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:47:24 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:47:24 PM	Tube furnace set to 300
9/29/2011	11:47:54 PM	H2 valve closed
9/29/2011	11:47:54 PM	BCl3 valve closed
9/29/2011	11:47:54 PM	PH3 valve closed
9/29/2011	11:47:54 PM	SiCl4 pre valve closed
9/29/2011	11:47:54 PM	SiCl4 post valve closed
9/29/2011	11:47:54 PM	Bypass valve closed
9/29/2011	11:47:54 PM	Bubbler valve closed
9/29/2011	11:47:54 PM	Helium valve opened
9/29/2011	11:47:54 PM	Main Vac valve opened
9/29/2011	11:47:54 PM	Helium MFC set to  20.000000
9/29/2011	11:47:54 PM	H2 MFC set to  0.000000
9/29/2011	11:47:54 PM	BCl3 MFC set to  0.000000
9/29/2011	11:47:54 PM	PHl3 MFC set to  0.000000
9/29/2011	11:47:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:47:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:47:54 PM	Tube furnace set to 300
9/29/2011	11:48:24 PM	Helium valve closed
9/29/2011	11:48:24 PM	H2 valve closed
9/29/2011	11:48:24 PM	BCl3 valve closed
9/29/2011	11:48:24 PM	PH3 valve closed
9/29/2011	11:48:24 PM	SiCl4 pre valve closed
9/29/2011	11:48:24 PM	SiCl4 post valve closed
9/29/2011	11:48:24 PM	Bypass valve closed
9/29/2011	11:48:24 PM	Bubbler valve closed
9/29/2011	11:48:24 PM	Main Vac valve opened
9/29/2011	11:48:24 PM	Helium MFC set to  0.000000
9/29/2011	11:48:24 PM	H2 MFC set to  0.000000
9/29/2011	11:48:24 PM	BCl3 MFC set to  0.000000
9/29/2011	11:48:24 PM	PHl3 MFC set to  0.000000
9/29/2011	11:48:24 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:48:24 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:48:24 PM	Tube furnace set to 300
9/29/2011	11:48:54 PM	H2 valve closed
9/29/2011	11:48:54 PM	BCl3 valve closed
9/29/2011	11:48:54 PM	PH3 valve closed
9/29/2011	11:48:54 PM	SiCl4 pre valve closed
9/29/2011	11:48:54 PM	SiCl4 post valve closed
9/29/2011	11:48:54 PM	Bypass valve closed
9/29/2011	11:48:54 PM	Bubbler valve closed
9/29/2011	11:48:54 PM	Helium valve opened
9/29/2011	11:48:54 PM	Main Vac valve opened
9/29/2011	11:48:54 PM	Helium MFC set to  20.000000
9/29/2011	11:48:54 PM	H2 MFC set to  0.000000
9/29/2011	11:48:54 PM	BCl3 MFC set to  0.000000
9/29/2011	11:48:54 PM	PHl3 MFC set to  0.000000
9/29/2011	11:48:54 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:48:54 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:48:54 PM	Tube furnace set to 300
9/29/2011	11:49:25 PM	Helium valve closed
9/29/2011	11:49:25 PM	H2 valve closed
9/29/2011	11:49:25 PM	BCl3 valve closed
9/29/2011	11:49:25 PM	PH3 valve closed
9/29/2011	11:49:25 PM	SiCl4 pre valve closed
9/29/2011	11:49:25 PM	SiCl4 post valve closed
9/29/2011	11:49:25 PM	Bypass valve closed
9/29/2011	11:49:25 PM	Bubbler valve closed
9/29/2011	11:49:25 PM	Main Vac valve opened
9/29/2011	11:49:25 PM	Helium MFC set to  0.000000
9/29/2011	11:49:25 PM	H2 MFC set to  0.000000
9/29/2011	11:49:25 PM	BCl3 MFC set to  0.000000
9/29/2011	11:49:25 PM	PHl3 MFC set to  0.000000
9/29/2011	11:49:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:49:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:49:25 PM	Tube furnace set to 300
9/29/2011	11:49:55 PM	H2 valve closed
9/29/2011	11:49:55 PM	BCl3 valve closed
9/29/2011	11:49:55 PM	PH3 valve closed
9/29/2011	11:49:55 PM	SiCl4 pre valve closed
9/29/2011	11:49:55 PM	SiCl4 post valve closed
9/29/2011	11:49:55 PM	Bypass valve closed
9/29/2011	11:49:55 PM	Bubbler valve closed
9/29/2011	11:49:55 PM	Helium valve opened
9/29/2011	11:49:55 PM	Main Vac valve opened
9/29/2011	11:49:55 PM	Helium MFC set to  20.000000
9/29/2011	11:49:55 PM	H2 MFC set to  0.000000
9/29/2011	11:49:55 PM	BCl3 MFC set to  0.000000
9/29/2011	11:49:55 PM	PHl3 MFC set to  0.000000
9/29/2011	11:49:55 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:49:55 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:49:55 PM	Tube furnace set to 300
9/29/2011	11:50:25 PM	Helium valve closed
9/29/2011	11:50:25 PM	H2 valve closed
9/29/2011	11:50:25 PM	BCl3 valve closed
9/29/2011	11:50:25 PM	PH3 valve closed
9/29/2011	11:50:25 PM	SiCl4 pre valve closed
9/29/2011	11:50:25 PM	SiCl4 post valve closed
9/29/2011	11:50:25 PM	Bypass valve closed
9/29/2011	11:50:25 PM	Bubbler valve closed
9/29/2011	11:50:25 PM	Main Vac valve opened
9/29/2011	11:50:25 PM	Helium MFC set to  0.000000
9/29/2011	11:50:25 PM	H2 MFC set to  0.000000
9/29/2011	11:50:25 PM	BCl3 MFC set to  0.000000
9/29/2011	11:50:25 PM	PHl3 MFC set to  0.000000
9/29/2011	11:50:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:50:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:50:25 PM	Tube furnace set to 300
9/29/2011	11:50:55 PM	H2 valve closed
9/29/2011	11:50:55 PM	BCl3 valve closed
9/29/2011	11:50:55 PM	PH3 valve closed
9/29/2011	11:50:55 PM	SiCl4 pre valve closed
9/29/2011	11:50:55 PM	SiCl4 post valve closed
9/29/2011	11:50:55 PM	Bypass valve closed
9/29/2011	11:50:55 PM	Bubbler valve closed
9/29/2011	11:50:55 PM	Helium valve opened
9/29/2011	11:50:55 PM	Main Vac valve opened
9/29/2011	11:50:55 PM	Helium MFC set to  20.000000
9/29/2011	11:50:55 PM	H2 MFC set to  0.000000
9/29/2011	11:50:55 PM	BCl3 MFC set to  0.000000
9/29/2011	11:50:55 PM	PHl3 MFC set to  0.000000
9/29/2011	11:50:55 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:50:55 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:50:55 PM	Tube furnace set to 300
9/29/2011	11:51:25 PM	Helium valve closed
9/29/2011	11:51:25 PM	H2 valve closed
9/29/2011	11:51:25 PM	BCl3 valve closed
9/29/2011	11:51:25 PM	PH3 valve closed
9/29/2011	11:51:25 PM	SiCl4 pre valve closed
9/29/2011	11:51:25 PM	SiCl4 post valve closed
9/29/2011	11:51:25 PM	Bypass valve closed
9/29/2011	11:51:25 PM	Bubbler valve closed
9/29/2011	11:51:25 PM	Main Vac valve opened
9/29/2011	11:51:25 PM	Helium MFC set to  0.000000
9/29/2011	11:51:25 PM	H2 MFC set to  0.000000
9/29/2011	11:51:25 PM	BCl3 MFC set to  0.000000
9/29/2011	11:51:25 PM	PHl3 MFC set to  0.000000
9/29/2011	11:51:25 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:51:25 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:51:26 PM	Tube furnace set to 300
9/29/2011	11:51:56 PM	H2 valve closed
9/29/2011	11:51:56 PM	BCl3 valve closed
9/29/2011	11:51:56 PM	PH3 valve closed
9/29/2011	11:51:56 PM	SiCl4 pre valve closed
9/29/2011	11:51:56 PM	SiCl4 post valve closed
9/29/2011	11:51:56 PM	Bypass valve closed
9/29/2011	11:51:56 PM	Bubbler valve closed
9/29/2011	11:51:56 PM	Helium valve opened
9/29/2011	11:51:56 PM	Main Vac valve opened
9/29/2011	11:51:56 PM	Helium MFC set to  20.000000
9/29/2011	11:51:56 PM	H2 MFC set to  0.000000
9/29/2011	11:51:56 PM	BCl3 MFC set to  0.000000
9/29/2011	11:51:56 PM	PHl3 MFC set to  0.000000
9/29/2011	11:51:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:51:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:51:56 PM	Tube furnace set to 300
9/29/2011	11:52:26 PM	Helium valve closed
9/29/2011	11:52:26 PM	H2 valve closed
9/29/2011	11:52:26 PM	BCl3 valve closed
9/29/2011	11:52:26 PM	PH3 valve closed
9/29/2011	11:52:26 PM	SiCl4 pre valve closed
9/29/2011	11:52:26 PM	SiCl4 post valve closed
9/29/2011	11:52:26 PM	Bypass valve closed
9/29/2011	11:52:26 PM	Bubbler valve closed
9/29/2011	11:52:26 PM	Main Vac valve opened
9/29/2011	11:52:26 PM	Helium MFC set to  0.000000
9/29/2011	11:52:26 PM	H2 MFC set to  0.000000
9/29/2011	11:52:26 PM	BCl3 MFC set to  0.000000
9/29/2011	11:52:26 PM	PHl3 MFC set to  0.000000
9/29/2011	11:52:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:52:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:52:26 PM	Tube furnace set to 300
9/29/2011	11:52:56 PM	H2 valve closed
9/29/2011	11:52:56 PM	BCl3 valve closed
9/29/2011	11:52:56 PM	PH3 valve closed
9/29/2011	11:52:56 PM	SiCl4 pre valve closed
9/29/2011	11:52:56 PM	SiCl4 post valve closed
9/29/2011	11:52:56 PM	Bypass valve closed
9/29/2011	11:52:56 PM	Bubbler valve closed
9/29/2011	11:52:56 PM	Helium valve opened
9/29/2011	11:52:56 PM	Main Vac valve opened
9/29/2011	11:52:56 PM	Helium MFC set to  20.000000
9/29/2011	11:52:56 PM	H2 MFC set to  0.000000
9/29/2011	11:52:56 PM	BCl3 MFC set to  0.000000
9/29/2011	11:52:56 PM	PHl3 MFC set to  0.000000
9/29/2011	11:52:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:52:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:52:56 PM	Tube furnace set to 300
9/29/2011	11:53:26 PM	Helium valve closed
9/29/2011	11:53:26 PM	H2 valve closed
9/29/2011	11:53:26 PM	BCl3 valve closed
9/29/2011	11:53:26 PM	PH3 valve closed
9/29/2011	11:53:26 PM	SiCl4 pre valve closed
9/29/2011	11:53:26 PM	SiCl4 post valve closed
9/29/2011	11:53:26 PM	Bypass valve closed
9/29/2011	11:53:26 PM	Bubbler valve closed
9/29/2011	11:53:26 PM	Main Vac valve opened
9/29/2011	11:53:26 PM	Helium MFC set to  0.000000
9/29/2011	11:53:26 PM	H2 MFC set to  0.000000
9/29/2011	11:53:26 PM	BCl3 MFC set to  0.000000
9/29/2011	11:53:26 PM	PHl3 MFC set to  0.000000
9/29/2011	11:53:26 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:53:26 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:53:26 PM	Tube furnace set to 300
9/29/2011	11:53:56 PM	H2 valve closed
9/29/2011	11:53:56 PM	BCl3 valve closed
9/29/2011	11:53:56 PM	PH3 valve closed
9/29/2011	11:53:56 PM	SiCl4 pre valve closed
9/29/2011	11:53:56 PM	SiCl4 post valve closed
9/29/2011	11:53:56 PM	Bypass valve closed
9/29/2011	11:53:56 PM	Bubbler valve closed
9/29/2011	11:53:56 PM	Helium valve opened
9/29/2011	11:53:56 PM	Main Vac valve opened
9/29/2011	11:53:56 PM	Helium MFC set to  20.000000
9/29/2011	11:53:56 PM	H2 MFC set to  0.000000
9/29/2011	11:53:56 PM	BCl3 MFC set to  0.000000
9/29/2011	11:53:56 PM	PHl3 MFC set to  0.000000
9/29/2011	11:53:56 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:53:56 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:53:57 PM	Tube furnace set to 300
9/29/2011	11:54:27 PM	Helium valve closed
9/29/2011	11:54:27 PM	H2 valve closed
9/29/2011	11:54:27 PM	BCl3 valve closed
9/29/2011	11:54:27 PM	PH3 valve closed
9/29/2011	11:54:27 PM	SiCl4 pre valve closed
9/29/2011	11:54:27 PM	SiCl4 post valve closed
9/29/2011	11:54:27 PM	Bypass valve closed
9/29/2011	11:54:27 PM	Bubbler valve closed
9/29/2011	11:54:27 PM	Main Vac valve opened
9/29/2011	11:54:27 PM	Helium MFC set to  0.000000
9/29/2011	11:54:27 PM	H2 MFC set to  0.000000
9/29/2011	11:54:27 PM	BCl3 MFC set to  0.000000
9/29/2011	11:54:27 PM	PHl3 MFC set to  0.000000
9/29/2011	11:54:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:54:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:54:27 PM	Tube furnace set to 300
9/29/2011	11:54:57 PM	H2 valve closed
9/29/2011	11:54:57 PM	BCl3 valve closed
9/29/2011	11:54:57 PM	PH3 valve closed
9/29/2011	11:54:57 PM	SiCl4 pre valve closed
9/29/2011	11:54:57 PM	SiCl4 post valve closed
9/29/2011	11:54:57 PM	Bypass valve closed
9/29/2011	11:54:57 PM	Bubbler valve closed
9/29/2011	11:54:57 PM	Helium valve opened
9/29/2011	11:54:57 PM	Main Vac valve opened
9/29/2011	11:54:57 PM	Helium MFC set to  20.000000
9/29/2011	11:54:57 PM	H2 MFC set to  0.000000
9/29/2011	11:54:57 PM	BCl3 MFC set to  0.000000
9/29/2011	11:54:57 PM	PHl3 MFC set to  0.000000
9/29/2011	11:54:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:54:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:54:57 PM	Tube furnace set to 300
9/29/2011	11:55:27 PM	Helium valve closed
9/29/2011	11:55:27 PM	H2 valve closed
9/29/2011	11:55:27 PM	BCl3 valve closed
9/29/2011	11:55:27 PM	PH3 valve closed
9/29/2011	11:55:27 PM	SiCl4 pre valve closed
9/29/2011	11:55:27 PM	SiCl4 post valve closed
9/29/2011	11:55:27 PM	Bypass valve closed
9/29/2011	11:55:27 PM	Bubbler valve closed
9/29/2011	11:55:27 PM	Main Vac valve opened
9/29/2011	11:55:27 PM	Helium MFC set to  0.000000
9/29/2011	11:55:27 PM	H2 MFC set to  0.000000
9/29/2011	11:55:27 PM	BCl3 MFC set to  0.000000
9/29/2011	11:55:27 PM	PHl3 MFC set to  0.000000
9/29/2011	11:55:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:55:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:55:27 PM	Tube furnace set to 300
9/29/2011	11:55:57 PM	H2 valve closed
9/29/2011	11:55:57 PM	BCl3 valve closed
9/29/2011	11:55:57 PM	PH3 valve closed
9/29/2011	11:55:57 PM	SiCl4 pre valve closed
9/29/2011	11:55:57 PM	SiCl4 post valve closed
9/29/2011	11:55:57 PM	Bypass valve closed
9/29/2011	11:55:57 PM	Bubbler valve closed
9/29/2011	11:55:57 PM	Helium valve opened
9/29/2011	11:55:57 PM	Main Vac valve opened
9/29/2011	11:55:57 PM	Helium MFC set to  20.000000
9/29/2011	11:55:57 PM	H2 MFC set to  0.000000
9/29/2011	11:55:57 PM	BCl3 MFC set to  0.000000
9/29/2011	11:55:57 PM	PHl3 MFC set to  0.000000
9/29/2011	11:55:57 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:55:57 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:55:57 PM	Tube furnace set to 300
9/29/2011	11:56:27 PM	Helium valve closed
9/29/2011	11:56:27 PM	H2 valve closed
9/29/2011	11:56:27 PM	BCl3 valve closed
9/29/2011	11:56:27 PM	PH3 valve closed
9/29/2011	11:56:27 PM	SiCl4 pre valve closed
9/29/2011	11:56:27 PM	SiCl4 post valve closed
9/29/2011	11:56:27 PM	Bypass valve closed
9/29/2011	11:56:27 PM	Bubbler valve closed
9/29/2011	11:56:27 PM	Main Vac valve opened
9/29/2011	11:56:27 PM	Helium MFC set to  0.000000
9/29/2011	11:56:27 PM	H2 MFC set to  0.000000
9/29/2011	11:56:27 PM	BCl3 MFC set to  0.000000
9/29/2011	11:56:27 PM	PHl3 MFC set to  0.000000
9/29/2011	11:56:27 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:56:27 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:56:28 PM	Tube furnace set to 300
9/29/2011	11:56:29 PM	Run finished at 11:56 PM
9/29/2011	11:57:14 PM	Recipe started at 11:57 PM
9/29/2011	11:57:14 PM	Helium valve closed
9/29/2011	11:57:14 PM	H2 valve closed
9/29/2011	11:57:14 PM	BCl3 valve closed
9/29/2011	11:57:14 PM	PH3 valve closed
9/29/2011	11:57:14 PM	SiCl4 pre valve closed
9/29/2011	11:57:14 PM	SiCl4 post valve closed
9/29/2011	11:57:14 PM	Bypass valve closed
9/29/2011	11:57:14 PM	Bubbler valve closed
9/29/2011	11:57:14 PM	Main Vac valve opened
9/29/2011	11:57:14 PM	Helium MFC set to  0.000000
9/29/2011	11:57:14 PM	H2 MFC set to  0.000000
9/29/2011	11:57:14 PM	BCl3 MFC set to  0.000000
9/29/2011	11:57:14 PM	PHl3 MFC set to  0.000000
9/29/2011	11:57:14 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:57:14 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:57:14 PM	Tube furnace set to 300
9/29/2011	11:57:44 PM	H2 valve closed
9/29/2011	11:57:44 PM	BCl3 valve closed
9/29/2011	11:57:44 PM	PH3 valve closed
9/29/2011	11:57:44 PM	SiCl4 pre valve closed
9/29/2011	11:57:44 PM	SiCl4 post valve closed
9/29/2011	11:57:44 PM	Bypass valve closed
9/29/2011	11:57:44 PM	Bubbler valve closed
9/29/2011	11:57:44 PM	Helium valve opened
9/29/2011	11:57:44 PM	Main Vac valve opened
9/29/2011	11:57:44 PM	Helium MFC set to  20.000000
9/29/2011	11:57:44 PM	H2 MFC set to  0.000000
9/29/2011	11:57:44 PM	BCl3 MFC set to  0.000000
9/29/2011	11:57:44 PM	PHl3 MFC set to  0.000000
9/29/2011	11:57:44 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:57:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:57:44 PM	Tube furnace set to 300
9/29/2011	11:58:14 PM	Helium valve closed
9/29/2011	11:58:14 PM	H2 valve closed
9/29/2011	11:58:14 PM	BCl3 valve closed
9/29/2011	11:58:14 PM	PH3 valve closed
9/29/2011	11:58:14 PM	SiCl4 pre valve closed
9/29/2011	11:58:14 PM	SiCl4 post valve closed
9/29/2011	11:58:14 PM	Bypass valve closed
9/29/2011	11:58:14 PM	Bubbler valve closed
9/29/2011	11:58:14 PM	Main Vac valve opened
9/29/2011	11:58:14 PM	Helium MFC set to  0.000000
9/29/2011	11:58:14 PM	H2 MFC set to  0.000000
9/29/2011	11:58:14 PM	BCl3 MFC set to  0.000000
9/29/2011	11:58:14 PM	PHl3 MFC set to  0.000000
9/29/2011	11:58:14 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:58:14 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:58:14 PM	Tube furnace set to 300
9/29/2011	11:58:44 PM	H2 valve closed
9/29/2011	11:58:44 PM	BCl3 valve closed
9/29/2011	11:58:44 PM	PH3 valve closed
9/29/2011	11:58:44 PM	SiCl4 pre valve closed
9/29/2011	11:58:44 PM	SiCl4 post valve closed
9/29/2011	11:58:44 PM	Bypass valve closed
9/29/2011	11:58:44 PM	Bubbler valve closed
9/29/2011	11:58:44 PM	Helium valve opened
9/29/2011	11:58:44 PM	Main Vac valve opened
9/29/2011	11:58:44 PM	Helium MFC set to  20.000000
9/29/2011	11:58:44 PM	H2 MFC set to  0.000000
9/29/2011	11:58:44 PM	BCl3 MFC set to  0.000000
9/29/2011	11:58:44 PM	PHl3 MFC set to  0.000000
9/29/2011	11:58:44 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:58:44 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:58:45 PM	Tube furnace set to 300
9/29/2011	11:59:15 PM	Helium valve closed
9/29/2011	11:59:15 PM	H2 valve closed
9/29/2011	11:59:15 PM	BCl3 valve closed
9/29/2011	11:59:15 PM	PH3 valve closed
9/29/2011	11:59:15 PM	SiCl4 pre valve closed
9/29/2011	11:59:15 PM	SiCl4 post valve closed
9/29/2011	11:59:15 PM	Bypass valve closed
9/29/2011	11:59:15 PM	Bubbler valve closed
9/29/2011	11:59:15 PM	Main Vac valve opened
9/29/2011	11:59:15 PM	Helium MFC set to  0.000000
9/29/2011	11:59:15 PM	H2 MFC set to  0.000000
9/29/2011	11:59:15 PM	BCl3 MFC set to  0.000000
9/29/2011	11:59:15 PM	PHl3 MFC set to  0.000000
9/29/2011	11:59:15 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:59:15 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:59:15 PM	Tube furnace set to 300
9/29/2011	11:59:45 PM	H2 valve closed
9/29/2011	11:59:45 PM	BCl3 valve closed
9/29/2011	11:59:45 PM	PH3 valve closed
9/29/2011	11:59:45 PM	SiCl4 pre valve closed
9/29/2011	11:59:45 PM	SiCl4 post valve closed
9/29/2011	11:59:45 PM	Bypass valve closed
9/29/2011	11:59:45 PM	Bubbler valve closed
9/29/2011	11:59:45 PM	Helium valve opened
9/29/2011	11:59:45 PM	Main Vac valve opened
9/29/2011	11:59:45 PM	Helium MFC set to  20.000000
9/29/2011	11:59:45 PM	H2 MFC set to  0.000000
9/29/2011	11:59:45 PM	BCl3 MFC set to  0.000000
9/29/2011	11:59:45 PM	PHl3 MFC set to  0.000000
9/29/2011	11:59:45 PM	SiCl4 MFC set to  0.000000
9/29/2011	11:59:45 PM	Bypass solenoid MFC set to  0.000000
9/29/2011	11:59:45 PM	Tube furnace set to 300
